KR20240028463A - 열전도성 실리콘 조성물, 반도체 장치 및 그의 제조 방법 - Google Patents

열전도성 실리콘 조성물, 반도체 장치 및 그의 제조 방법 Download PDF

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Publication number
KR20240028463A
KR20240028463A KR1020247003492A KR20247003492A KR20240028463A KR 20240028463 A KR20240028463 A KR 20240028463A KR 1020247003492 A KR1020247003492 A KR 1020247003492A KR 20247003492 A KR20247003492 A KR 20247003492A KR 20240028463 A KR20240028463 A KR 20240028463A
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South Korea
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component
thermally conductive
conductive silicone
silicone composition
group
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KR1020247003492A
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Korean (ko)
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쇼타 아키바
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신에쓰 가가꾸 고교 가부시끼가이샤
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Publication of KR20240028463A publication Critical patent/KR20240028463A/ko
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • C08L83/06Polysiloxanes containing silicon bound to oxygen-containing groups
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/25Arrangements for cooling characterised by their materials
    • H10W40/251Organics
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/10Metal compounds
    • C08K3/105Compounds containing metals of Groups 1 to 3 or of Groups 11 to 13 of the Periodic Table
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08Materials not undergoing a change of physical state when used
    • C09K5/14Solid materials, e.g. powdery or granular
    • H01L23/3738
    • H01L23/42
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/25Arrangements for cooling characterised by their materials
    • H10W40/253Semiconductors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/12Polysiloxanes containing silicon bound to hydrogen
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/20Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • C08K2003/0806Silver
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/001Conductive additives
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • C08K2201/006Additives being defined by their surface area
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/014Additives containing two or more different additives of the same subgroup in C08K
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/016Additives defined by their aspect ratio
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00Applications
    • C08L2203/20Applications use in electrical or conductive gadgets
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/70Fillings or auxiliary members in containers or in encapsulations for thermal protection or control

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
KR1020247003492A 2021-07-02 2022-06-23 열전도성 실리콘 조성물, 반도체 장치 및 그의 제조 방법 Pending KR20240028463A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-110436 2021-07-02
JP2021110436 2021-07-02
PCT/JP2022/025063 WO2023276846A1 (ja) 2021-07-02 2022-06-23 熱伝導性シリコーン組成物、半導体装置及びその製造方法

Publications (1)

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KR20240028463A true KR20240028463A (ko) 2024-03-05

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KR1020247003492A Pending KR20240028463A (ko) 2021-07-02 2022-06-23 열전도성 실리콘 조성물, 반도체 장치 및 그의 제조 방법

Country Status (7)

Country Link
US (1) US20250223444A1 (https=)
EP (1) EP4365238A4 (https=)
JP (1) JP7650612B2 (https=)
KR (1) KR20240028463A (https=)
CN (1) CN117580912A (https=)
TW (1) TW202302761A (https=)
WO (1) WO2023276846A1 (https=)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153995A (ja) 1988-12-05 1990-06-13 Shin Etsu Chem Co Ltd シリコーングリース組成物
JPH0314873A (ja) 1989-02-08 1991-01-23 Dow Corning Corp 熱伝導性オルガノシロキサン組成物
JPH10110179A (ja) 1996-08-09 1998-04-28 Shin Etsu Chem Co Ltd 熱伝導性シリコーン組成物、熱伝導性材料及び熱伝導性シリコーングリース
JP2000063873A (ja) 1998-08-21 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物及びそれを使用した半導体装置
JP2000063872A (ja) 1998-08-18 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物
JP2002030217A (ja) 2000-07-17 2002-01-31 Fujitsu Ltd 熱伝導性シリコーン組成物
JP3130193U (ja) 2006-12-28 2007-03-15 ライオン株式会社 エアゾール缶用押しボタン
JP2008222776A (ja) 2007-03-09 2008-09-25 Shin Etsu Chem Co Ltd 熱伝導性シリコーングリース組成物

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3130193B2 (ja) 1993-10-06 2001-01-31 東レ・ダウコーニング・シリコーン株式会社 シリコーンゴム用銀粉末、その製造方法、およびシリコーンゴム組成物
JP3677671B2 (ja) 1999-04-30 2005-08-03 東レ・ダウコーニング株式会社 シリコーンゴム用銀粉末の製造方法
EP2935429B1 (en) * 2012-12-20 2018-11-07 Dow Silicones Corporation Curable silicone compositions, electrically conductive silicone adhesives, methods of making and using same, and electrical devices containing same
EP3150672B1 (en) * 2015-10-02 2018-05-09 Shin-Etsu Chemical Co., Ltd. Thermal conductive silicone composition and semiconductor device
CN108603033B (zh) * 2016-03-18 2021-02-19 信越化学工业株式会社 热传导性硅酮组合物和半导体装置
JP6610491B2 (ja) * 2016-10-03 2019-11-27 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置
JP6607166B2 (ja) * 2016-10-31 2019-11-20 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置
WO2020129555A1 (ja) * 2018-12-21 2020-06-25 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置
WO2020137332A1 (ja) * 2018-12-25 2020-07-02 信越化学工業株式会社 熱伝導性シリコーン組成物及び半導体装置
JP7076400B2 (ja) * 2019-05-27 2022-05-27 信越化学工業株式会社 熱伝導性シリコーン組成物、半導体装置及びその製造方法
JP7271411B2 (ja) * 2019-12-20 2023-05-11 信越化学工業株式会社 熱伝導性シリコーン組成物、半導体装置及びその製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153995A (ja) 1988-12-05 1990-06-13 Shin Etsu Chem Co Ltd シリコーングリース組成物
JPH0314873A (ja) 1989-02-08 1991-01-23 Dow Corning Corp 熱伝導性オルガノシロキサン組成物
JPH10110179A (ja) 1996-08-09 1998-04-28 Shin Etsu Chem Co Ltd 熱伝導性シリコーン組成物、熱伝導性材料及び熱伝導性シリコーングリース
JP2000063872A (ja) 1998-08-18 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物
JP2000063873A (ja) 1998-08-21 2000-02-29 Shin Etsu Chem Co Ltd 熱伝導性グリース組成物及びそれを使用した半導体装置
JP2002030217A (ja) 2000-07-17 2002-01-31 Fujitsu Ltd 熱伝導性シリコーン組成物
JP3130193U (ja) 2006-12-28 2007-03-15 ライオン株式会社 エアゾール缶用押しボタン
JP2008222776A (ja) 2007-03-09 2008-09-25 Shin Etsu Chem Co Ltd 熱伝導性シリコーングリース組成物

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Publication number Publication date
EP4365238A1 (en) 2024-05-08
WO2023276846A1 (ja) 2023-01-05
TW202302761A (zh) 2023-01-16
JP7650612B2 (ja) 2025-03-25
US20250223444A1 (en) 2025-07-10
JPWO2023276846A1 (https=) 2023-01-05
EP4365238A4 (en) 2025-04-02
CN117580912A (zh) 2024-02-20

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