TW287348B - - Google Patents

Info

Publication number
TW287348B
TW287348B TW084102241A TW84102241A TW287348B TW 287348 B TW287348 B TW 287348B TW 084102241 A TW084102241 A TW 084102241A TW 84102241 A TW84102241 A TW 84102241A TW 287348 B TW287348 B TW 287348B
Authority
TW
Taiwan
Application number
TW084102241A
Original Assignee
Shinetsu Chem Ind Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chem Ind Co filed Critical Shinetsu Chem Ind Co
Application granted granted Critical
Publication of TW287348B publication Critical patent/TW287348B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B3/00—Hearth-type furnaces, e.g. of reverberatory type; Tank furnaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/003—Thick film resistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/032—Heaters specially adapted for heating by radiation heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Furnace Details (AREA)
TW084102241A 1994-04-11 1995-03-09 TW287348B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6071787A JPH07280462A (ja) 1994-04-11 1994-04-11 均熱セラミックスヒーター

Publications (1)

Publication Number Publication Date
TW287348B true TW287348B (zh) 1996-10-01

Family

ID=13470643

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084102241A TW287348B (zh) 1994-04-11 1995-03-09

Country Status (4)

Country Link
US (1) US5643483A (zh)
JP (1) JPH07280462A (zh)
KR (1) KR950033389A (zh)
TW (1) TW287348B (zh)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU7291398A (en) 1997-05-06 1998-11-27 Thermoceramix, L.L.C. Deposited resistive coatings
JP2987354B2 (ja) * 1997-12-26 1999-12-06 株式会社インターセントラル 遠赤外線暖房装置
AU5109099A (en) * 1998-07-15 2000-02-07 Thermon Manufacturing Company Thermally-conductive, electrically non-conductive heat transfer material and articles made thereof
US6379492B2 (en) * 1998-10-31 2002-04-30 Applied Materials, Inc. Corrosion resistant coating
US6262401B1 (en) * 1998-12-30 2001-07-17 Aos Holding Company Gold-plated water heater element and method of making same
US6967313B1 (en) * 1999-05-07 2005-11-22 Ibiden Company, Ltd. Hot plate and method of producing the same
WO2001011921A1 (fr) * 1999-08-09 2001-02-15 Ibiden Co., Ltd. Dispositif de chauffe en ceramique
JP2001118664A (ja) * 1999-08-09 2001-04-27 Ibiden Co Ltd セラミックヒータ
US6222166B1 (en) * 1999-08-09 2001-04-24 Watlow Electric Manufacturing Co. Aluminum substrate thick film heater
US6835916B2 (en) 1999-08-09 2004-12-28 Ibiden, Co., Ltd Ceramic heater
US6350664B1 (en) * 1999-09-02 2002-02-26 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method of manufacturing the same
WO2001041508A1 (fr) * 1999-11-30 2001-06-07 Ibiden Co., Ltd. Appareil chauffant en ceramique
EP1383167A1 (en) 1999-12-09 2004-01-21 Ibiden Co., Ltd. Ceramic plate for semiconductor producing/inspecting apparatus
US6433319B1 (en) * 2000-12-15 2002-08-13 Brian A. Bullock Electrical, thin film termination
US6580061B2 (en) * 2000-02-01 2003-06-17 Trebor International Inc Durable, non-reactive, resistive-film heater
US6674053B2 (en) 2001-06-14 2004-01-06 Trebor International Electrical, thin film termination
US7081602B1 (en) 2000-02-01 2006-07-25 Trebor International, Inc. Fail-safe, resistive-film, immersion heater
US6663914B2 (en) 2000-02-01 2003-12-16 Trebor International Method for adhering a resistive coating to a substrate
US6494955B1 (en) 2000-02-15 2002-12-17 Applied Materials, Inc. Ceramic substrate support
EP1274280A1 (en) 2000-04-14 2003-01-08 Ibiden Co., Ltd. Ceramic heater
EP1220303B1 (en) * 2000-06-02 2004-09-08 Ibiden Co., Ltd. Hot plate unit
JP4975146B2 (ja) * 2000-06-26 2012-07-11 京セラ株式会社 ウエハ加熱装置
JP4593770B2 (ja) * 2000-06-26 2010-12-08 京セラ株式会社 ウエハ加熱装置
US6878906B2 (en) * 2000-08-30 2005-04-12 Ibiden Co., Ltd. Ceramic heater for semiconductor manufacturing and inspecting equipment
JPWO2002043441A1 (ja) * 2000-11-24 2004-04-02 イビデン株式会社 セラミックヒータ、および、セラミックヒータの製造方法
US6919543B2 (en) 2000-11-29 2005-07-19 Thermoceramix, Llc Resistive heaters and uses thereof
JP4837192B2 (ja) * 2001-06-26 2011-12-14 ローム株式会社 加熱ヒータおよびその加熱ヒータを備えた定着装置
US6730175B2 (en) 2002-01-22 2004-05-04 Applied Materials, Inc. Ceramic substrate support
US6825681B2 (en) * 2002-07-19 2004-11-30 Delta Design, Inc. Thermal control of a DUT using a thermal control substrate
US6991003B2 (en) * 2003-07-28 2006-01-31 M.Braun, Inc. System and method for automatically purifying solvents
US9493906B2 (en) * 2003-11-20 2016-11-15 Koninklijke Philips N.V. Thin-film heating element
WO2006006391A1 (ja) 2004-06-28 2006-01-19 Kyocera Corporation ウェハ加熱装置と半導体製造装置
JP5036248B2 (ja) 2006-08-10 2012-09-26 大日本スクリーン製造株式会社 熱処理装置および熱処理用サセプタ
CN101409961B (zh) * 2007-10-10 2010-06-16 清华大学 面热光源,其制备方法及应用其加热物体的方法
FR2927218B1 (fr) * 2008-02-06 2010-03-05 Hydromecanique & Frottement Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu
US8240036B2 (en) 2008-04-30 2012-08-14 Panasonic Corporation Method of producing a circuit board
CN104313529A (zh) * 2008-05-01 2015-01-28 萨莫希雷梅克斯公司 制造烹饪器具的方法
EP2496061A4 (en) 2009-10-30 2014-01-08 Panasonic Corp PRINTED CIRCUIT BOARD AND SEMICONDUCTOR DEVICE COMPRISING A COMPONENT MOUNTED ON A PRINTED CIRCUIT BOARD
US9332642B2 (en) * 2009-10-30 2016-05-03 Panasonic Corporation Circuit board
JP2013145859A (ja) * 2011-12-16 2013-07-25 Stanley Electric Co Ltd 半導体製造装置
DE102015119763A1 (de) 2015-11-16 2017-05-18 Heraeus Quarzglas Gmbh & Co. Kg Infrarotstrahler

