KR940002375A - 수직형 브리집만법에 의한 갈륨 비소(GaAs) 단결정 성장용 원통형 보우트 및 그 지지구조 - Google Patents

수직형 브리집만법에 의한 갈륨 비소(GaAs) 단결정 성장용 원통형 보우트 및 그 지지구조

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KR940002375A
KR940002375A KR1019920013034A KR920013034A KR940002375A KR 940002375 A KR940002375 A KR 940002375A KR 1019920013034 A KR1019920013034 A KR 1019920013034A KR 920013034 A KR920013034 A KR 920013034A KR 940002375 A KR940002375 A KR 940002375A
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cylindrical
boat
gaas
single crystals
gaas single
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고한준
노용정
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박원근
금성전선 주식회사
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Abstract

본 밭명은 VB법에 의한 GaAs단결정 성장용 원통형 보우트 및 그 지지구조에 관한 것으로, 본 원통형보우트는 경사부와 시이드부가 없이, 상기 원통형부의 일측단을 밀폐하는 하단부만으로 구성되고, 또한 상기 하단부에 레이저에 의해 가공된 구멍을 구비하며, 본 발명의 원통형보우트의 지지구조는 상기 원통형보우트; 상기 원통형보우트가 장입물과 함게 장입되는 앰푸울의 개구부를 밀봉하고 상기 원통형보우트가 놓여지는 플러그; 및 상기 원통형 보우트를 지지하는 Aℓ2O3지지대로 이루어짐으로써, 단결정 성장중 발생하는 결합들을 근본적으로 제거할수 있고, 특히 상기 보우트의 하단부에 구멍을 뚫어 성장중 보우트 내벽에 α-크리스토비라이트 생성을 균일하게 하여 GaAs 용융액과 보우트사이의 융착을 방지하고, 또한 작은 경사부를 구비한 보우트를 사용함으로써, 대구경의 GaAs를 제조할 수 있다.

Description

수직형 브리지만벌에 의한 갈륨비소(GaAs)단결정 성장용 원통형 보우트 및 그 지지구조
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 VB법에 의한 GaAs 단결정성장용 원통형보우트 및 그 지지구조에 대한 단면도,
제3도는 본 발명의 하단에 작은 구멍을 구비하고 있는 VB법에 위한 GaAs단결정성장용 원통형보우트,
제4도는 본 발명이 대구경의 종결정을 제조하는데 사용되는 보우트 형상에 대한 단면도.

Claims (5)

  1. 경사부와 시이부가 없이 원통형부와, 상기 원통형부의 일측단을 밀폐하는 하단부만으로 구성되는 VB법에 의한 GaAs 단결정 원통형 보우드.
  2. 제1항에 있어서, 상기 하단부는 레이저에 의해 가공된 구멍을 갖는 것을 특징으로 하는 VB법에 GaAs단결정 성장용 원통형보우트.
  3. 제2항에 있어서, 상기 0.1내지 0.2mm의 직경을 갖는 것을 특징으로 하는 VB법에 GaAs단결정 성장용 원통형보우트.
  4. 경사부와 싱드부가 없이, 하부내면에 종결정용 단결정이 위치하고, 그 위에 GaAs단결정이 장입되는 원통형부와, 상기 원통형부의 일측단을 밀폐하는 하단부만으로 구성된 원통형보우트; 상기 원통형보우트가 장입물과 함께 장입되는 앰푸울; 상기 앰푸울의 개구부를 밀봉하고, 상기 원통형보우트가 놓여지는 플러그; 및 상기 플러그의 하부면에 설치되어 상기 원통형보우트를 지지하는 Aℓ2O3지지대로 이루어지는 VB법에 의한 GaAs단결정 성장용 원통형보우트의 지지구조.
  5. 원통형부; 상기 원통형부로부터 이어지고 쇼울더각이 90°를 이루는 원추형 경사부; 상기 경사부에 이어지는 시이드부로서 종래의 보우트구조의 시이드부 보다 직경이 큰 시이드부; 및 상기 시이드부를 밀폐하는 하단부로 구성되는 VB법에 의한 대구경의 중결정을 제조하기 위한 원통형보우트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920013034A 1991-07-29 1992-07-22 캐패시터 절연막을 갖는 반도체 장치 및 그 제조방법 KR0131448B1 (ko)

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JP3188512A JP2722873B2 (ja) 1991-07-29 1991-07-29 半導体装置およびその製造方法
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EP0525650A3 (en) 1993-04-07
EP0525650A2 (en) 1993-02-03
EP1143490A1 (en) 2001-10-10
DE69232131D1 (de) 2001-11-22
DE69232131T2 (de) 2002-07-11
US5349494A (en) 1994-09-20
JPH0536899A (ja) 1993-02-12
JP2722873B2 (ja) 1998-03-09
KR0131448B1 (ko) 1998-04-15
EP0525650B1 (en) 2001-10-17

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