CN108862200B - 一种超高纯氢氟酸的制备方法 - Google Patents
一种超高纯氢氟酸的制备方法 Download PDFInfo
- Publication number
- CN108862200B CN108862200B CN201810855103.4A CN201810855103A CN108862200B CN 108862200 B CN108862200 B CN 108862200B CN 201810855103 A CN201810855103 A CN 201810855103A CN 108862200 B CN108862200 B CN 108862200B
- Authority
- CN
- China
- Prior art keywords
- gas
- hydrofluoric acid
- ultra
- mixed gas
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 title claims abstract description 171
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 239000007789 gas Substances 0.000 claims abstract description 139
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 52
- 239000011737 fluorine Substances 0.000 claims abstract description 52
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims abstract description 39
- 239000012535 impurity Substances 0.000 claims abstract description 34
- 238000001914 filtration Methods 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000005406 washing Methods 0.000 claims abstract description 26
- 239000007864 aqueous solution Substances 0.000 claims abstract description 24
- YBGKQGSCGDNZIB-UHFFFAOYSA-N arsenic pentafluoride Chemical compound F[As](F)(F)(F)F YBGKQGSCGDNZIB-UHFFFAOYSA-N 0.000 claims abstract description 22
- CQXADFVORZEARL-UHFFFAOYSA-N Rilmenidine Chemical compound C1CC1C(C1CC1)NC1=NCCO1 CQXADFVORZEARL-UHFFFAOYSA-N 0.000 claims abstract description 20
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims abstract description 15
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910000127 oxygen difluoride Inorganic materials 0.000 claims abstract description 11
- DJHGAFSJWGLOIV-UHFFFAOYSA-K Arsenate3- Chemical compound [O-][As]([O-])([O-])=O DJHGAFSJWGLOIV-UHFFFAOYSA-K 0.000 claims abstract description 10
- 229940000489 arsenate Drugs 0.000 claims abstract description 10
- 229910001512 metal fluoride Inorganic materials 0.000 claims abstract description 10
- 230000008016 vaporization Effects 0.000 claims abstract description 4
- 150000001450 anions Chemical class 0.000 claims description 26
- 150000001768 cations Chemical class 0.000 claims description 25
- 239000001257 hydrogen Substances 0.000 claims description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims description 18
- 238000010521 absorption reaction Methods 0.000 claims description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 13
- 239000011552 falling film Substances 0.000 claims description 13
- 230000004888 barrier function Effects 0.000 claims description 12
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical group [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 claims description 12
- 238000011282 treatment Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
- 230000000717 retained effect Effects 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 6
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 claims description 6
- 239000011775 sodium fluoride Substances 0.000 claims description 6
- 235000013024 sodium fluoride Nutrition 0.000 claims description 6
- 230000006698 induction Effects 0.000 claims description 3
- 239000011698 potassium fluoride Substances 0.000 claims description 3
- 235000003270 potassium fluoride Nutrition 0.000 claims description 3
- 239000000126 substance Substances 0.000 abstract description 10
- 230000002411 adverse Effects 0.000 abstract description 4
- 239000002920 hazardous waste Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 238000010924 continuous production Methods 0.000 abstract 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 18
- 239000002245 particle Substances 0.000 description 17
- 229910052785 arsenic Inorganic materials 0.000 description 11
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 11
- 239000012286 potassium permanganate Substances 0.000 description 11
- 239000007800 oxidant agent Substances 0.000 description 9
- 230000001590 oxidative effect Effects 0.000 description 7
- 150000002431 hydrogen Chemical class 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000000746 purification Methods 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- MHUWZNTUIIFHAS-XPWSMXQVSA-N 9-octadecenoic acid 1-[(phosphonoxy)methyl]-1,2-ethanediyl ester Chemical compound CCCCCCCC\C=C\CCCCCCCC(=O)OCC(COP(O)(O)=O)OC(=O)CCCCCCC\C=C\CCCCCCCC MHUWZNTUIIFHAS-XPWSMXQVSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229940047047 sodium arsenate Drugs 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004255 ion exchange chromatography Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- JBDSSBMEKXHSJF-UHFFFAOYSA-N cyclopentanecarboxylic acid Chemical compound OC(=O)C1CCCC1 JBDSSBMEKXHSJF-UHFFFAOYSA-N 0.000 description 1
- 230000029087 digestion Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/195—Separation; Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Treating Waste Gases (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810855103.4A CN108862200B (zh) | 2018-07-31 | 2018-07-31 | 一种超高纯氢氟酸的制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810855103.4A CN108862200B (zh) | 2018-07-31 | 2018-07-31 | 一种超高纯氢氟酸的制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108862200A CN108862200A (zh) | 2018-11-23 |
CN108862200B true CN108862200B (zh) | 2020-04-28 |
Family
ID=64306639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810855103.4A Active CN108862200B (zh) | 2018-07-31 | 2018-07-31 | 一种超高纯氢氟酸的制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108862200B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111994874B (zh) * | 2020-09-03 | 2022-07-19 | 福建天甫电子材料有限公司 | 电子级氢氟酸的制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4929435A (en) * | 1987-02-12 | 1990-05-29 | Allied-Signal Inc. | Manufacture of high purity low arsenic anhydrous hydrogen fluoride |
US8153095B2 (en) * | 1999-03-29 | 2012-04-10 | Honeywell International Inc. | Method for producing highly pure solutions using gaseous hydrogen fluoride |
KR101791685B1 (ko) * | 2008-10-14 | 2017-11-20 | 노벨러스 시스템즈, 인코포레이티드 | 수소 이용 화학 반응으로 고용량 주입 스트립(hdis) 방법 및 장치 |
CN102232060B (zh) * | 2008-11-28 | 2013-11-06 | 国立大学法人京都大学 | 氟化氢的精制方法 |
CN102320573B (zh) * | 2011-09-19 | 2013-04-03 | 瓮福(集团)有限责任公司 | 一种制备电子级氢氟酸的方法 |
CN103864185B (zh) * | 2014-02-20 | 2015-09-30 | 中国石油大学(华东) | 利用辉光放电高效快速氧化固定废水中砷的方法及其装置 |
-
2018
- 2018-07-31 CN CN201810855103.4A patent/CN108862200B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN108862200A (zh) | 2018-11-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0739228B1 (en) | Recycling of wafer cleaning substances | |
CN103991847A (zh) | 电子级氢氟酸制备方法 | |
CN108862200B (zh) | 一种超高纯氢氟酸的制备方法 | |
KR20220156760A (ko) | 폐 황산 용액으로부터 전자 등급 황산을 제조하는 방법 | |
CN110155955B (zh) | 一种利用有色冶炼烟气制取电子级硫酸的生产方法 | |
CN112279220B (zh) | 一种高纯硫酸的连续生产方法 | |
CN112645396B (zh) | 一种三氟化氮制备过程中产生的含氟镍渣的处理方法 | |
JP6165882B2 (ja) | アニオン交換体、アニオン交換体とカチオン交換体の混合物、アニオン交換体とカチオン交換体とからなる混合床、それらの製造方法、及び過酸化水素水の精製方法 | |
JP4363494B2 (ja) | 酸洗用水溶液およびその製造方法ならびに資源回収方法 | |
CN104591462A (zh) | 一种处理强酸性高氟废水的氟化物共沉淀法 | |
CN113461017B (zh) | 一种应用于光伏行业含氟废酸的资源化利用方法 | |
CN217627632U (zh) | 一种从氨气直接生产电子级硝酸制备系统 | |
CN112079340B (zh) | 一种含氟硝酸回收利用的方法 | |
CN108975402A (zh) | 一种制备大颗粒高纯五氧化二钒的方法 | |
CN113860257A (zh) | 玻璃薄化废酸液再生回收的方法及系统 | |
CN112645287A (zh) | 一种含氟硫酸的回收利用方法 | |
Zueva et al. | Mitigation of Fluorine-Containing Waste Resulting from Chemical Vapour Deposition Used In Manufacturing Of Silicon Solar Cells | |
CN109453615B (zh) | 一种甲基磺酰氯生产尾气的处理方法 | |
CN108178127A (zh) | 氢氟酸中砷的去除方法 | |
KR102320475B1 (ko) | 폐boe를 활용한 고순도의 불화칼슘 제조시스템 및 제조방법 | |
CN104230073A (zh) | 含氨废水的处理方法 | |
JP3529479B2 (ja) | 弗素樹脂の精製方法及び装置 | |
CN114195099B (zh) | 一种多通道微反应器原位除砷制备电子级氟化氢和电子级氢氟酸的方法 | |
TWI552963B (zh) | Waste acid solution treatment method | |
CN114180526A (zh) | 一种超声耦合微电流除氟化氢中砷制备电子级氟化氢与电子级氢氟酸的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Wang Shenggao Inventor after: Wang Tao Inventor after: Zhang Xuemei Inventor after: Wang Xiao Inventor after: Xu Nian Inventor before: Wang Tao Inventor before: Zhang Xuemei Inventor before: Wang Xiao Inventor before: Xu Nian |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231009 Address after: No. 1 Jingbohu Road, Suzhou Industrial Park, Suqian City, Jiangsu Province, 215000 Patentee after: Jiangsu jiechuangxin Material Co.,Ltd. Address before: Room 408, 4 / F, building 1, 39 Yinfeng Road, Guoxiang street, Wuzhong District, Suzhou City, Jiangsu Province, 215100 Patentee before: SUZHOU XIANGXIEXUAN SURFACE ENGINEERING TECHNOLOGY CONSULTATION Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240114 Address after: 223800 No. 1, Jingbohu Road, Susu Industrial Park, Suqian City, Jiangsu Province Patentee after: Jiangsu jiechuangxin Material Co.,Ltd. Patentee after: Jiangsu Lianheng Electronic New Materials Technology Co.,Ltd. Address before: No. 1 Jingbohu Road, Suzhou Industrial Park, Suqian City, Jiangsu Province, 215000 Patentee before: Jiangsu jiechuangxin Material Co.,Ltd. |