MY150487A - Barrier slurry for low-k dielectrics. - Google Patents

Barrier slurry for low-k dielectrics.

Info

Publication number
MY150487A
MY150487A MYPI20111194A MY150487A MY 150487 A MY150487 A MY 150487A MY PI20111194 A MYPI20111194 A MY PI20111194A MY 150487 A MY150487 A MY 150487A
Authority
MY
Malaysia
Prior art keywords
polishing composition
polishing
dielectrics
low
salt
Prior art date
Application number
Other languages
English (en)
Inventor
Shoutian Li
Grumbine
Jeffrey Dysard
Singh
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of MY150487A publication Critical patent/MY150487A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/403—Chemomechanical polishing [CMP] of conductive or resistive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
MYPI20111194 2008-09-19 2009-09-03 Barrier slurry for low-k dielectrics. MY150487A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9860008P 2008-09-19 2008-09-19

Publications (1)

Publication Number Publication Date
MY150487A true MY150487A (en) 2014-01-30

Family

ID=42038105

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20111194 MY150487A (en) 2008-09-19 2009-09-03 Barrier slurry for low-k dielectrics.

Country Status (9)

Country Link
US (1) US8252687B2 (enExample)
EP (1) EP2356192B1 (enExample)
JP (1) JP5619009B2 (enExample)
KR (1) KR101247890B1 (enExample)
CN (1) CN102159662B (enExample)
IL (1) IL211576A (enExample)
MY (1) MY150487A (enExample)
TW (1) TWI388639B (enExample)
WO (1) WO2010033156A2 (enExample)

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Also Published As

Publication number Publication date
JP2012503329A (ja) 2012-02-02
TWI388639B (zh) 2013-03-11
CN102159662A (zh) 2011-08-17
WO2010033156A2 (en) 2010-03-25
US20100075502A1 (en) 2010-03-25
TW201016807A (en) 2010-05-01
KR101247890B1 (ko) 2013-03-26
EP2356192B1 (en) 2020-01-15
US8252687B2 (en) 2012-08-28
JP5619009B2 (ja) 2014-11-05
WO2010033156A3 (en) 2010-05-20
EP2356192A4 (en) 2013-05-22
CN102159662B (zh) 2014-05-21
IL211576A0 (en) 2011-05-31
IL211576A (en) 2014-05-28
KR20110069107A (ko) 2011-06-22
EP2356192A2 (en) 2011-08-17

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