KR890005918A - 비정질 실리콘 태양전지 제조방법 - Google Patents
비정질 실리콘 태양전지 제조방법 Download PDFInfo
- Publication number
- KR890005918A KR890005918A KR870010600A KR870010600A KR890005918A KR 890005918 A KR890005918 A KR 890005918A KR 870010600 A KR870010600 A KR 870010600A KR 870010600 A KR870010600 A KR 870010600A KR 890005918 A KR890005918 A KR 890005918A
- Authority
- KR
- South Korea
- Prior art keywords
- amorphous silicon
- solar cell
- silicon solar
- cell manufacturing
- patterning
- Prior art date
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims 6
- 238000004519 manufacturing process Methods 0.000 title claims 3
- 238000000034 method Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims 3
- 238000000059 patterning Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Photovoltaic Devices (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 가-라는 본 발명 방법에 따른 공정도.
Claims (1)
- 유리기판을 세척하는 제 1 공정과, 유리기판위에 투명전극을 증착하는 제 2 공정과, 투명전극을 패터닝하고 그 위에 다시 비정질 실리콘을 성장시키는 제 3 공정과, 성장된 비정질 실리콘을 패터닝하여 그위에 금속전극을 증착하여 패터닝하는 제 4 공정으로된 비정질 실리콘 태양전지 제조 방법에 있어서, 제 3 공정과 제 4 공정 사이에 성장된 비정질 실리콘층(3)위에 감광성 절연막(4)을 도포 한 후 유리기판(1)측에서 305-410nm 파장의 자외선을 적정시간 동안 조사하여 현상하여 핀홀(10)내에 절연막(4')이 형성되도록 하는 공정을 추가하여된 비정질 실리콘 태양 전지 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019870010600A KR940005754B1 (ko) | 1987-09-24 | 1987-09-24 | 비정질 실리콘 태양전지 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019870010600A KR940005754B1 (ko) | 1987-09-24 | 1987-09-24 | 비정질 실리콘 태양전지 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR890005918A true KR890005918A (ko) | 1989-05-17 |
| KR940005754B1 KR940005754B1 (ko) | 1994-06-23 |
Family
ID=19264692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019870010600A KR940005754B1 (ko) | 1987-09-24 | 1987-09-24 | 비정질 실리콘 태양전지 제조방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR940005754B1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100308851B1 (ko) * | 1998-11-04 | 2001-12-17 | 구본준, 론 위라하디락사 | 액정표시장치의 절연막 패턴 형성방법 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101497817B1 (ko) * | 2013-07-10 | 2015-03-04 | 고려대학교 산학협력단 | 메타 물질 기반의 태양 복사에너지 흡수체 및 이의 제조방법 |
-
1987
- 1987-09-24 KR KR1019870010600A patent/KR940005754B1/ko not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100308851B1 (ko) * | 1998-11-04 | 2001-12-17 | 구본준, 론 위라하디락사 | 액정표시장치의 절연막 패턴 형성방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR940005754B1 (ko) | 1994-06-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| G160 | Decision to publish patent application | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| LAPS | Lapse due to unpaid annual fee |