NO960583L - Interferometer med et mikrospeil - Google Patents

Interferometer med et mikrospeil

Info

Publication number
NO960583L
NO960583L NO960583A NO960583A NO960583L NO 960583 L NO960583 L NO 960583L NO 960583 A NO960583 A NO 960583A NO 960583 A NO960583 A NO 960583A NO 960583 L NO960583 L NO 960583L
Authority
NO
Norway
Prior art keywords
lateral dimension
disposed
micromirror
reflector
imaging device
Prior art date
Application number
NO960583A
Other languages
English (en)
Other versions
NO960583D0 (no
Inventor
Ivan Prikryl
Hall Ii Hollis O'neal
Original Assignee
Discovision Ass
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Discovision Ass filed Critical Discovision Ass
Publication of NO960583D0 publication Critical patent/NO960583D0/no
Publication of NO960583L publication Critical patent/NO960583L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Et Interferometer (10) innbefatter en strålespalter til spalting av en kildestråle (14) i en utprøvings- stråle (40) og en referansestråle (42), en blldedann- ende anordning (56) til påvisning av et interferens- mønster, et speil (38) anbrakt i en bane for utprøv- ingsstrålen (40) for refleksjon av utprøvingsstrålen mot den blldedannende anordning (56), et mikrospeil (44) anbrakt l banen for referansestrålen (42) for refleksjon av en del av referansestrålen (42) mot den blldedannende anordning (56), og en fokuseringsmekan- isme (34) anbrakt for å fokusere referansestrålen (42) mot mikrospellet (44). Mikrospellet (44) har en tverrdimensjon som ikke overskrider den tilnærmede tverrdimensjon av en sentral sløyfe for referansestrå- len (42) som er fokusert på dette med fokuseringsmekan- ismen (34). Et romfilter (38) for redusere virkningen av aberrasjon i en stråle innbefatter en reflektor som er påført en gjennomsiktig basis (46), der reflektoren har en tverrdimensjon som ikke overskrider den tilnærmede tverrdimensjon av en sentral sløyfe i den rommesslge intensitetsfordeling for strålen (42) som er fokusert på reflektoren. Det foreligger også en fremgangsmåte til filtrering av en stråle i et system til måling av bølgefront. Denne fremgangsmåte innbefat- ter fokusering av strålen, refleksjon av en bestemt første del av den fokuserte stråle og gjennomslipplng av en andre del av strålen.
NO960583A 1995-04-07 1996-02-14 Interferometer med et mikrospeil NO960583L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41832895A 1995-04-07 1995-04-07

Publications (2)

Publication Number Publication Date
NO960583D0 NO960583D0 (no) 1996-02-14
NO960583L true NO960583L (no) 1996-10-08

Family

ID=23657656

Family Applications (1)

Application Number Title Priority Date Filing Date
NO960583A NO960583L (no) 1995-04-07 1996-02-14 Interferometer med et mikrospeil

Country Status (16)

Country Link
US (5) US5771095A (no)
EP (2) EP0814331B1 (no)
JP (3) JPH08297009A (no)
KR (1) KR100297262B1 (no)
CN (2) CN1075630C (no)
AT (2) ATE201265T1 (no)
AU (1) AU721210B2 (no)
CA (1) CA2169141A1 (no)
DE (2) DE69612844T2 (no)
DK (2) DK0736759T3 (no)
ES (2) ES2142023T3 (no)
HK (1) HK1012704A1 (no)
NO (1) NO960583L (no)
PT (2) PT814331E (no)
SG (3) SG43240A1 (no)
TW (1) TW285713B (no)

