NL1024805A1 - Optische inrichting voor gebruik bij een lithografiewerkwijze, in het bijzonder voor de productie van een halfgeleiderinrichting, en optische lithografiewerkwijze. - Google Patents

Optische inrichting voor gebruik bij een lithografiewerkwijze, in het bijzonder voor de productie van een halfgeleiderinrichting, en optische lithografiewerkwijze.

Info

Publication number
NL1024805A1
NL1024805A1 NL1024805A NL1024805A NL1024805A1 NL 1024805 A1 NL1024805 A1 NL 1024805A1 NL 1024805 A NL1024805 A NL 1024805A NL 1024805 A NL1024805 A NL 1024805A NL 1024805 A1 NL1024805 A1 NL 1024805A1
Authority
NL
Netherlands
Prior art keywords
lithography method
optical
production
semiconductor device
optical device
Prior art date
Application number
NL1024805A
Other languages
English (en)
Other versions
NL1024805C2 (nl
Inventor
Michael Sebald
Ernst-Christian Richter
Original Assignee
Infineon Technologies Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag filed Critical Infineon Technologies Ag
Publication of NL1024805A1 publication Critical patent/NL1024805A1/nl
Application granted granted Critical
Publication of NL1024805C2 publication Critical patent/NL1024805C2/nl

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
NL1024805A 2002-11-18 2003-11-18 Optische inrichting voor gebruik bij een lithografiewerkwijze, in het bijzonder voor de productie van een halfgeleiderinrichting, en optische lithografiewerkwijze. NL1024805C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10253679A DE10253679A1 (de) 2002-11-18 2002-11-18 Optische Einrichtung zur Verwendung bei einem Lithographie-Verfahren, insbesondere zur Herstellung eines Halbleiter-Bauelements, sowie optisches Lithographieverfahren
DE10253679 2002-11-18

Publications (2)

Publication Number Publication Date
NL1024805A1 true NL1024805A1 (nl) 2004-09-14
NL1024805C2 NL1024805C2 (nl) 2006-06-02

Family

ID=32240129

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1024805A NL1024805C2 (nl) 2002-11-18 2003-11-18 Optische inrichting voor gebruik bij een lithografiewerkwijze, in het bijzonder voor de productie van een halfgeleiderinrichting, en optische lithografiewerkwijze.

Country Status (4)

Country Link
US (1) US20040169834A1 (nl)
JP (1) JP2004289118A (nl)
DE (1) DE10253679A1 (nl)
NL (1) NL1024805C2 (nl)

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Also Published As

Publication number Publication date
NL1024805C2 (nl) 2006-06-02
US20040169834A1 (en) 2004-09-02
JP2004289118A (ja) 2004-10-14
DE10253679A1 (de) 2004-06-03

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