MX171231B - Composicion de capa protectora positiva - Google Patents

Composicion de capa protectora positiva

Info

Publication number
MX171231B
MX171231B MX025684A MX2568491A MX171231B MX 171231 B MX171231 B MX 171231B MX 025684 A MX025684 A MX 025684A MX 2568491 A MX2568491 A MX 2568491A MX 171231 B MX171231 B MX 171231B
Authority
MX
Mexico
Prior art keywords
protective layer
layer composition
hydroxyl group
positive protective
compound
Prior art date
Application number
MX025684A
Other languages
English (en)
Inventor
Yasunori Uetani
Haruyoshi Osaki
Naoki Takeyama
Original Assignee
Sumitomo Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co filed Critical Sumitomo Chemical Co
Publication of MX171231B publication Critical patent/MX171231B/es

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
    • C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
    • C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
    • C08G8/20—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with polyhydric phenols

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Phenolic Resins Or Amino Resins (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

La presente invención se refiere a una composición de capa protectora positiva, caracterizada porque comprende un compuesto sensible a la radiación y una resina soluble en álcali, que es obtenible mediante una reacción de condensación de un aldehído y un compuesto de la fórmula; donde R1 y R9 son los mismos o diferente, e independientemente un átomo de hidrógeno, un grupo alquilo, un átomo de halógeno o un grupo hidróxilo, siempre y que al menos uno de R1 a R9 sea un grupo hidróxilo, y al menos dos de ellos en la posición orto- y para con respecto a al menos un grupo hidróxilo, sean grupos hidrógeno.
MX025684A 1990-06-05 1991-05-07 Composicion de capa protectora positiva MX171231B (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14773790 1990-06-05

Publications (1)

Publication Number Publication Date
MX171231B true MX171231B (es) 1993-10-12

Family

ID=15437005

Family Applications (1)

Application Number Title Priority Date Filing Date
MX025684A MX171231B (es) 1990-06-05 1991-05-07 Composicion de capa protectora positiva

Country Status (5)

Country Link
EP (1) EP0460416B1 (es)
KR (1) KR0170395B1 (es)
CA (1) CA2042788A1 (es)
DE (1) DE69121475T2 (es)
MX (1) MX171231B (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2092774A1 (en) * 1992-04-10 1993-10-11 Yuji Ueda Positive photoresist composition
JP2944327B2 (ja) * 1992-09-14 1999-09-06 富士写真フイルム株式会社 ポジ型感光性平版印刷版
US5876895A (en) * 1992-12-24 1999-03-02 Sumitomo Chemical Company, Limited Photosensitive resin composition for color filter
DE69322499T2 (de) * 1992-12-24 1999-04-29 Sumitomo Chemical Co., Ltd., Osaka Lichtempfindliche harzzusammensetzung für farbfilter
JP3230925B2 (ja) * 1994-04-12 2001-11-19 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
WO2019117479A1 (ko) 2017-12-12 2019-06-20 주식회사 엘지화학 공급 스페이서 및 이를 포함하는 역삼투압 필터 모듈

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143329A (en) * 1981-03-03 1982-09-04 Nippon Telegr & Teleph Corp <Ntt> Photosensitive resin and its production

Also Published As

Publication number Publication date
DE69121475D1 (de) 1996-09-26
KR920001242A (ko) 1992-01-30
EP0460416B1 (en) 1996-08-21
DE69121475T2 (de) 1997-01-23
KR0170395B1 (ko) 1999-03-20
EP0460416A1 (en) 1991-12-11
CA2042788A1 (en) 1991-12-06

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