KR940003291Y1 - 작업물 지지용 진공장치 - Google Patents

작업물 지지용 진공장치 Download PDF

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Publication number
KR940003291Y1
KR940003291Y1 KR2019880010922U KR880010922U KR940003291Y1 KR 940003291 Y1 KR940003291 Y1 KR 940003291Y1 KR 2019880010922 U KR2019880010922 U KR 2019880010922U KR 880010922 U KR880010922 U KR 880010922U KR 940003291 Y1 KR940003291 Y1 KR 940003291Y1
Authority
KR
South Korea
Prior art keywords
vacuum
support member
elastic
workpiece
sealing means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR2019880010922U
Other languages
English (en)
Korean (ko)
Other versions
KR890003634U (ko
Inventor
안토니우스 아우구스티누스 후버츠 페트루스
Original Assignee
필립스 앤드 듀퐁 옵티칼 캄파니
에프. 엠. 에이. 카르파이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 필립스 앤드 듀퐁 옵티칼 캄파니, 에프. 엠. 에이. 카르파이 filed Critical 필립스 앤드 듀퐁 옵티칼 캄파니
Publication of KR890003634U publication Critical patent/KR890003634U/ko
Application granted granted Critical
Publication of KR940003291Y1 publication Critical patent/KR940003291Y1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
KR2019880010922U 1987-07-08 1988-07-05 작업물 지지용 진공장치 Expired - Fee Related KR940003291Y1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8701603 1987-07-08
NL8701603A NL8701603A (nl) 1987-07-08 1987-07-08 Vacuuminrichting voor het vastzuigen van werkstukken.

Publications (2)

Publication Number Publication Date
KR890003634U KR890003634U (ko) 1989-04-13
KR940003291Y1 true KR940003291Y1 (ko) 1994-05-19

Family

ID=19850275

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880010922U Expired - Fee Related KR940003291Y1 (ko) 1987-07-08 1988-07-05 작업물 지지용 진공장치

Country Status (6)

