KR880014131A - 경질투명피막 및 그 형성방법 - Google Patents

경질투명피막 및 그 형성방법 Download PDF

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KR880014131A
KR880014131A KR1019880006206A KR880006206A KR880014131A KR 880014131 A KR880014131 A KR 880014131A KR 1019880006206 A KR1019880006206 A KR 1019880006206A KR 880006206 A KR880006206 A KR 880006206A KR 880014131 A KR880014131 A KR 880014131A
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oxide
film
hard transparent
transparent film
ceramic component
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KR1019880006206A
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KR910003740B1 (ko
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다까오 도시히로
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와다나베 에쯔로오
오리엔트도께이 가부시기가이샤
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)

Abstract

내용 없음

Description

경질투명피막 및 그 형성방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도면은 산화마그네슘 함유 알루미늄 피막의 두께와 광흡수 계수를 나타낸 그래프.

Claims (11)

  1. 표면 피막형 물품은 (a) 기질체와 (b) 기질체의 표면상에 0.5∼8μm 범위의 두께를 지니고 산화알루미늄, 이산화실리콘, 산화게르마늄, 이산화자르코늄, 산화하프늄, 이산화티타늄, 산화아연, 산화인듐, 산화주석, 산화베릴륨, 산화이트륨, 산화바나듐, 산화텡스텐, 산화비스무스, 산화셀레늄, 산화란타늄, 산화네오디뮴, 산화텔레늄, 산화레늄과 지르코늄티타늄 플럼베이트로 구성하는 지로부터 선택된 최소한 하나의 산화물과 균형을 이룬 5ppm~40중량%의 산화마그네슘을 포함하는 세라믹성분을 만들어진 피막을 포함하는 것을 특징으로 하는 경질투명피막.
  2. 제1항에 있어서 피막은 산화알루미늄, 이산화실리콘, 이산화티타늄, 산화지르코늄, 산화아연, 산화인듐, 산화주석, 삼화베릴륨, 산화이트륨과 지르코늄티타늄 플럼베이트를 구성하는 기로부터 선택된 최소한 하나의 산화물과 균형을 이룬 산화마그네슘의 5ppm~40중량%를 함유하는 세라믹 성분으로 만들어진 피막인 것을 특징으로 하는 경질투명피막.
  3. 제1항에 있어서, 피막은 거조 도금공정에 의해 형성되는 것을 특징으로 경질투명피막.
  4. 제3항에 있어서, 건조 도금공정은 이온도금 공정인 것을 특징으로 하는 경질투명피막.
  5. 제3항에 있어서, 건조도금 공정은 스퍼터링공정인 것을 특징으로 하는 경질투명막피막.
  6. 제1항에 있어서, 파막은 다음의 (c) 기질표면과 세라믹 성분의 피막사이에 초벌층을 포함하는 것을 특징으로 하는 경질투명피막.
  7. 제6항에 있어서, 초벌층은 금속, 합성수지, 이산화티타늄, 이산화실리콘, 산화인듐과 산화아연을 구성하는 기로부터 선택된 물질로 만들어진 것을 툭징으로 하는 경질투명피막.
  8. 제6항에 있어서, 초벌층은 5~200㎜ 범위의 두께를 지니는 것으로 하는 경질투명피막.
  9. 제1항에 있어서, 피막은 (d)세라믹 성분의 피막상에 꼭대기 피막을 형성하는 것을 특징으로 하는 경질투명피막.
  10. 제9항에 있어서, 꼭대기 피막은 합성수지인 것을 특징으로 하는 경질투명피막.
  11. 제1항에 있어서, 피막은 (c)기질표면과 세라믹 성분의 피막사이에 초벌층과 (d)세라믹 성분의 피막상이 꼭대기 피막을 포함하는 것을 특징으로 하는 경질투명피막.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880006206A 1987-05-29 1988-05-26 표면피복성형체 및 그 제조방법 KR910003740B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62-131772 1987-05-29
JP13177287 1987-05-29

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KR880014131A true KR880014131A (ko) 1988-12-23
KR910003740B1 KR910003740B1 (ko) 1991-06-10

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US (1) US4906524A (ko)
EP (1) EP0293198B1 (ko)
KR (1) KR910003740B1 (ko)
DE (1) DE3877256T2 (ko)
ES (1) ES2037828T3 (ko)

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Also Published As

Publication number Publication date
DE3877256D1 (de) 1993-02-18
KR910003740B1 (ko) 1991-06-10
EP0293198A3 (en) 1989-08-23
ES2037828T3 (es) 1993-07-01
US4906524A (en) 1990-03-06
EP0293198B1 (en) 1993-01-07
EP0293198A2 (en) 1988-11-30
DE3877256T2 (de) 1993-06-24

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