KR20180105081A - 물품 반송 설비 - Google Patents
물품 반송 설비 Download PDFInfo
- Publication number
- KR20180105081A KR20180105081A KR1020180028734A KR20180028734A KR20180105081A KR 20180105081 A KR20180105081 A KR 20180105081A KR 1020180028734 A KR1020180028734 A KR 1020180028734A KR 20180028734 A KR20180028734 A KR 20180028734A KR 20180105081 A KR20180105081 A KR 20180105081A
- Authority
- KR
- South Korea
- Prior art keywords
- rail
- traveling
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- path
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- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Platform Screen Doors And Railroad Systems (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017048678A JP6717243B2 (ja) | 2017-03-14 | 2017-03-14 | 物品搬送設備 |
JPJP-P-2017-048678 | 2017-03-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20180105081A true KR20180105081A (ko) | 2018-09-27 |
KR102470491B1 KR102470491B1 (ko) | 2022-11-23 |
Family
ID=63574037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020180028734A KR102470491B1 (ko) | 2017-03-14 | 2018-03-12 | 물품 반송 설비 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6717243B2 (zh) |
KR (1) | KR102470491B1 (zh) |
CN (1) | CN108569523A (zh) |
TW (1) | TWI736742B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220097701A (ko) | 2020-12-30 | 2022-07-08 | 세메스 주식회사 | 물품 이송 설비 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110182224A (zh) * | 2019-06-24 | 2019-08-30 | 北京城景空间智能交通科技中心(有限合伙) | 一种转向稳定性增强的转向结构 |
FR3098509B1 (fr) * | 2019-07-08 | 2021-06-25 | Erba Diagnostics Ltd | Véhicule de transport d’échantillon biologique comportant un dispositif de guidage |
CN113682751B (zh) * | 2021-08-11 | 2023-12-15 | 弥费实业(上海)有限公司 | 一种空中搬运装置及搬运系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52128206U (zh) * | 1977-03-31 | 1977-09-29 | ||
JP2002087251A (ja) * | 2000-09-14 | 2002-03-27 | Daifuku Co Ltd | 搬送設備 |
JP2011116313A (ja) | 2009-12-07 | 2011-06-16 | Daifuku Co Ltd | 物品搬送設備 |
KR20140084387A (ko) * | 2012-12-26 | 2014-07-07 | 주식회사 에스에프에이 | 반송시스템 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09315296A (ja) * | 1996-05-29 | 1997-12-09 | Daifuku Co Ltd | 物品搬送車の案内設備 |
KR100654838B1 (ko) * | 2005-12-14 | 2006-12-08 | 삼성전자주식회사 | 이송장치 |
DE102008020052B4 (de) * | 2008-04-22 | 2010-10-07 | Ceratis Gmbh | Werkstückträgereinrichtung sowie Fördersystem |
JP5590422B2 (ja) * | 2012-06-13 | 2014-09-17 | 株式会社ダイフク | 物品搬送設備 |
KR101419357B1 (ko) * | 2012-12-28 | 2014-07-16 | 주식회사 에스에프에이 | 반송시스템 |
CN104315079B (zh) * | 2014-09-18 | 2016-07-06 | 中国地震局工程力学研究所 | 包含弹簧阻尼导杆装置的三向隔震台座 |
CN204383151U (zh) * | 2014-12-19 | 2015-06-10 | 河北工程大学 | 用于内燃发动机的减振装置 |
JP6278341B2 (ja) * | 2015-04-06 | 2018-02-14 | 株式会社ダイフク | 物品搬送設備 |
JP6507897B2 (ja) * | 2015-07-10 | 2019-05-08 | 株式会社ダイフク | 物品搬送設備 |
JP6471651B2 (ja) * | 2015-08-27 | 2019-02-20 | 株式会社ダイフク | 物品搬送設備 |
CN205342646U (zh) * | 2015-12-10 | 2016-06-29 | 重庆戈林物流有限责任公司 | 防撞击缓冲装置 |
CN205708585U (zh) * | 2016-06-29 | 2016-11-23 | 青岛德盛利智能装备股份有限公司 | 一种实现小曲率半径的环形穿梭车导向轮机构 |
CN105952840A (zh) * | 2016-06-30 | 2016-09-21 | 苏州博众精工科技有限公司 | 一种多位置固定缓冲器 |
-
2017
- 2017-03-14 JP JP2017048678A patent/JP6717243B2/ja active Active
-
2018
- 2018-02-13 TW TW107105273A patent/TWI736742B/zh active
- 2018-03-12 KR KR1020180028734A patent/KR102470491B1/ko active IP Right Grant
- 2018-03-14 CN CN201810209331.4A patent/CN108569523A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52128206U (zh) * | 1977-03-31 | 1977-09-29 | ||
JP2002087251A (ja) * | 2000-09-14 | 2002-03-27 | Daifuku Co Ltd | 搬送設備 |
JP2011116313A (ja) | 2009-12-07 | 2011-06-16 | Daifuku Co Ltd | 物品搬送設備 |
KR20140084387A (ko) * | 2012-12-26 | 2014-07-07 | 주식회사 에스에프에이 | 반송시스템 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220097701A (ko) | 2020-12-30 | 2022-07-08 | 세메스 주식회사 | 물품 이송 설비 |
Also Published As
Publication number | Publication date |
---|---|
TW201838849A (zh) | 2018-11-01 |
KR102470491B1 (ko) | 2022-11-23 |
TWI736742B (zh) | 2021-08-21 |
CN108569523A (zh) | 2018-09-25 |
JP6717243B2 (ja) | 2020-07-01 |
JP2018149967A (ja) | 2018-09-27 |
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A201 | Request for examination | ||
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