Country Link
US (1) US4856766A (https=)
EP (1) EP0298564B1 (https=)
JP (1) JPH07446Y2 (https=)
KR (1) KR940003291Y1 (https=)
DE (1) DE3874981T2 (https=)
NL (1) NL8701603A (https=)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8922225D0 (en) * 1989-10-03 1989-11-15 Superion Ltd Apparatus and methods relating to ion implantation
DE69133413D1 (de) * 1990-05-07 2004-10-21 Canon Kk Substratträger des Vakuumtyps
US5143450A (en) * 1991-02-01 1992-09-01 Aetrium, Inc. Apparatus for handling devices under varying temperatures
JPH0521584A (ja) * 1991-07-16 1993-01-29 Nikon Corp 保持装置
DE69322778T2 (de) * 1992-05-06 1999-12-02 Carne, Charles Nicholas Vakuumplatte
JPH0639818U (ja) * 1992-11-09 1994-05-27 東燃化学株式会社 木材の搬出用シューター
JPH06268051A (ja) * 1993-03-10 1994-09-22 Mitsubishi Electric Corp ウエハ剥し装置
US5660699A (en) * 1995-02-20 1997-08-26 Kao Corporation Electroplating apparatus
US5724121A (en) * 1995-05-12 1998-03-03 Hughes Danbury Optical Systems, Inc. Mounting member method and apparatus with variable length supports
JPH1022184A (ja) * 1996-06-28 1998-01-23 Sony Corp 基板張り合わせ装置
JP3376258B2 (ja) 1996-11-28 2003-02-10 キヤノン株式会社 陽極化成装置及びそれに関連する装置及び方法
ATE218240T1 (de) * 1997-03-12 2002-06-15 Tapematic Spa Vorrichtung zum unterstützen von optischen datenspeicherscheiben
US6080050A (en) * 1997-12-31 2000-06-27 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
US5993302A (en) * 1997-12-31 1999-11-30 Applied Materials, Inc. Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
US5989444A (en) * 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same
DE29814100U1 (de) * 1998-08-06 1999-12-16 J. Schmalz GmbH, 72293 Glatten Blocksauger
EP1109207A1 (de) * 1999-12-14 2001-06-20 Esec SA Ansaugvorrichtung zum Niederhalten eines Substrates
CH695405A5 (de) 1999-12-14 2006-04-28 Esec Trading Sa Die Bonder und Wire Bonder mit einer Ansaugvorrichtung zum Flachziehen und Niederhalten eines gewölbten Substrats.
EP1170783A1 (en) * 2000-07-03 2002-01-09 Esec Trading S.A. Pick-up-tool
EP1170781A1 (de) * 2000-07-03 2002-01-09 Esec Trading S.A. Greifwerkzeug
CH695075A5 (de) 2000-07-03 2005-11-30 Esec Trading Sa Greifwerkzeug.
US6771482B2 (en) * 2001-07-30 2004-08-03 Unaxis Usa Inc. Perimeter seal for backside cooling of substrates
ITMI20012014A1 (it) * 2001-09-27 2003-03-27 Lpe Spa Utensile per maneggiare fette e stazione per crescita epitassiale
EP1762898A3 (en) * 2003-05-09 2007-03-28 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1475667A1 (en) 2003-05-09 2004-11-10 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
DE202004012259U1 (de) * 2004-08-05 2005-04-07 Weha Ludwig Werwein Gmbh Saugvorrichtung für Plattenbearbeitung
JP4534978B2 (ja) * 2005-12-21 2010-09-01 トヨタ自動車株式会社 半導体薄膜製造装置
JP5312923B2 (ja) 2008-01-31 2013-10-09 大日本スクリーン製造株式会社 基板処理装置
KR100936643B1 (ko) * 2009-06-22 2010-01-14 지기용 페달식 회전탈수장치
CN102754199A (zh) * 2009-12-15 2012-10-24 速力斯公司 用于薄晶片处理的可移动真空载具
US9966293B2 (en) * 2014-09-19 2018-05-08 Infineon Technologies Ag Wafer arrangement and method for processing a wafer
JP6400120B2 (ja) * 2014-12-12 2018-10-03 キヤノン株式会社 基板保持装置、リソグラフィ装置、及び物品の製造方法
US10699934B2 (en) 2015-10-01 2020-06-30 Infineon Technologies Ag Substrate carrier, a processing arrangement and a method
US9917000B2 (en) 2015-10-01 2018-03-13 Infineon Technologies Ag Wafer carrier, method for manufacturing the same and method for carrying a wafer
JP2018533763A (ja) * 2015-10-29 2018-11-15 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置用基板テーブル、および基板の装填方法
JP6725326B2 (ja) * 2016-06-03 2020-07-15 日本特殊陶業株式会社 真空チャック及び真空チャックの製造方法
KR101926726B1 (ko) * 2018-06-28 2018-12-07 주식회사 기가레인 부산물 증착 문제가 개선된 립실 및 이를 포함하는 반도체 공정 장치
JP7495819B2 (ja) * 2020-06-05 2024-06-05 キヤノン株式会社 保持装置、リソグラフィ装置及び物品の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2133518A (en) * 1937-08-20 1938-10-18 William C Huebner Vacuum holder
US2983638A (en) * 1958-02-05 1961-05-09 Du Pont Laminating blanket
US2936139A (en) * 1959-04-08 1960-05-10 Oscar L Lindstrom Resilient non-skid supporting shoes with suction cup
JPS5037892Y2 (https=) * 1971-01-27 1975-11-04
JPS50155472U (https=) * 1974-06-12 1975-12-23
SE444526B (sv) * 1978-01-23 1986-04-21 Western Electric Co Sett att i lege och plan placera en substratbricka
SU829536A1 (ru) * 1979-07-30 1981-05-15 Предприятие П/Я А-1813 Пневматический захват
US4530635A (en) * 1983-06-15 1985-07-23 The Perkin-Elmer Corporation Wafer transferring chuck assembly

Also Published As

Publication number Publication date
NL8701603A (nl) 1989-02-01
US4856766A (en) 1989-08-15
DE3874981D1 (de) 1992-11-05
DE3874981T2 (de) 1993-04-15
JPH07446Y2 (ja) 1995-01-11
KR890003634U (ko) 1989-04-13
EP0298564A1 (en) 1989-01-11
JPS6426648U (https=) 1989-02-15
EP0298564B1 (en) 1992-09-30

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