KR950033389A - 세라믹 히터 및 그의 제조방법 - Google Patents

세라믹 히터 및 그의 제조방법 Download PDF

Info

Publication number
KR950033389A
KR950033389A KR1019950008432A KR19950008432A KR950033389A KR 950033389 A KR950033389 A KR 950033389A KR 1019950008432 A KR1019950008432 A KR 1019950008432A KR 19950008432 A KR19950008432 A KR 19950008432A KR 950033389 A KR950033389 A KR 950033389A
Authority
KR
South Korea
Prior art keywords
surface roughness
substrate plate
range
ceramic heater
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019950008432A
Other languages
English (en)
Korean (ko)
Inventor
요시히로 구보따
히로시 모기
Original Assignee
가나까와 찌히로
신에쓰가가꾸고오교 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가나까와 찌히로, 신에쓰가가꾸고오교 가부시끼가이샤 filed Critical 가나까와 찌히로
Publication of KR950033389A publication Critical patent/KR950033389A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B3/00—Hearth-type furnaces, e.g. of reverberatory type; Electric arc furnaces ; Tank furnaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/003—Thick film resistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/032—Heaters specially adapted for heating by radiation heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Furnace Details (AREA)
KR1019950008432A 1994-04-11 1995-01-11 세라믹 히터 및 그의 제조방법 Withdrawn KR950033389A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6071787A JPH07280462A (ja) 1994-04-11 1994-04-11 均熱セラミックスヒーター
JP94-71787 1994-04-11

Publications (1)

Publication Number Publication Date
KR950033389A true KR950033389A (ko) 1995-12-26

Family

ID=13470643

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950008432A Withdrawn KR950033389A (ko) 1994-04-11 1995-01-11 세라믹 히터 및 그의 제조방법

Country Status (4)

