HUT77722A - Vékonyréteggel működtetett tükörelemelrendezés és eljárás annak előállítására - Google Patents
Vékonyréteggel működtetett tükörelemelrendezés és eljárás annak előállításáraInfo
- Publication number
- HUT77722A HUT77722A HU9800822A HU9800822A HUT77722A HU T77722 A HUT77722 A HU T77722A HU 9800822 A HU9800822 A HU 9800822A HU 9800822 A HU9800822 A HU 9800822A HU T77722 A HUT77722 A HU T77722A
- Authority
- HU
- Hungary
- Prior art keywords
- array
- manufacture
- thin film
- film actuated
- actuated mirrors
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00174—See-saws
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/30—Picture reproducers using solid-state colour display devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0105—Sacrificial layer
- B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940029763A KR960018646A (ko) | 1994-11-14 | 1994-11-14 | 광로조절장치의 제조방법 |
PCT/KR1995/000133 WO1996015630A1 (en) | 1994-11-14 | 1995-10-17 | Array of thin film actuated mirrors and method for the manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
HUT77722A true HUT77722A (hu) | 1998-07-28 |
HU221360B1 HU221360B1 (en) | 2002-09-28 |
Family
ID=19397806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HU9800822A HU221360B1 (en) | 1994-11-14 | 1995-10-17 | Array of thin film actuated mirrors and method for the manufacture thereof |
Country Status (18)
Country | Link |
---|---|
US (1) | US5606452A (hu) |
EP (1) | EP0712021B1 (hu) |
JP (1) | JPH10508952A (hu) |
KR (1) | KR960018646A (hu) |
CN (1) | CN1061203C (hu) |
AU (1) | AU701168B2 (hu) |
BR (1) | BR9510396A (hu) |
CA (1) | CA2205168A1 (hu) |
CZ (1) | CZ288386B6 (hu) |
DE (1) | DE69522898T2 (hu) |
HU (1) | HU221360B1 (hu) |
MY (1) | MY132060A (hu) |
PE (1) | PE36497A1 (hu) |
PL (1) | PL178550B1 (hu) |
RU (1) | RU2143715C1 (hu) |
TW (1) | TW305944B (hu) |
UY (1) | UY24087A1 (hu) |
WO (1) | WO1996015630A1 (hu) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
KR970054559A (ko) * | 1995-12-22 | 1997-07-31 | 배순훈 | 광로 조절 장치의 제조 방법 |
TW357271B (en) * | 1996-02-26 | 1999-05-01 | Seiko Epson Corp | Light regulator, display and the electronic machine |
KR100229788B1 (ko) * | 1996-05-29 | 1999-11-15 | 전주범 | 광로 조절 장치의 제조 방법 |
EP0810458B1 (en) * | 1996-05-29 | 2001-09-19 | Daewoo Electronics Co., Ltd | Array of thin film actuated mirrors and method for the manufacture thereof |
US5930025A (en) * | 1996-05-29 | 1999-07-27 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors and method for the manufacture thereof |
US5945898A (en) * | 1996-05-31 | 1999-08-31 | The Regents Of The University Of California | Magnetic microactuator |
KR100212539B1 (ko) * | 1996-06-29 | 1999-08-02 | 전주범 | 박막형 광로조절장치의 엑츄에이터 및 제조방법 |
US5991064A (en) * | 1996-06-29 | 1999-11-23 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array and a method for the manufacture thereof |
WO1998008127A1 (en) * | 1996-08-21 | 1998-02-26 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array for use in an optical projection system |
JP3920351B2 (ja) * | 1996-08-21 | 2007-05-30 | デーウー・エレクトロニクス・コーポレイション | 光ピックアップシステム用薄膜アクチュエーテッドミラーアレイ |
US5949568A (en) * | 1996-12-30 | 1999-09-07 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors having a levelling member |
EP1033037B1 (en) * | 1997-06-30 | 2006-12-13 | Daewoo Electronics Corporation | Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction |
