MX9704519A - Formacion de espejos accinados por pelicula delgada formados a baja temperatura. - Google Patents
Formacion de espejos accinados por pelicula delgada formados a baja temperatura.Info
- Publication number
- MX9704519A MX9704519A MX9704519A MX9704519A MX9704519A MX 9704519 A MX9704519 A MX 9704519A MX 9704519 A MX9704519 A MX 9704519A MX 9704519 A MX9704519 A MX 9704519A MX 9704519 A MX9704519 A MX 9704519A
- Authority
- MX
- Mexico
- Prior art keywords
- thin film
- electrode
- array
- low temperature
- mirror array
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 8
- 239000011159 matrix material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
- Electroluminescent Light Sources (AREA)
- Bipolar Transistors (AREA)
Abstract
Una formacion de espejos accionados por película delgada M x N incluye una matriz activa que tiene un substrato, una formacion de terminales de conexion M x N y una formacion de transistores M x N y una formacion de estructuras de accionamiento M x N, cada una de las estructuras de accionamiento es de una estructura bimorfa e incluye una porcion de accionamiento y una porcion reflectora de luz, la porcion de accionamiento incluye una porcion frontal de un segundo electrodo de película delgada. Un miembro electrodesplazable inferior, un electrodo intermedio, un miembro electrodesplazable superior y una porcion frontal de un primer electrodo de película delgada. La porcion frontal del segundo electrodo de película delgada se conecta eléctricamente con cada uno de los terminales de conexion y cada uno de los transistores, y la porcion restante del primer electrodo de película delgada se coloca en la parte superior de la porcion restante del segundo electrodo de película delgada para formar la porcion reflectora de luz, permitiendo que el primero y segundo electrodos de película delgada funcionen como un electrodo de señal. El electrodo intermedio colocado entre los miembros electrodesplazables superior e inferior funciona como un electrodo de polarizacion comun.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019940034972A KR100203577B1 (ko) | 1994-12-19 | 1994-12-19 | 광로조절장치와 그 제조방법 |
| KR1019940034972 | 1994-12-19 | ||
| KR9434972 | 1994-12-19 | ||
| PCT/KR1995/000153 WO1996019896A1 (en) | 1994-12-19 | 1995-11-22 | Low temperature formed thin film actuated mirror array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MX9704519A true MX9704519A (es) | 1997-10-31 |
| MXPA97004519A MXPA97004519A (es) | 1998-07-03 |
Family
ID=
Also Published As
| Publication number | Publication date |
|---|---|
| WO1996019896A1 (en) | 1996-06-27 |
| KR100203577B1 (ko) | 1999-06-15 |
| EP0718658B1 (en) | 2001-06-13 |
| PE55296A1 (es) | 1996-12-03 |
| HU221359B1 (en) | 2002-09-28 |
| AU3882095A (en) | 1996-07-10 |
| RU2156487C2 (ru) | 2000-09-20 |
| CN1070330C (zh) | 2001-08-29 |
| HUT77725A (hu) | 1998-07-28 |
| CZ188297A3 (cs) | 1998-03-18 |
| JP3523881B2 (ja) | 2004-04-26 |
| AU703795B2 (en) | 1999-04-01 |
| JPH10510931A (ja) | 1998-10-20 |
| EP0718658A1 (en) | 1996-06-26 |
| TW305945B (es) | 1997-05-21 |
| BR9510206A (pt) | 1997-11-04 |
| DE69521283T2 (de) | 2001-09-20 |
| US5706121A (en) | 1998-01-06 |
| CA2208089A1 (en) | 1996-06-27 |
| KR960028118A (ko) | 1996-07-22 |
| PL320827A1 (en) | 1997-11-10 |
| MY113094A (en) | 2001-11-30 |
| AR000913A1 (es) | 1997-08-27 |
| CN1176727A (zh) | 1998-03-18 |
| DE69521283D1 (de) | 2001-07-19 |
| PL178495B1 (pl) | 2000-05-31 |
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