NO319039B1 - Sammensetning for optisk polering - Google Patents
Sammensetning for optisk polering Download PDFInfo
- Publication number
- NO319039B1 NO319039B1 NO20004122A NO20004122A NO319039B1 NO 319039 B1 NO319039 B1 NO 319039B1 NO 20004122 A NO20004122 A NO 20004122A NO 20004122 A NO20004122 A NO 20004122A NO 319039 B1 NO319039 B1 NO 319039B1
- Authority
- NO
- Norway
- Prior art keywords
- cerium oxide
- polishing
- particle size
- slurry
- microns
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims description 38
- 239000000203 mixture Substances 0.000 title claims description 35
- 230000003287 optical effect Effects 0.000 title claims description 10
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 41
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 41
- 239000002245 particle Substances 0.000 claims description 41
- 239000002002 slurry Substances 0.000 claims description 23
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 18
- 239000007787 solid Substances 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 3
- 239000008186 active pharmaceutical agent Substances 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 229910052684 Cerium Inorganic materials 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000012612 commercial material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- LVTJOONKWUXEFR-FZRMHRINSA-N protoneodioscin Natural products O(C[C@@H](CC[C@]1(O)[C@H](C)[C@@H]2[C@]3(C)[C@H]([C@H]4[C@@H]([C@]5(C)C(=CC4)C[C@@H](O[C@@H]4[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@@H](O)[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@H](CO)O4)CC5)CC3)C[C@@H]2O1)C)[C@H]1[C@H](O)[C@H](O)[C@H](O)[C@@H](CO)O1 LVTJOONKWUXEFR-FZRMHRINSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229910001954 samarium oxide Inorganic materials 0.000 description 1
- 229940075630 samarium oxide Drugs 0.000 description 1
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less
- Y10S977/775—Nanosized powder or flake, e.g. nanosized catalyst
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less
- Y10S977/775—Nanosized powder or flake, e.g. nanosized catalyst
- Y10S977/776—Ceramic powder or flake
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/025,730 US5989301A (en) | 1998-02-18 | 1998-02-18 | Optical polishing formulation |
| PCT/US1999/003143 WO1999042537A1 (en) | 1998-02-18 | 1999-02-16 | Optical polishing formulation |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO20004122L NO20004122L (no) | 2000-08-17 |
| NO20004122D0 NO20004122D0 (no) | 2000-08-17 |
| NO319039B1 true NO319039B1 (no) | 2005-06-06 |
Family
ID=21827759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20004122A NO319039B1 (no) | 1998-02-18 | 2000-08-17 | Sammensetning for optisk polering |
Country Status (28)
| Country | Link |
|---|---|
| US (2) | US5989301A (zh) |
| EP (1) | EP1060221B1 (zh) |
| JP (1) | JP3605036B2 (zh) |
| KR (1) | KR100354202B1 (zh) |
| CN (1) | CN1187426C (zh) |
| AR (1) | AR014959A1 (zh) |
| AT (1) | ATE245180T1 (zh) |
| AU (1) | AU729245B2 (zh) |
| BR (1) | BR9908020B1 (zh) |
| CA (1) | CA2319107C (zh) |
| CO (1) | CO5060536A1 (zh) |
| CZ (1) | CZ294042B6 (zh) |
| DE (1) | DE69909597T2 (zh) |
| DK (1) | DK1060221T3 (zh) |
| ES (1) | ES2204107T3 (zh) |
| FI (1) | FI118180B (zh) |
| HU (1) | HUP0101154A3 (zh) |
| IL (1) | IL137804A0 (zh) |
| MY (1) | MY123257A (zh) |
| NO (1) | NO319039B1 (zh) |
| NZ (1) | NZ505901A (zh) |
| PL (1) | PL186840B1 (zh) |
| PT (1) | PT1060221E (zh) |
| RU (1) | RU2181132C1 (zh) |
| SK (1) | SK285219B6 (zh) |
| TW (1) | TWI239995B (zh) |
| WO (1) | WO1999042537A1 (zh) |
| ZA (1) | ZA991150B (zh) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6839362B2 (en) * | 2001-05-22 | 2005-01-04 | Saint-Gobain Ceramics & Plastics, Inc. | Cobalt-doped saturable absorber Q-switches and laser systems |
| US20030092271A1 (en) * | 2001-09-13 | 2003-05-15 | Nyacol Nano Technologies, Inc. | Shallow trench isolation polishing using mixed abrasive slurries |
| US6896591B2 (en) * | 2003-02-11 | 2005-05-24 | Cabot Microelectronics Corporation | Mixed-abrasive polishing composition and method for using the same |
| US7326477B2 (en) * | 2003-09-23 | 2008-02-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel boules, wafers, and methods for fabricating same |
| US20050061230A1 (en) * | 2003-09-23 | 2005-03-24 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
| US7045223B2 (en) * | 2003-09-23 | 2006-05-16 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
| US7919815B1 (en) | 2005-02-24 | 2011-04-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel wafers and methods of preparation |
| US7294044B2 (en) * | 2005-04-08 | 2007-11-13 | Ferro Corporation | Slurry composition and method for polishing organic polymer-based ophthalmic substrates |
| PT2094443E (pt) * | 2006-12-19 | 2014-04-02 | Saint Gobain Ceramics | Abrasivos ligados a alta temperatura com alfa alumina submicrónoca |
| KR20110019427A (ko) | 2008-06-23 | 2011-02-25 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 고공극율 유리질 초연마 제품들 및 그 제조 방법 |
| MX2011008068A (es) * | 2009-01-30 | 2011-12-16 | Pcw Holdings Llc | Composiciones y metodos para restaurar cubiertas y lentes de plastico. |
| WO2011056671A2 (en) | 2009-10-27 | 2011-05-12 | Saint-Gobain Abrasives, Inc. | Resin bonded abrasive |
| KR20150038627A (ko) | 2009-10-27 | 2015-04-08 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 유리질본드 연마재 |
| RU2608890C2 (ru) * | 2010-09-08 | 2017-01-26 | Басф Се | Водные полирующие композиции, содержащие n-замещенные диазений диоксиды и/или соли n -замещенных n'-гидрокси-диазений оксидов |
| RU2013135445A (ru) | 2010-12-31 | 2015-02-10 | Сэнт-Гобэн Керамикс Энд Пластикс, Инк. | Абразивное изделие (варианты) и способ его формования |
| TWI605112B (zh) * | 2011-02-21 | 2017-11-11 | Fujimi Inc | 研磨用組成物 |
| EP2726248B1 (en) | 2011-06-30 | 2019-06-19 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| CN108262695A (zh) | 2011-06-30 | 2018-07-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| US9517546B2 (en) | 2011-09-26 | 2016-12-13 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| WO2013049526A2 (en) | 2011-09-29 | 2013-04-04 | Saint-Gobain Abrasives, Inc. | Abrasive products and methods for finishing hard surfaces |
| KR20140106737A (ko) | 2011-12-30 | 2014-09-03 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자들 형성 |
| WO2013102170A1 (en) | 2011-12-30 | 2013-07-04 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9266220B2 (en) | 2011-12-30 | 2016-02-23 | Saint-Gobain Abrasives, Inc. | Abrasive articles and method of forming same |
| EP2797715A4 (en) | 2011-12-30 | 2016-04-20 | Saint Gobain Ceramics | SHAPED ABRASIVE PARTICLE AND METHOD OF FORMING THE SAME |
| WO2013106597A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having complex shapes and methods of forming same |
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| US9321947B2 (en) | 2012-01-10 | 2016-04-26 | Saint-Gobain Abrasives, Inc. | Abrasive products and methods for finishing coated surfaces |
| RU2595788C2 (ru) | 2012-03-16 | 2016-08-27 | Сэнт-Гобэн Эбрейзивс, Инк. | Абразивные продукты и способы чистовой обработки поверхностей |
| US8968435B2 (en) | 2012-03-30 | 2015-03-03 | Saint-Gobain Abrasives, Inc. | Abrasive products and methods for fine polishing of ophthalmic lenses |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| WO2013177446A1 (en) | 2012-05-23 | 2013-11-28 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| EP2866977B8 (en) | 2012-06-29 | 2023-01-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| EP2906392A4 (en) | 2012-10-15 | 2016-07-13 | Saint Gobain Abrasives Inc | GRINDING PARTICLES WITH SPECIAL FORMS AND METHOD FOR FORMING SUCH PARTICLES |