Country Link
US (1) US5643483A (enExample)
JP (1) JPH07280462A (enExample)
KR (1) KR950033389A (enExample)
TW (1) TW287348B (enExample)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU7291398A (en) 1997-05-06 1998-11-27 Thermoceramix, L.L.C. Deposited resistive coatings
JP2987354B2 (ja) * 1997-12-26 1999-12-06 株式会社インターセントラル 遠赤外線暖房装置
EP1123344B1 (en) * 1998-07-15 2006-06-21 Thermon Manufacturing Company A heating cable
US6379492B2 (en) * 1998-10-31 2002-04-30 Applied Materials, Inc. Corrosion resistant coating
US6262401B1 (en) * 1998-12-30 2001-07-17 Aos Holding Company Gold-plated water heater element and method of making same
EP1187511A1 (en) * 1999-05-07 2002-03-13 Ibiden Co., Ltd. Hot plate and method of producing the same
JP2001118664A (ja) 1999-08-09 2001-04-27 Ibiden Co Ltd セラミックヒータ
US6835916B2 (en) 1999-08-09 2004-12-28 Ibiden, Co., Ltd Ceramic heater
WO2001011921A1 (en) * 1999-08-09 2001-02-15 Ibiden Co., Ltd. Ceramic heater
US6222166B1 (en) * 1999-08-09 2001-04-24 Watlow Electric Manufacturing Co. Aluminum substrate thick film heater
US6350664B1 (en) * 1999-09-02 2002-02-26 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method of manufacturing the same
EP1137321A1 (en) * 1999-11-30 2001-09-26 Ibiden Co., Ltd. Ceramic heater
US6884972B2 (en) 1999-12-09 2005-04-26 Ibiden Co., Ltd. Ceramic plate for a semiconductor producing/inspecting apparatus
US6433319B1 (en) * 2000-12-15 2002-08-13 Brian A. Bullock Electrical, thin film termination
US6674053B2 (en) 2001-06-14 2004-01-06 Trebor International Electrical, thin film termination
US6580061B2 (en) * 2000-02-01 2003-06-17 Trebor International Inc Durable, non-reactive, resistive-film heater
US7081602B1 (en) 2000-02-01 2006-07-25 Trebor International, Inc. Fail-safe, resistive-film, immersion heater
US6663914B2 (en) 2000-02-01 2003-12-16 Trebor International Method for adhering a resistive coating to a substrate
US6494955B1 (en) 2000-02-15 2002-12-17 Applied Materials, Inc. Ceramic substrate support
EP1274280A1 (en) 2000-04-14 2003-01-08 Ibiden Co., Ltd. Ceramic heater
EP1220303B1 (en) * 2000-06-02 2004-09-08 Ibiden Co., Ltd. Hot plate unit
JP4975146B2 (ja) * 2000-06-26 2012-07-11 京セラ株式会社 ウエハ加熱装置
JP4593770B2 (ja) * 2000-06-26 2010-12-08 京セラ株式会社 ウエハ加熱装置
WO2002019400A1 (en) * 2000-08-30 2002-03-07 Ibiden Co., Ltd. Ceramic heater for semiconductor manufacturing and inspecting equipment
JPWO2002043441A1 (ja) * 2000-11-24 2004-04-02 イビデン株式会社 セラミックヒータ、および、セラミックヒータの製造方法
AU2002246534A1 (en) 2000-11-29 2002-08-06 Thermoceramix, Lcc Resistive heaters and uses thereof
JP4837192B2 (ja) * 2001-06-26 2011-12-14 ローム株式会社 加熱ヒータおよびその加熱ヒータを備えた定着装置
US6730175B2 (en) 2002-01-22 2004-05-04 Applied Materials, Inc. Ceramic substrate support
US6825681B2 (en) * 2002-07-19 2004-11-30 Delta Design, Inc. Thermal control of a DUT using a thermal control substrate
US6991003B2 (en) * 2003-07-28 2006-01-31 M.Braun, Inc. System and method for automatically purifying solvents
ATE384413T1 (de) * 2003-11-20 2008-02-15 Koninkl Philips Electronics Nv Dünnschichtheizelement
KR101185794B1 (ko) 2004-06-28 2012-10-02 쿄세라 코포레이션 웨이퍼 가열장치와 반도체 제조장치
JP5036248B2 (ja) 2006-08-10 2012-09-26 大日本スクリーン製造株式会社 熱処理装置および熱処理用サセプタ
CN101409961B (zh) * 2007-10-10 2010-06-16 清华大学 面热光源,其制备方法及应用其加热物体的方法
FR2927218B1 (fr) * 2008-02-06 2010-03-05 Hydromecanique & Frottement Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu
US8240036B2 (en) 2008-04-30 2012-08-14 Panasonic Corporation Method of producing a circuit board
US20090272728A1 (en) * 2008-05-01 2009-11-05 Thermoceramix Inc. Cooking appliances using heater coatings
US9332642B2 (en) * 2009-10-30 2016-05-03 Panasonic Corporation Circuit board
US8929092B2 (en) 2009-10-30 2015-01-06 Panasonic Corporation Circuit board, and semiconductor device having component mounted on circuit board
JP2013145859A (ja) * 2011-12-16 2013-07-25 Stanley Electric Co Ltd 半導体製造装置
DE102015119763A1 (de) 2015-11-16 2017-05-18 Heraeus Quarzglas Gmbh & Co. Kg Infrarotstrahler

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2105845A5 (enExample) * 1970-09-09 1972-04-28 Delog Detag Flachglas Ag
JPH0353055A (ja) * 1989-07-19 1991-03-07 Kobe Steel Ltd 表面にセラミックスを溶射した金属ロール
JPH0432183A (ja) * 1990-05-25 1992-02-04 Toshiba Lighting & Technol Corp 赤外線ヒータ
JPH04141947A (ja) * 1990-09-30 1992-05-15 Toshiba Lighting & Technol Corp セラミック放電ランプ
JP2936351B2 (ja) * 1990-11-29 1999-08-23 京セラ株式会社 セラミック部材と金属部材の接合体
JPH05182750A (ja) * 1991-12-28 1993-07-23 Rohm Co Ltd 加熱ヒータ
JPH05238853A (ja) * 1992-02-28 1993-09-17 Tokyo Electric Power Co Inc:The セラミックス基材の表面改質方法
JPH05338235A (ja) * 1992-06-10 1993-12-21 Kyocera Corp サーマルヘッド
JP3057670B2 (ja) * 1992-10-28 2000-07-04 信越化学工業株式会社 複層セラミックスヒーター
EP0601613A1 (en) * 1992-12-11 1994-06-15 Shin-Etsu Chemical Co., Ltd. Silicon solar cell

Also Published As

Publication number Publication date
JPH07280462A (ja) 1995-10-27
TW287348B (enExample) 1996-10-01
US5643483A (en) 1997-07-01

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19950411

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid