DE3874981D1 - Vakuumvorrichtung zum halten von werkstuecken. - Google Patents

Vakuumvorrichtung zum halten von werkstuecken.

Info

Publication number
DE3874981D1
DE3874981D1 DE8888201409T DE3874981T DE3874981D1 DE 3874981 D1 DE3874981 D1 DE 3874981D1 DE 8888201409 T DE8888201409 T DE 8888201409T DE 3874981 T DE3874981 T DE 3874981T DE 3874981 D1 DE3874981 D1 DE 3874981D1
Authority
DE
Germany
Prior art keywords
vacuum device
holding workpieces
workpieces
holding
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888201409T
Other languages
English (en)
Other versions
DE3874981T2 (de
Inventor
Petrus Antonius A Huberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips and Du Pont Optical Co BV
Original Assignee
Philips and Du Pont Optical Co BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips and Du Pont Optical Co BV filed Critical Philips and Du Pont Optical Co BV
Application granted granted Critical
Publication of DE3874981D1 publication Critical patent/DE3874981D1/de
Publication of DE3874981T2 publication Critical patent/DE3874981T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
DE8888201409T 1987-07-08 1988-07-06 Vakuumvorrichtung zum halten von werkstuecken. Expired - Fee Related DE3874981T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8701603A NL8701603A (nl) 1987-07-08 1987-07-08 Vacuuminrichting voor het vastzuigen van werkstukken.

Publications (2)

Publication Number Publication Date
DE3874981D1 true DE3874981D1 (de) 1992-11-05
DE3874981T2 DE3874981T2 (de) 1993-04-15

Family

ID=19850275

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888201409T Expired - Fee Related DE3874981T2 (de) 1987-07-08 1988-07-06 Vakuumvorrichtung zum halten von werkstuecken.

Country Status (6)

Country Link
US (1) US4856766A (de)
EP (1) EP0298564B1 (de)
JP (1) JPH07446Y2 (de)
KR (1) KR940003291Y1 (de)
DE (1) DE3874981T2 (de)
NL (1) NL8701603A (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8922225D0 (en) * 1989-10-03 1989-11-15 Superion Ltd Apparatus and methods relating to ion implantation
DE69133413D1 (de) * 1990-05-07 2004-10-21 Canon Kk Substratträger des Vakuumtyps
US5143450A (en) * 1991-02-01 1992-09-01 Aetrium, Inc. Apparatus for handling devices under varying temperatures
JPH0521584A (ja) * 1991-07-16 1993-01-29 Nikon Corp 保持装置
EP0640024B1 (de) * 1992-05-06 1998-12-23 CARNE, James Christopher Vakuumplatte
JPH0639818U (ja) * 1992-11-09 1994-05-27 東燃化学株式会社 木材の搬出用シューター
JPH06268051A (ja) * 1993-03-10 1994-09-22 Mitsubishi Electric Corp ウエハ剥し装置
US5660699A (en) * 1995-02-20 1997-08-26 Kao Corporation Electroplating apparatus
US5724121A (en) * 1995-05-12 1998-03-03 Hughes Danbury Optical Systems, Inc. Mounting member method and apparatus with variable length supports
JPH1022184A (ja) * 1996-06-28 1998-01-23 Sony Corp 基板張り合わせ装置
JP3376258B2 (ja) 1996-11-28 2003-02-10 キヤノン株式会社 陽極化成装置及びそれに関連する装置及び方法
DE69712864T2 (de) * 1997-03-12 2002-09-12 Tapematic Spa Vorrichtung zum Unterstützen von optischen Datenspeicherscheiben
US6080050A (en) 1997-12-31 2000-06-27 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
US5993302A (en) * 1997-12-31 1999-11-30 Applied Materials, Inc. Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
US5989444A (en) * 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same
DE29814100U1 (de) * 1998-08-06 1999-12-16 Schmalz J Gmbh Blocksauger
CH695405A5 (de) 1999-12-14 2006-04-28 Esec Trading Sa Die Bonder und Wire Bonder mit einer Ansaugvorrichtung zum Flachziehen und Niederhalten eines gewölbten Substrats.
EP1109207A1 (de) * 1999-12-14 2001-06-20 Esec SA Ansaugvorrichtung zum Niederhalten eines Substrates
EP1170783A1 (de) * 2000-07-03 2002-01-09 Esec Trading S.A. Greifwerkzeug
EP1170781A1 (de) * 2000-07-03 2002-01-09 Esec Trading S.A. Greifwerkzeug
CH695075A5 (de) 2000-07-03 2005-11-30 Esec Trading Sa Greifwerkzeug.
US6771482B2 (en) * 2001-07-30 2004-08-03 Unaxis Usa Inc. Perimeter seal for backside cooling of substrates
ITMI20012014A1 (it) * 2001-09-27 2003-03-27 Lpe Spa Utensile per maneggiare fette e stazione per crescita epitassiale
EP1762898A3 (de) * 2003-05-09 2007-03-28 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
EP1475667A1 (de) 2003-05-09 2004-11-10 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
DE202004012259U1 (de) * 2004-08-05 2005-04-07 Weha Ludwig Werwein Gmbh Saugvorrichtung für Plattenbearbeitung
JP4534978B2 (ja) * 2005-12-21 2010-09-01 トヨタ自動車株式会社 半導体薄膜製造装置
JP5312923B2 (ja) * 2008-01-31 2013-10-09 大日本スクリーン製造株式会社 基板処理装置
KR100936643B1 (ko) * 2009-06-22 2010-01-14 지기용 페달식 회전탈수장치
WO2011084531A2 (en) * 2009-12-15 2011-07-14 Solexel, Inc. Mobile vacuum carriers for thin wafer processing
US9966293B2 (en) * 2014-09-19 2018-05-08 Infineon Technologies Ag Wafer arrangement and method for processing a wafer
WO2016092700A1 (ja) 2014-12-12 2016-06-16 キヤノン株式会社 基板保持装置、リソグラフィ装置、及び物品の製造方法
US9917000B2 (en) 2015-10-01 2018-03-13 Infineon Technologies Ag Wafer carrier, method for manufacturing the same and method for carrying a wafer
US10699934B2 (en) 2015-10-01 2020-06-30 Infineon Technologies Ag Substrate carrier, a processing arrangement and a method
JP2018533763A (ja) * 2015-10-29 2018-11-15 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置用基板テーブル、および基板の装填方法
JP6725326B2 (ja) * 2016-06-03 2020-07-15 日本特殊陶業株式会社 真空チャック及び真空チャックの製造方法
KR101926726B1 (ko) * 2018-06-28 2018-12-07 주식회사 기가레인 부산물 증착 문제가 개선된 립실 및 이를 포함하는 반도체 공정 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2133518A (en) * 1937-08-20 1938-10-18 William C Huebner Vacuum holder
US2983638A (en) * 1958-02-05 1961-05-09 Du Pont Laminating blanket
US2936139A (en) * 1959-04-08 1960-05-10 Oscar L Lindstrom Resilient non-skid supporting shoes with suction cup
JPS5037892Y2 (de) * 1971-01-27 1975-11-04
JPS50155472U (de) * 1974-06-12 1975-12-23
SE444526B (sv) * 1978-01-23 1986-04-21 Western Electric Co Sett att i lege och plan placera en substratbricka
SU829536A1 (ru) * 1979-07-30 1981-05-15 Предприятие П/Я А-1813 Пневматический захват
US4530635A (en) * 1983-06-15 1985-07-23 The Perkin-Elmer Corporation Wafer transferring chuck assembly

Also Published As

Publication number Publication date
JPH07446Y2 (ja) 1995-01-11
KR940003291Y1 (ko) 1994-05-19
JPS6426648U (de) 1989-02-15
DE3874981T2 (de) 1993-04-15
NL8701603A (nl) 1989-02-01
US4856766A (en) 1989-08-15
EP0298564A1 (de) 1989-01-11
EP0298564B1 (de) 1992-09-30
KR890003634U (ko) 1989-04-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee