NO20020140D0 - Mikromaskinert speilanordning - Google Patents
Mikromaskinert speilanordningInfo
- Publication number
- NO20020140D0 NO20020140D0 NO20020140A NO20020140A NO20020140D0 NO 20020140 D0 NO20020140 D0 NO 20020140D0 NO 20020140 A NO20020140 A NO 20020140A NO 20020140 A NO20020140 A NO 20020140A NO 20020140 D0 NO20020140 D0 NO 20020140D0
- Authority
- NO
- Norway
- Prior art keywords
- mirror
- micro machined
- mirror device
- micromachined mirror
- travel stops
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/352,835 US6315423B1 (en) | 1999-07-13 | 1999-07-13 | Micro machined mirror |
PCT/US2000/018998 WO2001004680A1 (en) | 1999-07-13 | 2000-07-13 | Micro-machined mirror device |
Publications (3)
Publication Number | Publication Date |
---|---|
NO20020140D0 true NO20020140D0 (no) | 2002-01-11 |
NO20020140L NO20020140L (no) | 2002-03-12 |
NO326146B1 NO326146B1 (no) | 2008-10-06 |
Family
ID=23386711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20020140A NO326146B1 (no) | 1999-07-13 | 2002-01-11 | Mikromaskinert speilanordning |
Country Status (9)
Country | Link |
---|---|
US (2) | US6315423B1 (no) |
EP (1) | EP1200865B1 (no) |
JP (1) | JP2003527621A (no) |
AT (1) | ATE400831T1 (no) |
AU (1) | AU6091100A (no) |
CA (1) | CA2378736C (no) |
DE (1) | DE60039432D1 (no) |
NO (1) | NO326146B1 (no) |
WO (1) | WO2001004680A1 (no) |
Families Citing this family (73)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6720682B2 (en) * | 2001-06-14 | 2004-04-13 | Lightbay Networks Corporation | Actuator assembly for tilting a mirror or like object |
JP2003022414A (ja) * | 2001-07-06 | 2003-01-24 | Sony Corp | バーコードリーダ |
US6844952B2 (en) * | 2001-09-18 | 2005-01-18 | Vitesse Semiconductor Corporation | Actuator-controlled mirror with Z-stop mechanism |
EP1890181B1 (en) | 2001-10-19 | 2012-07-04 | ION Geophysical Corporation | Digital optical switch apparatus and process for manufacturing same |
CA2463900C (en) * | 2001-10-19 | 2011-01-11 | Input/Output, Inc. | Digital optical switch apparatus and process for manufacturing same |
US7400432B2 (en) * | 2002-05-17 | 2008-07-15 | Microvision, Inc. | Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method |
US7110637B2 (en) * | 2002-05-28 | 2006-09-19 | Jds Uniphase Inc. | Two-step electrode for MEMs micromirrors |
US7302131B2 (en) * | 2002-05-28 | 2007-11-27 | Jds Uniphase Inc. | Sunken electrode configuration for MEMs Micromirror |
US7167613B2 (en) * | 2002-05-28 | 2007-01-23 | Jds Uniphase Inc. | Interlaced array of piano MEMs micromirrors |
CA2429508C (en) * | 2002-05-28 | 2013-01-08 | Jds Uniphase Inc. | Piano mems micromirror |
JP3987382B2 (ja) * | 2002-06-11 | 2007-10-10 | 富士通株式会社 | マイクロミラー素子およびその製造方法 |
US6641273B1 (en) | 2002-06-28 | 2003-11-04 | Glimmerglass Networks, Inc. | MEMS structure with mechanical overdeflection limiter |
US7019434B2 (en) | 2002-11-08 | 2006-03-28 | Iris Ao, Inc. | Deformable mirror method and apparatus including bimorph flexures and integrated drive |
US20040160118A1 (en) | 2002-11-08 | 2004-08-19 | Knollenberg Clifford F. | Actuator apparatus and method for improved deflection characteristics |
US7095546B2 (en) * | 2003-04-24 | 2006-08-22 | Metconnex Canada Inc. | Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
EP1479646B1 (en) | 2003-05-23 | 2010-04-28 | JDS Uniphase Inc. | Electrode configuration for pivotable MEMS micromirror |
