KR920012988A - 액티브 매트릭스 기판 검사장치 - Google Patents
액티브 매트릭스 기판 검사장치 Download PDFInfo
- Publication number
- KR920012988A KR920012988A KR1019910023752A KR910023752A KR920012988A KR 920012988 A KR920012988 A KR 920012988A KR 1019910023752 A KR1019910023752 A KR 1019910023752A KR 910023752 A KR910023752 A KR 910023752A KR 920012988 A KR920012988 A KR 920012988A
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- South Korea
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- active matrix
- matrix substrate
- liquid crystal
- conductive film
- polymer sheet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/07—Non contact-making probes
- G01R1/071—Non contact-making probes containing electro-optic elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/02—Materials and properties organic material
- G02F2202/022—Materials and properties organic material polymeric
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- General Engineering & Computer Science (AREA)
- Liquid Crystal (AREA)
- Mathematical Physics (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 액티브 매트릭스 기판 결함 검사장치를 사용한 액티브 매트릭스 기판 검사방법을 나타내는 다이어 그램도, 제2A도,제2B도, 및 제2C도는 제1도에 도시한 본 발명의 액티브 매트릭스 기판 결함 검사장치를 위한 제조공정을 나타내는 다이어그램도.
Claims (8)
- 액티브 매트릭스 기판 검사장치에 있어서, 투명 절연기판; 상기 기판상의 투명 도전막; 상기 투명 도전막상의 배향막; 액정층이 그 사이에 샌드위치된 상태에서 상기 배향막에 대향하여 배치된 폴리머 시트: 및 상기 배향막과 폴리머 시트사이에 간격을 유지하기 위한 스페이서를 포함하는 것을 특징으로 하는 장치.
- 제1항에 있어서, 상기 폴리머 시트는 광도전성인 것을 특징으로 하는 장치.
- 액티브 매트릭스 기판에서 결함을 검사하기 위한 방법에 있어서, 검사 장치의 폴리머 시트에 대향하여 검사 액티브 매트릭스 기판을 배치하는 단계;액티브 매트릭스 기판상에 형성된 투명 도전막과 액티브 매트릭스 기판상의 화소를 가로질러 전압을 인가하는 단계; 및 액정층에서 전기적 변조를 검사하는 단계를 포함하는 것을 특징으로 하는 방법.
- 어떠한 결함에 대해 액티브 매트릭스 기판을 검사하기 위한 방법에 있어서, 검사장치의 광도전성 폴리머시트에 대향하여 액티브 매트릭스 기판을 배치하는 단계; 액티브 매트릭스 기판상에 형성된 투명 도전막과 액티브 매트릭스 기판상의 화소 전극을 가로질러 전압을 인가하는 단계; 및 액정층에서 발생하는 전기적 변조를 검사하는 단계를 포함하는 것을 특징으로 하는 방법.
- 액티브 매트릭스 기판 검사장치에 있어서, 투명 절연 기판상에 형성된 투명 도전막; 상기 도전막상에 형성된 폴리머 분산형 액정층; 및 상기 액정층상에 형성된 폴리머 시트를 포함하는 것을 특징으로 하는 장치.
- 제5항에 있어서, 상기 폴리머 시트는 가시광 조사에 대한 노출에 의해 도전성으로 되는 것을 특징으로 하는 장치.
- 투명 절연 기판상의 투명 도전막, 도전막상의 폴리머 분산형 액정, 및 액정위의 폴리머 시트를 포함하는 어떠한 액티브 매트릭스 기판검사 장치의 사용에 의해 액티브 매트릭스 기판에서의 결함을 검사하기 위한 방법으로서, 그의 액정이 그 위에 형성된 액티브 매트릭스 소자에 대향하여 위치되도록 액티브 매트릭스 기판 검사장치를 배치하는 단계; 액티브 매트릭스 기판 검사장치의 도전막과 액티브 매트릭스 기판상에 형성된 화소 전극을 가로질러 전압을 인가하는 단계; 및 액티브 매트릭스 기판 검사 장치의 액정층에서의 광학적 특성의 변화율을 검사하는 단계를 포함하는 것을 특징으로 하는 방법.
- 제7항에 있어서, 상기 액티브 매트릭스 기판검사 장치의 폴리머 시트는 가시광 조사에 대한 노출에 의해 광도전성으로 되는 것을 특징으로 하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP90-405237 | 1990-12-21 | ||
JP40523790A JP2622193B2 (ja) | 1990-12-21 | 1990-12-21 | アクティブマトリクス基板検査装置及びアクティブマトリクス基板の検査方法 |
JP3417691A JP2613980B2 (ja) | 1991-02-28 | 1991-02-28 | アクティブマトリクス基板検査装置及びアクティブマトリクス基板の検査方法 |
JP91-34176 | 1991-02-28 | ||
JP3088089A JP2774704B2 (ja) | 1991-04-19 | 1991-04-19 | アクティブマトリクス基板検査装置および方法 |
JP91-88089 | 1991-04-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920012988A true KR920012988A (ko) | 1992-07-28 |
KR950011950B1 KR950011950B1 (ko) | 1995-10-12 |
Family
ID=27288344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910023752A KR950011950B1 (ko) | 1990-12-21 | 1991-12-21 | 액티브매트릭스 기판 검사 장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5258705A (ko) |
EP (1) | EP0493025B1 (ko) |
KR (1) | KR950011950B1 (ko) |
DE (1) | DE69123232T2 (ko) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5377030A (en) * | 1992-03-30 | 1994-12-27 | Sony Corporation | Method for testing active matrix liquid crystal by measuring voltage due to charge in a supplemental capacitor |
US5532615A (en) | 1992-11-25 | 1996-07-02 | Sharp Kabushiki Kaisha | Inspecting method, inspecting apparatus, and defect correcting method |
EP0752583A4 (en) * | 1993-12-24 | 1997-05-07 | Hoechst Ag | DEVICE FOR DETECTING A WIRING FAULT IN A WIRING SUBSTRATE |
KR100414960B1 (ko) * | 1995-04-20 | 2004-03-18 | 가부시끼가이샤 엠푸라스 | 표시패널검사용소켓 |
US5694053A (en) * | 1995-06-07 | 1997-12-02 | Xerox Corporation | Display matrix tester |
US6121059A (en) * | 1998-01-14 | 2000-09-19 | Taiwan Semiconductor Manufacturing Company, Ltd | Method and apparatus for identifying failure sites on IC chips |
US6599762B1 (en) * | 2000-03-08 | 2003-07-29 | Advanced Micro Devices, Inc. | Defect detection using liquid crystal and internal heat source |
JP2002022789A (ja) * | 2000-07-05 | 2002-01-23 | Oht Inc | 検査装置及び検査方法 |
TW532489U (en) * | 2000-11-20 | 2003-05-11 | Hannstar Display Corp | Orientation detector of LCD unit |
JP2004527124A (ja) * | 2001-04-10 | 2004-09-02 | サーノフ コーポレイション | 有機薄膜トランジスタを使用する高性能アクティブマトリクスピクセルを提供する方法及び装置 |
KR100987890B1 (ko) * | 2003-11-13 | 2010-10-13 | 엘지디스플레이 주식회사 | 액정표시소자의 검사장치 및 그 검사방법 |
US7834948B2 (en) * | 2004-06-11 | 2010-11-16 | Sharp Kabushiki Kaisha | Active matrix substrate and liquid crystal display device |
US7164146B2 (en) * | 2004-10-22 | 2007-01-16 | Northrop Grumman Corporation | System for detecting structural defects and features utilizing blackbody self-illumination |
US7462809B2 (en) * | 2004-10-22 | 2008-12-09 | Northrop Grumman Corporation | Spectral filter system for infrared imaging of substrates through coatings |
TWI296705B (en) * | 2004-12-24 | 2008-05-11 | Innolux Display Corp | Device and method for inspecting a matrix substrate |
US7466161B2 (en) * | 2005-04-22 | 2008-12-16 | Photon Dynamics, Inc. | Direct detect sensor for flat panel displays |
KR100738089B1 (ko) * | 2005-12-30 | 2007-07-12 | 삼성전자주식회사 | 표면 전자방출 소자 어레이를 이용한 tft 검사 장치 |
US8801964B2 (en) | 2010-12-22 | 2014-08-12 | Photon Dynamics, Inc. | Encapsulated polymer network liquid crystal material, device and applications |
CN105445977A (zh) * | 2016-01-21 | 2016-03-30 | 武汉华星光电技术有限公司 | 检测液晶显示面板良率的方法 |
WO2018112267A1 (en) | 2016-12-16 | 2018-06-21 | Tesoro Scientific, Inc. | Light emitting diode (led) test apparatus and method of manufacture |
KR20190112294A (ko) | 2017-01-23 | 2019-10-04 | 테소로 사이언티픽, 인코포레이티드 | 발광 다이오드 테스트 장치 및 제조 방법 |
CN110945637B (zh) | 2017-06-20 | 2024-05-17 | 苹果公司 | 发光二极管(led)测试设备和制造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4355278A (en) * | 1980-08-06 | 1982-10-19 | The United States Of America As Represented By The Secretary Of The Air Force | Method for testing and analyzing surface acoustic wave interdigital transducers |
US4538884A (en) * | 1981-07-10 | 1985-09-03 | Canon Kabushiki Kaisha | Electro-optical device and method of operating same |
JPS5810720A (ja) * | 1981-07-10 | 1983-01-21 | Canon Inc | 電気光学装置 |
JPH0614254B2 (ja) * | 1988-05-31 | 1994-02-23 | シャープ株式会社 | 液晶表示装置の電極検査方法 |
DE3920495C1 (en) * | 1989-06-22 | 1990-10-04 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | IC voltage measuring device for CMOS circuit - superimposes second part of beam on reflected beam to produce interference which represents voltage to be measured |
-
1991
- 1991-12-19 US US07/809,910 patent/US5258705A/en not_active Expired - Lifetime
- 1991-12-20 EP EP91311876A patent/EP0493025B1/en not_active Expired - Lifetime
- 1991-12-20 DE DE69123232T patent/DE69123232T2/de not_active Expired - Fee Related
- 1991-12-21 KR KR1019910023752A patent/KR950011950B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0493025B1 (en) | 1996-11-20 |
DE69123232D1 (de) | 1997-01-02 |
EP0493025A3 (en) | 1992-12-02 |
US5258705A (en) | 1993-11-02 |
DE69123232T2 (de) | 1997-04-17 |
EP0493025A2 (en) | 1992-07-01 |
KR950011950B1 (ko) | 1995-10-12 |
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