KR970020441A - 잉크젯 기록 장치 및 그 제조 방법 - Google Patents
잉크젯 기록 장치 및 그 제조 방법 Download PDFInfo
- Publication number
- KR970020441A KR970020441A KR1019960045603A KR19960045603A KR970020441A KR 970020441 A KR970020441 A KR 970020441A KR 1019960045603 A KR1019960045603 A KR 1019960045603A KR 19960045603 A KR19960045603 A KR 19960045603A KR 970020441 A KR970020441 A KR 970020441A
- Authority
- KR
- South Korea
- Prior art keywords
- electrode
- protective layer
- recording apparatus
- piezoelectric body
- forming
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract 3
- 230000005684 electric field Effects 0.000 claims abstract 2
- 239000011241 protective layer Substances 0.000 claims 16
- 238000000034 method Methods 0.000 claims 11
- 238000002347 injection Methods 0.000 claims 7
- 239000007924 injection Substances 0.000 claims 7
- 239000000463 material Substances 0.000 claims 5
- 239000011810 insulating material Substances 0.000 claims 4
- 230000003647 oxidation Effects 0.000 claims 4
- 238000007254 oxidation reaction Methods 0.000 claims 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 2
- 229910052749 magnesium Inorganic materials 0.000 claims 2
- 239000011777 magnesium Substances 0.000 claims 2
- 229910052758 niobium Inorganic materials 0.000 claims 2
- 239000010955 niobium Substances 0.000 claims 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 2
- 238000000059 patterning Methods 0.000 claims 2
- 230000000630 rising effect Effects 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 239000002699 waste material Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04525—Control methods or devices therefor, e.g. driver circuits, control circuits reducing occurrence of cross talk
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04541—Specific driving circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04573—Timing; Delays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0459—Height of the driving signal being adjusted
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04591—Width of the driving signal being adjusted
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04593—Dot-size modulation by changing the size of the drop
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/145—Arrangement thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/215—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material by passing a medium, e.g. consisting of an air or particle stream, through an ink mist
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14379—Edge shooter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49346—Rocket or jet device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
조밀 구성을 갖는 멀티 노즐 잉크젯 기록 장치 및 그 제조 방법이 공개된다. 압전판의 측벽에 전압을 인가하기 위한 두 전극이 압력 챔버의 영역 내에 놓여 있으며 이에 따라 잉크 방울의 분사에 기여하지 않는 부분에는 전계가 작용하지 않는다. 이로 인해 전압의 낭비가 미연에 방지됨으로써 저전압 구동이 실현되어 상기 압력 챔버의 크기가 줄어든다. 모든 홈은 어떠한 틈새나 이와 유사한 비경제적인 공간이 없는 압력 챔버의 역할을 한다. 이로 인해 조밀 구성을 가지고 있는 멀티노즐 프린트의 헤드가 구현된다. 이러한 프린트 헤드에 의해 상기 기록 장치는 소형의 컴팩트한 구성을 이룬다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 잉크젯 기록 장치를 도시하는 도면,
제2A-2C는 제1도에 도시된 장치의 동작을 설명하기 위한 제1도의 A-A'선을 따른 단면도,
제3도는 드라이브 전압의 파형을 도시하는 도면.
Claims (30)
- 상하방향으로 분극되고 상부가 신축성 있는 유전체의 측벽에 의해, 양측의 범위가 각각 정해진 복수의 압력챔버로서, 전극이 각각의 상기 측벽의 상부면과 하부면상에 각각 위치되어 있는 복수의 압력챔버; 유체가 흐를 수 있도록 각각의 상기 압력챔버와 각각 통해 있는 복수의 노즐, 및 상기 전극에 전기접속되어, 상기 측벽의 분극과 동일한 방향으로 전계를 인가하는 제어시스템을 구비 하고 있는 것을 특징으로 하는 잉크젯 기록장치.
- 제1항에 있어서, 상기 측벽은 상기 압력챔버의 영역내에 놓여있는 것을 특징으로 하는 잉크젯 기록장치.
