JP2003527621A - マイクロマシン加工ミラー・デバイス - Google Patents

マイクロマシン加工ミラー・デバイス

Info

Publication number
JP2003527621A
JP2003527621A JP2001510032A JP2001510032A JP2003527621A JP 2003527621 A JP2003527621 A JP 2003527621A JP 2001510032 A JP2001510032 A JP 2001510032A JP 2001510032 A JP2001510032 A JP 2001510032A JP 2003527621 A JP2003527621 A JP 2003527621A
Authority
JP
Japan
Prior art keywords
mirror
mirror assembly
mass
microns
stop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001510032A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003527621A5 (enExample
Inventor
ユ，デュリ
ユ，リアンゾーン
ゴールドバーグ，ハワード，ディー．
エー． シュミット，マーティン
ピー． ライド，ロバート
Original Assignee
インプット／アウトプット，インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インプット／アウトプット，インコーポレーテッド filed Critical インプット／アウトプット，インコーポレーテッド
Publication of JP2003527621A publication Critical patent/JP2003527621A/ja
Publication of JP2003527621A5 publication Critical patent/JP2003527621A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
  • Sliding-Contact Bearings (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
JP2001510032A 1999-07-13 2000-07-13 マイクロマシン加工ミラー・デバイス Pending JP2003527621A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/352,835 1999-07-13
US09/352,835 US6315423B1 (en) 1999-07-13 1999-07-13 Micro machined mirror
PCT/US2000/018998 WO2001004680A1 (en) 1999-07-13 2000-07-13 Micro-machined mirror device

Publications (2)

Publication Number Publication Date
JP2003527621A true JP2003527621A (ja) 2003-09-16
JP2003527621A5 JP2003527621A5 (enExample) 2007-08-09

Family

ID=23386711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001510032A Pending JP2003527621A (ja) 1999-07-13 2000-07-13 マイクロマシン加工ミラー・デバイス

Country Status (9)