US7089666B2 (en) * | 2003-06-06 | 2006-08-15 | The Regents Of The University Of California | Microfabricated vertical comb actuator using plastic deformation |
WO2005011071A2 (en) * | 2003-07-28 | 2005-02-03 | Technion Research And Development Foundation Ltd. | Vertical comb drive and uses thereof |
US20050093818A1 (en) * | 2003-11-05 | 2005-05-05 | Lightbay Networks Corporation | Dynamic laser projection display |
US8537204B2 (en) * | 2004-07-08 | 2013-09-17 | Gyoung Il Cho | 3D television broadcasting system |
US7898144B2 (en) * | 2006-02-04 | 2011-03-01 | Angstrom, Inc. | Multi-step microactuator providing multi-step displacement to a controlled object |
US7580178B2 (en) * | 2004-02-13 | 2009-08-25 | Angstrom, Inc. | Image-guided microsurgery system and method |
US7350922B2 (en) * | 2004-02-13 | 2008-04-01 | Angstrom, Inc. | Three-dimensional display using variable focal length micromirror array lens |
US7382516B2 (en) * | 2004-06-18 | 2008-06-03 | Angstrom, Inc. | Discretely controlled micromirror with multi-level positions |
US7751694B2 (en) * | 2004-02-13 | 2010-07-06 | Angstrom, Inc. | Three-dimensional endoscope imaging and display system |
US7330297B2 (en) | 2005-03-04 | 2008-02-12 | Angstrom, Inc | Fine control of rotation and translation of discretely controlled micromirror |
US7474454B2 (en) * | 2004-06-18 | 2009-01-06 | Angstrom, Inc. | Programmable micromirror motion control system |
US7768571B2 (en) * | 2004-03-22 | 2010-08-03 | Angstrom, Inc. | Optical tracking system using variable focal length lens |
US7410266B2 (en) * | 2004-03-22 | 2008-08-12 | Angstrom, Inc. | Three-dimensional imaging system for robot vision |
US7339746B2 (en) * | 2004-03-22 | 2008-03-04 | Angstrom, Inc. | Small and fast zoom system using micromirror array lens |
US7742232B2 (en) * | 2004-04-12 | 2010-06-22 | Angstrom, Inc. | Three-dimensional imaging system |
US7619614B2 (en) * | 2004-04-12 | 2009-11-17 | Angstrom, Inc. | Three-dimensional optical mouse system |
US20070040924A1 (en) * | 2005-08-19 | 2007-02-22 | Stereo Display, Inc. | Cellular phone camera with three-dimensional imaging function |
US20070115261A1 (en) * | 2005-11-23 | 2007-05-24 | Stereo Display, Inc. | Virtual Keyboard input system using three-dimensional motion detection by variable focal length lens |
US8049776B2 (en) * | 2004-04-12 | 2011-11-01 | Angstrom, Inc. | Three-dimensional camcorder |
US7777959B2 (en) * | 2004-05-27 | 2010-08-17 | Angstrom, Inc. | Micromirror array lens with fixed focal length |
US7667896B2 (en) | 2004-05-27 | 2010-02-23 | Angstrom, Inc. | DVD recording and reproducing system |
US7354167B2 (en) | 2004-05-27 | 2008-04-08 | Angstrom, Inc. | Beam focusing and scanning system using micromirror array lens |
US7489434B2 (en) | 2007-05-02 | 2009-02-10 | Angstrom, Inc. | Hybrid micromirror array lens for reducing chromatic aberration |
US7619807B2 (en) | 2004-11-08 | 2009-11-17 | Angstrom, Inc. | Micromirror array lens with optical surface profiles |
US7232701B2 (en) * | 2005-01-04 | 2007-06-19 | Freescale Semiconductor, Inc. | Microelectromechanical (MEM) device with a protective cap that functions as a motion stop |
EP1835324A4 (en) | 2005-01-05 | 2010-02-17 | Nippon Telegraph & Telephone | MIRROR DEVICE, MIRROR NETWORK, OPTICAL SWITCH, METHOD FOR MANUFACTURING MIRROR DEVICE AND MIRROR SUBSTRATE |
US7432629B2 (en) * | 2005-02-16 | 2008-10-07 | Jds Uniphase Corporation | Articulated MEMs structures |
