DE69522898D1 - Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung - Google Patents

Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung

Info

Publication number
DE69522898D1
DE69522898D1 DE69522898T DE69522898T DE69522898D1 DE 69522898 D1 DE69522898 D1 DE 69522898D1 DE 69522898 T DE69522898 T DE 69522898T DE 69522898 T DE69522898 T DE 69522898T DE 69522898 D1 DE69522898 D1 DE 69522898D1
Authority
DE
Germany
Prior art keywords
production
matrix arrangement
film mirrors
controlled thin
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69522898T
Other languages
English (en)
Other versions
DE69522898T2 (de
Inventor
Yong-Ki Min
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Application granted granted Critical
Publication of DE69522898D1 publication Critical patent/DE69522898D1/de
Publication of DE69522898T2 publication Critical patent/DE69522898T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00174—See-saws
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/30—Picture reproducers using solid-state colour display devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Liquid Crystal (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
DE69522898T 1994-11-14 1995-10-20 Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung Expired - Fee Related DE69522898T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940029763A KR960018646A (ko) 1994-11-14 1994-11-14 광로조절장치의 제조방법

Publications (2)

Publication Number Publication Date
DE69522898D1 true DE69522898D1 (de) 2001-10-31
DE69522898T2 DE69522898T2 (de) 2002-06-20

Family

ID=19397806

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522898T Expired - Fee Related DE69522898T2 (de) 1994-11-14 1995-10-20 Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung

Country Status (18)

Country Link
US (1) US5606452A (de)
EP (1) EP0712021B1 (de)
JP (1) JPH10508952A (de)
KR (1) KR960018646A (de)
CN (1) CN1061203C (de)
AU (1) AU701168B2 (de)
BR (1) BR9510396A (de)
CA (1) CA2205168A1 (de)
CZ (1) CZ288386B6 (de)
DE (1) DE69522898T2 (de)
HU (1) HU221360B1 (de)
MY (1) MY132060A (de)
PE (1) PE36497A1 (de)
PL (1) PL178550B1 (de)
RU (1) RU2143715C1 (de)
TW (1) TW305944B (de)
UY (1) UY24087A1 (de)
WO (1) WO1996015630A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
KR970054559A (ko) * 1995-12-22 1997-07-31 배순훈 광로 조절 장치의 제조 방법
TW357271B (en) * 1996-02-26 1999-05-01 Seiko Epson Corp Light regulator, display and the electronic machine
EP0810458B1 (de) * 1996-05-29 2001-09-19 Daewoo Electronics Co., Ltd Anordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung
US5930025A (en) * 1996-05-29 1999-07-27 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors and method for the manufacture thereof
KR100229788B1 (ko) * 1996-05-29 1999-11-15 전주범 광로 조절 장치의 제조 방법
US5945898A (en) * 1996-05-31 1999-08-31 The Regents Of The University Of California Magnetic microactuator
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
KR100212539B1 (ko) * 1996-06-29 1999-08-02 전주범 박막형 광로조절장치의 엑츄에이터 및 제조방법
AU717083B2 (en) * 1996-08-21 2000-03-16 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
EP1033037B1 (de) * 1997-06-30 2006-12-13 Daewoo Electronics Corporation Dünnschichtgesteuerter spiegel einschliesslich bildungselement und verschiebungselement aus materialien mit gleicher kristallstruktur und wachstumsrichtung
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
JP4037394B2 (ja) * 2004-09-16 2008-01-23 株式会社東芝 マイクロメカニカルデバイス

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544201A (en) * 1968-01-02 1970-12-01 Gen Telephone & Elect Optical beam deflector
US4615595A (en) * 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system
US5216537A (en) * 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5159225A (en) * 1991-10-18 1992-10-27 Aura Systems, Inc. Piezoelectric actuator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
AU3674495A (en) 1996-06-06
CZ148797A3 (en) 1997-12-17
CA2205168A1 (en) 1996-05-23
PE36497A1 (es) 1997-11-27
BR9510396A (pt) 1997-12-23
AU701168B2 (en) 1999-01-21
MY132060A (en) 2007-09-28
UY24087A1 (es) 1996-04-11
EP0712021B1 (de) 2001-09-26
JPH10508952A (ja) 1998-09-02
PL178550B1 (pl) 2000-05-31
WO1996015630A1 (en) 1996-05-23
RU2143715C1 (ru) 1999-12-27
US5606452A (en) 1997-02-25
DE69522898T2 (de) 2002-06-20
CN1163689A (zh) 1997-10-29
HU221360B1 (en) 2002-09-28
KR960018646A (ko) 1996-06-17
PL320161A1 (en) 1997-09-15
EP0712021A1 (de) 1996-05-15
CZ288386B6 (en) 2001-06-13
HUT77722A (hu) 1998-07-28
TW305944B (de) 1997-05-21
CN1061203C (zh) 2001-01-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR

8339 Ceased/non-payment of the annual fee