Country Link
US (2) US6315423B1 (enExample)
EP (1) EP1200865B1 (enExample)
JP (1) JP2003527621A (enExample)
AT (1) ATE400831T1 (enExample)
AU (1) AU6091100A (enExample)
CA (1) CA2378736C (enExample)
DE (1) DE60039432D1 (enExample)
NO (1) NO326146B1 (enExample)
WO (1) WO2001004680A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6720682B2 (en) * 2001-06-14 2004-04-13 Lightbay Networks Corporation Actuator assembly for tilting a mirror or like object
JP2003022414A (ja) * 2001-07-06 2003-01-24 Sony Corp バーコードリーダ
US6844952B2 (en) * 2001-09-18 2005-01-18 Vitesse Semiconductor Corporation Actuator-controlled mirror with Z-stop mechanism
DE60226262T2 (de) * 2001-10-19 2009-05-20 ION Geophysical Corp., Houston Digitale optische schaltvorrichtung und verfahren zu ihrer herstellung
EP1890181B1 (en) 2001-10-19 2012-07-04 ION Geophysical Corporation Digital optical switch apparatus and process for manufacturing same
US7400432B2 (en) * 2002-05-17 2008-07-15 Microvision, Inc. Scanning-mirror structure having a cut or a composite design to reduce deformation of the mirror face, and related system and method
CA2429508C (en) * 2002-05-28 2013-01-08 Jds Uniphase Inc. Piano mems micromirror
US7167613B2 (en) * 2002-05-28 2007-01-23 Jds Uniphase Inc. Interlaced array of piano MEMs micromirrors
US7110637B2 (en) * 2002-05-28 2006-09-19 Jds Uniphase Inc. Two-step electrode for MEMs micromirrors
US7302131B2 (en) * 2002-05-28 2007-11-27 Jds Uniphase Inc. Sunken electrode configuration for MEMs Micromirror
JP3987382B2 (ja) * 2002-06-11 2007-10-10 富士通株式会社 マイクロミラー素子およびその製造方法
US6641273B1 (en) 2002-06-28 2003-11-04 Glimmerglass Networks, Inc. MEMS structure with mechanical overdeflection limiter
US20040160118A1 (en) 2002-11-08 2004-08-19 Knollenberg Clifford F. Actuator apparatus and method for improved deflection characteristics
US7019434B2 (en) * 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
US7095546B2 (en) * 2003-04-24 2006-08-22 Metconnex Canada Inc. Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
DE602004026804D1 (de) 2003-05-23 2010-06-10 Jds Uniphase Inc Elektrodenkonfiguration für kippbaren MEMS Mikrospiegel
US7089666B2 (en) * 2003-06-06 2006-08-15 The Regents Of The University Of California Microfabricated vertical comb actuator using plastic deformation
US20080197748A1 (en) * 2003-07-28 2008-08-21 Technion Research And Development Foundation Ltd. Vertical Comb Drive and Uses Thereof
US20050093818A1 (en) * 2003-11-05 2005-05-05 Lightbay Networks Corporation Dynamic laser projection display
US8537204B2 (en) * 2004-07-08 2013-09-17 Gyoung Il Cho 3D television broadcasting system
US7580178B2 (en) * 2004-02-13 2009-08-25 Angstrom, Inc. Image-guided microsurgery system and method
US7350922B2 (en) * 2004-02-13 2008-04-01 Angstrom, Inc. Three-dimensional display using variable focal length micromirror array lens
US7382516B2 (en) * 2004-06-18 2008-06-03 Angstrom, Inc. Discretely controlled micromirror with multi-level positions
US7898144B2 (en) * 2006-02-04 2011-03-01 Angstrom, Inc. Multi-step microactuator providing multi-step displacement to a controlled object
US7474454B2 (en) * 2004-06-18 2009-01-06 Angstrom, Inc. Programmable micromirror motion control system
US7330297B2 (en) * 2005-03-04 2008-02-12 Angstrom, Inc Fine control of rotation and translation of discretely controlled micromirror
US7751694B2 (en) * 2004-02-13 2010-07-06 Angstrom, Inc. Three-dimensional endoscope imaging and display system
US7768571B2 (en) * 2004-03-22 2010-08-03 Angstrom, Inc. Optical tracking system using variable focal length lens
US7410266B2 (en) * 2004-03-22 2008-08-12 Angstrom, Inc. Three-dimensional imaging system for robot vision
US7339746B2 (en) * 2004-03-22 2008-03-04 Angstrom, Inc. Small and fast zoom system using micromirror array lens
US20070115261A1 (en) * 2005-11-23 2007-05-24 Stereo Display, Inc. Virtual Keyboard input system using three-dimensional motion detection by variable focal length lens
US20070040924A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Cellular phone camera with three-dimensional imaging function
US8049776B2 (en) * 2004-04-12 2011-11-01 Angstrom, Inc. Three-dimensional camcorder
US7619614B2 (en) * 2004-04-12 2009-11-17 Angstrom, Inc. Three-dimensional optical mouse system
US7742232B2 (en) * 2004-04-12 2010-06-22 Angstrom, Inc. Three-dimensional imaging system
US7777959B2 (en) * 2004-05-27 2010-08-17 Angstrom, Inc. Micromirror array lens with fixed focal length
US7667896B2 (en) 2004-05-27 2010-02-23 Angstrom, Inc. DVD recording and reproducing system
US7354167B2 (en) 2004-05-27 2008-04-08 Angstrom, Inc. Beam focusing and scanning system using micromirror array lens
US7619807B2 (en) 2004-11-08 2009-11-17 Angstrom, Inc. Micromirror array lens with optical surface profiles
US7489434B2 (en) 2007-05-02 2009-02-10 Angstrom, Inc. Hybrid micromirror array lens for reducing chromatic aberration
US7232701B2 (en) * 2005-01-04 2007-06-19 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
