KR890015968A - 시각적으로 드러나지 않는 합금산화물 스퍼터링 필름 - Google Patents

시각적으로 드러나지 않는 합금산화물 스퍼터링 필름 Download PDF

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KR890015968A
KR890015968A KR1019890004199A KR890004199A KR890015968A KR 890015968 A KR890015968 A KR 890015968A KR 1019890004199 A KR1019890004199 A KR 1019890004199A KR 890004199 A KR890004199 A KR 890004199A KR 890015968 A KR890015968 A KR 890015968A
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film
transparent
metal oxide
sputtering
antireflective
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KR920005470B1 (ko
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호워드 길레리 프랭크
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헬렌 에에.파블릭크
피피지 인더스트리즈, 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12597—Noncrystalline silica or noncrystalline plural-oxide component [e.g., glass, etc.]

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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Materials For Medical Uses (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Paints Or Removers (AREA)

Abstract

내용 없음

Description

시각적으로 드러나지 않는 합금산화물 스퍼터링 필름
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 필름과 선행 기술의 필름의 색도좌표를 나타내는 색도표이다.

Claims (20)

  1. (a) 투명한 비금속성 기재 ; (b) 상기 기재 표면상에 침착된 굴절지수 약 2.0을 갖는 투명한 제 1 반사방지 산화금속 필름 ; (c) 상기 제 1 산화금속 필름상에 침착된 굴절지수 2.0이상을 갖는 투명한 제 1 중간산화금속층 ; (d) 상기 중간 산화금속층상에 침착된 투명한 적외선 반사금속성 필름 ; (e) 상기 적외선 반사 금속성 필름상에 침착된 투명한 중간 금속층 ; 및 (f) 상기 중간 금속층상에 침착된 투명한 제 2 반사 방지 산화금속 필름을 포함하는, 시각적으로 드러나지 않는 반사성, 그 투과성, 저 복사성 제품.
  2. 제 1 항에 있어서, 상기 기재가 유리인 제품.
  3. 제 2 항에 있어서, 상기 적외선 반사 금속성 필름이 은인 제품.
  4. 제 3 항에 있어서, 상기 반사방지 산화금속이 아연 및 주석을 함유하는 옥사이드 반응 생성물을 함유하는 제품.
  5. 제 4 항에 있어서, 상기 반사방지 산화금속이 주석산 아연을 함유하는 제품.
  6. 제 1 항에 있어서, 반사방지 산화금속 필름과 적외선 반사 금속성 필름사이에 상기 중간 산화금속 필름이 산화 티탄 및 산화 지르코늄으로 이루어지는 그룹중에서 선택되는 제품.
  7. 제 6 항에 있어서, 상기 중간 산화금속 필름이 산화 티탄을 함유하는 제품.
  8. 제 6 항에 있어서, 상기 제 1 산화 티탄층이 약 50 내지 100Å의 두께를 갖는 제품.
  9. 제 8 항에 있어서, 상기 중간 금속층이 티탄을 함유하는 제품.
  10. 제 9 항에 있어서, 상기 제 2 반사방지 산화금속 필름상에 산화티탄 보호 막을 또한 포함하는 제품.
  11. (a) 음극금속타겟(target)을 산소를 함유하는 반응성 대기중에서 스퍼터링하여 굴절지수 약 2.0을 갖는투명한 반사방지 산화금속 필름을 기재표면상에 침착시키고 ; (b) 상기 반사방지 산화금속 필름상에 굴절지수 2.0 이상을 갖는 투명한 중간 산화금속층을 스퍼터링하며 ; (c) 상기 중간 산화금속층상에 투명한 적외선 반사 금속성 필름을 스퍼터링하고 ; (d) 상기 적외선 반사 금속성 필름상에 투명한 중간 금속층을 스퍼터링하며 ; (e) 상기 제2중간 금속층상에 투명한 제 2 반사방지 산화금속필름을 스퍼터링하는 단계를 포함하여, 시각적으로 드러나지 않는 고 투과성, 저 복사성 필름을 침착시키는 방법.
  12. 제11항에 있어서, 상기 중간 산화금속층이 산화 티탄 및 산화 지르코늄으로 이루어지는 그룹중에서 선택되는 방법.
  13. 제12항에 있어서, 상기 기재가 유리인 방법.
  14. 제13항에 있어서, 상기 반사방지 산화금속 필름이 아연 및 주석을 함유하는 옥사이드 반응 생성물을 함유하는 방법.
  15. 제14항에 있어서, 상기 필름이 주석산 아연을 함유하는 방법.
  16. (a) 투명한 비금속성 기재를 스퍼터링 챔버에 넣고 ; (b) 아연 및 주석을 함유하는 음극타겟을 산소를 함유하는 반응성 대기중에서 스퍼터링하여 투명한 반사방지 합금 옥사이드 필름을 상기 기재표면상에 침착시키며 ; (c) 티탄 타겟을 산화성 대기중에서 스퍼터링하여 중간 산화티탄층을 상기 반사방지 아연/주석 옥사이드 필름상에 침착시키고 ; (d) 은 음극 타겟을 불활성 대기중에서 스퍼터링하여 투명한 금속성 은필름을 상기 산화티탄층상에 침착시키며 ; (e) 티탄 타겟을 불활성 대기중에서 스퍼터링하여 중간 티탄층을 상기 은필름상에 침착시키고 ; (f) 아연 및 주석을 함유하는 음극 타겟을 산소를 함유하는 반응성 대기중에서 스퍼터링하여 제 2 아연/주석 합금옥사이드 필름을 상기 티탄층 상에 침착시키는 단계를 포함하여, 시각적으로 드러나지 않는 투과성, 저 복사성 다층 코팅물을 제조하는 방법.
  17. 제16항에 있어서, 상기 기재가 유리인 방법.
  18. 제17항에 있어서, 상기 합금이 필수적으로 아연 및 주석으로 이루어지는 방법.
  19. 제18항에 있어서, 상기 합금옥사이드 필름이 주석산 아연을 함유하는 방법.
  20. 제16항에 있어서, 산화티탄 보호막을 제 2 아연/주석 옥사이드 필름상에 스퍼터링하는 단계를 또한 포함하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890004199A 1988-04-01 1989-03-31 시각적으로 드러나지 않는 합금산화물 스퍼터링 필름 KR920005470B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/176,563 US4834857A (en) 1988-04-01 1988-04-01 Neutral sputtered films of metal alloy oxides
US176563 1988-04-01

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KR890015968A true KR890015968A (ko) 1989-11-27
KR920005470B1 KR920005470B1 (ko) 1992-07-04

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US (1) US4834857A (ko)
EP (1) EP0339274B1 (ko)
JP (1) JP2505276B2 (ko)
KR (1) KR920005470B1 (ko)
CN (1) CN1016188B (ko)
AT (1) ATE101588T1 (ko)
AU (1) AU592942B2 (ko)
CA (1) CA1335887C (ko)
DE (1) DE68913068T2 (ko)
DK (1) DK171096B1 (ko)
ES (1) ES2051316T3 (ko)
FI (1) FI891527A (ko)
HK (1) HK1006834A1 (ko)
MY (1) MY103862A (ko)
NO (1) NO302901B1 (ko)
NZ (1) NZ228159A (ko)
ZA (1) ZA891665B (ko)

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CA1335887C (en) 1995-06-13
DK157189D0 (da) 1989-03-31
EP0339274A1 (en) 1989-11-02
NZ228159A (en) 1991-01-29
JP2505276B2 (ja) 1996-06-05
CN1037550A (zh) 1989-11-29
NO891207D0 (no) 1989-03-20
FI891527A (fi) 1989-10-02
NO302901B1 (no) 1998-05-04
AU592942B2 (en) 1990-01-25
MY103862A (en) 1993-09-30
NO891207L (no) 1989-10-02
DE68913068D1 (de) 1994-03-24
ATE101588T1 (de) 1994-03-15
AU3232189A (en) 1989-10-05
KR920005470B1 (ko) 1992-07-04
JPH029731A (ja) 1990-01-12
DE68913068T2 (de) 1994-07-07
US4834857A (en) 1989-05-30
ES2051316T3 (es) 1994-06-16
FI891527A0 (fi) 1989-03-30
HK1006834A1 (en) 1999-03-19
CN1016188B (zh) 1992-04-08
DK171096B1 (da) 1996-06-03
EP0339274B1 (en) 1994-02-16
DK157189A (da) 1989-10-02
ZA891665B (en) 1990-11-28

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