DE69123232D1 - Inspektionsgerät für eine aktive Matrix - Google Patents

Inspektionsgerät für eine aktive Matrix

Info

Publication number
DE69123232D1
DE69123232D1 DE69123232T DE69123232T DE69123232D1 DE 69123232 D1 DE69123232 D1 DE 69123232D1 DE 69123232 T DE69123232 T DE 69123232T DE 69123232 T DE69123232 T DE 69123232T DE 69123232 D1 DE69123232 D1 DE 69123232D1
Authority
DE
Germany
Prior art keywords
active matrix
inspection device
inspection
matrix
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69123232T
Other languages
English (en)
Other versions
DE69123232T2 (de
Inventor
Masaya Okamoto
Fumiaki Funada
Shoji Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP40523790A external-priority patent/JP2622193B2/ja
Priority claimed from JP3417691A external-priority patent/JP2613980B2/ja
Priority claimed from JP3088089A external-priority patent/JP2774704B2/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE69123232D1 publication Critical patent/DE69123232D1/de
Application granted granted Critical
Publication of DE69123232T2 publication Critical patent/DE69123232T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G01R1/071—Non contact-making probes containing electro-optic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/02—Materials and properties organic material
    • G02F2202/022—Materials and properties organic material polymeric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
DE69123232T 1990-12-21 1991-12-20 Inspektionsgerät für eine aktive Matrix Expired - Fee Related DE69123232T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP40523790A JP2622193B2 (ja) 1990-12-21 1990-12-21 アクティブマトリクス基板検査装置及びアクティブマトリクス基板の検査方法
JP3417691A JP2613980B2 (ja) 1991-02-28 1991-02-28 アクティブマトリクス基板検査装置及びアクティブマトリクス基板の検査方法
JP3088089A JP2774704B2 (ja) 1991-04-19 1991-04-19 アクティブマトリクス基板検査装置および方法

Publications (2)

Publication Number Publication Date
DE69123232D1 true DE69123232D1 (de) 1997-01-02
DE69123232T2 DE69123232T2 (de) 1997-04-17

Family

ID=27288344

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123232T Expired - Fee Related DE69123232T2 (de) 1990-12-21 1991-12-20 Inspektionsgerät für eine aktive Matrix

Country Status (4)

Country Link
US (1) US5258705A (de)
EP (1) EP0493025B1 (de)
KR (1) KR950011950B1 (de)
DE (1) DE69123232T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5377030A (en) * 1992-03-30 1994-12-27 Sony Corporation Method for testing active matrix liquid crystal by measuring voltage due to charge in a supplemental capacitor
US5532615A (en) 1992-11-25 1996-07-02 Sharp Kabushiki Kaisha Inspecting method, inspecting apparatus, and defect correcting method
EP0752583A4 (de) * 1993-12-24 1997-05-07 Hoechst Ag Vorrichtung zum nachweis von verdrahtungsfehlern auf einer leiterplatte
KR100414960B1 (ko) * 1995-04-20 2004-03-18 가부시끼가이샤 엠푸라스 표시패널검사용소켓
US5694053A (en) * 1995-06-07 1997-12-02 Xerox Corporation Display matrix tester
US6121059A (en) * 1998-01-14 2000-09-19 Taiwan Semiconductor Manufacturing Company, Ltd Method and apparatus for identifying failure sites on IC chips
US6599762B1 (en) * 2000-03-08 2003-07-29 Advanced Micro Devices, Inc. Defect detection using liquid crystal and internal heat source
JP2002022789A (ja) * 2000-07-05 2002-01-23 Oht Inc 検査装置及び検査方法
TW532489U (en) * 2000-11-20 2003-05-11 Hannstar Display Corp Orientation detector of LCD unit
JP2004527124A (ja) * 2001-04-10 2004-09-02 サーノフ コーポレイション 有機薄膜トランジスタを使用する高性能アクティブマトリクスピクセルを提供する方法及び装置
KR100987890B1 (ko) * 2003-11-13 2010-10-13 엘지디스플레이 주식회사 액정표시소자의 검사장치 및 그 검사방법
US7834948B2 (en) * 2004-06-11 2010-11-16 Sharp Kabushiki Kaisha Active matrix substrate and liquid crystal display device
US7164146B2 (en) * 2004-10-22 2007-01-16 Northrop Grumman Corporation System for detecting structural defects and features utilizing blackbody self-illumination
US7462809B2 (en) * 2004-10-22 2008-12-09 Northrop Grumman Corporation Spectral filter system for infrared imaging of substrates through coatings
TWI296705B (en) * 2004-12-24 2008-05-11 Innolux Display Corp Device and method for inspecting a matrix substrate
US7466161B2 (en) * 2005-04-22 2008-12-16 Photon Dynamics, Inc. Direct detect sensor for flat panel displays
KR100738089B1 (ko) * 2005-12-30 2007-07-12 삼성전자주식회사 표면 전자방출 소자 어레이를 이용한 ｔｆｔ 검사 장치
US8801964B2 (en) 2010-12-22 2014-08-12 Photon Dynamics, Inc. Encapsulated polymer network liquid crystal material, device and applications
CN105445977A (zh) * 2016-01-21 2016-03-30 武汉华星光电技术有限公司 检测液晶显示面板良率的方法
WO2018112267A1 (en) 2016-12-16 2018-06-21 Tesoro Scientific, Inc. Light emitting diode (led) test apparatus and method of manufacture
KR20190112294A (ko) 2017-01-23 2019-10-04 테소로 사이언티픽, 인코포레이티드 발광 다이오드 테스트 장치 및 제조 방법
CN110945637B (zh) 2017-06-20 2024-05-17 苹果公司 发光二极管(led)测试设备和制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355278A (en) * 1980-08-06 1982-10-19 The United States Of America As Represented By The Secretary Of The Air Force Method for testing and analyzing surface acoustic wave interdigital transducers
US4538884A (en) * 1981-07-10 1985-09-03 Canon Kabushiki Kaisha Electro-optical device and method of operating same
JPS5810720A (ja) * 1981-07-10 1983-01-21 Canon Inc 電気光学装置
JPH0614254B2 (ja) * 1988-05-31 1994-02-23 シャープ株式会社 液晶表示装置の電極検査方法
DE3920495C1 (en) * 1989-06-22 1990-10-04 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De IC voltage measuring device for CMOS circuit - superimposes second part of beam on reflected beam to produce interference which represents voltage to be measured