EP1835324A4 (en) 2005-01-05 2010-02-17 Nippon Telegraph & Telephone MIRROR DEVICE, MIRROR ARRANGEMENT, OPTICAL SWITCH, METHOD FOR MIRROR MANUFACTURE AND METHOD FOR PRODUCING A MIRROR SUBSTRATE
CA2536722A1 (en) * 2005-02-16 2006-08-16 Jds Uniphase Inc. Articulated mems structures
US20060198011A1 (en) * 2005-03-04 2006-09-07 Stereo Display, Inc. Volumetric three-dimensional device using two-dimensional scanning device
US20060203117A1 (en) * 2005-03-10 2006-09-14 Stereo Display, Inc. Video monitoring system using variable focal length lens
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US20070041077A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Pocket-sized two-dimensional image projection system
US7725027B2 (en) * 2006-04-06 2010-05-25 Jds Uniphase Corporation Multi-unit wavelength dispersive device
US9736346B2 (en) 2006-05-09 2017-08-15 Stereo Display, Inc Imaging system improving image resolution of the system with low resolution image sensor
US7784933B2 (en) * 2006-06-29 2010-08-31 Lexmark International, Inc. Smart projector guides for handprinters
US20080022771A1 (en) * 2006-07-28 2008-01-31 Alexander Wolter Micromechanical component
CN101121498B (zh) * 2006-08-07 2011-01-26 探微科技股份有限公司 制作微扭转轴的方法
US7365899B2 (en) * 2006-08-10 2008-04-29 Angstrom, Inc. Micromirror with multi-axis rotation and translation
US7589884B2 (en) * 2006-09-22 2009-09-15 Angstrom, Inc. Micromirror array lens with encapsulation of reflective metal layer and method of making the same
US7589885B2 (en) * 2006-09-22 2009-09-15 Angstrom, Inc. Micromirror array device comprising encapsulated reflective metal layer and method of making the same
JP4919750B2 (ja) 2006-09-27 2012-04-18 富士通株式会社 マイクロ構造体製造方法およびマイクロ構造体
US7488082B2 (en) 2006-12-12 2009-02-10 Angstrom, Inc. Discretely controlled micromirror array device with segmented electrodes
DE102007002725A1 (de) * 2007-01-18 2008-07-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente
US7535618B2 (en) * 2007-03-12 2009-05-19 Angstrom, Inc. Discretely controlled micromirror device having multiple motions
US9505606B2 (en) 2007-06-13 2016-11-29 Angstrom, Inc. MEMS actuator with discretely controlled multiple motions
US7605988B2 (en) 2007-07-23 2009-10-20 Angstrom, Inc. Compact image taking lens system with a lens-surfaced prism
US7589916B2 (en) 2007-08-10 2009-09-15 Angstrom, Inc. Micromirror array with iris function
US20090185067A1 (en) * 2007-12-21 2009-07-23 Stereo Display, Inc. Compact automatic focusing camera
US8810908B2 (en) 2008-03-18 2014-08-19 Stereo Display, Inc. Binoculars with micromirror array lenses
US20090303569A1 (en) * 2008-05-20 2009-12-10 Stereo Didplay, Inc. Self-tilted micromirror device
US8622557B2 (en) 2008-05-20 2014-01-07 Stereo Display, Inc. Micromirror array lens with self-tilted micromirrors
US20110188104A1 (en) * 2008-06-25 2011-08-04 Panasonic Electric Works Co., Ltd. Moving structure and light scanning mirror using the same
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
JP5577742B2 (ja) * 2010-02-23 2014-08-27 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
ITTO20130031A1 (it) 2013-01-14 2014-07-15 St Microelectronics Srl Struttura micromeccanica di specchio e relativo procedimento di fabbricazione
JP6343994B2 (ja) * 2014-03-25 2018-06-20 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
DE102017206252A1 (de) * 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57183515U (enExample) * 1981-05-18 1982-11-20
JPH03287222A (ja) * 1990-04-03 1991-12-17 Ricoh Co Ltd トラッキングミラーアクチュエータ装置
JPH07230052A (ja) * 1993-12-22 1995-08-29 Omron Corp 光スキャナ及び光走査装置並びに当該光走査装置を用いた光センサ装置、符号情報読み取り装置及びｐｏｓシステム
JPH08211320A (ja) * 1994-11-10 1996-08-20 Toshiba Corp ガルバノミラー及びそれを用いた光ディスク装置
EP0731417A2 (en) * 1995-02-27 1996-09-11 Symbol Technologies, Inc. Scan module for optical scanner
JPH08327927A (ja) * 1995-04-25 1996-12-13 Omron Corp 光走査装置
JPH1062709A (ja) * 1996-08-13 1998-03-06 Toshiba Corp ガルバノミラー装置およびこれを用いた光ディスク装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5245464A (en) * 1988-08-12 1993-09-14 Laser Scan Vision Aps Deflecting instrument, controllable reflecting device herefor and use hereof
US5966230A (en) 1990-05-29 1999-10-12 Symbol Technologies, Inc. Integrated scanner on a common substrate
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6044705A (en) 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US6059188A (en) 1993-10-25 2000-05-09 Symbol Technologies Packaged mirror including mirror travel stops
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5999303A (en) * 1997-03-24 1999-12-07 Seagate Technology Inc. Micro-machined mirror using tethered elements
US6128122A (en) * 1998-09-18 2000-10-03 Seagate Technology, Inc. Micromachined mirror with stretchable restoring force member
WO1998044571A1 (en) * 1997-04-01 1998-10-08 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators
US6617098B1 (en) * 1999-07-13 2003-09-09 Input/Output, Inc. Merged-mask micro-machining process

