KR970059318A - 단결정 인상 방법 및 그 실행 장치 - Google Patents
단결정 인상 방법 및 그 실행 장치 Download PDFInfo
- Publication number
- KR970059318A KR970059318A KR1019970000447A KR19970000447A KR970059318A KR 970059318 A KR970059318 A KR 970059318A KR 1019970000447 A KR1019970000447 A KR 1019970000447A KR 19970000447 A KR19970000447 A KR 19970000447A KR 970059318 A KR970059318 A KR 970059318A
- Authority
- KR
- South Korea
- Prior art keywords
- raw material
- crucible
- airtight container
- pulling method
- suspended
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
- C30B15/12—Double crucible methods
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1056—Seed pulling including details of precursor replenishment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
본 발명은 기밀용기와 상호 연통된 외부 도가니 및 내부 도가니를 구비하고 기밀 용기 내부에 있으며 반도체 용융물을 저장하는 이중 도가니와, 기밀 용기의 상부로부터 현수되고 입상 또는 분상 원료가 하단부 개구로부터 외부 도가니 내의 반도체 용융물로 첨가될 수 있도록 위치된 원료 공급관을 포함하며, 원료는 격납된 용기를 향해 유동하는 불활성 가스와 함께 원료 공급관 내로 투입되는 단결정 인상 방법에 있어서, 원료는 불활성 가스의 유량[N(ℓ/min·㎠)]이 0.0048P+0.0264〈N〈0.07P[여기서, P(Torr)는 기밀 용기 내압이다]의 범위 내에 있는 조건 하에서 투입되는 것을 특징으로 하는 단결정 인상 방법이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일 실시예에 채용된 단결정 인상 장치를 도시한 도면.
Claims (3)
- 기밀 용기와, 상호 연통된 외부 도가니 및 내부 도가니를 구비하고 기밀 용기 내부에 있으며 반도체 응용물을 저장하는 이중 도가니와, 기밀 용기의 상부로부터 현수되고 입상 또는 분상 원료가 하단부 개구로부터외부 도가니 내의 반도체 용융물로 첨가될 수 있도록 위치된 원료 공급관을 포함하며, 원료는 격납된 용기를 향해 유동하는 불활성 가스와 함께 원료 공급관 내로 투입되는 단결정 인상 방법에 있어서, 원료는 불활성 가스의 유량 [N(ℓ/min·㎠)]이 0.0048P+0.0264〈N〈0.07P[여기서, P(Torr)는 기밀 용기 내압이다]의 범위 내에 있는 조건 하에서 투입되는 것을 특징으로 하는 단결정 인상 방법이다.
- 기밀 용기와, 상호 연통된 외부 도가니 및 내부 도가니를 구비하고 기밀 용기 내부에 있으며 반도체 응용물을 저장하는 이중 도가니와, 기밀 용기의 상부로부터 현수되고 입상 또는 분상 원료가 하단부 개구로부터 내부 도가니와 외부 도가니 사이의 반도체 용융물로 구역으로 첨가될 수 있도록 위치된 원료 공급관을 포함하는단결절 인상 방법에 있어서, 원료가 공급되는 부분의 온도 (Tm)가 Ts+50〈Tm〈Ts+100[여기서, Ts(℃)는 고체-액체 경계 온도]의 범위 내에 있는 조건 하에서,외부 도가니와 내부 도가니 사이의 구역에 저장된 반도체 용융물 중량(W(㎏)]은 W850.3K - 5[여기서, K8520이며, K(g/min)는 원료 공급관으로부터 공급된 원료량이다]의 범위 내에 있는 것을 특징으로 하는 단결정 인상 방법.
- 제1항 또는 제2항에 따른 단결 인상 방법을 실행하는 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP96-003377 | 1996-01-11 | ||
JP00337796A JP3750172B2 (ja) | 1996-01-11 | 1996-01-11 | 単結晶引上方法 |
JP8004407A JPH09194287A (ja) | 1996-01-12 | 1996-01-12 | 単結晶引上装置 |
JP96-004407 | 1996-01-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970059318A true KR970059318A (ko) | 1997-08-12 |
KR100441357B1 KR100441357B1 (ko) | 2004-09-18 |
Family
ID=26336948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019970000447A KR100441357B1 (ko) | 1996-01-11 | 1997-01-10 | 단결정인상방법및그실행장치 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5891245A (ko) |
KR (1) | KR100441357B1 (ko) |
CN (1) | CN1138878C (ko) |
DE (1) | DE19700498B4 (ko) |
TW (1) | TW440613B (ko) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003038161A1 (en) * | 2001-11-01 | 2003-05-08 | Midwest Research Institute | Shallow melt apparatus for semicontinuous czochralski crystal growth |
US6984263B2 (en) * | 2001-11-01 | 2006-01-10 | Midwest Research Institute | Shallow melt apparatus for semicontinuous czochralski crystal growth |
US8021483B2 (en) * | 2002-02-20 | 2011-09-20 | Hemlock Semiconductor Corporation | Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods |
DE10339402B4 (de) * | 2003-08-27 | 2011-02-24 | Crystal Growing Systems Gmbh | Schmelzvorrichtung mit einem Schmelztiegel sowie Verfahren zum Zuführen von Granulat in eine im Schmelztiegel vorhandene Schmelze |
US7862656B2 (en) * | 2007-07-03 | 2011-01-04 | Siemens Medical Solutions Usa, Inc. | Apparatus and method for growing a crystal and heating an annular channel circumscribing the crystal |
TW201012978A (en) * | 2008-08-27 | 2010-04-01 | Bp Corp North America Inc | Apparatus and method of use for a casting system with independent melting and solidification |
