KR900701649A - 저비소 고순도 무수 플루오르화수소의 제조방법 - Google Patents
저비소 고순도 무수 플루오르화수소의 제조방법Info
- Publication number
- KR900701649A KR900701649A KR1019900700477A KR900700477A KR900701649A KR 900701649 A KR900701649 A KR 900701649A KR 1019900700477 A KR1019900700477 A KR 1019900700477A KR 900700477 A KR900700477 A KR 900700477A KR 900701649 A KR900701649 A KR 900701649A
- Authority
- KR
- South Korea
- Prior art keywords
- process according
- arsenic
- catalyst component
- hydrogen fluoride
- anhydrous hydrogen
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G28/00—Compounds of arsenic
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/195—Separation; Purification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/195—Separation; Purification
- C01B7/196—Separation; Purification by distillation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Catalysts (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (10)
- (a) 비소 오염된 무수 플루오르화수소를, 촉매적양의 (i) 몰리브덴, 몰리브덴화합물, 바나듐 및 바나듐화합물로 구성된 군으로부터 선택된 성분 및 (ii)인산염으로 구성되는 촉매존재하에서, 무수 플루오로화수소내의 휘발성 3가 비소불순물을 비휘발성 5가 비소 화합물로 산화시키기에 적절한 온도와 시간에서 과산화수소와 접촉시켜 비소불순물을 산화시키고: (b) 결과의 혼합물을 증류하여 감소된 저수준의 비소불순물을 함유하는 무수 플루오르화수소를 회수함을 특징으로 하는, 저비소 고순도 플루오르화수소의 제조방법.
- 제1항에 있어서, 비소 오염된 무수 플루오르화수소가 과산화수소에 의한 비소불순물 산화를 저해하는 양의 유기오염물질을 함유하지 않는 것임을 특징으로 하는 제조방법.
- 제1항에 있어서, 비소오염된 무수 플루오르화수소가 유기물질로 오염된 것이며, 그 유기물질을 산화시키는 산화제와 접촉처리됨을 특징으로하는 제조방법.
- 제1항에 있어서, 촉매성분(i)의 유기 몰리브덴 화합물인 것을 특징으로하는 제조방법.
- 제1항에 있어서, 촉매성분(i)이 바나듐인 것을 특징으로 하는 제조방법.
- 제1항에 있어서, 촉매성분(i)이 유기 바나듐 화합물인 것을 특징으로 하는 제조방법.
- 제1항에 있어서, 촉매성분(i)이 무기 바나듐 화합물인 것을 특징으로 하는 제조방법.
- 제1항에 있어서, 촉매성분(i)이 무기 바나듐산 암모늄인 것을 특징으로 하는 제조방법.
- 제1항에 있어서, 촉매성분(i)이 무기 바나듐산나트륨인 것을 특징으로 하는 제조방법.
- 제1항에 있어서, 촉매성분(i)의 양이 100%HF 기준으로 3.7ppm 이상이고, 촉매성분(ii)의 양이 100%HF 기준으로 3.5ppm 이상인 것을 특징으로 하는 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US217.497 | 1988-07-11 | ||
US217,497 | 1988-07-11 | ||
US07/217,497 US4929435A (en) | 1987-02-12 | 1988-07-11 | Manufacture of high purity low arsenic anhydrous hydrogen fluoride |
PCT/US1989/002902 WO1990000521A1 (en) | 1988-07-11 | 1989-06-29 | Manufacture of high purity low arsenic anhydrous hydrogen fluoride |
Publications (2)
Publication Number | Publication Date |
---|---|
KR900701649A true KR900701649A (ko) | 1990-12-04 |
KR970000892B1 KR970000892B1 (ko) | 1997-01-21 |
Family
ID=22811337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900700477A KR970000892B1 (ko) | 1988-07-11 | 1989-06-29 | 저비소 고순도 무수 플루오르화수소의 제조방법 |
Country Status (10)
Country | Link |
---|---|
US (1) | US4929435A (ko) |
EP (2) | EP0428547A1 (ko) |
JP (1) | JPH0657602B2 (ko) |
KR (1) | KR970000892B1 (ko) |
AU (1) | AU636298B2 (ko) |
CA (1) | CA1314382C (ko) |
DE (1) | DE68906973T2 (ko) |
ES (1) | ES2055065T3 (ko) |
MX (1) | MX167322B (ko) |
WO (1) | WO1990000521A1 (ko) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4960580A (en) * | 1989-10-31 | 1990-10-02 | E. I. Du Pont De Nemours And Company | Process for purifying hydrogen fluoride |
JPH05504754A (ja) * | 1990-03-02 | 1993-07-22 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | フッ化水素の精製方法 |
US5089241A (en) * | 1990-12-20 | 1992-02-18 | Allied-Signal Inc. | Process for converting hexafluoroarsenic acid or any salt thereof to arsenic acid or salt thereof which can then be rendered nonhazardous |
GB9300956D0 (en) * | 1993-01-19 | 1993-03-10 | British Nuclear Fuels Plc | Dehydration of mixtures |
US5846386A (en) * | 1994-01-07 | 1998-12-08 | Startec Ventures, Inc. | On-site ammonia purification for semiconductor manufacture |
US5722442A (en) * | 1994-01-07 | 1998-03-03 | Startec Ventures, Inc. | On-site generation of ultra-high-purity buffered-HF for semiconductor processing |
US5846387A (en) * | 1994-01-07 | 1998-12-08 | Air Liquide Electronics Chemicals & Services, Inc. | On-site manufacture of ultra-high-purity hydrochloric acid for semiconductor processing |
US5496778A (en) * | 1994-01-07 | 1996-03-05 | Startec Ventures, Inc. | Point-of-use ammonia purification for electronic component manufacture |
US5785820A (en) * | 1994-01-07 | 1998-07-28 | Startec Ventures, Inc. | On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing |
US6350425B2 (en) * | 1994-01-07 | 2002-02-26 | Air Liquide America Corporation | On-site generation of ultra-high-purity buffered-HF and ammonium fluoride |
MY132240A (en) * | 1995-06-05 | 2007-09-28 | Startec Ventures Inc | On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing |
WO1996039264A1 (en) * | 1995-06-05 | 1996-12-12 | Startec Ventures, Inc. | On-site manufacture of ultra-high-purity hydrochloric acid for semiconductor processing |
KR100379887B1 (ko) * | 1995-06-05 | 2003-06-12 | 스타텍 벤처스, 인코포레이티드 | 반도체제조용암모니아의온-사이트(on-site)정제 |
AU6333896A (en) * | 1995-06-05 | 1996-12-24 | Startec Ventures, Inc. | On-site generation of ultra-high-purity buffered-hf for semi conductor processing |
EP0830316A1 (en) * | 1995-06-05 | 1998-03-25 | Startec Ventures, Inc. | Point-of-use ammonia purification for electronic component manufacture |
US6001223A (en) * | 1995-07-07 | 1999-12-14 | Air Liquide America Corporation | On-site ammonia purification for semiconductor manufacture |
WO1997018158A1 (en) * | 1995-11-13 | 1997-05-22 | Alliedsignal Inc. | Manufacture of very low arsenic hydrogen fluoride |
US6214173B1 (en) | 1996-06-05 | 2001-04-10 | Air Liquide Electronics Chemicals & Services, Inc. | On-site manufacture of ultra-high-purity nitric acid |
DE10031563B4 (de) | 2000-06-28 | 2009-01-29 | Lanxess Deutschland Gmbh | Verfahren zur Herstellung von perfluororganischen Verbindungen durch elektrochemische Fluorierung |
DE10031565B4 (de) | 2000-06-28 | 2006-02-23 | Bulan, Andreas | Verfahren zur Herstellung von perfluorierten organischen Verbindungen durch elektrochemische Fluorierung |
US20080003172A1 (en) * | 2006-06-29 | 2008-01-03 | Honeywell International Inc. | Continuous hydrolysis of hexafluoroarsenic acid |
JP5595283B2 (ja) * | 2008-11-28 | 2014-09-24 | 国立大学法人京都大学 | フッ化水素の精製方法 |
MX357878B (es) | 2014-12-18 | 2018-07-27 | Mexichem Fluor Sa De Capital Variable | Proceso para la purificación del ácido fluorhídrico incluyendo la obtención del subproducto ácido arsenioso. |
CN108862200B (zh) * | 2018-07-31 | 2020-04-28 | 苏州香榭轩表面工程技术咨询有限公司 | 一种超高纯氢氟酸的制备方法 |
CN114195099B (zh) * | 2021-12-16 | 2023-04-28 | 浙江博瑞电子科技有限公司 | 一种多通道微反应器原位除砷制备电子级氟化氢和电子级氢氟酸的方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE62309C (de) * | Dr. R. HIRSCH in Berlin W., Potsdamerstr. 113 | Verfahren zur Darstellung von Diphenylamin, o- und p-Amidodiphenyl | ||
