KR20250153317A - 박막 반도체 스위칭 장치 - Google Patents
박막 반도체 스위칭 장치Info
- Publication number
- KR20250153317A KR20250153317A KR1020257033608A KR20257033608A KR20250153317A KR 20250153317 A KR20250153317 A KR 20250153317A KR 1020257033608 A KR1020257033608 A KR 1020257033608A KR 20257033608 A KR20257033608 A KR 20257033608A KR 20250153317 A KR20250153317 A KR 20250153317A
- Authority
- KR
- South Korea
- Prior art keywords
- material layer
- thin film
- source
- film transistor
- tft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6728—Vertical TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/62—Electrodes ohmically coupled to a semiconductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
- H10W20/427—Power or ground buses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
- H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
- H10W90/297—Configurations of stacked chips characterised by the through-semiconductor vias [TSVs] in the stacked chips
Landscapes
- Thin Film Transistor (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163221292P | 2021-07-13 | 2021-07-13 | |
| US63/221,292 | 2021-07-13 | ||
| PCT/IB2022/056349 WO2023285936A1 (en) | 2021-07-13 | 2022-07-08 | Thin film semiconductor switching device |
| KR1020247002156A KR102870900B1 (ko) | 2021-07-13 | 2022-07-08 | 박막 반도체 스위칭 장치 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020247002156A Division KR102870900B1 (ko) | 2021-07-13 | 2022-07-08 | 박막 반도체 스위칭 장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20250153317A true KR20250153317A (ko) | 2025-10-24 |
Family
ID=84920064
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020257033608A Pending KR20250153317A (ko) | 2021-07-13 | 2022-07-08 | 박막 반도체 스위칭 장치 |
| KR1020247002156A Active KR102870900B1 (ko) | 2021-07-13 | 2022-07-08 | 박막 반도체 스위칭 장치 |
| KR1020257033605A Pending KR20250153316A (ko) | 2021-07-13 | 2022-07-11 | 능동 비아 |
| KR1020247003461A Active KR102870896B1 (ko) | 2021-07-13 | 2022-07-11 | 능동 비아 |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020247002156A Active KR102870900B1 (ko) | 2021-07-13 | 2022-07-08 | 박막 반도체 스위칭 장치 |
| KR1020257033605A Pending KR20250153316A (ko) | 2021-07-13 | 2022-07-11 | 능동 비아 |
| KR1020247003461A Active KR102870896B1 (ko) | 2021-07-13 | 2022-07-11 | 능동 비아 |
Country Status (7)
| Country | Link |
|---|---|
| US (6) | US20240332426A1 (https=) |
| EP (2) | EP4371160A4 (https=) |
| JP (4) | JP2024525817A (https=) |
| KR (4) | KR20250153317A (https=) |
| CN (2) | CN117795688A (https=) |
| CA (2) | CA3224433A1 (https=) |
| WO (2) | WO2023285936A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023285936A1 (en) | 2021-07-13 | 2023-01-19 | Zinite Corporation | Thin film semiconductor switching device |
| EP4640026A1 (en) * | 2022-12-23 | 2025-10-29 | Zinite Corporation | Thin film transistor |
| WO2024165987A1 (en) * | 2023-02-09 | 2024-08-15 | Zinite Corporation | Passivation elements of a thin film transistor |
| CN121175800A (zh) * | 2023-04-06 | 2025-12-19 | 任耐特公司 | 等温晶体管结构 |
| CN121014276A (zh) | 2023-04-18 | 2025-11-25 | 任耐特公司 | 氮化铪粘附层 |
| TW202505981A (zh) * | 2023-07-26 | 2025-02-01 | 日商半導體能源研究所股份有限公司 | 氧化物半導體層、氧化物半導體層的製造方法、半導體裝置及半導體裝置的製造方法 |
| US20250204015A1 (en) * | 2023-12-14 | 2025-06-19 | Zinite Corporation | Gate stack for field effect transistors |
| WO2025163584A1 (en) * | 2024-02-01 | 2025-08-07 | Zinite Corporation | Thin-film transistors with gate-source capacitance tuning |
| WO2026022653A1 (en) * | 2024-07-23 | 2026-01-29 | Zinite Corporation | Stackable and self-aligned tft structures |
