KR880010154A - 반응성 스퍼터링에 의해 투명한 코우팅을 제조하는 방법 및 그 방법에 의해 피복된 물품 - Google Patents

반응성 스퍼터링에 의해 투명한 코우팅을 제조하는 방법 및 그 방법에 의해 피복된 물품 Download PDF

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KR880010154A
KR880010154A KR1019880000945A KR880000945A KR880010154A KR 880010154 A KR880010154 A KR 880010154A KR 1019880000945 A KR1019880000945 A KR 1019880000945A KR 880000945 A KR880000945 A KR 880000945A KR 880010154 A KR880010154 A KR 880010154A
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oxygen
coating
silicon
nitrogen
aluminum
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아이 벨킨드 에이브라함
비어나아드 에릭
제이 호프만 제임즈
브이 제이콥슨 도널드
제이 네어들 스티븐
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원본미기재
더 비이오우시이 그루우트 인코퍼레이팃드
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Abstract

내용 없음

Description

반응성 스퍼터링에 의해 투명한 코우팅을 제조하는 방법 및 그 방법에 의해 피복된 물품
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1도는 알루미늄 88%와 규소 12%인 타켓트(target)를 본 발명에 따른 아르곤, 산소와 질소의 혼합물에 스퍼터링시킴에 의해 부착된 코우팅에 있어서, O2와 N2의 총 흐름에 대한 O2흐름의 비율인 r의 함수로 정규 부착속도 D(A㎟/J)를 나타내는 그래프이다.

Claims (25)

  1. 하기 (a)-(d) 단계를 포함하는, 기판상에 코우팅과 보호 오버코우팅을 부착시키는 방법 : (a) 기판상에 코우팅을 부착시키고 ; (b) 비정질 오버코우팅을 생산하기에 충분한 규소와 알루미늄을 포함하는 합금인 스퍼터링 타겟트를 제조하고 ; (c) 배기시킨 챔버속에 타겟트와 피복된 기판을 집어넣고 ; (d) 알루미늄 및 규소와 반응하는 성분을 함유한 기체로 이루어진 분위기 속에서 타겟트를 스퍼터링시켜 알루미늄과 규소의 반응 생성물을 함유하는 투명한 비정질 오버코우팅을 제조한다.
  2. 제 1항에 있어서, 합금이 규소 약 6%-약95%를 포함하는 방법.
  3. 제 2항에 있어서, 반응성 기체가 산소, 질소, 산소 화합물 및 질소 화합물로 이루어진 군으로부터 선택되는 방법.
  4. 제 3항에 있어서, 기판이 투명하고, 코우팅 부착단계가 스퍼터링에 의해 유전체-금속-유전체 코우팅을 부착시키는 것을 포함하는 방법.
  5. 하기 (a)-(c)단계를 포함하는 기판상에 투명한 코우팅을 부착시키는 방법. (a) 알루미늄과 규소 6-18%를 포함하는 합금인 타겟트를 제조하고 ; (b) 배기시킨 챔버속에 타겟트와 기판을 집어넣고 ; (c) 알루미늄 및 규소와 반응하는 성분을 함유한 기체로 이루어진 분위기 속에서 타겟트를 스퍼터링시켜 알루미늄과 규소의 반응 생성물을 함유한 비정질 코우팅을 제조한다.
  6. 제 5항에 있어서, 반응성 기체가 질소, 산소, 산소화합물 및 질소 화합물로 이루어진 군으로부터 선택되는 방법.
  7. 제 6항에 있어서, 합금이 알루미늄 82-90%와 규소 10-14%를 포함하는 방법.
  8. 제 7항에 있어서, 합금이 부수적인 불순물을 갖는 규소 12%와 알루미늄 대략 88%를 포함하는 방법.
  9. 제 6항에 있어서, 반응성 기체가 산소와 질소를 포함하고, 산소와 질소의 합에 대한 산소의 비율이 0.1-0.3의 범위인 방법.
  10. 제 9항에 있어서, 합금이 알루미늄 82-90%와 규소 10-14%를 포함하는 방법.
  11. 제 10항에 있어서, 합금이 부수적인 불순물을 갖는 규소 12%와 알루미늄 대략 88%를 포함하는 방법.
  12. 기판, 그 기판상의 코우팅, 그리고 그 코우팅상의 반응성 기체 속에서 알루미늄과 규소를 포함하는 합금인 타겟트를 스퍼터링시켜 제조한 반응생성물의 비정질 층으로 이루어진 보호 오버코우팅을 포함하는 피복된 물품.
  13. 제 12항에 있어서, 합금이 규소 6-95%를 포함하고 반응성 기체가 산소, 질소, 산소화합물 및 질소화합물로 이루어진 군으로부터 선택되는 피복된 물품.
  14. 제 13항에 있어서, 기판이 투명하고, 코우팅이 다층의 유전체-금속-유전체 코우팅을 포함하고, 유전체층의 물질이 비스무트, 인듐, 주석, 티탄 및 아연의 산화물로 이루어진 군으로부터 선택되는 피복된 물품.
  15. 제 13항에 있어서, 코우팅이 유전체-금속-산화 아연인 피복된 물품.
  16. 제 15항에 있어서, 반응성 기체가 산소와 질소를 포함하고 산소와 질소의 합에 대한 산소의 비율이 0.1-0.3의 범위인 피복된 물품.
  17. 제 13항에 있어서, 반응성 기체가 산소와 질소를 포함하고 산소와 질소의 합에 대한 산소의 비율이 0.1-0.3의 범위인 피복된 물품.
  18. 제 17항에 있어서, 코우팅이 유전체-은 코우팅인 피복된 물품.
  19. 알루미늄과 규소 6-18%의 합금인 타켓트를 반응성 기체 속에서 스퍼터링시켜 제조한 반응생성물의 비정질 코우팅과 기판을 포함하는 피복된 물품.
  20. 제 19항에 있어서, 반응성 기체가 산소, 질소, 산소화합물 및 질소 화합물로 이루어진 군으로부터 선택되는 피복된 물품.
  21. 제 20항에 있어서, 반응성 기체가 산소와 질소를 함유하고 산소와 질소의 합에 대한 산소의 비율이 0.1-0.3의 범위인 피복된 물품.
  22. 제 21항에 있어서, 기판이 투명한 기부와, 비정질 코우팅이 위에 부착되는 유전체-금속 코우팅을 포함하는 물품.
  23. 제 21항에 있어서, 기판이 투명한 기부와 비정질 코우팅이 위에 부착되는 유전체-금속-산화아연 코우팅을 포함하는 물품.
  24. 제 23항에 있어서, 합금이 부수적인 불순물을 갖는 규소 12%와 알루미늄 대략 88%를 포함하는 방법.
  25. 제 24항에 있어서, 투명한 시이트, 및 시이트와 기부를 밀봉하여 비정질 코우팅을 안쪽에 갖고 있는 이중-유리 창문 유니트를 제조하기 위한 수단을 포함하는 피복된 물품.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880000945A 1987-02-02 1988-02-01 반응성 스퍼터링에 의해 투명한 코우팅을 제조하는 방법 및 그 방법에 의해 피복된 물품 KR910002893B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/010,023 US4769291A (en) 1987-02-02 1987-02-02 Transparent coatings by reactive sputtering
US010,023 1987-02-02
US07/010023 1987-02-02

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ATE88508T1 (de) 1993-05-15
ZA88226B (en) 1988-06-30
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EP0279550A1 (en) 1988-08-24
DE3880340T2 (de) 1993-09-23
JPS63247352A (ja) 1988-10-14
AU592282B2 (en) 1990-01-04
CA1325404C (en) 1993-12-21
DE3880340D1 (de) 1993-05-27
EP0279550B1 (en) 1993-04-21
GB8802156D0 (en) 1988-03-02
AU1092988A (en) 1988-08-04
KR910002893B1 (ko) 1991-05-09
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