KR930701771A - 상 형성 방법 - Google Patents

상 형성 방법

Info

Publication number
KR930701771A
KR930701771A KR1019920703347A KR920703347A KR930701771A KR 930701771 A KR930701771 A KR 930701771A KR 1019920703347 A KR1019920703347 A KR 1019920703347A KR 920703347 A KR920703347 A KR 920703347A KR 930701771 A KR930701771 A KR 930701771A
Authority
KR
South Korea
Prior art keywords
layer
iii
substrate
forming
phase
Prior art date
Application number
KR1019920703347A
Other languages
English (en)
Other versions
KR100187942B1 (ko
Inventor
니콜라스 에릭 아이보리
렌포드 존 대처
Original Assignee
에이. 이. 래스셀레즈
코우티즈 브라더즈 피엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB909014325A external-priority patent/GB9014325D0/en
Priority claimed from GB919106561A external-priority patent/GB9106561D0/en
Application filed by 에이. 이. 래스셀레즈, 코우티즈 브라더즈 피엘씨 filed Critical 에이. 이. 래스셀레즈
Publication of KR930701771A publication Critical patent/KR930701771A/ko
Application granted granted Critical
Publication of KR100187942B1 publication Critical patent/KR100187942B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • H05K3/287—Photosensitive compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/016—Diazonium salts or compounds
    • G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
    • G03F7/0212—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the diazo resins or the polymeric diazonium compounds
    • G03F7/0215—Natural gums; Proteins, e.g. gelatins; Macromolecular carbohydrates, e.g. cellulose; Polyvinyl alcohol and derivatives thereof, e.g. polyvinylacetals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0793—Aqueous alkaline solution, e.g. for cleaning or etching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3452—Solder masks

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Materials For Photolithography (AREA)

Abstract

본 발명은 하기 단계(ⅰ) 내지 (ⅳ)를 포함하는 기판에 패턴화된 상을 형성시키는 방법에 관한 것이다 : (ⅰ) 상기 기판에 광경화성 물질의 수성 유탁액의 층을 형성시키는 단계; (ⅱ) 거의 무수 상태이며, 끈적이지 않는 상태로 상기 층을 건조시키는 단계; (ⅲ) 상기 층을 상에 따라 방사에 노출시켜 방사에 노출된 층의 부분을 경화시키는 단계; 및 (ⅳ) 상기 층의 노출되지 않은 부분(경화되지 않은 부분)을 물로 세척하여 제거하는 단계.

Description

상 형성 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (2)

  1. 하기 단계 (ⅰ) 내지 (ⅳ)를 포함하는 기판에 패턴화된 상을 형성시키는 방법 : (ⅰ) 상기 기판에 광경화성 물질의 수성 유탁액의 층을 형성시키는 단계; (ⅱ) 거의 무수 상태이며, 끈적이지 않는 상태로 상기 층을 건조시키는 단계; (ⅲ) 상기 층을 상에 따라 방사에 노출시켜 방사(radiation)에 노출된 층의 부분을 경화시키는 단계; 및 (ⅳ) 상기 층의 노출되지 않은 부분(경화되지 않은 부분)을 물로 세척하여 제거하는 단계.
  2. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920703347A 1990-06-27 1991-06-27 영상 형성 방법 KR100187942B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB909014325A GB9014325D0 (en) 1990-06-27 1990-06-27 Image-forming process
GB9014325.6 1990-06-27
GB919106561A GB9106561D0 (en) 1991-03-27 1991-03-27 Image-forming process
GB9106561.5 1991-03-27

Publications (2)

Publication Number Publication Date
KR930701771A true KR930701771A (ko) 1993-06-12
KR100187942B1 KR100187942B1 (ko) 1999-06-01

Family

ID=26297254

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920703347A KR100187942B1 (ko) 1990-06-27 1991-06-27 영상 형성 방법

Country Status (7)

Country Link
US (2) US5556735A (ko)
EP (1) EP0536272B1 (ko)
JP (1) JP3071462B2 (ko)
KR (1) KR100187942B1 (ko)
AT (1) ATE185000T1 (ko)
DE (1) DE69131647T2 (ko)
WO (1) WO1992000552A1 (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2269385A (en) * 1992-07-14 1994-02-09 Coates Brothers Plc Coating compositions
JP2718901B2 (ja) * 1994-10-31 1998-02-25 ローム株式会社 半導体装置の製造方法
US5512607A (en) * 1995-06-06 1996-04-30 W. R. Grace & Co.-Conn. Unsaturated epoxy ester with quaternary ammonium and phosphate groups
WO1996041240A1 (en) * 1995-06-07 1996-12-19 W.R. Grace & Co.-Conn. Water photoresist emulsions and methods of preparation thereof
DE69703505T2 (de) * 1996-02-26 2001-06-13 Agfa Gevaert Nv Bildaufzeichnungselement, das eine Zweiphasenbeschichtung mit einer dispergierten hydrophoben photopolymerisierbaren Phase enthält
JP3771714B2 (ja) * 1998-05-12 2006-04-26 互応化学工業株式会社 感光性樹脂組成物及びプリント配線板製造用フォトソルダーレジストインク
ATE528973T1 (de) * 1998-12-22 2011-10-15 Huntsman Adv Mat Switzerland Herstellung von photoresistbeschichtungen
US6555592B2 (en) * 2001-02-27 2003-04-29 Advance Materials Corporation Photothermosetting composition comprising acrylated epoxy resin
KR100407292B1 (ko) * 2001-05-11 2003-11-28 박영곤 피가공물체 표면처리방법
BRPI0411101A (pt) 2003-06-12 2006-07-18 Valspar Sourcing Inc composição de revestimento, método de revestimento, revestimento, e, método de preparação de uma composição de revestimento
WO2005017617A1 (en) 2003-07-17 2005-02-24 Honeywell International Inc. Planarization films for advanced microelectronic applications and devices and methods of production thereof
US20080223530A1 (en) * 2007-03-13 2008-09-18 Vincent Grosso Shade cover attachment for blind

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB665649A (en) * 1949-04-01 1952-01-30 Autotype Company Ltd Improvements in photographic films and processes for producing stencils therewith
GB719084A (en) * 1951-10-15 1954-11-24 Nat Res Dev Electro-forming metal grids
AU4509872A (en) * 1971-08-02 1974-01-31 Rca Corp Making a viewing screen for an apertured-mask cathode-ray tube
JPS5220225B2 (ko) * 1973-07-25 1977-06-02
US4154614A (en) * 1975-07-02 1979-05-15 Nippon Paint Co., Ltd. Photosensitive diazo composition with graft copolymer for use in printing screen
US4186069A (en) * 1978-01-30 1980-01-29 Richardson Graphics Company Photopolymerizable latex systems
EP0030213A1 (de) * 1979-11-29 1981-06-10 Ciba-Geigy Ag Durch Licht vernetzbare Schicht auf Druckformen und Verfahren zur Herstellung von Offset-Druckplatten
EP0083835A3 (en) * 1982-01-12 1984-03-07 Autotype International Limited Stabilization of diazo-resin sensitisers
US4592816A (en) * 1984-09-26 1986-06-03 Rohm And Haas Company Electrophoretic deposition process
GB2202858A (en) * 1987-03-26 1988-10-05 Sericol Group Ltd Photopolymerisable compositions for producing screen printing stencils
GB2213487B (en) * 1987-12-08 1992-01-08 Kansai Paint Co Ltd Method of forming a cured coating film
GB8804044D0 (en) * 1988-02-22 1988-03-23 Coates Brothers Plc Coating compositions

Also Published As

Publication number Publication date
DE69131647T2 (de) 2000-05-18
US5556735A (en) 1996-09-17
US5750291A (en) 1998-05-12
JP3071462B2 (ja) 2000-07-31
DE69131647D1 (de) 1999-10-28
KR100187942B1 (ko) 1999-06-01
EP0536272A1 (en) 1993-04-14
JPH05509175A (ja) 1993-12-16
ATE185000T1 (de) 1999-10-15
EP0536272B1 (en) 1999-09-22
WO1992000552A1 (en) 1992-01-09

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