NO20080334L - Metode for a fremstille en kapasitiv akselerasjonssensor, og kapasitiv akselerasjonssensor - Google Patents

Metode for a fremstille en kapasitiv akselerasjonssensor, og kapasitiv akselerasjonssensor

Info

Publication number
NO20080334L
NO20080334L NO20080334A NO20080334A NO20080334L NO 20080334 L NO20080334 L NO 20080334L NO 20080334 A NO20080334 A NO 20080334A NO 20080334 A NO20080334 A NO 20080334A NO 20080334 L NO20080334 L NO 20080334L
Authority
NO
Norway
Prior art keywords
acceleration sensor
capacitive acceleration
capacitive
producing
acceleration
Prior art date
Application number
NO20080334A
Other languages
English (en)
Norwegian (no)
Inventor
Heikki Kuisma
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of NO20080334L publication Critical patent/NO20080334L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
NO20080334A 2005-06-17 2008-01-16 Metode for a fremstille en kapasitiv akselerasjonssensor, og kapasitiv akselerasjonssensor NO20080334L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20055323A FI119299B (fi) 2005-06-17 2005-06-17 Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
PCT/FI2006/050257 WO2006134232A1 (en) 2005-06-17 2006-06-13 Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor

Publications (1)

Publication Number Publication Date
NO20080334L true NO20080334L (no) 2008-03-14

Family

ID=34778459

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20080334A NO20080334L (no) 2005-06-17 2008-01-16 Metode for a fremstille en kapasitiv akselerasjonssensor, og kapasitiv akselerasjonssensor

Country Status (10)

Country Link
US (1) US7426863B2 (zh)
EP (1) EP1891450B1 (zh)
JP (1) JP5215847B2 (zh)
KR (1) KR101286028B1 (zh)
CN (2) CN101198874A (zh)
CA (1) CA2610185A1 (zh)
FI (1) FI119299B (zh)
IL (1) IL187938A0 (zh)
NO (1) NO20080334L (zh)
WO (1) WO2006134232A1 (zh)

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Also Published As

Publication number Publication date
FI20055323A (fi) 2007-03-05
JP2008544243A (ja) 2008-12-04
JP5215847B2 (ja) 2013-06-19
IL187938A0 (en) 2008-03-20
CN103823082A (zh) 2014-05-28
EP1891450A1 (en) 2008-02-27
EP1891450A4 (en) 2011-07-27
WO2006134232A1 (en) 2006-12-21
FI20055323A0 (fi) 2005-06-17
KR20080031283A (ko) 2008-04-08
US20070000323A1 (en) 2007-01-04
KR101286028B1 (ko) 2013-07-18
CN101198874A (zh) 2008-06-11
FI119299B (fi) 2008-09-30
CN103823082B (zh) 2017-11-10
EP1891450B1 (en) 2013-08-14
CA2610185A1 (en) 2006-12-21
US7426863B2 (en) 2008-09-23

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