NL1008401C2 - Transmissie-elektronenmicroscoop en werkwijze voor het waarnemen van elementverdeling. - Google Patents

Transmissie-elektronenmicroscoop en werkwijze voor het waarnemen van elementverdeling. Download PDF

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Publication number
NL1008401C2
NL1008401C2 NL1008401A NL1008401A NL1008401C2 NL 1008401 C2 NL1008401 C2 NL 1008401C2 NL 1008401 A NL1008401 A NL 1008401A NL 1008401 A NL1008401 A NL 1008401A NL 1008401 C2 NL1008401 C2 NL 1008401C2
Authority
NL
Netherlands
Prior art keywords
image
energy
exposure time
loss electrons
energy region
Prior art date
Application number
NL1008401A
Other languages
English (en)
Dutch (nl)
Other versions
NL1008401A1 (nl
Inventor
Shigeto Isakozawa
Yoshifumi Taniguchi
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL1008401A1 publication Critical patent/NL1008401A1/xx
Application granted granted Critical
Publication of NL1008401C2 publication Critical patent/NL1008401C2/nl

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL1008401A 1997-03-03 1998-02-24 Transmissie-elektronenmicroscoop en werkwijze voor het waarnemen van elementverdeling. NL1008401C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4820297 1997-03-03
JP04820297A JP3439614B2 (ja) 1997-03-03 1997-03-03 透過型電子顕微鏡及び元素分布観察方法

Publications (2)

Publication Number Publication Date
NL1008401A1 NL1008401A1 (nl) 1998-09-07
NL1008401C2 true NL1008401C2 (nl) 2002-09-24

Family

ID=12796808

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1008401A NL1008401C2 (nl) 1997-03-03 1998-02-24 Transmissie-elektronenmicroscoop en werkwijze voor het waarnemen van elementverdeling.

Country Status (4)

Country Link
US (1) US5981948A (de)
JP (1) JP3439614B2 (de)
DE (1) DE19808768C2 (de)
NL (1) NL1008401C2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184524B1 (en) * 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
DE19811395A1 (de) 1998-03-16 1999-09-23 Deutsches Krebsforsch Verfahren zur Kontrastverstärkung für ein Transmissionselektronenmikroskop
US6289235B1 (en) * 1998-03-05 2001-09-11 Wake Forest University Method and system for creating three-dimensional images using tomosynthetic computed tomography
US6744268B2 (en) * 1998-08-27 2004-06-01 The Micromanipulator Company, Inc. High resolution analytical probe station
JP4449573B2 (ja) * 1999-01-04 2010-04-14 株式会社日立製作所 元素マッピング装置，走査透過型電子顕微鏡および元素マッピング方法
JP3687541B2 (ja) * 1999-01-04 2005-08-24 株式会社日立製作所 元素マッピング装置、走査透過型電子顕微鏡および元素マッピング方法
JP3721287B2 (ja) * 1999-09-01 2005-11-30 日本電子株式会社 エネルギ選択スリット幅設定装置
JP4045058B2 (ja) * 1999-11-22 2008-02-13 株式会社日立製作所 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡
JP4006165B2 (ja) * 2000-04-21 2007-11-14 株式会社日立製作所 元素分析装置及び走査透過型電子顕微鏡並びに元素分析方法
WO2003038418A1 (fr) 2001-11-02 2003-05-08 Hitachi, Ltd. Dispositif d'analyses d'elements, microscope electronique a emission par balayage et procede d'analyses d'elements
JP3789104B2 (ja) * 2002-05-13 2006-06-21 株式会社日立ハイテクノロジーズ 元素分布観察方法及び装置
US7157720B2 (en) * 2003-08-01 2007-01-02 Ropintassco Holdings, L.P. Multi-mode charged particle beam device
FR2874124B1 (fr) * 2004-08-04 2006-10-13 Centre Nat Rech Scient Cnrse Dispositif pour l'acquisition d'images et/ou de spectres de pertes d'energie
JP5254046B2 (ja) * 2007-02-16 2013-08-07 富士通株式会社 電子顕微鏡及び観察方法
DE102009055271A1 (de) * 2009-12-23 2011-06-30 Carl Zeiss NTS GmbH, 73447 Verfahren zur Erzeugung einer Darstellung eines Objekts mittels eines Teilchenstrahls sowie Teilchenstrahlgerät zur Durchführung des Verfahrens
JP2012028105A (ja) * 2010-07-22 2012-02-09 Jeol Ltd 分析電子顕微鏡のシャッタ機構
KR101369670B1 (ko) * 2012-06-01 2014-03-06 (주)오로스 테크놀로지 주사 전자 현미경
JP2016091814A (ja) * 2014-11-05 2016-05-23 日本電子株式会社 電子顕微鏡および画像生成方法
US10366862B2 (en) * 2015-09-21 2019-07-30 KLA-Tencor Corporaton Method and system for noise mitigation in a multi-beam scanning electron microscopy system
JP2017143060A (ja) * 2016-01-20 2017-08-17 ガタン インコーポレイテッドＧａｔａｎ，Ｉｎｃ． 直接検出センサを用いる電子エネルギー損失分光器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
DE19546780A1 (de) * 1994-12-16 1996-06-27 Hitachi Ltd Transmissionselektronenmikroskop und Verfahren zum Untersuchen einer Elementeverteilung unter Verwendung desselben

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3435949B2 (ja) * 1994-12-16 2003-08-11 株式会社日立製作所 透過型電子顕微鏡及び元素分布観察方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
DE19546780A1 (de) * 1994-12-16 1996-06-27 Hitachi Ltd Transmissionselektronenmikroskop und Verfahren zum Untersuchen einer Elementeverteilung unter Verwendung desselben

Also Published As

Publication number Publication date
JPH10246709A (ja) 1998-09-14
DE19808768C2 (de) 2002-03-14
DE19808768A1 (de) 1998-09-10
NL1008401A1 (nl) 1998-09-07
JP3439614B2 (ja) 2003-08-25
US5981948A (en) 1999-11-09

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Effective date: 20020723

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