Also Published As

Publication number Publication date
KR920012988A (ko) 1992-07-28
EP0493025B1 (de) 1996-11-20
EP0493025A3 (en) 1992-12-02
US5258705A (en) 1993-11-02
DE69123232T2 (de) 1997-04-17
EP0493025A2 (de) 1992-07-01
KR950011950B1 (ko) 1995-10-12

Similar Documents

Publication Publication Date Title
DE69123232D1 (de) Inspektionsgerät für eine aktive Matrix
DE69007113D1 (de) Prüfvorrichtung für thermalabbildungseinrichtungen.
DE69420555T2 (de) Umleitgitteranordnung für eine schubumkehrvorrichtung
DE3887937D1 (de) Inspektionsvorrichtung.
NO931835D0 (no) Ikke-destruktivt testsystem
DE69129892T2 (de) Vorrichtung für eine günstige Route-Auswahl
DE69032623T2 (de) Probentesteinheit
DE68922908D1 (de) Keilform für eine sauerstoffvorrichtung.
DE69030231D1 (de) Vorrichtung für Halbleiterlithographie
DE69130835T2 (de) Besamungssonde
DE69014782D1 (de) Transporteinheit für Bilderzeugungsgerät.
DE68920018D1 (de) Optisches Untersuchungsgerät.
DE69130755D1 (de) Prüfeinrichtung
DE59201916D1 (de) Montagevorrichtung für eine Winkelmesseinrichtung.
DE59300703D1 (de) Transporteinrichtung für eine Analysenvorrichtung.
DE69012674D1 (de) Untersuchungsgerät für Rohre.
NO911895D0 (no) Anordning for korrigering av et individs emosjonelle tilstand.
KR900012121A (ko) 액티브 매트릭스 표시장치의 제조방법
DE69106290D1 (de) Testvorrichtung.
FI920055A0 (fi) Mikrobiologisk testanordning.
DE69128649T2 (de) Elektrodenstruktur für eine elektrophoretische anzeigevorrichtung.
DE58905661D1 (de) Lichtverteiler für eine Röntgendiagnostikeinrichtung.
DE69013610D1 (de) Aktives Matrixanzeigegerät.
DE69109708D1 (de) Positioniervorrichtung und Sensor für Fläschchen.
DE69020191D1 (de) Bandlageranordnung für Prüfvorrichtung.

Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee