KR920001242A - 포지티브 레지스트 조성물 - Google Patents

포지티브 레지스트 조성물 Download PDF

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Publication number
KR920001242A
KR920001242A KR1019910008749A KR910008749A KR920001242A KR 920001242 A KR920001242 A KR 920001242A KR 1019910008749 A KR1019910008749 A KR 1019910008749A KR 910008749 A KR910008749 A KR 910008749A KR 920001242 A KR920001242 A KR 920001242A
Authority
KR
South Korea
Prior art keywords
resist composition
positive resist
hydroxyl group
ortho
aldehyde
Prior art date
Application number
KR1019910008749A
Other languages
English (en)
Other versions
KR0170395B1 (ko
Inventor
야스노리 우에따니
하루요시 오사끼
나오끼 다께야마
Original Assignee
모리 히데오
스미또모가가꾸 고오교 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 모리 히데오, 스미또모가가꾸 고오교 가부시끼가이샤 filed Critical 모리 히데오
Publication of KR920001242A publication Critical patent/KR920001242A/ko
Application granted granted Critical
Publication of KR0170395B1 publication Critical patent/KR0170395B1/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
    • C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
    • C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
    • C08G8/20—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with polyhydric phenols

Abstract

내용 없음

Description

포지티브 레지스트 조성물
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (1)

  1. 감방사선성 물질, 및 알데히드와 하기식의 화합물을 축합반응시켜 수득한 알칼리-용해성 수지를 함유하는 포지티브 레지스트 조성물 :
    (식중 R1∼R9는 동일하거나 상이하며 독립적으로 수소원자, 알킬기, 할로겐 원자 또는 히드록실기이다. 단 R1∼R9중 적어도 하나는 히드록실기이며 전술한 적어도 하나의 히드록실기의 오르토 및 파라위치에서 그들 중 적어도 둘은 수소 둘은 수소 원자이다)
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910008749A 1990-06-05 1991-05-28 포지티브 레지스트 조성물 KR0170395B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14773790 1990-06-05
JP2-147737 1990-06-05

Publications (2)

Publication Number Publication Date
KR920001242A true KR920001242A (ko) 1992-01-30
KR0170395B1 KR0170395B1 (ko) 1999-03-20

Family

ID=15437005

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910008749A KR0170395B1 (ko) 1990-06-05 1991-05-28 포지티브 레지스트 조성물

Country Status (5)

Country Link
EP (1) EP0460416B1 (ko)
KR (1) KR0170395B1 (ko)
CA (1) CA2042788A1 (ko)
DE (1) DE69121475T2 (ko)
MX (1) MX171231B (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2092774A1 (en) * 1992-04-10 1993-10-11 Yuji Ueda Positive photoresist composition
JP2944327B2 (ja) * 1992-09-14 1999-09-06 富士写真フイルム株式会社 ポジ型感光性平版印刷版
EP0628599B1 (en) * 1992-12-24 1998-12-09 Sumitomo Chemical Company Limited Photosensitive resin composition for color filter
US5876895A (en) * 1992-12-24 1999-03-02 Sumitomo Chemical Company, Limited Photosensitive resin composition for color filter
JP3230925B2 (ja) * 1994-04-12 2001-11-19 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
WO2019117479A1 (ko) 2017-12-12 2019-06-20 주식회사 엘지화학 공급 스페이서 및 이를 포함하는 역삼투압 필터 모듈

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143329A (en) * 1981-03-03 1982-09-04 Nippon Telegr & Teleph Corp <Ntt> Photosensitive resin and its production

Also Published As

Publication number Publication date
DE69121475T2 (de) 1997-01-23
EP0460416A1 (en) 1991-12-11
KR0170395B1 (ko) 1999-03-20
DE69121475D1 (de) 1996-09-26
CA2042788A1 (en) 1991-12-06
EP0460416B1 (en) 1996-08-21
MX171231B (es) 1993-10-12

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