KR930018657A - 반도체 소자의 제조방법 - Google Patents

반도체 소자의 제조방법 Download PDF

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KR930018657A
KR930018657A KR1019920002630A KR920002630A KR930018657A KR 930018657 A KR930018657 A KR 930018657A KR 1019920002630 A KR1019920002630 A KR 1019920002630A KR 920002630 A KR920002630 A KR 920002630A KR 930018657 A KR930018657 A KR 930018657A
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layer
metal
manufacturing
semiconductor device
heat treatment
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KR100237095B1 (ko
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필리페 빌리암 두샤뜨 요한
헤럴드 리더 알렉
얀 반데르 콜크 게르리트
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루돌프 요한네스 페테르스
엔.브이.필립스 글로아이람펜파브리켄
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
    • H01L21/76889—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances by forming silicides of refractory metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
    • H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/019—Contacts of silicides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/147—Silicides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/934—Sheet resistance, i.e. dopant parameters

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)

Abstract

반도체 소자를 제조하는 방법에 있어서, Co 또는 Ni을 포함하는 층(12)이 절연물질의 영역(8, 9)과 실리콘영역(3, 4, 5, 6)에 접하고 있는 반도체 몸체의 몸체의 표면위에 침착되고, 그런후 반도체 몸체(1)가 열처리동안 어떤 온도로 가열되는데, 그 온도에서 Co 또는 Ni은 절연물질(8,9)과는 상관없이 실리콘(3,4,5,6)과 금속 규화물을 형성한다. 본 발명에 따라, Co 또는 Ni을 포함하는 층(12)의 표면위에 Ti, Zr, Ta, Mo, Nb, Hf 및 W를 구비하는 그룹에서의 금속을 함께하는 이 금속의 비결정질 합금의 층이 퇴적된다. 이와같은 방법으로 해서 금속 규화물은 실리콘 영역(3, 4, 5, 6)위에서만이 형성되고 바로 그들에 인접하고 있는 절연물질의 영역위에서는 형성되지 않는 바, 다시 말해서 본 방법은 자기-정돈 금속 규화물을 낳는다.

Description

반도체 소자의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 및 제2도는 본 발명에 따른 방법에 의해 만들어진 반도체 소자의 제조에서의 2단계.

Claims (7)

  1. Co 또는 Ni을 구비하는 충을 절연물질의 영역과 실리콘의 영역에 접하고 있는 반도체 몸체의 표면위에 침착시키고, 그 후 그 반도체 몸체를 열처리동안 Co 또는 Ni이 절연물질이 아닌 실리콘과 금속 규화물을 형성하도록 하는 온도로 가열하는 반도체 소자의 제조방법으로서, Co 또는 Ni을 포함하는 층을, 상기 금속과, Ti, Zr, Ta, Mo, Nb, Hf 및 W로 구성되는 그룹으로부터의 한 금속의 비결정질 합금층을 상기 표면상에 침착시키고, 열처리 동안 비결정질 합금의 층이 비결정질로 남게되도록 온도를 알맞게 소정하는 것을 특징으로 하는 반도체 소자의 제조방법.
  2. 제1항에 있어서, Ti, Zr 및 W그룹에서의 한 금속을 포함하는 Co의 비결정질 합금 층을 상기 표면상에 침착시키는 것을 특징으로 하는 반도체 소자의 제조방법.
  3. 선행항중 어느 한 항에 있어서, 열처리동안 상기 온도가 350℃ 내지 600℃사이에서 선택되어지는 것을 특징으로 하는 반도체 소자의 제조방법.
  4. 제2항에 있어서, Co가 50내지 75%포함된 합금을 침착시키는 것을 특징으로 하는 반도체 소자의 제조방법.
  5. 선행항중 어느 한항에 있어서, 실리콘과 금속 규화물을 형성하지 않는 비결정질 합금층의 잔존 부분을 열처리후에 패턴화시키는 것을 특징으로 하는 반도체 소자의 제조방법.
  6. 제5항에 있어서, 상기 층의 잔존 부분을 패턴화한 후에, 이 부분의 질화물이 되도록 하는 것을 특징으로 하는 반도체 소자의 제조방법.
  7. 제1내지 4항중 어느 한 항에 있어서, 비결정질의 층이 퇴적하는 동안 붕소를 제공받도록 활용되지며, 열처리가 질소를 포함하는 대기에서 일어나도록 하는 것을 특징으로 하는 반도체 소자의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920002630A 1991-02-26 1992-02-21 반도체 소자의 제조방법 KR100237095B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9100334A NL9100334A (nl) 1991-02-26 1991-02-26 Werkwijze voor het vervaardigen van een halfgeleiderinrichting waarbij een zelfregistrerend kobalt- of nikkel-silicide gevormd wordt.
NL9100334 1992-02-26

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KR930018657A true KR930018657A (ko) 1993-09-22
KR100237095B1 KR100237095B1 (ko) 2000-01-15

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US (1) US5302552A (ko)
EP (1) EP0501561B1 (ko)
JP (1) JP2719863B2 (ko)
KR (1) KR100237095B1 (ko)
DE (1) DE69215926T2 (ko)
NL (1) NL9100334A (ko)

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DE69215926T2 (de) 1997-05-28
JP2719863B2 (ja) 1998-02-25
EP0501561B1 (en) 1996-12-18
JPH0594966A (ja) 1993-04-16
KR100237095B1 (ko) 2000-01-15
EP0501561A1 (en) 1992-09-02
US5302552A (en) 1994-04-12
DE69215926D1 (de) 1997-01-30
NL9100334A (nl) 1992-09-16

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