CA2378736C - Micro-machined mirror device - Google Patents

Micro-machined mirror device Download PDF

Info

Publication number
CA2378736C
CA2378736C CA2378736A CA2378736A CA2378736C CA 2378736 C CA2378736 C CA 2378736C CA 2378736 A CA2378736 A CA 2378736A CA 2378736 A CA2378736 A CA 2378736A CA 2378736 C CA2378736 C CA 2378736C
Authority
CA
Canada
Prior art keywords
mirror
preferred
microns
plate
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA2378736A
Other languages
English (en)
French (fr)
Other versions
CA2378736A1 (en
Inventor
Duli Yu
Lianzhong Yu
Howard D. Goldberg
Martin A. Schmidt
Robert P. Ried
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Geophysical Corp
Original Assignee
Ion Geophysical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Geophysical Corp filed Critical Ion Geophysical Corp
Publication of CA2378736A1 publication Critical patent/CA2378736A1/en
Application granted granted Critical
Publication of CA2378736C publication Critical patent/CA2378736C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Sliding-Contact Bearings (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
CA2378736A 1999-07-13 2000-07-13 Micro-machined mirror device Expired - Lifetime CA2378736C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/352,835 1999-07-13
US09/352,835 US6315423B1 (en) 1999-07-13 1999-07-13 Micro machined mirror
PCT/US2000/018998 WO2001004680A1 (en) 1999-07-13 2000-07-13 Micro-machined mirror device

Publications (2)

Publication Number Publication Date
CA2378736A1 CA2378736A1 (en) 2001-01-18
CA2378736C true CA2378736C (en) 2010-03-23

Family

ID=23386711

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2378736A Expired - Lifetime CA2378736C (en) 1999-07-13 2000-07-13 Micro-machined mirror device

Country Status (9)

Country Link
US (2) US6315423B1 (enExample)
EP (1) EP1200865B1 (enExample)
JP (1) JP2003527621A (enExample)
AT (1) ATE400831T1 (enExample)
AU (1) AU6091100A (enExample)
CA (1) CA2378736C (enExample)
DE (1) DE60039432D1 (enExample)
NO (1) NO326146B1 (enExample)
WO (1) WO2001004680A1 (enExample)

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DE60226262T2 (de) * 2001-10-19 2009-05-20 ION Geophysical Corp., Houston Digitale optische schaltvorrichtung und verfahren zu ihrer herstellung
EP1890181B1 (en) 2001-10-19 2012-07-04 ION Geophysical Corporation Digital optical switch apparatus and process for manufacturing same
US7400432B2 (en) * 2002-05-17 2008-07-15 Microvision, Inc. Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method
CA2429508C (en) * 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
US7167613B2 (en) * 2002-05-28 2007-01-23 Jds Uniphase Inc. Interlaced array of piano MEMs micromirrors
US7110637B2 (en) * 2002-05-28 2006-09-19 Jds Uniphase Inc. Two-step electrode for MEMs micromirrors
US7302131B2 (en) * 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
US6641273B1 (en) 2002-06-28 2003-11-04 Glimmerglass Networks, Inc. MEMS structure with mechanical overdeflection limiter
US20040160118A1 (en) 2002-11-08 2004-08-19 Knollenberg Clifford F. Actuator apparatus and method for improved deflection characteristics
US7019434B2 (en) * 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
US7095546B2 (en) * 2003-04-24 2006-08-22 Metconnex Canada Inc. Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
DE602004026804D1 (de) 2003-05-23 2010-06-10 Jds Uniphase Inc Elektrodenkonfiguration für kippbaren MEMS Mikrospiegel
US7089666B2 (en) * 2003-06-06 2006-08-15 The Regents Of The University Of California Microfabricated vertical comb actuator using plastic deformation
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US7898144B2 (en) * 2006-02-04 2011-03-01 Angstrom, Inc. Multi-step microactuator providing multi-step displacement to a controlled object
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US7330297B2 (en) * 2005-03-04 2008-02-12 Angstrom, Inc Fine control of rotation and translation of discretely controlled micromirror
US7751694B2 (en) * 2004-02-13 2010-07-06 Angstrom, Inc. Three-dimensional endoscope imaging and display system
US7768571B2 (en) * 2004-03-22 2010-08-03 Angstrom, Inc. Optical tracking system using variable focal length lens
US7410266B2 (en) * 2004-03-22 2008-08-12 Angstrom, Inc. Three-dimensional imaging system for robot vision
US7339746B2 (en) * 2004-03-22 2008-03-04 Angstrom, Inc. Small and fast zoom system using micromirror array lens
US20070115261A1 (en) * 2005-11-23 2007-05-24 Stereo Display, Inc. Virtual Keyboard input system using three-dimensional motion detection by variable focal length lens
US20070040924A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Cellular phone camera with three-dimensional imaging function
US8049776B2 (en) * 2004-04-12 2011-11-01 Angstrom, Inc. Three-dimensional camcorder
US7619614B2 (en) * 2004-04-12 2009-11-17 Angstrom, Inc. Three-dimensional optical mouse system
US7742232B2 (en) * 2004-04-12 2010-06-22 Angstrom, Inc. Three-dimensional imaging system
US7777959B2 (en) * 2004-05-27 2010-08-17 Angstrom, Inc. Micromirror array lens with fixed focal length
US7667896B2 (en) 2004-05-27 2010-02-23 Angstrom, Inc. DVD recording and reproducing system
US7354167B2 (en) 2004-05-27 2008-04-08 Angstrom, Inc. Beam focusing and scanning system using micromirror array lens
US7619807B2 (en) 2004-11-08 2009-11-17 Angstrom, Inc. Micromirror array lens with optical surface profiles
US7489434B2 (en) 2007-05-02 2009-02-10 Angstrom, Inc. Hybrid micromirror array lens for reducing chromatic aberration
US7232701B2 (en) * 2005-01-04 2007-06-19 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
EP1835324A4 (en) 2005-01-05 2010-02-17 Nippon Telegraph & Telephone MIRROR DEVICE, MIRROR ARRANGEMENT, OPTICAL SWITCH, METHOD FOR MIRROR MANUFACTURE AND METHOD FOR PRODUCING A MIRROR SUBSTRATE
CA2536722A1 (en) * 2005-02-16 2006-08-16 Jds Uniphase Inc. Articulated mems structures
US20060198011A1 (en) * 2005-03-04 2006-09-07 Stereo Display, Inc. Volumetric three-dimensional device using two-dimensional scanning device
US20060203117A1 (en) * 2005-03-10 2006-09-14 Stereo Display, Inc. Video monitoring system using variable focal length lens
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US20070041077A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Pocket-sized two-dimensional image projection system
US7725027B2 (en) * 2006-04-06 2010-05-25 Jds Uniphase Corporation Multi-unit wavelength dispersive device
US9736346B2 (en) 2006-05-09 2017-08-15 Stereo Display, Inc Imaging system improving image resolution of the system with low resolution image sensor
US7784933B2 (en) * 2006-06-29 2010-08-31 Lexmark International, Inc. Smart projector guides for handprinters
US20080022771A1 (en) * 2006-07-28 2008-01-31 Alexander Wolter Micromechanical component
CN101121498B (zh) * 2006-08-07 2011-01-26 探微科技股份有限公司 制作微扭转轴的方法
US7365899B2 (en) * 2006-08-10 2008-04-29 Angstrom, Inc. Micromirror with multi-axis rotation and translation
US7589884B2 (en) * 2006-09-22 2009-09-15 Angstrom, Inc. Micromirror array lens with encapsulation of reflective metal layer and method of making the same
US7589885B2 (en) * 2006-09-22 2009-09-15 Angstrom, Inc. Micromirror array device comprising encapsulated reflective metal layer and method of making the same
JP4919750B2 (ja) 2006-09-27 2012-04-18 富士通株式会社 マイクロ構造体製造方法およびマイクロ構造体
US7488082B2 (en) 2006-12-12 2009-02-10 Angstrom, Inc. Discretely controlled micromirror array device with segmented electrodes
DE102007002725A1 (de) * 2007-01-18 2008-07-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente
US7535618B2 (en) * 2007-03-12 2009-05-19 Angstrom, Inc. Discretely controlled micromirror device having multiple motions
US9505606B2 (en) 2007-06-13 2016-11-29 Angstrom, Inc. MEMS actuator with discretely controlled multiple motions
US7605988B2 (en) 2007-07-23 2009-10-20 Angstrom, Inc. Compact image taking lens system with a lens-surfaced prism
US7589916B2 (en) 2007-08-10 2009-09-15 Angstrom, Inc. Micromirror array with iris function
US20090185067A1 (en) * 2007-12-21 2009-07-23 Stereo Display, Inc. Compact automatic focusing camera
US8810908B2 (en) 2008-03-18 2014-08-19 Stereo Display, Inc. Binoculars with micromirror array lenses
US20090303569A1 (en) * 2008-05-20 2009-12-10 Stereo Didplay, Inc. Self-tilted micromirror device
US8622557B2 (en) 2008-05-20 2014-01-07 Stereo Display, Inc. Micromirror array lens with self-tilted micromirrors
US20110188104A1 (en) * 2008-06-25 2011-08-04 Panasonic Electric Works Co., Ltd. Moving structure and light scanning mirror using the same
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
JP5577742B2 (ja) * 2010-02-23 2014-08-27 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
ITTO20130031A1 (it) 2013-01-14 2014-07-15 St Microelectronics Srl Struttura micromeccanica di specchio e relativo procedimento di fabbricazione
JP6343994B2 (ja) * 2014-03-25 2018-06-20 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
DE102017206252A1 (de) * 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung

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Also Published As

Publication number Publication date
NO20020140L (no) 2002-03-12
DE60039432D1 (de) 2008-08-21
NO20020140D0 (no) 2002-01-11
ATE400831T1 (de) 2008-07-15
US20020012180A1 (en) 2002-01-31
WO2001004680A1 (en) 2001-01-18
CA2378736A1 (en) 2001-01-18
US6315423B1 (en) 2001-11-13
EP1200865B1 (en) 2008-07-09
AU6091100A (en) 2001-01-30
JP2003527621A (ja) 2003-09-16
EP1200865A4 (en) 2004-04-28
US6454421B2 (en) 2002-09-24
EP1200865A1 (en) 2002-05-02
NO326146B1 (no) 2008-10-06

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Effective date: 20200713