US7281808B2 (en) * | 2003-06-21 | 2007-10-16 | Qortek, Inc. | Thin, nearly wireless adaptive optical device |
JP4037394B2 (ja) * | 2004-09-16 | 2008-01-23 | 株式会社東芝 | マイクロメカニカルデバイス |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3544201A (en) * | 1968-01-02 | 1970-12-01 | Gen Telephone & Elect | Optical beam deflector |
US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
US5126836A (en) * | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5185660A (en) * | 1989-11-01 | 1993-02-09 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
GB2239101B (en) * | 1989-11-17 | 1993-09-22 | Marconi Gec Ltd | Optical device |
US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
US5216537A (en) * | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5170283A (en) * | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
US5159225A (en) * | 1991-10-18 | 1992-10-27 | Aura Systems, Inc. | Piezoelectric actuator |
US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
KR970003007B1 (ko) * | 1993-05-21 | 1997-03-13 | 대우전자 주식회사 | 투사형 화상표시장치용 광로조절장치 및 그 구동방법 |
US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
-
1994
- 1994-11-14 KR KR1019940029763A patent/KR960018646A/ko not_active Application Discontinuation
-
1995
- 1995-10-17 BR BR9510396A patent/BR9510396A/pt not_active IP Right Cessation
- 1995-10-17 AU AU36744/95A patent/AU701168B2/en not_active Ceased
- 1995-10-17 WO PCT/KR1995/000133 patent/WO1996015630A1/en active IP Right Grant
- 1995-10-17 CZ CZ19971487A patent/CZ288386B6/cs not_active IP Right Cessation
- 1995-10-17 CN CN95196202A patent/CN1061203C/zh not_active Expired - Fee Related
- 1995-10-17 JP JP8515934A patent/JPH10508952A/ja not_active Abandoned
- 1995-10-17 PL PL95320161A patent/PL178550B1/pl unknown
- 1995-10-17 HU HU9800822A patent/HU221360B1/hu not_active IP Right Cessation
- 1995-10-17 RU RU97110173/09A patent/RU2143715C1/ru not_active IP Right Cessation
- 1995-10-17 CA CA002205168A patent/CA2205168A1/en not_active Abandoned
- 1995-10-19 TW TW084111042A patent/TW305944B/zh active
- 1995-10-19 MY MYPI95003145A patent/MY132060A/en unknown
- 1995-10-20 EP EP95116566A patent/EP0712021B1/en not_active Expired - Lifetime
- 1995-10-20 DE DE69522898T patent/DE69522898T2/de not_active Expired - Fee Related
- 1995-10-25 US US08/548,034 patent/US5606452A/en not_active Expired - Fee Related
- 1995-11-14 PE PE1995284565A patent/PE36497A1/es not_active Application Discontinuation
- 1995-11-14 UY UY24087A patent/UY24087A1/es not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1061203C (zh) | 2001-01-24 |
AU701168B2 (en) | 1999-01-21 |
RU2143715C1 (ru) | 1999-12-27 |
CN1163689A (zh) | 1997-10-29 |
EP0712021B1 (en) | 2001-09-26 |
WO1996015630A1 (en) | 1996-05-23 |
MY132060A (en) | 2007-09-28 |
TW305944B (hu) | 1997-05-21 |
PL320161A1 (en) | 1997-09-15 |
PL178550B1 (pl) | 2000-05-31 |
AU3674495A (en) | 1996-06-06 |
JPH10508952A (ja) | 1998-09-02 |
CZ288386B6 (en) | 2001-06-13 |
CA2205168A1 (en) | 1996-05-23 |
US5606452A (en) | 1997-02-25 |
BR9510396A (pt) | 1997-12-23 |
DE69522898D1 (de) | 2001-10-31 |
DE69522898T2 (de) | 2002-06-20 |
EP0712021A1 (en) | 1996-05-15 |
UY24087A1 (es) | 1996-04-11 |
CZ148797A3 (en) | 1997-12-17 |
KR960018646A (ko) | 1996-06-17 |
HU221360B1 (en) | 2002-09-28 |
PE36497A1 (es) | 1997-11-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
HMM4 | Cancellation of final prot. due to non-payment of fee |