KR920022408A - 혼합용액의 일정비율을 혼합장치 - Google Patents

혼합용액의 일정비율을 혼합장치 Download PDF

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KR920022408A
KR920022408A KR1019910007867A KR910007867A KR920022408A KR 920022408 A KR920022408 A KR 920022408A KR 1019910007867 A KR1019910007867 A KR 1019910007867A KR 910007867 A KR910007867 A KR 910007867A KR 920022408 A KR920022408 A KR 920022408A
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chemical liquid
chemical
container
teflon
mixing
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KR1019910007867A
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KR930008856B1 (ko
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최원욱
류도현
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문정환
금성일렉트론 주식회사
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Priority to KR1019910007867A priority Critical patent/KR930008856B1/ko
Priority to US07/795,450 priority patent/US5346302A/en
Priority to JP00632892A priority patent/JP3205024B2/ja
Priority to DE4201811A priority patent/DE4201811C2/de
Publication of KR920022408A publication Critical patent/KR920022408A/ko
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Publication of KR930008856B1 publication Critical patent/KR930008856B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/28—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with stationary measuring chambers having constant volume during measurement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2112—Level of material in a container or the position or shape of the upper surface of the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/71—Feed mechanisms
    • B01F35/714—Feed mechanisms for feeding predetermined amounts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/88—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/28—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with stationary measuring chambers having constant volume during measurement
    • G01F11/284—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with stationary measuring chambers having constant volume during measurement combined with electric level detecting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G17/00—Apparatus for or methods of weighing material of special form or property
    • G01G17/02—Apparatus for or methods of weighing material of special form or property for weighing material of filamentary or sheet form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G19/00—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups
    • G01G19/22—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups for apportioning materials by weighing prior to mixing them
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/133—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components with discontinuous action
    • G05D11/134—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components with discontinuous action by sensing the weight of the individual components

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Weting (AREA)
  • Accessories For Mixers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

내용 없음.

Description

혼합용액의 일정비율을 혼합장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2는 본 발명에 의한 약액 정량 토출장치의 구성을 보인 정면도,
제3도는 제2도의 요부 구성을 보인 단면도,
제4도는 본 발명에 의한 혼합용액의 일정비율 혼합장치를 보인 정면도.

Claims (9)

  1. 테프론용기(1)에 공급되는 레벨을 감지하기 위한 약액 레벨 감지부와, 테프론용기(1)의 용적만큼 약액을 케미컬용기(17)로 토출하는 약액 정량 토출부와, 케미컬탱크(2)의 약액을 테프론용기(1)로 자동공급하는 약액 자동 공급부로 구성됨을 특징으로 하는 약액 정량 토출장치.
  2. 제1항에 있어서, 상기 약액 레벨 감지부는 테프론용기(1)의 약액 레벨을 감지하는 에어다이아프램센서(3)와, N2의 압력을 에어다이아프램센서(3)의 사양에 맞도록 조절하는 에어레귤레이터(4)와, N2의 흐름량을 조절하는 니들밸브(5)로 구성됨을 특징으로 하는 약액 정량 토출장치.
  3. 제1항에 있어서 상기 약액 정량 토출부는 정량용기(1a)와 외부용기(1b)로 구분되는 테프론용기(1)와, 정량용액을 케미컬용기(17)로 드레인하는 테프론배관(6) 및 자동밸브(7)와, 외부용기(1b)의 약액을 케미컬 탱크(7)로 이송시키는 테프론배관(8) 및 자동밸브(9)와, 에어필터(10)로 구성됨을 특징으로 하는 약액 정량 토출장치.
  4. 제1항에 있어서, 약액 자동 공급부는 약액이 저장되는 케미컬탱크(2)와, 약액 정량 토출부의 테프론배관(8)에 연결되는 테프론배관(11) 및 자동밸브(12)와, 케미컬탱크(2)의 약액을 테프론용기(1)로 펌핑하기 위한 벨로우즈펌프(13)와, 케미컬탱크(2)의 약액을 테프론용기(1)로 안내하기 위한 테프론배관(14) 및 자동밸브(15)와, 케미컬 탱크(2)의 약액 유무를 감지하는 센서(16)로 구성됨을 특징으로 하는 약액 정량 토출장치.
  5. 제3항에 있어서, 상기 테프론용기(1)의 정량용기(1a) 상측연부에 수개의 요입부(1c)가 연속적으로 형성되어, 정량용기(1a)에 보다 정확한 양의 약액이 담겨지도록 구성된 것을 특징으로 하는 약액 정량 토출 장치.
  6. 제1항 기재의 약액 정량 토출장치와, 각각의 용액을 정확한 비율로 혼합시키는 혼합부와, 혼합용액을 저장탱크로 이송시키기 위한 혼합용액 드레인부와, 콘트롤부로 구성됨을 특징으로 하는 혼합용액의 일정 비율 혼합장치.
  7. 제6항에 있어서, 상기 혼합부는 혼합용액의 무게를 정확하게 측정할 수 있는 전자저울(20)과, 전자저울(20)의 수치를 표시하는 인디케이터(21)와, 각각의 용액이 혼합되는 혼합탱크(17′)와, 상기 혼합탱크(17′)에 대량 및 소량의 용액을 공급하기 위한 제어벨브(22)(23)와, 혼합탱크(17′)에서 저장탱크로 이송되는 혼합용액의 흐름을 제어하는 에어밸브(24)와, 혼합용액을 골고루 혼합시키는 N2버블링장치로 구성됨을 특징으로 하는 혼합용액의 일정비율 혼합장치.
  8. 제6항에 있어서, 상기 혼합용액 드레인부는 혼합용액 혼합탱크(17′)에서 저장탱크로 펌핑하기 위한 드레인 펌프(25)와, 파티클을 제거하기 위한 케미컬 필터(26)로 구성됨을 특징으로 하는 혼합용액의 일정비율 혼합장치.
  9. 제6항에 있어서, 상기 콘트롤부는 회로기판 및 전자부품이 내장됨과 아울러 스위치판넬 및 에러디스플레이 기능을 갖는 콘트롤러(27)인 것을 특징으로 하는 혼합용액의 일정비율 혼합장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910007867A 1991-05-15 1991-05-15 혼합용액의 일정비율 혼합장치 KR930008856B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019910007867A KR930008856B1 (ko) 1991-05-15 1991-05-15 혼합용액의 일정비율 혼합장치
US07/795,450 US5346302A (en) 1991-05-15 1991-11-21 Apparatus for mixing liquids in a certain ratio
JP00632892A JP3205024B2 (ja) 1991-05-15 1992-01-17 液体定量吐出装置および混合液体の一定比率混合装置
DE4201811A DE4201811C2 (de) 1991-05-15 1992-01-24 Vorrichtung zum wiederholten Abgeben von abgemessenen Flüssigkeits-Teilmengen

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Application Number Priority Date Filing Date Title
KR1019910007867A KR930008856B1 (ko) 1991-05-15 1991-05-15 혼합용액의 일정비율 혼합장치

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KR920022408A true KR920022408A (ko) 1992-12-19
KR930008856B1 KR930008856B1 (ko) 1993-09-16

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Country Link
US (1) US5346302A (ko)
JP (1) JP3205024B2 (ko)
KR (1) KR930008856B1 (ko)
DE (1) DE4201811C2 (ko)

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KR20210106137A (ko) * 2020-02-20 2021-08-30 주식회사 오무전기 집진기용 화재방지 및 소화장치

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KR100954564B1 (ko) * 2008-02-04 2010-04-22 세메스 주식회사 약액 공급 시스템 및 이를 포함하는 기판 처리 장치
KR20210106137A (ko) * 2020-02-20 2021-08-30 주식회사 오무전기 집진기용 화재방지 및 소화장치

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Publication number Publication date
DE4201811A1 (de) 1992-11-19
JP3205024B2 (ja) 2001-09-04
JPH05144919A (ja) 1993-06-11
US5346302A (en) 1994-09-13
DE4201811C2 (de) 1995-11-16
KR930008856B1 (ko) 1993-09-16

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