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2105845A5 (zh) * 1970-09-09 1972-04-28 Delog Detag Flachglas Ag
JPH0353055A (ja) * 1989-07-19 1991-03-07 Kobe Steel Ltd 表面にセラミックスを溶射した金属ロール
JPH0432183A (ja) * 1990-05-25 1992-02-04 Toshiba Lighting & Technol Corp 赤外線ヒータ
JPH04141947A (ja) * 1990-09-30 1992-05-15 Toshiba Lighting & Technol Corp セラミック放電ランプ
JP2936351B2 (ja) * 1990-11-29 1999-08-23 京セラ株式会社 セラミック部材と金属部材の接合体
JPH05182750A (ja) * 1991-12-28 1993-07-23 Rohm Co Ltd 加熱ヒータ
JPH05238853A (ja) * 1992-02-28 1993-09-17 Tokyo Electric Power Co Inc:The セラミックス基材の表面改質方法
JPH05338235A (ja) * 1992-06-10 1993-12-21 Kyocera Corp サーマルヘッド
JP3057670B2 (ja) * 1992-10-28 2000-07-04 信越化学工業株式会社 複層セラミックスヒーター
US5431741A (en) * 1992-12-11 1995-07-11 Shin-Etsu Chemical Co., Ltd. Silicon solar cell

Also Published As

Publication number Publication date
US5643483A (en) 1997-07-01
KR950033389A (ko) 1995-12-26
JPH07280462A (ja) 1995-10-27

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees