NO326146B1 - Mikromaskinert speilanordning - Google Patents
Mikromaskinert speilanordning Download PDFInfo
- Publication number
- NO326146B1 NO326146B1 NO20020140A NO20020140A NO326146B1 NO 326146 B1 NO326146 B1 NO 326146B1 NO 20020140 A NO20020140 A NO 20020140A NO 20020140 A NO20020140 A NO 20020140A NO 326146 B1 NO326146 B1 NO 326146B1
- Authority
- NO
- Norway
- Prior art keywords
- mass
- mirror
- mirror assembly
- movement
- preferred
- Prior art date
Links
- 230000001154 acute effect Effects 0.000 claims description 4
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims 3
- 210000000988 bone and bone Anatomy 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 11
- 239000000919 ceramic Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 14
- 238000005459 micromachining Methods 0.000 description 11
- 230000035939 shock Effects 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000010276 construction Methods 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000708 deep reactive-ion etching Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 4
- 238000013519 translation Methods 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010008 shearing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000013479 data entry Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
- Sliding-Contact Bearings (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/352,835 US6315423B1 (en) | 1999-07-13 | 1999-07-13 | Micro machined mirror |
| PCT/US2000/018998 WO2001004680A1 (en) | 1999-07-13 | 2000-07-13 | Micro-machined mirror device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO20020140D0 NO20020140D0 (no) | 2002-01-11 |
| NO20020140L NO20020140L (no) | 2002-03-12 |
| NO326146B1 true NO326146B1 (no) | 2008-10-06 |
Family
ID=23386711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20020140A NO326146B1 (no) | 1999-07-13 | 2002-01-11 | Mikromaskinert speilanordning |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US6315423B1 (enExample) |
| EP (1) | EP1200865B1 (enExample) |
| JP (1) | JP2003527621A (enExample) |
| AT (1) | ATE400831T1 (enExample) |
| AU (1) | AU6091100A (enExample) |
| CA (1) | CA2378736C (enExample) |
| DE (1) | DE60039432D1 (enExample) |
| NO (1) | NO326146B1 (enExample) |
| WO (1) | WO2001004680A1 (enExample) |
Families Citing this family (73)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6720682B2 (en) * | 2001-06-14 | 2004-04-13 | Lightbay Networks Corporation | Actuator assembly for tilting a mirror or like object |
| JP2003022414A (ja) * | 2001-07-06 | 2003-01-24 | Sony Corp | バーコードリーダ |
| US6844952B2 (en) * | 2001-09-18 | 2005-01-18 | Vitesse Semiconductor Corporation | Actuator-controlled mirror with Z-stop mechanism |
| DE60226262T2 (de) * | 2001-10-19 | 2009-05-20 | ION Geophysical Corp., Houston | Digitale optische schaltvorrichtung und verfahren zu ihrer herstellung |
| EP1890181B1 (en) | 2001-10-19 | 2012-07-04 | ION Geophysical Corporation | Digital optical switch apparatus and process for manufacturing same |
| US7400432B2 (en) * | 2002-05-17 | 2008-07-15 | Microvision, Inc. | Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method |
| CA2429508C (en) * | 2002-05-28 | 2013-01-08 | Jds Uniphase Inc. | Piano mems micromirror |
| US7167613B2 (en) * | 2002-05-28 | 2007-01-23 | Jds Uniphase Inc. | Interlaced array of piano MEMs micromirrors |
| US7110637B2 (en) * | 2002-05-28 | 2006-09-19 | Jds Uniphase Inc. | Two-step electrode for MEMs micromirrors |
| US7302131B2 (en) * | 2002-05-28 | 2007-11-27 | Jds Uniphase Inc. | Sunken electrode configuration for MEMs Micromirror |
| JP3987382B2 (ja) * | 2002-06-11 | 2007-10-10 | 富士通株式会社 | マイクロミラー素子およびその製造方法 |
| US6641273B1 (en) | 2002-06-28 | 2003-11-04 | Glimmerglass Networks, Inc. | MEMS structure with mechanical overdeflection limiter |
| US20040160118A1 (en) | 2002-11-08 | 2004-08-19 | Knollenberg Clifford F. | Actuator apparatus and method for improved deflection characteristics |
| US7019434B2 (en) * | 2002-11-08 | 2006-03-28 | Iris Ao, Inc. | Deformable mirror method and apparatus including bimorph flexures and integrated drive |
| US7095546B2 (en) * | 2003-04-24 | 2006-08-22 | Metconnex Canada Inc. | Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
| DE602004026804D1 (de) | 2003-05-23 | 2010-06-10 | Jds Uniphase Inc | Elektrodenkonfiguration für kippbaren MEMS Mikrospiegel |
| US7089666B2 (en) * | 2003-06-06 | 2006-08-15 | The Regents Of The University Of California | Microfabricated vertical comb actuator using plastic deformation |
| US20080197748A1 (en) * | 2003-07-28 | 2008-08-21 | Technion Research And Development Foundation Ltd. | Vertical Comb Drive and Uses Thereof |
| US20050093818A1 (en) * | 2003-11-05 | 2005-05-05 | Lightbay Networks Corporation | Dynamic laser projection display |
| US8537204B2 (en) * | 2004-07-08 | 2013-09-17 | Gyoung Il Cho | 3D television broadcasting system |
| US7580178B2 (en) * | 2004-02-13 | 2009-08-25 | Angstrom, Inc. | Image-guided microsurgery system and method |
| US7350922B2 (en) * | 2004-02-13 | 2008-04-01 | Angstrom, Inc. | Three-dimensional display using variable focal length micromirror array lens |
| US7382516B2 (en) * | 2004-06-18 | 2008-06-03 | Angstrom, Inc. | Discretely controlled micromirror with multi-level positions |
| US7898144B2 (en) * | 2006-02-04 | 2011-03-01 | Angstrom, Inc. | Multi-step microactuator providing multi-step displacement to a controlled object |
| US7474454B2 (en) * | 2004-06-18 | 2009-01-06 | Angstrom, Inc. | Programmable micromirror motion control system |
| US7330297B2 (en) * | 2005-03-04 | 2008-02-12 | Angstrom, Inc | Fine control of rotation and translation of discretely controlled micromirror |
| US7751694B2 (en) * | 2004-02-13 | 2010-07-06 | Angstrom, Inc. | Three-dimensional endoscope imaging and display system |
| US7768571B2 (en) * | 2004-03-22 | 2010-08-03 | Angstrom, Inc. | Optical tracking system using variable focal length lens |
| US7410266B2 (en) * | 2004-03-22 | 2008-08-12 | Angstrom, Inc. | Three-dimensional imaging system for robot vision |
| US7339746B2 (en) * | 2004-03-22 | 2008-03-04 | Angstrom, Inc. | Small and fast zoom system using micromirror array lens |
| US20070115261A1 (en) * | 2005-11-23 | 2007-05-24 | Stereo Display, Inc. | Virtual Keyboard input system using three-dimensional motion detection by variable focal length lens |
| US20070040924A1 (en) * | 2005-08-19 | 2007-02-22 | Stereo Display, Inc. | Cellular phone camera with three-dimensional imaging function |
| US8049776B2 (en) * | 2004-04-12 | 2011-11-01 | Angstrom, Inc. | Three-dimensional camcorder |
| US7619614B2 (en) * | 2004-04-12 | 2009-11-17 | Angstrom, Inc. | Three-dimensional optical mouse system |
| US7742232B2 (en) * | 2004-04-12 | 2010-06-22 | Angstrom, Inc. | Three-dimensional imaging system |
| US7777959B2 (en) * | 2004-05-27 | 2010-08-17 | Angstrom, Inc. | Micromirror array lens with fixed focal length |
| US7667896B2 (en) | 2004-05-27 | 2010-02-23 | Angstrom, Inc. | DVD recording and reproducing system |
| US7354167B2 (en) | 2004-05-27 | 2008-04-08 | Angstrom, Inc. | Beam focusing and scanning system using micromirror array lens |
| US7619807B2 (en) | 2004-11-08 | 2009-11-17 | Angstrom, Inc. | Micromirror array lens with optical surface profiles |
| US7489434B2 (en) | 2007-05-02 | 2009-02-10 | Angstrom, Inc. | Hybrid micromirror array lens for reducing chromatic aberration |
| US7232701B2 (en) * | 2005-01-04 | 2007-06-19 | Freescale Semiconductor, Inc. | Microelectromechanical (MEM) device with a protective cap that functions as a motion stop |