- 제2항에 있어서, 각각의 상기 측벽은 인접한 압력 챔버들에 의해 공유되는 것을 특징으로 하는 잉크젯 기록장치.
- 제3항에 있어서, 상기 측벽은 각각의 노즐을 통해 잉크방울이 분사되도록 팽창된 후 수축되는 것을 특징으로 하는 잉크젯 기록장치.
- 제4항에 있어서, 상기 제어시스템은 임계분사 전압 보다 높지만 이 임계분사전압의 2배 이하인 구동전압을 상기 측벽에 인가하는 것을 특징으로 하는 잉크젯 기록장치.
- 제4항에 있어서, 상기 제어시스템은 임계 분사변위 속도 보다 높지만 이 임계분사변위속도의 2배 이하인 속도로 상기 측벽을 변위시킬 수 있는 구동전압 파형을 상기 측벽에 인가하는 것을 특징으로 하는 잉크젯 기록장치.
- 제4항에 있어서, 상기 제어시스템은 임계분사에너지 보다 높지만 이임계분사에너지의 4배 이하인 에너지를 상기 측벽에 인가하는 것을 특징으로 하는 잉크젯 기록장치.
- 제5항 내지 제7항 중 어느 한 항에 있어서, 모든 n번째 노즐(n은 2이상의 자연수)은 동일한 레벨에 위치되어 있고, 모든 n번째 압력챔버는 동일타이밍에서 구동되는 것을 특징으로 하는 잉크젯 기록장치.
- 제5항 내지 제7항 중 어느 잔 항에 있어서, 인접한 두 인접노즐로부터 n개 노즐(n은 2이상의 자연수)만큼 간격을 둔 각각의 두 인접 노즐은 동일레벨에 위치되어 있고, 인접한 두 인접압력챔버로부터 n개 압력 챔버만큼 간격을 둔 각각의 두 인접압력챔버는 동일 타이밍에서 구동되는 것을 특징으로 하는 잉크젯 기록장치.
- 제5항 내지 제7항 중 어느 한 항에 있어서, 인접한 두 인접 노즐로부터 2n개 노즐(n은 2이상의 자연수)만큼 간격을 둔 각각의 두 인접 노즐은 동일레벨에 위치되어 있고, 인접한 두 인접압력 챔버로부터 2n개 압력챔버만큼 간격을 둔 각각의 두 인접 압력 챔버는 동일 타이밍에서 구동되는 것을 특징으로 하는 잉크젯 기록장치.
- 제8항 내지 제10항 중 어느 한 항에 있어서, 상기 제어시스템은 각각의 상기 압력 챔버에 대한 프린트 데이타를 상기 측벽에 제공하는 데이타 변환수단을 구비하고 있는 것을 특징으로 하는 잉크젯 기록장치.
- 제11항에 있어서, 각각의 상기 측벽과 전기적으로 병렬인 저항발생수단을 더구비하고 있는 것을 특징으로 하는 잉크젯 기록장치.
- 제12항에 있어서, 상기 제어시스템은 분사될 잉크의 양에 따라 펄스폭을 변경시키고 이 펄스폭을 구동기에 공급하는 제어수단을 구비하고 있는 것을 특징으로 하는 잉크젯 기록장치.
- 제11항에 있어서, 상기 제어시스템은 제1 및 제2펄스를 발생하고 이 제1펄스의 네가티브 진행에지와 상기 제2펄스의 포지티브 진행 에지간의 간격을 변경시키는 제어수단; 상승부와 하강부를 가지고 있는 전압파형을 발생하는 파형 발생수단; 및 상기 제1 및 제2펄스가 하이레벨인 동안에 상기 전압 파형을 상기 측벽에 인가하는 스위칭 수단을 구비하는 것을 특징으로 하는 잉크젯 기록장치.