WO2010106756A1 (ja) * | 2009-03-16 | 2010-09-23 | 新日本製鐵株式会社 | 焼結鉱の製造方法 |
KR101841032B1 (ko) | 2010-09-03 | 2018-03-22 | 지티에이티 아이피 홀딩 엘엘씨 | 갈륨, 인듐 또는 알루미늄으로 도핑된 실리콘 단결정 |
EP2893057B1 (en) * | 2012-09-10 | 2017-12-20 | Gtat Ip Holding Llc | Continuous czochralski method and apparatus |
US9376762B2 (en) * | 2012-11-29 | 2016-06-28 | Solaicx | Weir for improved crystal growth in a continuous Czochralski process |
US10006145B2 (en) * | 2012-12-31 | 2018-06-26 | Corner Star Limited | Liquid doping systems and methods for controlled doping of single crystal semiconductor material |
CN104342750A (zh) * | 2013-08-08 | 2015-02-11 | 徐州协鑫太阳能材料有限公司 | 石英坩埚及其制备方法 |
KR20150106204A (ko) | 2014-03-11 | 2015-09-21 | (주)기술과가치 | 잉곳 제조 장치 |
KR20150107540A (ko) | 2014-03-14 | 2015-09-23 | (주)기술과가치 | 잉곳 제조 장치 |
KR101599338B1 (ko) * | 2014-05-13 | 2016-03-03 | 웅진에너지 주식회사 | Ccz용 이중도가니 |
US9476141B2 (en) * | 2014-07-25 | 2016-10-25 | Sunedison, Inc. | Weir for inhibiting melt contamination |
US10000863B2 (en) * | 2015-02-03 | 2018-06-19 | Sumco Corporation | Method for cleaning single crystal pulling apparatus, cleaning tool for use therein, and method for manufacturing single crystal |
WO2016179022A1 (en) * | 2015-05-01 | 2016-11-10 | Sunedison, Inc. | Methods for producing single crystal ingots doped with volatile dopants |
KR20210150510A (ko) | 2019-04-11 | 2021-12-10 | 글로벌웨이퍼스 씨오., 엘티디. | 말기 본체 길이에서 감소된 왜곡을 갖는 잉곳을 준비하기 위한 프로세스 |
KR102576552B1 (ko) | 2019-04-18 | 2023-09-07 | 글로벌웨이퍼스 씨오., 엘티디. | 연속 쵸크랄스키 방법을 사용하여 단결정 실리콘 잉곳을 성장시키기 위한 방법들 |
JP7216340B2 (ja) * | 2019-09-06 | 2023-02-01 | 株式会社Sumco | シリコン単結晶の育成方法およびシリコン単結晶の引き上げ装置 |
US11111597B2 (en) | 2019-09-13 | 2021-09-07 | Globalwafers Co., Ltd. | Methods for growing a nitrogen doped single crystal silicon ingot using continuous Czochralski method |
US11111596B2 (en) | 2019-09-13 | 2021-09-07 | Globalwafers Co., Ltd. | Single crystal silicon ingot having axial uniformity |
US11976379B2 (en) * | 2020-11-04 | 2024-05-07 | Globalwafers Co., Ltd. | Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing |
KR20240096253A (ko) | 2022-12-19 | 2024-06-26 | 한국세라믹기술원 | 초크랄스키법에서 불순물 제거를 위한 내부도가니 돌출구조 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3577405D1 (de) * | 1984-12-28 | 1990-06-07 | Sumitomo Electric Industries | Verfahren zur herstellung von polykristallen von halbleiterverbindungen und vorrichtung zu dessen durchfuehrung. |
JPS6270291A (ja) * | 1985-09-19 | 1987-03-31 | Toshiba Corp | GaAs単結晶の製造方法及び装置 |
AU632886B2 (en) * | 1990-01-25 | 1993-01-14 | Ebara Corporation | Melt replenishment system for dendritic web growth |
JPH04198086A (ja) * | 1990-11-28 | 1992-07-17 | Osaka Titanium Co Ltd | 単結晶成長方法 |
JP2935337B2 (ja) * | 1994-11-21 | 1999-08-16 | 信越半導体株式会社 | 粒状原料の供給装置およびその供給方法 |
TW430699B (en) * | 1995-12-27 | 2001-04-21 | Mitsubishi Material Silicon Co | Single crystal pulling apparatus |
-
1996
- 1996-12-21 TW TW085115858A patent/TW440613B/zh not_active IP Right Cessation
-
1997
- 1997-01-09 DE DE19700498A patent/DE19700498B4/de not_active Expired - Fee Related
- 1997-01-10 CN CNB971010099A patent/CN1138878C/zh not_active Expired - Fee Related
- 1997-01-10 US US08/781,842 patent/US5891245A/en not_active Expired - Lifetime
- 1997-01-10 KR KR1019970000447A patent/KR100441357B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW440613B (en) | 2001-06-16 |
KR100441357B1 (ko) | 2004-09-18 |
US5891245A (en) | 1999-04-06 |
CN1165208A (zh) | 1997-11-19 |
CN1138878C (zh) | 2004-02-18 |
DE19700498B4 (de) | 2008-11-20 |
DE19700498A1 (de) | 1997-07-17 |
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