NO960583L - Interferometer med et mikrospeil - Google Patents

Interferometer med et mikrospeil

Info

Publication number
NO960583L
NO960583L NO960583A NO960583A NO960583L NO 960583 L NO960583 L NO 960583L NO 960583 A NO960583 A NO 960583A NO 960583 A NO960583 A NO 960583A NO 960583 L NO960583 L NO 960583L
Authority
NO
Norway
Prior art keywords
lateral dimension
disposed
micromirror
reflector
imaging device
Prior art date
Application number
NO960583A
Other languages
English (en)
Norwegian (no)
Other versions
NO960583D0 (no
Inventor
Ivan Prikryl
Hall Ii Hollis O'neal
Original Assignee
Discovision Ass
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Discovision Ass filed Critical Discovision Ass
Publication of NO960583D0 publication Critical patent/NO960583D0/no
Publication of NO960583L publication Critical patent/NO960583L/no

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J3/453Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535Devices with moving mirror
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
NO960583A 1995-04-07 1996-02-14 Interferometer med et mikrospeil NO960583L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41832895A 1995-04-07 1995-04-07

Publications (2)

Publication Number Publication Date
NO960583D0 NO960583D0 (no) 1996-02-14
NO960583L true NO960583L (no) 1996-10-08

Family

ID=23657656

Family Applications (1)

Application Number Title Priority Date Filing Date
NO960583A NO960583L (no) 1995-04-07 1996-02-14 Interferometer med et mikrospeil

Country Status (16)

Country Link
US (5) US5675413A (pt)
EP (2) EP0814331B1 (pt)
JP (3) JPH08297009A (pt)
KR (1) KR100297262B1 (pt)
CN (2) CN1075630C (pt)
AT (2) ATE201265T1 (pt)
AU (1) AU721210B2 (pt)
CA (1) CA2169141A1 (pt)
DE (2) DE69606450T2 (pt)
DK (2) DK0736759T3 (pt)
ES (2) ES2142023T3 (pt)
HK (1) HK1012704A1 (pt)
NO (1) NO960583L (pt)
PT (2) PT814331E (pt)
SG (3) SG43240A1 (pt)
TW (1) TW285713B (pt)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
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CA2169141A1 (en) 1995-04-07 1996-10-08 Ivan Prikryl Interferometer having a micromirror
JPH1090196A (ja) * 1996-09-19 1998-04-10 Toppan Printing Co Ltd 透明保護層の検査方法およびその検査装置
US5822066A (en) * 1997-02-26 1998-10-13 Ultratech Stepper, Inc. Point diffraction interferometer and pin mirror for use therewith
US6700606B1 (en) 1999-06-09 2004-03-02 Activcard Ireland Limited Micromirror optical imager
US6525802B1 (en) 1999-11-05 2003-02-25 Nikon Corporation Kinematic mounted reference mirror with provision for stable mounting of alignment optics
JP4593768B2 (ja) * 1999-12-27 2010-12-08 キヤノン株式会社 光干渉装置及び位置検出装置
US6320707B1 (en) 2000-01-18 2001-11-20 The Boeing Company Miniature piezoelectric translators for optical applications
US6307301B1 (en) 2000-02-02 2001-10-23 The Boeing Company Buckling resistant piezoelectric actuator
JP2001343208A (ja) * 2000-03-30 2001-12-14 Fuji Photo Optical Co Ltd フーリエ変換を用いた縞解析方法および装置
US6717159B2 (en) 2000-10-18 2004-04-06 Nikon Corporation Low distortion kinematic reticle support
US6646773B2 (en) * 2001-05-23 2003-11-11 Board Of Regents, The University Of Texas System Digital micro-mirror holographic projection
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
JP2004184309A (ja) 2002-12-05 2004-07-02 Pulstec Industrial Co Ltd 干渉計
US7106457B1 (en) 2003-05-29 2006-09-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Achromatic shearing phase sensor for generating images indicative of measure(s) of alignment between segments of a segmented telescope's mirrors
GB0402941D0 (en) * 2004-02-11 2004-03-17 Qinetiq Ltd Surface shape measurement
US7471443B2 (en) * 2004-03-02 2008-12-30 Hewlett-Packard Development Company, L.P. Piezoelectric flexures for light modulator
JP4853938B2 (ja) * 2004-06-07 2012-01-11 富士フイルム株式会社 波面測定用干渉計装置
US7538890B2 (en) 2004-06-07 2009-05-26 Fujinon Corporation Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
JP4739806B2 (ja) * 2004-06-07 2011-08-03 富士フイルム株式会社 光ビーム測定装置および方法
AT413765B (de) * 2004-06-24 2006-05-15 Ctr Carinthian Tech Res Ag Anordnung zum aufbau eines miniaturisierten fourier-transform-interferometers für optische strahlung nach dem michelson- bzw. einem daraus abgeleiteten prinzip
US7508488B2 (en) 2004-10-13 2009-03-24 Carl Zeiss Smt Ag Projection exposure system and method of manufacturing a miniaturized device
US7557932B2 (en) * 2005-04-19 2009-07-07 Texas Instruments Incorporated Characterization of micromirror array devices using interferometers
US7630085B2 (en) * 2005-04-19 2009-12-08 Texas Instruments Incorporated Interferometers of high resolutions
US20060232784A1 (en) * 2005-04-19 2006-10-19 Regis Grasser Interferometers of high resolutions
JP4667965B2 (ja) * 2005-06-07 2011-04-13 富士フイルム株式会社 光ビーム測定装置
TWI264523B (en) * 2005-09-06 2006-10-21 Instr Technology Res Ct Method and instrument for measuring decenter and tilt of lens by interferometer
US7733493B2 (en) * 2005-12-23 2010-06-08 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Fourier transform spectrometer
KR100777423B1 (ko) * 2005-12-26 2007-11-20 한국항공우주연구원 정지궤도 전자광학카메라 보정시스템
CA2672900C (en) * 2006-12-21 2015-02-17 Johnson & Johnson Vision Care, Inc. Interferometry testing of lenses, and systems and devices for same
JP4802110B2 (ja) * 2007-01-31 2011-10-26 富士フイルム株式会社 光波干渉測定装置
US7570366B2 (en) * 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
WO2009028332A1 (ja) * 2007-08-27 2009-03-05 Nikon Corporation 波面収差計測装置および方法、並びに波面収差調整方法
CN101183042B (zh) * 2007-12-13 2011-10-12 上海微电子装备有限公司 点衍射干涉仪
US8575528B1 (en) * 2010-03-03 2013-11-05 Jeffrey D. Barchers System and method for coherent phased array beam transmission and imaging
JP5607392B2 (ja) * 2010-03-12 2014-10-15 株式会社ミツトヨ 光干渉測定装置
US10018461B2 (en) * 2015-01-04 2018-07-10 Joshua Noel Hogan Reference signal filter for interferometric system
CN104567752A (zh) * 2015-01-19 2015-04-29 复旦大学 消杂光双光路光学定中仪
RU2615717C1 (ru) * 2016-03-25 2017-04-07 Акционерное общество "Лыткаринский завод оптического стекла" Интерферометр для многоцелевых оптических измерений
CN109313008B (zh) * 2016-04-21 2020-12-04 诺威量测设备股份有限公司 用于样本测量的光学系统和方法
US11408724B2 (en) 2018-07-16 2022-08-09 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Interferometry with an achromatic interferometric superposition of electromagnetic fields