| US20260032965A1 (en) * | 2024-07-25 | 2026-01-29 | Zinite Corporation | Thin-film transistors and related methods of manufacture with metal nitride source/drain |
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| KR100963027B1 (ko) | 2008-06-30 | 2010-06-10 | 삼성모바일디스플레이주식회사 | 박막 트랜지스터, 그의 제조 방법 및 박막 트랜지스터를구비하는 평판 표시 장치 |
| US9082857B2 (en) * | 2008-09-01 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
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| WO2023285936A1 (en) | 2021-07-13 | 2023-01-19 | Zinite Corporation | Thin film semiconductor switching device |
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2022
- 2022-07-08 WO PCT/IB2022/056349 patent/WO2023285936A1/en not_active Ceased
- 2022-07-08 KR KR1020257033608A patent/KR20250153317A/ko active Pending
- 2022-07-08 CN CN202280055063.XA patent/CN117795688A/zh active Pending
- 2022-07-08 EP EP22841576.6A patent/EP4371160A4/en active Pending
- 2022-07-08 JP JP2024502119A patent/JP2024525817A/ja active Pending
- 2022-07-08 KR KR1020247002156A patent/KR102870900B1/ko active Active
- 2022-07-08 CA CA3224433A patent/CA3224433A1/en active Pending
- 2022-07-08 US US18/576,205 patent/US20240332426A1/en active Pending
- 2022-07-11 EP EP22841579.0A patent/EP4371152A4/en active Pending
- 2022-07-11 JP JP2024502139A patent/JP7779997B2/ja active Active
- 2022-07-11 KR KR1020257033605A patent/KR20250153316A/ko active Pending
- 2022-07-11 CN CN202280049363.7A patent/CN117616559A/zh active Pending
- 2022-07-11 WO PCT/IB2022/056397 patent/WO2023285951A1/en not_active Ceased
- 2022-07-11 CA CA3224452A patent/CA3224452A1/en active Pending
- 2022-07-11 KR KR1020247003461A patent/KR102870896B1/ko active Active
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2023
- 2023-10-26 US US18/384,066 patent/US11949019B2/en active Active
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2024
- 2024-01-03 US US18/403,268 patent/US12148838B2/en active Active
- 2024-09-30 US US18/902,625 patent/US20250022961A1/en active Pending
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2025
- 2025-02-21 US US19/060,198 patent/US12446258B2/en active Active
- 2025-08-15 US US19/301,777 patent/US12593467B2/en active Active
- 2025-11-05 JP JP2025186357A patent/JP2026027346A/ja active Pending
- 2025-11-25 JP JP2025203212A patent/JP2026027531A/ja active Pending
Also Published As
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| TW202303992A (zh) | 2023-01-16 |
| CA3224452A1 (en) | 2023-01-19 |
| EP4371152A1 (en) | 2024-05-22 |
| KR20240032856A (ko) | 2024-03-12 |
| KR20250153316A (ko) | 2025-10-24 |
| US20240055529A1 (en) | 2024-02-15 |
| CA3224433A1 (en) | 2023-01-19 |
| US12148838B2 (en) | 2024-11-19 |
| US20250234589A1 (en) | 2025-07-17 |
| US12446258B2 (en) | 2025-10-14 |
| CN117795688A (zh) | 2024-03-29 |
| EP4371152A4 (en) | 2025-06-04 |
| WO2023285936A1 (en) | 2023-01-19 |
| JP2026027531A (ja) | 2026-02-18 |
| US11949019B2 (en) | 2024-04-02 |
| US20250380453A1 (en) | 2025-12-11 |
| US20240136330A1 (en) | 2024-04-25 |
| EP4371160A4 (en) | 2025-11-26 |
| WO2023285951A1 (en) | 2023-01-19 |
| JP2024525817A (ja) | 2024-07-12 |
| JP2026027346A (ja) | 2026-02-18 |
| US20250022961A1 (en) | 2025-01-16 |
| US12593467B2 (en) | 2026-03-31 |
| CN117616559A (zh) | 2024-02-27 |
| KR20240035497A (ko) | 2024-03-15 |
| KR102870896B1 (ko) | 2025-10-14 |
| US20240332426A1 (en) | 2024-10-03 |
| TW202303897A (zh) | 2023-01-16 |
| JP7779997B2 (ja) | 2025-12-03 |
| KR102870900B1 (ko) | 2025-10-15 |
| EP4371160A1 (en) | 2024-05-22 |
| JP2024525824A (ja) | 2024-07-12 |
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