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US5822066A (en) * 1997-02-26 1998-10-13 Ultratech Stepper, Inc. Point diffraction interferometer and pin mirror for use therewith
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US6525802B1 (en) 1999-11-05 2003-02-25 Nikon Corporation Kinematic mounted reference mirror with provision for stable mounting of alignment optics
JP4593768B2 (ja) * 1999-12-27 2010-12-08 キヤノン株式会社 光干渉装置及び位置検出装置
US6320707B1 (en) 2000-01-18 2001-11-20 The Boeing Company Miniature piezoelectric translators for optical applications
US6307301B1 (en) 2000-02-02 2001-10-23 The Boeing Company Buckling resistant piezoelectric actuator
JP2001343208A (ja) * 2000-03-30 2001-12-14 Fuji Photo Optical Co Ltd フーリエ変換を用いた縞解析方法および装置
US6717159B2 (en) 2000-10-18 2004-04-06 Nikon Corporation Low distortion kinematic reticle support
US6646773B2 (en) * 2001-05-23 2003-11-11 Board Of Regents, The University Of Texas System Digital micro-mirror holographic projection
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
JP2004184309A (ja) 2002-12-05 2004-07-02 Pulstec Industrial Co Ltd 干渉計
US7106457B1 (en) 2003-05-29 2006-09-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Achromatic shearing phase sensor for generating images indicative of measure(s) of alignment between segments of a segmented telescope's mirrors
GB0402941D0 (en) * 2004-02-11 2004-03-17 Qinetiq Ltd Surface shape measurement
US7471443B2 (en) * 2004-03-02 2008-12-30 Hewlett-Packard Development Company, L.P. Piezoelectric flexures for light modulator
US7538890B2 (en) 2004-06-07 2009-05-26 Fujinon Corporation Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
JP4739806B2 (ja) * 2004-06-07 2011-08-03 富士フイルム株式会社 光ビーム測定装置および方法
JP4853938B2 (ja) * 2004-06-07 2012-01-11 富士フイルム株式会社 波面測定用干渉計装置
AT413765B (de) * 2004-06-24 2006-05-15 Ctr Carinthian Tech Res Ag Anordnung zum aufbau eines miniaturisierten fourier-transform-interferometers für optische strahlung nach dem michelson- bzw. einem daraus abgeleiteten prinzip
US7508488B2 (en) 2004-10-13 2009-03-24 Carl Zeiss Smt Ag Projection exposure system and method of manufacturing a miniaturized device
US20060232784A1 (en) * 2005-04-19 2006-10-19 Regis Grasser Interferometers of high resolutions
US7630085B2 (en) * 2005-04-19 2009-12-08 Texas Instruments Incorporated Interferometers of high resolutions
US7557932B2 (en) * 2005-04-19 2009-07-07 Texas Instruments Incorporated Characterization of micromirror array devices using interferometers
JP4667965B2 (ja) * 2005-06-07 2011-04-13 富士フイルム株式会社 光ビーム測定装置
TWI264523B (en) * 2005-09-06 2006-10-21 Instr Technology Res Ct Method and instrument for measuring decenter and tilt of lens by interferometer
US7733493B2 (en) * 2005-12-23 2010-06-08 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Fourier transform spectrometer
KR100777423B1 (ko) * 2005-12-26 2007-11-20 한국항공우주연구원 정지궤도 전자광학카메라 보정시스템
BRPI0720499A2 (pt) * 2006-12-21 2014-02-04 Johnson & Johnson Vision Care Cubeta para lente oftálmica
JP4802110B2 (ja) * 2007-01-31 2011-10-26 富士フイルム株式会社 光波干渉測定装置
US7570366B2 (en) 2007-02-21 2009-08-04 Corning Incorporated Apparatus for measuring defects in a glass sheet
CN101772696A (zh) * 2007-08-27 2010-07-07 株式会社尼康 波面像差测量装置及方法、以及波面像差调整方法
CN101183042B (zh) * 2007-12-13 2011-10-12 上海微电子装备有限公司 点衍射干涉仪
US8575528B1 (en) * 2010-03-03 2013-11-05 Jeffrey D. Barchers System and method for coherent phased array beam transmission and imaging
JP5607392B2 (ja) * 2010-03-12 2014-10-15 株式会社ミツトヨ 光干渉測定装置
US10018461B2 (en) * 2015-01-04 2018-07-10 Joshua Noel Hogan Reference signal filter for interferometric system
CN104567752A (zh) * 2015-01-19 2015-04-29 复旦大学 消杂光双光路光学定中仪
RU2615717C1 (ru) * 2016-03-25 2017-04-07 Акционерное общество "Лыткаринский завод оптического стекла" Интерферометр для многоцелевых оптических измерений
CN112504116B (zh) * 2016-04-21 2023-04-07 诺威有限公司 在对图案化样本的计量测量中使用的测量系统
CN112424560B (zh) * 2018-07-16 2023-10-17 马克思-普朗克科学促进协会 利用电磁场的消色差干涉叠加的干涉方法

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CA2169141A1 (en) * 1995-04-07 1996-10-08 Ivan Prikryl Interferometer having a micromirror

Also Published As

Publication number Publication date
DK0736759T3 (da) 2000-06-13
ES2142023T3 (es) 2000-04-01
KR100297262B1 (ko) 2001-11-22
CN1210975A (zh) 1999-03-17
US5771095A (en) 1998-06-23
CN1075630C (zh) 2001-11-28
SG73524A1 (en) 2000-06-20
ATE201265T1 (de) 2001-06-15
AU721210B2 (en) 2000-06-29
JP2003177006A (ja) 2003-06-27
PT814331E (pt) 2001-10-31
PT736759E (pt) 2000-05-31
US20010019415A1 (en) 2001-09-06
HK1012704A1 (en) 1999-08-06
CA2169141A1 (en) 1996-10-08
DE69606450D1 (de) 2000-03-09
US5675413A (en) 1997-10-07
SG43240A1 (en) 1997-10-17
TW285713B (no) 1996-09-11
KR960038363A (ko) 1996-11-21
US6493094B2 (en) 2002-12-10
EP0736759B1 (en) 2000-02-02
ATE189520T1 (de) 2000-02-15
SG73523A1 (en) 2000-06-20
EP0814331A3 (en) 1998-02-11
EP0736759A2 (en) 1996-10-09
EP0736759A3 (en) 1998-01-21
DE69612844D1 (de) 2001-06-21
EP0814331A2 (en) 1997-12-29
DE69612844T2 (de) 2001-09-27
DE69606450T2 (de) 2000-06-21
JPH08297009A (ja) 1996-11-12
EP0814331B1 (en) 2001-05-16
CN1153297A (zh) 1997-07-02
AU4578896A (en) 1996-10-17
US6025912A (en) 2000-02-15
NO960583D0 (no) 1996-02-14
ES2156326T3 (es) 2001-06-16
DK0814331T3 (da) 2001-06-11
US6204925B1 (en) 2001-03-20
JP2003185503A (ja) 2003-07-03

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