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225236A (en) * 1977-11-11 1980-09-30 Rca Corporation Fabry-perot interferometer
US4682025A (en) * 1984-04-13 1987-07-21 Trw Inc. Active mirror wavefront sensor
US4707137A (en) * 1985-10-25 1987-11-17 Laser Magnetic Storage International Company Device and method for testing the wave front quality of optical components
JPH01193623A (ja) * 1988-01-28 1989-08-03 Nippon Sheet Glass Co Ltd 干渉測定装置
US5026977A (en) 1989-04-05 1991-06-25 The Charles Stark Draper Laboratory, Inc. Wavefront sensing and correction with deformable mirror
JP2902421B2 (ja) * 1989-10-16 1999-06-07 旭光学工業株式会社 干渉計
US5042950A (en) * 1990-05-22 1991-08-27 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for laser beam diagnosis
IL100655A (en) 1991-02-08 1994-11-28 Hughes Aircraft Co Profile gauge for interferometric laser
JP3130638B2 (ja) 1992-04-27 2001-01-31 株式会社東芝 電動機器単体試験支援装置
US5305074A (en) * 1992-07-17 1994-04-19 The United States Of America As Represented By The United States Department Of Energy Achromatic self-referencing interferometer
JP3012439B2 (ja) * 1992-12-28 2000-02-21 シャープ株式会社 光ヘテロダイン検波方式および検波装置
JP3230781B2 (ja) * 1993-08-11 2001-11-19 日本電信電話株式会社 共振器分散測定方法および装置
EP0742940A4 (en) * 1994-01-31 1998-09-30 Sdl Inc LASER-LIGHTED DISPLAY SYSTEM
CA2169141A1 (en) * 1995-04-07 1996-10-08 Ivan Prikryl Interferometer having a micromirror

Also Published As

Publication number Publication date
SG43240A1 (en) 1997-10-17
EP0736759B1 (en) 2000-02-02
AU4578896A (en) 1996-10-17
DE69606450T2 (de) 2000-06-21
ATE189520T1 (de) 2000-02-15
JP2003185503A (ja) 2003-07-03
DE69606450D1 (de) 2000-03-09
US5771095A (en) 1998-06-23
US20010019415A1 (en) 2001-09-06
TW285713B (pt) 1996-09-11
EP0814331A3 (en) 1998-02-11
EP0736759A2 (en) 1996-10-09
AU721210B2 (en) 2000-06-29
SG73523A1 (en) 2000-06-20
PT814331E (pt) 2001-10-31
KR960038363A (ko) 1996-11-21
US6025912A (en) 2000-02-15
US6493094B2 (en) 2002-12-10
JP2003177006A (ja) 2003-06-27
DK0814331T3 (da) 2001-06-11
US5675413A (en) 1997-10-07
KR100297262B1 (ko) 2001-11-22
CA2169141A1 (en) 1996-10-08
ES2142023T3 (es) 2000-04-01
EP0814331B1 (en) 2001-05-16
NO960583D0 (no) 1996-02-14
DK0736759T3 (da) 2000-06-13
EP0736759A3 (en) 1998-01-21
ES2156326T3 (es) 2001-06-16
JPH08297009A (ja) 1996-11-12
DE69612844D1 (de) 2001-06-21
HK1012704A1 (en) 1999-08-06
DE69612844T2 (de) 2001-09-27
PT736759E (pt) 2000-05-31
US6204925B1 (en) 2001-03-20
CN1075630C (zh) 2001-11-28
EP0814331A2 (en) 1997-12-29
CN1210975A (zh) 1999-03-17
SG73524A1 (en) 2000-06-20
ATE201265T1 (de) 2001-06-15
CN1153297A (zh) 1997-07-02

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