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57183515U (enExample) * 1981-05-18 1982-11-20
JPH03287222A (ja) * 1990-04-03 1991-12-17 Ricoh Co Ltd トラッキングミラーアクチュエータ装置
JPH07230052A (ja) * 1993-12-22 1995-08-29 Omron Corp 光スキャナ及び光走査装置並びに当該光走査装置を用いた光センサ装置、符号情報読み取り装置及びｐｏｓシステム
JPH08211320A (ja) * 1994-11-10 1996-08-20 Toshiba Corp ガルバノミラー及びそれを用いた光ディスク装置
EP0731417A2 (en) * 1995-02-27 1996-09-11 Symbol Technologies, Inc. Scan module for optical scanner
JPH08327927A (ja) * 1995-04-25 1996-12-13 Omron Corp 光走査装置
JPH1062709A (ja) * 1996-08-13 1998-03-06 Toshiba Corp ガルバノミラー装置およびこれを用いた光ディスク装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子

Also Published As

Publication number Publication date
NO20020140L (no) 2002-03-12
DE60039432D1 (de) 2008-08-21
NO20020140D0 (no) 2002-01-11
ATE400831T1 (de) 2008-07-15
US20020012180A1 (en) 2002-01-31
WO2001004680A1 (en) 2001-01-18
CA2378736A1 (en) 2001-01-18
US6315423B1 (en) 2001-11-13
EP1200865B1 (en) 2008-07-09
AU6091100A (en) 2001-01-30
EP1200865A4 (en) 2004-04-28
US6454421B2 (en) 2002-09-24
CA2378736C (en) 2010-03-23
EP1200865A1 (en) 2002-05-02
NO326146B1 (no) 2008-10-06

Similar Documents

Publication Publication Date Title
JP2003527621A (ja) マイクロマシン加工ミラー・デバイス
US6201629B1 (en) Torsional micro-mechanical mirror system
JP3011144B2 (ja) 光スキャナとその駆動方法
CN109425981B (zh) 微机电反射器系统
CN109782431A (zh) 具有中央支撑件的微机电反射器
US20230244076A1 (en) Glass-substrate-based mems mirror device and method for its production
KR20080050131A (ko) 2차원 마이크로 광스캐너
US7372603B2 (en) Mirror package scanning apparatus and method
US7750767B2 (en) Micro electro mechanical system device
JPH04211217A (ja) 光偏向子
JP2001075042A (ja) 光偏向器
KR20060124079A (ko) 스캐닝 마이크로미러 및 전자력 구동 2축 스캐닝마이크로미러 디바이스
CN103250027B (zh) 用于产生标准光平面的锥透镜系统/盖罩系统的优化
JP2012026935A (ja) センサ装置
JPH08254664A (ja) 光学装置、光スキャン装置、加速度検出装置、圧力検出装置、及び画像検出装置
WO2023053840A1 (ja) 光走査装置
JP2012027338A (ja) 光ビーム走査装置およびそれを用いたセンサ装置
JP2012027336A (ja) センサ装置
CN110941083B (zh) 一种振镜和激光雷达
TW202519931A (zh) 具有雙軸平衡環架結構之掃描鏡
JPH11337860A (ja) 光スキャナ
CN218099782U (zh) 微机电反射镜器件和微型投影仪设备
JP7608909B2 (ja) 可動装置、偏向装置、物体認識装置、画像投影装置、及び移動体
EP4446794B1 (en) Two-axis mems mirror
WO2023176561A1 (ja) 光偏向装置及び測距装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070618

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070618

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100811

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100810

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20101111

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20101118

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110214

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20110214

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110920

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20111220

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20111228

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20121225