KR970702504A - 볼록 초미립자면 구조 - Google Patents

볼록 초미립자면 구조

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KR970702504A
KR970702504A KR1019960705880A KR19960705880A KR970702504A KR 970702504 A KR970702504 A KR 970702504A KR 1019960705880 A KR1019960705880 A KR 1019960705880A KR 19960705880 A KR19960705880 A KR 19960705880A KR 970702504 A KR970702504 A KR 970702504A
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light
convex
refractive index
fine
transfer
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KR1019960705880A
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English (en)
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고타로 오노
겐지 스미다
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고타로 오노
와시 고산 가부시키가이샤
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Priority claimed from JP7029222A external-priority patent/JPH08221828A/ja
Priority claimed from JP07261195A external-priority patent/JP3408354B2/ja
Priority claimed from JP11854595A external-priority patent/JPH08314064A/ja
Priority claimed from JP22351695A external-priority patent/JP4030601B2/ja
Priority claimed from JP2235096A external-priority patent/JPH09211842A/ja
Application filed by 고타로 오노, 와시 고산 가부시키가이샤 filed Critical 고타로 오노
Priority claimed from PCT/JP1996/000350 external-priority patent/WO1996025677A1/ja
Publication of KR970702504A publication Critical patent/KR970702504A/ko

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Abstract

본 발명은 렌즈, 태양전지의 채광면, 광디스크 등의 기록담체, 감광필름등의 감광체, 집적회로의 제조장치등에 있어서, 광반사를 경감하고, 또한 채광효과를 향상시키는 볼록 초미립자 면구조에 관한 것으로서, 렌즈 등의 표면 및/또한 계면에 볼록 초미립자면을 형성하는 방법으로, SiO2등에 의해 형성된 굴절율이 연속적으로 변화하는 볼록 초미립자면을 전사한 오목 초미립자면을 전사면으로 가지는 스탬퍼(108)를 이용하여 볼록 초미립자면을 복제하는 것을 특징으로 한다.

Description

볼록 초미립자면 구조
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 렌즈의 단면도.

Claims (25)

  1. 광반사의 경감 및/또는 채광효과의 향상을 위해 SiO2등에 의해 형성된 굴절율이 연속적으로 변화하는 볼록 초미립자면을 전사한 오목 미립자면을 전사면으로 갖는 스탬퍼를 이용하여 복제된 것을 특징으로 하는 볼록 초미립자면 구조.
  2. 청구항 제1항의 면구조를 채광면으로 이용한 것을 특징으로 하는 태양전지.
  3. 청구항 제1항의 면구조를 가지는 것을 특징으로 하는 기록담체.
  4. 청구항 제1항의 면구조를 가진 것을 특징으로 하는 필름, 판 등의 시트부재.
  5. 청구항 제1항의 면구조를 표면, 내부면 또는 계면에 가지는 것을 특징으로 하는 렌즈.
  6. 청구항 제1항의 면구조를 가지는 것을 특징으로 하는 감광 필름, 인화지 등의 감광체.
  7. 청구항 제1항의 상기 면구조를 광원으로부더 레지스트층에 도달하는 광로내에 배치된 복수의 수광면중 적어도 한 면 또는 상기 레지스트층의 표면에 이용한 장치에 의해 제조된 것을 특징으로 하는 집적회로.
  8. 수지렌즈의 표면, 이면 또는 제면중 적어도 한 면에 곡률반경이 15∼150nm인 미세한 오목면 및/또는 볼록면을 형성한 것을 특징으로 하는 안경용 렌즈.
  9. 미세한 오목면 및/또는 볼록면을 스탬퍼를 이용하여 전사 형성하는 것을 특징으로 하는 안경용 렌즈의 제조방법.
  10. 광반사의 경감 및/또는 채광효과의 향상을 위해, SiO2등에 의해 형성된 굴절율이 연속적으로 변화하는 초미립자면을 제1모형으로 한 전사면을 채광기구의 적어도 일부에 설치한 것을 특징으로 하는 태양전지.
  11. 굴절률이 연속적으로 변화하는 초미립자면을 모형으로 한 전사면과, 제2이하의 모형으로 한 전사면을 채광기구중 적어도 일부에 설치한 것을 특징으로 하는 태양진지.
  12. 상기 제1모형 또는 제2이하의 모형을 이용한 전사면에 광변환 소재를 정착시킨 것을 특징으로 하는 태양전지.
  13. 레이져 광선의 입사광 및/또는 그 반사광에 의해 판독할 수 있는 기록을 가진 담체위에 상기 광선의 입자광 및/또는 그 반사광의 파장에 해당하는 레이져 광선의 기록면으로의 도달 효율 및 기록면으로부터의 반사광의 도달효율을 높이기 위한 굴절율이 연속적으로 변화하는 초미립자층을 적어도 일부에 설치하여 이루어진 것을 특징으로 하는 기록담체.
  14. 제13항에 있어서, 초미립자가 SiO2인 것을 특징으로 하는 기록담체.
  15. 제13항에 있어서, 기록담체의 초미립자층을 전사하여 이루어진 층을 가지는 것을 특징으로 하는 기록담체.
  16. 제15항에 있어서, 기록담체의 초미립자층을 전사하여 얻어지는 미세한 오목부에, 이 오목부를 구성하는 물질의 굴절율 보다 작은 굴절율을 가지는 물질을 충전하는 것을 특징으로 하는 기록담체.
  17. 제13항에 있어서, 초미립자층을 전사하여 얻어지는 전사면을 모형으로 하여 반구형상의 미세한 볼록부를 설치하는 것을 특징으로 하는 기록담체.
  18. 초미립자층을 전사하여 얻어지는 전사면을 모형으로 하여 반구형상의 미세한 볼록부를 설치하는 것을 특징으로 하는 투명수지필름 또는 판.
  19. 반사를 경감하여 채광효율을 향상시키기 위해 SiO2등에 의해 형성된 굴절율이 연속적으로 변화하는 초미립자면을 제1모형으로 한 전사면을 빛이 투과하는 물질의 계면중 적어도 한 개의 계면에 형성한 것을 특징으로 하는 감광재료.
  20. 굴절율이 연속적으로 변화하는 초미립자면을 모형으로 한 전사면을 제2이하의 모형으로 한 전사면을 빛이 투과하는 물질의 층의 계면중 적어도 한 개의 계면에 형성한 것을 특징으로 하는 감광재료.
  21. 집적회로를 광학적수법에 의해 작성할 때, 베이스 표면에 구성하는 박막이나 레지스트 등으로 이루어진 적층면 및/또는 조사원으로부터 상기 적층면에 도달하는 광로내에 설치된 마스크, 렌즈 등의 광투과체중 적어도 한 면에 연속적으로 굴절율을 변화시킬 수 있는 15∼50nm의 깊이의 미세한 요철면을 스탬퍼 등의 전사수단을 이용하여 형성하고, 상기 적층면이나 상기 광투과체에서의 조사광이나 투과광의 반사율을 저감시키는 것을 특징으로 하는 제조방법.
  22. 연속적으로 굴절율을 변화시키는 15∼150nm 깊이의 미세한 요철면을 투영노광법을 수단으로 하여 형성하는 것을 특징으로 하는 제조방법.
  23. 청구항 제21항 또는 제22항의 방법을 이용하여 IC 또는 LSI등의 집적회로를 제조하는 것을 특징으로 하는 노광장치.
  24. 청구항 제21항 또는 제22항의 방법에 의해 제조된 것을 특징으로 하는 IC 또는 LSI등의 집적회로.
  25. 청구항 제24항의 집적회로를 이용한 젓을 특징으로 하는 칩.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960705880A 1995-02-17 1996-02-16 볼록 초미립자면 구조 KR970702504A (ko)

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JP7029222A JPH08221828A (ja) 1995-02-17 1995-02-17 低反射面を有する光記録担体
JP95-29222 1995-02-17
JP07261195A JP3408354B2 (ja) 1995-03-30 1995-03-30 太陽電池の製造方法
JP95-72611 1995-03-30
JP11854595A JPH08314064A (ja) 1995-05-17 1995-05-17 光反射防止機能を付与した写真用感光材料
JP95-118545 1995-05-17
JP95-223516 1995-08-31
JP22351695A JP4030601B2 (ja) 1995-08-31 1995-08-31 眼鏡用樹脂レンズの成形用スタンパ
JP2235096A JPH09211842A (ja) 1996-02-08 1996-02-08 光学的手段を用いた電子回路形成における光反射防止方法及びその装置とその製品
JP96-22350 1996-02-08
PCT/JP1996/000350 WO1996025677A1 (fr) 1995-02-17 1996-02-16 Structure de surface convexe d'un grain ultra-fin

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