| EP1835324A4 (en) | 2005-01-05 | 2010-02-17 | Nippon Telegraph & Telephone | MIRROR DEVICE, MIRROR ARRANGEMENT, OPTICAL SWITCH, METHOD FOR MIRROR MANUFACTURE AND METHOD FOR PRODUCING A MIRROR SUBSTRATE |
| CA2536722A1 (en) * | 2005-02-16 | 2006-08-16 | Jds Uniphase Inc. | Articulated mems structures |
| US20060198011A1 (en) * | 2005-03-04 | 2006-09-07 | Stereo Display, Inc. | Volumetric three-dimensional device using two-dimensional scanning device |
| US20060203117A1 (en) * | 2005-03-10 | 2006-09-14 | Stereo Display, Inc. | Video monitoring system using variable focal length lens |
| DE102005033800B4 (de) * | 2005-07-13 | 2016-09-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung |
| US20070041077A1 (en) * | 2005-08-19 | 2007-02-22 | Stereo Display, Inc. | Pocket-sized two-dimensional image projection system |
| US7725027B2 (en) * | 2006-04-06 | 2010-05-25 | Jds Uniphase Corporation | Multi-unit wavelength dispersive device |
| US9736346B2 (en) | 2006-05-09 | 2017-08-15 | Stereo Display, Inc | Imaging system improving image resolution of the system with low resolution image sensor |
| US7784933B2 (en) * | 2006-06-29 | 2010-08-31 | Lexmark International, Inc. | Smart projector guides for handprinters |
| US20080022771A1 (en) * | 2006-07-28 | 2008-01-31 | Alexander Wolter | Micromechanical component |
| CN101121498B (zh) * | 2006-08-07 | 2011-01-26 | 探微科技股份有限公司 | 制作微扭转轴的方法 |
| US7365899B2 (en) * | 2006-08-10 | 2008-04-29 | Angstrom, Inc. | Micromirror with multi-axis rotation and translation |
| US7589884B2 (en) * | 2006-09-22 | 2009-09-15 | Angstrom, Inc. | Micromirror array lens with encapsulation of reflective metal layer and method of making the same |
| US7589885B2 (en) * | 2006-09-22 | 2009-09-15 | Angstrom, Inc. | Micromirror array device comprising encapsulated reflective metal layer and method of making the same |
| JP4919750B2 (ja) | 2006-09-27 | 2012-04-18 | 富士通株式会社 | マイクロ構造体製造方法およびマイクロ構造体 |
| US7488082B2 (en) | 2006-12-12 | 2009-02-10 | Angstrom, Inc. | Discretely controlled micromirror array device with segmented electrodes |
| DE102007002725A1 (de) * | 2007-01-18 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente |
| US7535618B2 (en) * | 2007-03-12 | 2009-05-19 | Angstrom, Inc. | Discretely controlled micromirror device having multiple motions |
| US9505606B2 (en) | 2007-06-13 | 2016-11-29 | Angstrom, Inc. | MEMS actuator with discretely controlled multiple motions |
| US7605988B2 (en) | 2007-07-23 | 2009-10-20 | Angstrom, Inc. | Compact image taking lens system with a lens-surfaced prism |
| US7589916B2 (en) | 2007-08-10 | 2009-09-15 | Angstrom, Inc. | Micromirror array with iris function |
| US20090185067A1 (en) * | 2007-12-21 | 2009-07-23 | Stereo Display, Inc. | Compact automatic focusing camera |
| US8810908B2 (en) | 2008-03-18 | 2014-08-19 | Stereo Display, Inc. | Binoculars with micromirror array lenses |
| US20090303569A1 (en) * | 2008-05-20 | 2009-12-10 | Stereo Didplay, Inc. | Self-tilted micromirror device |
| US8622557B2 (en) | 2008-05-20 | 2014-01-07 | Stereo Display, Inc. | Micromirror array lens with self-tilted micromirrors |
| US20110188104A1 (en) * | 2008-06-25 | 2011-08-04 | Panasonic Electric Works Co., Ltd. | Moving structure and light scanning mirror using the same |
| JP2011027973A (ja) * | 2009-07-24 | 2011-02-10 | Fujitsu Ltd | マイクロ素子 |
| US8322216B2 (en) * | 2009-09-22 | 2012-12-04 | Duli Yu | Micromachined accelerometer with monolithic electrodes and method of making the same |
| JP5577742B2 (ja) * | 2010-02-23 | 2014-08-27 | セイコーエプソン株式会社 | 光スキャナーおよび画像形成装置 |
| ITTO20130031A1 (it) | 2013-01-14 | 2014-07-15 | St Microelectronics Srl | Struttura micromeccanica di specchio e relativo procedimento di fabbricazione |