FR1335675A (fr) * | 1961-07-27 | 1963-08-23 | I C P M Ind Chimiche Porto Mar | Procédé pour l'élimination de composés d'arsenic et d'antimoine de l'acide fluorhdrique moyennant la formation de complexes, facilement séparables, entre l'arsenic et l'antimoine, le fluor et un métal alcalin |
BE620698A (ko) * | 1961-07-27 | |||
BE632837A (ko) * | 1962-06-04 | 1963-10-21 | ||
US3663382A (en) * | 1969-08-19 | 1972-05-16 | Du Pont | Process of recovering hydrogen fluoride free of arsenic by distillation |
US3689370A (en) * | 1970-02-20 | 1972-09-05 | Daikin Ind Ltd | Process for purifying hydrofluoric acid by distillation with an oxidizing agent and a ferrous salt |
US3687622A (en) * | 1970-11-30 | 1972-08-29 | Du Pont | High pressure purification of hydrogen fluoride |
US4032621A (en) * | 1975-11-24 | 1977-06-28 | E. I. Du Pont De Nemours And Company | Preparation of hydrogen fluoride with low levels of arsenic, iron and sulfite |
JPS5354463A (en) * | 1976-10-27 | 1978-05-17 | Nec Corp | Microwave tube |
US4083941A (en) * | 1977-04-18 | 1978-04-11 | E. I. Du Pont De Nemours And Company | Purification of anhydrous hydrogen fluoride |
DE2942545A1 (de) * | 1979-10-20 | 1981-06-04 | Riedel-De Haen Ag, 3016 Seelze | Verfahren zur herstellung einer gereinigten oxidationsbestaendigen anorganischen saeure und danach erhaltene saeure |
US4491570A (en) * | 1984-05-03 | 1985-01-01 | Pennwalt Corporation | Removal of arsenic from hydrogen fluoride |
JPH0238521B2 (ja) * | 1984-12-25 | 1990-08-30 | Hashimoto Chemical Ind | Futsukasuisosannoseiseiho |
US4752380A (en) * | 1986-09-23 | 1988-06-21 | Union Oil Company Of California | Arsenic removal from shale oil by chloride addition |
US4752379A (en) * | 1986-09-23 | 1988-06-21 | Union Oil Company Of California | Arsenic removal from shale oil by oxidation |
US4756899A (en) * | 1987-02-12 | 1988-07-12 | Allied-Signal Inc. | Manufacture of high purity low arsenic anhydrous hydrogen fluoride |
-
1988
- 1988-07-11 US US07/217,497 patent/US4929435A/en not_active Expired - Lifetime
-
1989
- 1989-06-29 EP EP89908290A patent/EP0428547A1/en active Pending
- 1989-06-29 KR KR1019900700477A patent/KR970000892B1/ko not_active IP Right Cessation
- 1989-06-29 JP JP1508034A patent/JPH0657602B2/ja not_active Expired - Lifetime
- 1989-06-29 EP EP89306641A patent/EP0351107B1/en not_active Expired - Lifetime
- 1989-06-29 AU AU38725/89A patent/AU636298B2/en not_active Ceased
- 1989-06-29 WO PCT/US1989/002902 patent/WO1990000521A1/en not_active Application Discontinuation
- 1989-06-29 ES ES89306641T patent/ES2055065T3/es not_active Expired - Lifetime
- 1989-06-29 DE DE8989306641T patent/DE68906973T2/de not_active Expired - Lifetime
- 1989-07-06 MX MX016701A patent/MX167322B/es unknown
- 1989-07-07 CA CA000605017A patent/CA1314382C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1990000521A1 (en) | 1990-01-25 |
DE68906973D1 (de) | 1993-07-15 |
EP0428547A1 (en) | 1991-05-29 |
JPH0657602B2 (ja) | 1994-08-03 |
DE68906973T2 (de) | 1993-09-16 |
ES2055065T3 (es) | 1994-08-16 |
AU3872589A (en) | 1990-02-05 |
JPH03501965A (ja) | 1991-05-09 |
EP0351107B1 (en) | 1993-06-09 |
CA1314382C (en) | 1993-03-16 |
MX167322B (es) | 1993-03-16 |
KR970000892B1 (ko) | 1997-01-21 |
EP0351107A1 (en) | 1990-01-17 |
AU636298B2 (en) | 1993-04-29 |
US4929435A (en) | 1990-05-29 |
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