- 제14항에 있어서, 상기 제어수단은 상기 전압파형이 상승할때 단일의 잉크분사 사이클에서 상기 제1펄스를 발생하고, 상기 전압파형이 상기 제1펄스가 로우로 될때 나타나는 전압과 동일한 전압으로 하강할때 상기 제2펄스를 발생하는 것을 특징으로 하는 잉크젯 기록장치.
- 제15항에 있어서, 상기 파형은 상승후 시간경과에 따라 연속적으로 증가하는 속도로 하강하는 것을 특징으로 하는 잉크젯 기록장치.
- 제11항 내지 제16항 중 어느 한 항에 있어서, 상기 압전체는 박판구조를 가지고 있는 것을 특징으로 하는 잉크젯 기록장치.
- 제11항 내지 제16항 중 어느 한 항에 있어서, 상기 전극은 탄탈, 알루미늄, 티타늄, 마그네슘, 니오브 및 지르코늄, 알루미늄, 티타늄. 마그네슘, 니오브, 및 지르코늄 중 어느 하나로 형성되어 있고, 상기 전극을 보호하는 보호층은 상기 전극을 구성하는 재료의 산화막으로 이루어진 것을 특징으로 하는 잉크젯 기록장치.
- (a) 압전체의 상부면 및 하부면에 전극을 형성하는 단계; (b) 상기 압전체와 하부판을 부착하는 단계; (c) 인터페이스 전체에 걸쳐서 상기 압전체와 상기 하부판에 복수의 홈을 형성하는 단계; (d) 상기 복수의 홈이 형성된 후에 상기 전극의 보호층을 형성하는 단계; 및 (c) 인터페이스 전체에 걸쳐서 상기 압전체와 상기 하부판에 복수의 홈을 형성하는 단제; (d) 상기 복수의 홈이 형성된 후에 상기 전극의 보호층을 형성하는 단계; 및 (e) 상기 보호층이 형성된 후에 노즐판과 상부판을 부착하는 단계를 포함하고 있는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제19항에 있어서, 상기 보호층은 상기 전극을 구성하는 재료의 애노드 산화에 의해 형성되는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제19항에 있어서, 상기 보호층은 절연재료의 막으로 이루어진 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- (a) 압전체의 상부면에 전극을 패터닝하는 단계; (b) 상기 압전체이 하부면에 전극을 형성하는 단계; (c) 상기 압전체에 하부판을 부착하는 단계; (d) 인터페이스 전체에 걸쳐서 상기 압전체와 상기 하부판에 복수의 홈을 형성하는 단계.
- 제22항에 있어서, 상기 보호층은 상기 전극을 구성하는 재료의 애노드 산화에 의해 형성되는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제22항에 있어서, 상기 보호층은 절연 재료의 막으로 이루어진 것을 특징으로 하는 잉크젯 기록 장치 제조 방법.
- (a) 압전체의 상부면에 전극을 형성하는 단계; (b) 하부판의 상부변에 전극을 형성하는 단계 ; (c) 상기 압전체와 상기 하부판을 부착하는 단계; (d) 인터페이스전제에 걸쳐서 상기 압전체와 상기 하부판에 복수의 홈을 형성하는 단계; (e) 상기 복수의 홈이 형성된 후에 상기 전극의 보호층을 형성하는 단계; 및 (f) 상기 보호층이 형성된 후에 노즐판과 상부판을 부착하는 단계를 포함하는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제25항에 있어서, 상기 보호층은 상기 전극을 구성하는 재료의 애노드 산화에 의해 형성되는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제25항에 있어서, 상기 보호층은 절연재료의 막으로 이루어진 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- (a) 압전체의 상부면에 전극을 패터닝하는 단계; (b) 하부판의 상부면에 전극을 형성하는 단계; (c) 상기 압전체와 상기 하부판을 부착하는 단계; (d) 인터페이스 전체에 걸쳐서 상기 압전판과 상기 하부판에 복수의 홈을 형성하는 단계; (e) 상기 복수의 홈이 형성된 후에 상기 전극의 보호층을 형성하는 단계; 및 (f) 상기 보호층이 형성된 후에 노즐판과 상부판을 부착하는 단계를 포함하는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제28항에 있어서, 상기 보호층은 상기 전극을 구성하는 재료의 애노드 산화에 의해 형성되는 것을 특징으로 하는 잉크젯 기록장치 제조 방법.
- 제28항에 있어서, 상기 보호층은 절연재료의 막으로 이루어진 것을 특징으로 하는 잉크젯 기록장치 제조 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP95-261896 | 1995-10-09 | ||
JP7261896A JP2870459B2 (ja) | 1995-10-09 | 1995-10-09 | インクジェット記録装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970020441A true KR970020441A (ko) | 1997-05-28 |
KR100236149B1 KR100236149B1 (ko) | 1999-12-15 |
Family
ID=17368269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960045603A KR100236149B1 (ko) | 1995-10-09 | 1996-10-09 | 잉크젯 기록 장치 및 그 제조 방법(Ink jet recording device and method of producing the same) |
Country Status (7)
Country | Link |
---|---|
US (2) | US6161926A (ko) |
EP (2) | EP0768181B1 (ko) |
JP (1) | JP2870459B2 (ko) |
KR (1) | KR100236149B1 (ko) |
AU (1) | AU720415B2 (ko) |
CA (1) | CA2187415C (ko) |
DE (2) | DE69606821T2 (ko) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6095638A (en) * | 1996-11-21 | 2000-08-01 | Nec Corporation | Elastic ink jet printing head and method for manufacturing head block thereof |
JP3123468B2 (ja) | 1997-06-25 | 2001-01-09 | 日本電気株式会社 | インクジェット記録ヘッド及びその製造方法 |
ES2195629T3 (es) * | 1998-11-14 | 2003-12-01 | Xaar Technology Ltd | Aparato para deposito a partir de gotitas. |
CA2380144C (en) | 1999-08-14 | 2008-04-15 | Xaar Technology Limited | Droplet deposition apparatus |
GB0121619D0 (en) | 2001-09-07 | 2001-10-31 | Xaar Technology Ltd | Droplet depostion apparatus |
GB0121909D0 (en) | 2001-09-11 | 2001-10-31 | Xaar Technology Ltd | Droplet deposition apparatus |
EP1338421B1 (en) * | 2002-02-21 | 2007-04-18 | Brother Kogyo Kabushiki Kaisha | Ink-jet head, method for it's manufacturing, and ink-jet printer |
US6942318B2 (en) * | 2002-05-31 | 2005-09-13 | Hewlett-Packard Development Company, L.P. | Chamber having a protective layer |
US7025433B2 (en) * | 2002-11-27 | 2006-04-11 | Hewlett-Packard Development Company, L.P. | Changing drop-ejection velocity in an ink-jet pen |
GB0414867D0 (en) * | 2004-07-02 | 2004-08-04 | Xaar Technology Ltd | Droplet deposition apparatus |
JP2006082396A (ja) * | 2004-09-16 | 2006-03-30 | Konica Minolta Holdings Inc | インクジェットヘッド |
JP4857934B2 (ja) | 2005-08-23 | 2012-01-18 | コニカミノルタホールディングス株式会社 | インクジェットヘッド |
KR100992475B1 (ko) | 2008-11-14 | 2010-11-08 | 성균관대학교산학협력단 | 플러렌 박막층을 포함하는 소자 및 이를 제조하는 방법 |
JP5563354B2 (ja) * | 2010-04-01 | 2014-07-30 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP5588230B2 (ja) * | 2010-05-27 | 2014-09-10 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法 |
JP5689651B2 (ja) * | 2010-11-09 | 2015-03-25 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの駆動方法 |
JP2012223936A (ja) * | 2011-04-18 | 2012-11-15 | Seiko Epson Corp | 圧電素子駆動回路および流体噴射装置 |
DE102019122924B3 (de) * | 2019-08-27 | 2020-10-29 | Canon Production Printing Holding B.V. | Verfahren zur Bestimmung des hochdynamischen Ablösungsverhaltens einer Tinte von einem Tintenstrahldruckkopf und Verwendung des Verfahrens |
JP7478556B2 (ja) | 2020-03-04 | 2024-05-07 | 東芝テック株式会社 | 液体吐出装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5912828B2 (ja) * | 1976-07-19 | 1984-03-26 | 株式会社大林組 | 鉄筋コンクリ−ト構造骨組の柱・梁接合部 |
EP0350080A3 (en) * | 1981-04-24 | 1990-01-24 | E.R. Squibb & Sons, Inc. | Use of nadolol for inhibiting the onset of migraine headaches |
JPS57182452A (en) * | 1981-05-08 | 1982-11-10 | Seiko Epson Corp | Multinozzle head |
JPS6159913A (ja) * | 1984-08-30 | 1986-03-27 | Shin Kobe Electric Mach Co Ltd | Ad変換回路 |
JPS6256150A (ja) * | 1985-09-06 | 1987-03-11 | Fuji Electric Co Ltd | インクジエツト記録ヘツド |
DE3645017C2 (ko) * | 1985-09-06 | 1990-07-12 | Fuji Electric Co., Ltd., Kawasaki, Kanagawa, Jp | |
US4879568A (en) * | 1987-01-10 | 1989-11-07 | Am International, Inc. | Droplet deposition apparatus |
JP2744536B2 (ja) * | 1991-10-04 | 1998-04-28 | 株式会社テック | インクジェットプリンタヘッド及びその製造方法 |
US5543009A (en) * | 1991-08-16 | 1996-08-06 | Compaq Computer Corporation | Method of manufacturing a sidewall actuator array for an ink jet printhead |
US5227813A (en) * | 1991-08-16 | 1993-07-13 | Compaq Computer Corporation | Sidewall actuator for a high density ink jet printhead |
JPH05338147A (ja) * | 1992-06-11 | 1993-12-21 | Tokyo Electric Co Ltd | インクジェットプリンタ |
JPH06143588A (ja) * | 1992-10-30 | 1994-05-24 | Seiko Epson Corp | インクジェット記録ヘッドの製造方法 |
EP0595654A3 (en) * | 1992-10-30 | 1997-07-23 | Citizen Watch Co Ltd | Ink jet head |
JP3292223B2 (ja) * | 1993-01-25 | 2002-06-17 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの駆動方法、及びその装置 |
JP3123298B2 (ja) * | 1993-05-10 | 2001-01-09 | ブラザー工業株式会社 | インクジェットプリンタヘッドの製造方法 |
JPH06344550A (ja) * | 1993-06-07 | 1994-12-20 | Brother Ind Ltd | インク噴射装置 |
JPH0747678A (ja) * | 1993-08-09 | 1995-02-21 | Tec Corp | インクジェットプリンタヘッドの製造方法 |
JP3120638B2 (ja) * | 1993-10-01 | 2000-12-25 | ブラザー工業株式会社 | インク噴射装置 |
JPH07171960A (ja) * | 1993-10-29 | 1995-07-11 | Citizen Watch Co Ltd | インクジェットヘッドおよびその駆動方法 |
JP3183010B2 (ja) * | 1993-12-24 | 2001-07-03 | ブラザー工業株式会社 | インク噴射装置 |
US5767878A (en) * | 1994-09-30 | 1998-06-16 | Compaq Computer Corporation | Page-wide piezoelectric ink jet print engine with circumferentially poled piezoelectric material |
JPH08192514A (ja) * | 1995-01-19 | 1996-07-30 | Brother Ind Ltd | インクジェット記録装置 |
JP3299431B2 (ja) * | 1995-01-31 | 2002-07-08 | 東芝テック株式会社 | インクジェットプリンタヘッドの製造方法 |
US5997135A (en) * | 1995-03-27 | 1999-12-07 | Brother Kogyo Kabushiki Kaisha | Two actuator shear mode type ink jet print head with dimensional relations |
-
1995
- 1995-10-09 JP JP7261896A patent/JP2870459B2/ja not_active Expired - Fee Related
-
1996
- 1996-10-08 EP EP96116106A patent/EP0768181B1/en not_active Expired - Lifetime
- 1996-10-08 CA CA002187415A patent/CA2187415C/en not_active Expired - Fee Related
- 1996-10-08 DE DE69606821T patent/DE69606821T2/de not_active Expired - Fee Related
- 1996-10-08 EP EP98100819A patent/EP0839656B1/en not_active Expired - Lifetime
- 1996-10-08 DE DE69608900T patent/DE69608900T2/de not_active Expired - Fee Related
- 1996-10-09 US US08/731,017 patent/US6161926A/en not_active Expired - Fee Related
- 1996-10-09 AU AU68107/96A patent/AU720415B2/en not_active Ceased
- 1996-10-09 KR KR1019960045603A patent/KR100236149B1/ko not_active IP Right Cessation
-
2000
- 2000-10-17 US US09/688,793 patent/US6390609B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2870459B2 (ja) | 1999-03-17 |
JPH09104108A (ja) | 1997-04-22 |
EP0839656A1 (en) | 1998-05-06 |
EP0768181A1 (en) | 1997-04-16 |
DE69608900T2 (de) | 2000-10-19 |
US6390609B1 (en) | 2002-05-21 |
AU6810796A (en) | 1997-04-17 |
DE69608900D1 (de) | 2000-07-20 |
AU720415B2 (en) | 2000-06-01 |
CA2187415C (en) | 2000-12-05 |
DE69606821D1 (de) | 2000-04-06 |
US6161926A (en) | 2000-12-19 |
EP0768181B1 (en) | 2000-03-01 |
DE69606821T2 (de) | 2000-08-03 |
KR100236149B1 (ko) | 1999-12-15 |
EP0839656B1 (en) | 2000-06-14 |
CA2187415A1 (en) | 1997-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR970020441A (ko) | 잉크젯 기록 장치 및 그 제조 방법 | |
EP0634272B1 (en) | Inkjet recording apparatus having an electrostatic actuator and method of driving it | |
JP5004806B2 (ja) | インクジェットプリント法 | |
RU2184038C2 (ru) | Способ работы устройства для осаждения капель (варианты), устройство для осаждения капель | |
US5512922A (en) | Method of multi-tone printing | |
US6409295B1 (en) | Ink-jet device | |
KR20000010518A (ko) | 잉크젯 헤드 구동 방법 | |
JP2854876B2 (ja) | 記録ヘッド及び記録装置 | |
US5373314A (en) | Ink jet print head | |
JP4000356B2 (ja) | インクジェット式記録ヘッドの駆動方法、及びインクジェット式記録装置 | |
JP3326395B2 (ja) | インクジェット記録装置 | |
US4631553A (en) | Printer head of an ink-jet printer | |
JPH0462157A (ja) | インクジェット記録装置 | |
JP2650584B2 (ja) | インクジェット記録ヘッド | |
JPH05338165A (ja) | 液体噴射記録ヘッドの駆動方法 | |
JP3302401B2 (ja) | インクジェットの駆動装置及びインクジェットの駆動方法 | |
JP2004188932A (ja) | インクジェットヘッドの駆動方法 | |
JP4412945B2 (ja) | 液滴吐出装置 | |
JPH04361045A (ja) | 液体噴射記録ヘッドの駆動方法 | |
JPH02274552A (ja) | インクジェット記録装置 | |
JPH11268277A (ja) | インクジェット記録装置 | |
EP1543975A2 (en) | Inkjet printhead | |
JPH0381154A (ja) | インクジェットプリントヘッド | |
JP3259785B2 (ja) | 液体噴射記録装置 | |
JPH01206062A (ja) | 静電型インクジェット記録装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20070920 Year of fee payment: 9 |
|
LAPS | Lapse due to unpaid annual fee |