| JP6343994B2 (ja) * | 2014-03-25 | 2018-06-20 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置およびヘッドマウントディスプレイ |
| DE102017206252A1 (de) * | 2017-04-11 | 2018-10-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanische Spiegelvorrichtung |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4317611A (en) | 1980-05-19 | 1982-03-02 | International Business Machines Corporation | Optical ray deflection apparatus |
| JPS644091Y2 (enExample) * | 1981-05-18 | 1989-02-02 | ||
| US5245464A (en) * | 1988-08-12 | 1993-09-14 | Laser Scan Vision Aps | Deflecting instrument, controllable reflecting device herefor and use hereof |
| JPH03287222A (ja) * | 1990-04-03 | 1991-12-17 | Ricoh Co Ltd | トラッキングミラーアクチュエータ装置 |
| US5966230A (en) | 1990-05-29 | 1999-10-12 | Symbol Technologies, Inc. | Integrated scanner on a common substrate |
| US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
| US6044705A (en) | 1993-10-18 | 2000-04-04 | Xros, Inc. | Micromachined members coupled for relative rotation by torsion bars |
| US6059188A (en) | 1993-10-25 | 2000-05-09 | Symbol Technologies | Packaged mirror including mirror travel stops |
| US5583688A (en) * | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
| JP3636742B2 (ja) * | 1993-12-22 | 2005-04-06 | オムロン株式会社 | 光スキャナ及び光走査装置並びに当該光走査装置を用いた符号情報読み取り装置及びｐｏｓシステム |
| JPH08211320A (ja) * | 1994-11-10 | 1996-08-20 | Toshiba Corp | ガルバノミラー及びそれを用いた光ディスク装置 |
| DE69632882T2 (de) * | 1995-02-27 | 2005-07-14 | Symbol Technologies, Inc. | Abtastmodul für einen optischen Abtaster |
| JP3427564B2 (ja) * | 1995-04-25 | 2003-07-22 | オムロン株式会社 | 光走査装置 |
| JPH1062709A (ja) * | 1996-08-13 | 1998-03-06 | Toshiba Corp | ガルバノミラー装置およびこれを用いた光ディスク装置 |
| US5914801A (en) * | 1996-09-27 | 1999-06-22 | Mcnc | Microelectromechanical devices including rotating plates and related methods |
| US5999303A (en) * | 1997-03-24 | 1999-12-07 | Seagate Technology Inc. | Micro-machined mirror using tethered elements |
| US6128122A (en) * | 1998-09-18 | 2000-10-03 | Seagate Technology, Inc. | Micromachined mirror with stretchable restoring force member |
| WO1998044571A1 (en) * | 1997-04-01 | 1998-10-08 | Xros, Inc. | Adjusting operating characteristics of micromachined torsional oscillators |
| US6617098B1 (en) * | 1999-07-13 | 2003-09-09 | Input/Output, Inc. | Merged-mask micro-machining process |
-
1999
- 1999-07-13 US US09/352,835 patent/US6315423B1/en not_active Expired - Lifetime
-
2000
- 2000-07-13 CA CA2378736A patent/CA2378736C/en not_active Expired - Lifetime
- 2000-07-13 JP JP2001510032A patent/JP2003527621A/ja active Pending
- 2000-07-13 EP EP00947273A patent/EP1200865B1/en not_active Expired - Lifetime
- 2000-07-13 AT AT00947273T patent/ATE400831T1/de not_active IP Right Cessation
- 2000-07-13 AU AU60911/00A patent/AU6091100A/en not_active Abandoned
- 2000-07-13 WO PCT/US2000/018998 patent/WO2001004680A1/en not_active Ceased
- 2000-07-13 DE DE60039432T patent/DE60039432D1/de not_active Expired - Lifetime
-
2001
- 2001-06-01 US US09/873,054 patent/US6454421B2/en not_active Expired - Lifetime
-
2002
- 2002-01-11 NO NO20020140A patent/NO326146B1/no not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| NO20020140L (no) | 2002-03-12 |
| DE60039432D1 (de) | 2008-08-21 |
| NO20020140D0 (no) | 2002-01-11 |
| ATE400831T1 (de) | 2008-07-15 |
| US20020012180A1 (en) | 2002-01-31 |
| WO2001004680A1 (en) | 2001-01-18 |
| CA2378736A1 (en) | 2001-01-18 |
| US6315423B1 (en) | 2001-11-13 |
| EP1200865B1 (en) | 2008-07-09 |
| AU6091100A (en) | 2001-01-30 |
| JP2003527621A (ja) | 2003-09-16 |
| EP1200865A4 (en) | 2004-04-28 |
| US6454421B2 (en) | 2002-09-24 |
| CA2378736C (en) | 2010-03-23 |
| EP1200865A1 (en) | 2002-05-02 |
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