US20060198011A1 (en) * | 2005-03-04 | 2006-09-07 | Stereo Display, Inc. | Volumetric three-dimensional device using two-dimensional scanning device |
US20060203117A1 (en) * | 2005-03-10 | 2006-09-14 | Stereo Display, Inc. | Video monitoring system using variable focal length lens |
DE102005033800B4 (de) * | 2005-07-13 | 2016-09-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung |
US20070041077A1 (en) * | 2005-08-19 | 2007-02-22 | Stereo Display, Inc. | Pocket-sized two-dimensional image projection system |
US7616372B2 (en) * | 2006-04-06 | 2009-11-10 | Jds Uniphase Corporation | Piano MEMS with hidden hinge |
US9736346B2 (en) | 2006-05-09 | 2017-08-15 | Stereo Display, Inc | Imaging system improving image resolution of the system with low resolution image sensor |
US7784933B2 (en) * | 2006-06-29 | 2010-08-31 | Lexmark International, Inc. | Smart projector guides for handprinters |
US20080022771A1 (en) * | 2006-07-28 | 2008-01-31 | Alexander Wolter | Micromechanical component |
CN101121498B (zh) * | 2006-08-07 | 2011-01-26 | 探微科技股份有限公司 | 制作微扭转轴的方法 |
US7365899B2 (en) * | 2006-08-10 | 2008-04-29 | Angstrom, Inc. | Micromirror with multi-axis rotation and translation |
US7589884B2 (en) * | 2006-09-22 | 2009-09-15 | Angstrom, Inc. | Micromirror array lens with encapsulation of reflective metal layer and method of making the same |
US7589885B2 (en) * | 2006-09-22 | 2009-09-15 | Angstrom, Inc. | Micromirror array device comprising encapsulated reflective metal layer and method of making the same |
JP4919750B2 (ja) | 2006-09-27 | 2012-04-18 | 富士通株式会社 | マイクロ構造体製造方法およびマイクロ構造体 |
US7488082B2 (en) | 2006-12-12 | 2009-02-10 | Angstrom, Inc. | Discretely controlled micromirror array device with segmented electrodes |
DE102007002725A1 (de) * | 2007-01-18 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente |
US7535618B2 (en) * | 2007-03-12 | 2009-05-19 | Angstrom, Inc. | Discretely controlled micromirror device having multiple motions |
US9505606B2 (en) | 2007-06-13 | 2016-11-29 | Angstrom, Inc. | MEMS actuator with discretely controlled multiple motions |
US7605988B2 (en) | 2007-07-23 | 2009-10-20 | Angstrom, Inc. | Compact image taking lens system with a lens-surfaced prism |
US7589916B2 (en) | 2007-08-10 | 2009-09-15 | Angstrom, Inc. | Micromirror array with iris function |
US20090185067A1 (en) * | 2007-12-21 | 2009-07-23 | Stereo Display, Inc. | Compact automatic focusing camera |
US8810908B2 (en) | 2008-03-18 | 2014-08-19 | Stereo Display, Inc. | Binoculars with micromirror array lenses |
US20090303569A1 (en) * | 2008-05-20 | 2009-12-10 | Stereo Didplay, Inc. | Self-tilted micromirror device |
US8622557B2 (en) | 2008-05-20 | 2014-01-07 | Stereo Display, Inc. | Micromirror array lens with self-tilted micromirrors |
CN102067433A (zh) * | 2008-06-25 | 2011-05-18 | 松下电工株式会社 | 可动结构体及使用它的光扫描反射镜 |
JP2011027973A (ja) * | 2009-07-24 | 2011-02-10 | Fujitsu Ltd | マイクロ素子 |
US8322216B2 (en) * | 2009-09-22 | 2012-12-04 | Duli Yu | Micromachined accelerometer with monolithic electrodes and method of making the same |
JP5577742B2 (ja) | 2010-02-23 | 2014-08-27 | セイコーエプソン株式会社 | 光スキャナーおよび画像形成装置 |
ITTO20130031A1 (it) | 2013-01-14 | 2014-07-15 | St Microelectronics Srl | Struttura micromeccanica di specchio e relativo procedimento di fabbricazione |
JP6343994B2 (ja) * | 2014-03-25 | 2018-06-20 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置およびヘッドマウントディスプレイ |
DE102017206252A1 (de) * | 2017-04-11 | 2018-10-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanische Spiegelvorrichtung |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4317611A (en) | 1980-05-19 | 1982-03-02 | International Business Machines Corporation | Optical ray deflection apparatus |
JPS644091Y2 (no) * | 1981-05-18 | 1989-02-02 | ||
US5245464A (en) * | 1988-08-12 | 1993-09-14 | Laser Scan Vision Aps | Deflecting instrument, controllable reflecting device herefor and use hereof |
JPH03287222A (ja) * | 1990-04-03 | 1991-12-17 | Ricoh Co Ltd | トラッキングミラーアクチュエータ装置 |
US5966230A (en) | 1990-05-29 | 1999-10-12 | Symbol Technologies, Inc. | Integrated scanner on a common substrate |
US6044705A (en) | 1993-10-18 | 2000-04-04 | Xros, Inc. | Micromachined members coupled for relative rotation by torsion bars |
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US6059188A (en) | 1993-10-25 | 2000-05-09 | Symbol Technologies | Packaged mirror including mirror travel stops |
US5583688A (en) * | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
JP3636742B2 (ja) * | 1993-12-22 | 2005-04-06 | オムロン株式会社 | 光スキャナ及び光走査装置並びに当該光走査装置を用いた符号情報読み取り装置及びposシステム |
JPH08211320A (ja) * | 1994-11-10 | 1996-08-20 | Toshiba Corp | ガルバノミラー及びそれを用いた光ディスク装置 |
DE69632882T2 (de) * | 1995-02-27 | 2005-07-14 | Symbol Technologies, Inc. | Abtastmodul für einen optischen Abtaster |
JP3427564B2 (ja) * | 1995-04-25 | 2003-07-22 | オムロン株式会社 | 光走査装置 |
JPH1062709A (ja) * | 1996-08-13 | 1998-03-06 | Toshiba Corp | ガルバノミラー装置およびこれを用いた光ディスク装置 |
US5914801A (en) * | 1996-09-27 | 1999-06-22 | Mcnc | Microelectromechanical devices including rotating plates and related methods |
US6128122A (en) * | 1998-09-18 | 2000-10-03 | Seagate Technology, Inc. | Micromachined mirror with stretchable restoring force member |
US5999303A (en) * | 1997-03-24 | 1999-12-07 | Seagate Technology Inc. | Micro-machined mirror using tethered elements |
WO1998044571A1 (en) * | 1997-04-01 | 1998-10-08 | Xros, Inc. | Adjusting operating characteristics of micromachined torsional oscillators |
US6617098B1 (en) * | 1999-07-13 | 2003-09-09 | Input/Output, Inc. | Merged-mask micro-machining process |
-
1999
- 1999-07-13 US US09/352,835 patent/US6315423B1/en not_active Expired - Lifetime
-
2000
- 2000-07-13 CA CA2378736A patent/CA2378736C/en not_active Expired - Lifetime
- 2000-07-13 EP EP00947273A patent/EP1200865B1/en not_active Expired - Lifetime
- 2000-07-13 WO PCT/US2000/018998 patent/WO2001004680A1/en active Application Filing
- 2000-07-13 AU AU60911/00A patent/AU6091100A/en not_active Abandoned
- 2000-07-13 DE DE60039432T patent/DE60039432D1/de not_active Expired - Lifetime
- 2000-07-13 AT AT00947273T patent/ATE400831T1/de not_active IP Right Cessation
- 2000-07-13 JP JP2001510032A patent/JP2003527621A/ja active Pending
-
2001
- 2001-06-01 US US09/873,054 patent/US6454421B2/en not_active Expired - Lifetime
-
2002
- 2002-01-11 NO NO20020140A patent/NO326146B1/no not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE60039432D1 (de) | 2008-08-21 |
EP1200865A1 (en) | 2002-05-02 |
AU6091100A (en) | 2001-01-30 |
CA2378736A1 (en) | 2001-01-18 |
ATE400831T1 (de) | 2008-07-15 |
NO326146B1 (no) | 2008-10-06 |
US6454421B2 (en) | 2002-09-24 |
EP1200865B1 (en) | 2008-07-09 |
US6315423B1 (en) | 2001-11-13 |
WO2001004680A1 (en) | 2001-01-18 |
NO20020140L (no) | 2002-03-12 |
JP2003527621A (ja) | 2003-09-16 |
US20020012180A1 (en) | 2002-01-31 |
EP1200865A4 (en) | 2004-04-28 |
CA2378736C (en) | 2010-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK1K | Patent expired |