| WO2014106173A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| PL2978566T3 (pl) | 2013-03-29 | 2024-07-15 | Saint-Gobain Abrasives, Inc. | Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| RU2643004C2 (ru) | 2013-09-30 | 2018-01-29 | Сен-Гобен Серэмикс Энд Пластикс, Инк. | Формованные абразивные частицы и способы их получения |
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| EP3131705A4 (en) | 2014-04-14 | 2017-12-06 | Saint-Gobain Ceramics and Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| US10196551B2 (en) | 2015-03-31 | 2019-02-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| CA2988012C (en) | 2015-06-11 | 2021-06-29 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| EP4071224A3 (en) | 2016-05-10 | 2023-01-04 | Saint-Gobain Ceramics and Plastics, Inc. | Methods of forming abrasive articles |
| EP3455320A4 (en) | 2016-05-10 | 2019-11-20 | Saint-Gobain Ceramics&Plastics, Inc. | GRINDING PARTICLES AND METHOD FOR FORMING THEREOF |
| US11230653B2 (en) | 2016-09-29 | 2022-01-25 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10865148B2 (en) | 2017-06-21 | 2020-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US11865663B2 (en) * | 2018-05-10 | 2024-01-09 | George Shuai | Optical surface polishing |
| CN109439282A (zh) * | 2018-10-23 | 2019-03-08 | 蓝思科技（长沙）有限公司 | 复合纳米磨料、抛光液及其制备方法、玻璃晶片和电子设备 |
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| CN110724460A (zh) * | 2019-11-13 | 2020-01-24 | 刘通 | 一种铈铝复合氧化物抛光粉的制备方法 |
| EP4081369A4 (en) | 2019-12-27 | 2024-04-10 | Saint-Gobain Ceramics & Plastics Inc. | GRINDING ARTICLES AND METHODS OF FORMING SAME |
| CN113881348A (zh) * | 2021-11-04 | 2022-01-04 | 青岛福禄泰科表面材料科技有限公司 | 一种复合氧化铝抛光液及其制备方法和应用 |
| CN114213977A (zh) * | 2021-12-23 | 2022-03-22 | 中天科技精密材料有限公司 | 抛光剂及其制备方法 |
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|---|---|---|---|---|
| US3429080A (en) * | 1966-05-02 | 1969-02-25 | Tizon Chem Corp | Composition for polishing crystalline silicon and germanium and process |
| GB1501570A (en) * | 1975-11-11 | 1978-02-15 | Showa Denko Kk | Abrader for mirror polishing of glass and method for mirror polishing |
| US4161394A (en) * | 1978-06-19 | 1979-07-17 | Regan Glen B | Polishing slurry of xanthan gum and a dispersing agent |
| FR2549846B1 (fr) * | 1983-07-29 | 1986-12-26 | Rhone Poulenc Spec Chim | Nouvelle composition de polissage a base de cerium et son procede de fabrication |
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-
1998
- 1998-02-18 US US09/025,730 patent/US5989301A/en not_active Expired - Lifetime
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1999
- 1999-02-12 MY MYPI99000512A patent/MY123257A/en unknown
- 1999-02-12 ZA ZA9901150A patent/ZA991150B/xx unknown
- 1999-02-15 CO CO99008983A patent/CO5060536A1/es unknown
- 1999-02-16 WO PCT/US1999/003143 patent/WO1999042537A1/en active IP Right Grant
- 1999-02-16 CA CA002319107A patent/CA2319107C/en not_active Expired - Fee Related
- 1999-02-16 AU AU26777/99A patent/AU729245B2/en not_active Ceased
- 1999-02-16 CN CNB998028681A patent/CN1187426C/zh not_active Expired - Fee Related
- 1999-02-16 BR BRPI9908020-6A patent/BR9908020B1/pt not_active IP Right Cessation
- 1999-02-16 HU HU0101154A patent/HUP0101154A3/hu unknown
- 1999-02-16 NZ NZ505901A patent/NZ505901A/en unknown
- 1999-02-16 ES ES99907002T patent/ES2204107T3/es not_active Expired - Lifetime
- 1999-02-16 DE DE69909597T patent/DE69909597T2/de not_active Expired - Lifetime
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- 1999-02-16 KR KR1020007009035A patent/KR100354202B1/ko not_active IP Right Cessation
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