EP0493025A3 - An active matrix substrate inspecting device - Google Patents

An active matrix substrate inspecting device Download PDF

Info

Publication number
EP0493025A3
EP0493025A3 EP19910311876 EP91311876A EP0493025A3 EP 0493025 A3 EP0493025 A3 EP 0493025A3 EP 19910311876 EP19910311876 EP 19910311876 EP 91311876 A EP91311876 A EP 91311876A EP 0493025 A3 EP0493025 A3 EP 0493025A3
Authority
EP
European Patent Office
Prior art keywords
active matrix
matrix substrate
inspecting device
substrate inspecting
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19910311876
Other versions
EP0493025B1 (en
EP0493025A2 (en
Inventor
Masaya Okamoto
Fumiaki Funada
Shoji Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP40523790A external-priority patent/JP2622193B2/en
Priority claimed from JP3417691A external-priority patent/JP2613980B2/en
Priority claimed from JP3088089A external-priority patent/JP2774704B2/en
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of EP0493025A2 publication Critical patent/EP0493025A2/en
Publication of EP0493025A3 publication Critical patent/EP0493025A3/en
Application granted granted Critical
Publication of EP0493025B1 publication Critical patent/EP0493025B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G01R1/071—Non contact-making probes containing electro-optic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/02—Materials and properties organic material
    • G02F2202/022—Materials and properties organic material polymeric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
EP91311876A 1990-12-21 1991-12-20 An active matrix substrate inspecting device Expired - Lifetime EP0493025B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP40523790A JP2622193B2 (en) 1990-12-21 1990-12-21 Active matrix substrate inspection apparatus and active matrix substrate inspection method
JP405237/90 1990-12-21
JP34176/91 1991-02-28
JP3417691A JP2613980B2 (en) 1991-02-28 1991-02-28 Active matrix substrate inspection apparatus and active matrix substrate inspection method
JP3088089A JP2774704B2 (en) 1991-04-19 1991-04-19 Active matrix substrate inspection apparatus and method
JP88089/91 1991-04-19

Publications (3)

Publication Number Publication Date
EP0493025A2 EP0493025A2 (en) 1992-07-01
EP0493025A3 true EP0493025A3 (en) 1992-12-02
EP0493025B1 EP0493025B1 (en) 1996-11-20

Family

ID=27288344

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91311876A Expired - Lifetime EP0493025B1 (en) 1990-12-21 1991-12-20 An active matrix substrate inspecting device

Country Status (4)

Country Link
US (1) US5258705A (en)
EP (1) EP0493025B1 (en)
KR (1) KR950011950B1 (en)
DE (1) DE69123232T2 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377030A (en) * 1992-03-30 1994-12-27 Sony Corporation Method for testing active matrix liquid crystal by measuring voltage due to charge in a supplemental capacitor
DE69330669T2 (en) 1992-11-25 2002-07-04 Sharp K.K., Osaka Method and device for testing a substrate with an active matrix
WO1995018369A1 (en) * 1993-12-24 1995-07-06 Hoechst Aktiengesellschaft Device for detecting wiring defect of wiring substrate
TW307934B (en) * 1995-04-20 1997-06-11 Enporasu Kk
US5694053A (en) * 1995-06-07 1997-12-02 Xerox Corporation Display matrix tester
US6121059A (en) * 1998-01-14 2000-09-19 Taiwan Semiconductor Manufacturing Company, Ltd Method and apparatus for identifying failure sites on IC chips
US6599762B1 (en) * 2000-03-08 2003-07-29 Advanced Micro Devices, Inc. Defect detection using liquid crystal and internal heat source
JP2002022789A (en) * 2000-07-05 2002-01-23 Oht Inc Inspection device and method
TW532489U (en) * 2000-11-20 2003-05-11 Hannstar Display Corp Orientation detector of LCD unit
US6639281B2 (en) * 2001-04-10 2003-10-28 Sarnoff Corporation Method and apparatus for providing a high-performance active matrix pixel using organic thin-film transistors
KR100987890B1 (en) * 2003-11-13 2010-10-13 엘지디스플레이 주식회사 Apparatus for testing liquid crystal display device and testing method thereof
US7834948B2 (en) * 2004-06-11 2010-11-16 Sharp Kabushiki Kaisha Active matrix substrate and liquid crystal display device
US7164146B2 (en) * 2004-10-22 2007-01-16 Northrop Grumman Corporation System for detecting structural defects and features utilizing blackbody self-illumination
US7462809B2 (en) * 2004-10-22 2008-12-09 Northrop Grumman Corporation Spectral filter system for infrared imaging of substrates through coatings
TWI296705B (en) * 2004-12-24 2008-05-11 Innolux Display Corp Device and method for inspecting a matrix substrate
US7466161B2 (en) * 2005-04-22 2008-12-16 Photon Dynamics, Inc. Direct detect sensor for flat panel displays
KR100738089B1 (en) * 2005-12-30 2007-07-12 삼성전자주식회사 Thin film transistor inspection system using surface electron emission device array
US8801964B2 (en) 2010-12-22 2014-08-12 Photon Dynamics, Inc. Encapsulated polymer network liquid crystal material, device and applications
CN105445977A (en) * 2016-01-21 2016-03-30 武汉华星光电技术有限公司 Method for detecting yield of liquid crystal display panels
EP3555909A4 (en) 2016-12-16 2020-09-16 Tesoro Scientific, Inc. Light emitting diode (led) test apparatus and method of manufacture
JP2020506541A (en) 2017-01-23 2020-02-27 テソロ・サイエンティフィック・インコーポレーテッド Light emitting diode (LED) inspection apparatus and manufacturing method
JP7258781B2 (en) 2017-06-20 2023-04-17 アップル インコーポレイテッド Light Emitting Diode (LED) Test Apparatus and Manufacturing Method
CN114578591A (en) * 2020-12-01 2022-06-03 群创光电股份有限公司 Method for manufacturing packaged circuit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355278A (en) * 1980-08-06 1982-10-19 The United States Of America As Represented By The Secretary Of The Air Force Method for testing and analyzing surface acoustic wave interdigital transducers
DE3920495C1 (en) * 1989-06-22 1990-10-04 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De IC voltage measuring device for CMOS circuit - superimposes second part of beam on reflected beam to produce interference which represents voltage to be measured

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4538884A (en) * 1981-07-10 1985-09-03 Canon Kabushiki Kaisha Electro-optical device and method of operating same
JPS5810720A (en) * 1981-07-10 1983-01-21 Canon Inc Electrooptical device
JPH0614254B2 (en) * 1988-05-31 1994-02-23 シャープ株式会社 Liquid crystal display device electrode inspection method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355278A (en) * 1980-08-06 1982-10-19 The United States Of America As Represented By The Secretary Of The Air Force Method for testing and analyzing surface acoustic wave interdigital transducers
DE3920495C1 (en) * 1989-06-22 1990-10-04 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De IC voltage measuring device for CMOS circuit - superimposes second part of beam on reflected beam to produce interference which represents voltage to be measured

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
ELECTRONIC DESIGN. vol. 19, 13 September 1967, HASBROUCK HEIGHTS, NEW JERSEY pages 71 - 79 M. LAURIENTE ET AL. 'LIQUID CRYSTALS PLOT THE HOT SPOTS' *
IBM TECHNICAL DISCLOSURE BULLETIN. vol. 33, no. 2, July 1990, NEW YORK US pages 130 - 131 'LIQUID CRYSTAL-BASED TEST HEAD' *
PATENT ABSTRACTS OF JAPAN vol. 14, no. 98 (P-1011)22 February 1990 & JP-A-1 303 485 ( SHARP ) 7 December 1989 *

Also Published As

Publication number Publication date
US5258705A (en) 1993-11-02
DE69123232D1 (en) 1997-01-02
EP0493025B1 (en) 1996-11-20
DE69123232T2 (en) 1997-04-17
KR950011950B1 (en) 1995-10-12
KR920012988A (en) 1992-07-28
EP0493025A2 (en) 1992-07-01

Similar Documents

Publication Publication Date Title
EP0493025A3 (en) An active matrix substrate inspecting device
EP0450941A3 (en) An active matrix display device
EP0484965A3 (en) Active matrix substrate
EP0441595A3 (en) An active matrix display device
EP0430592A3 (en) An active matrix display device
EP0514218A3 (en) An active matrix substrate
KR970009405B1 (en) Active matrix type display device
DE69028581D1 (en) Thin film semiconductor matrix device
GB2217910B (en) Organic thin film device
DE69308242D1 (en) Active matrix display device
GB2247957B (en) Testing device
GB9117680D0 (en) Electronic matrix array devices
AU8411791A (en) Stressing device
EP0512840A3 (en) An active matrix display device
AU4374493A (en) Inspection device
EP0409074A3 (en) Optical-electronic device
EP0448316A3 (en) Substrate holding device
GB8924601D0 (en) Method for manufacturing organic semiconductor thin film and semiconductor device comprising the thin film
EP0599623A3 (en) Inspecting method and apparatus for an active matrix substrate.
GB2240400B (en) Adhesive testing device
DE68917651D1 (en) Active matrix display device.
AU8453291A (en) Testing device
EP0488808A3 (en) An active matrix substrate
EP0488802A3 (en) An active matrix display device
EP0482737A3 (en) Active matrix display device

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR GB NL

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): DE FR GB NL

17P Request for examination filed

Effective date: 19930209

17Q First examination report despatched

Effective date: 19941121

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB NL

ET Fr: translation filed
REF Corresponds to:

Ref document number: 69123232

Country of ref document: DE

Date of ref document: 19970102

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20011212

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20011219

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20011228

Year of fee payment: 11

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20020109

Year of fee payment: 11

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20021220

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030701

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030701

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20021220

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 20030701

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030901

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST