KR20110103854A - 도포액 공급 장치, 도포액 공급 방법 및 버퍼 탱크 - Google Patents

도포액 공급 장치, 도포액 공급 방법 및 버퍼 탱크 Download PDF

Info

Publication number
KR20110103854A
KR20110103854A KR1020110013550A KR20110013550A KR20110103854A KR 20110103854 A KR20110103854 A KR 20110103854A KR 1020110013550 A KR1020110013550 A KR 1020110013550A KR 20110013550 A KR20110013550 A KR 20110013550A KR 20110103854 A KR20110103854 A KR 20110103854A
Authority
KR
South Korea
Prior art keywords
coating liquid
tank
liquid
buffer tank
coating
Prior art date
Application number
KR1020110013550A
Other languages
English (en)
Korean (ko)
Inventor
민 린
토모오 우치카타
히로카즈 칸바야시
사다히코 이토
Original Assignee
도레 엔지니아린구 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도레 엔지니아린구 가부시키가이샤 filed Critical 도레 엔지니아린구 가부시키가이샤
Publication of KR20110103854A publication Critical patent/KR20110103854A/ko

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020110013550A 2010-03-15 2011-02-16 도포액 공급 장치, 도포액 공급 방법 및 버퍼 탱크 KR20110103854A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010058461A JP5534591B2 (ja) 2010-03-15 2010-03-15 塗布液供給装置、及び、塗布液供給方法
JPJP-P-2010-058461 2010-03-15

Publications (1)

Publication Number Publication Date
KR20110103854A true KR20110103854A (ko) 2011-09-21

Family

ID=44598456

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110013550A KR20110103854A (ko) 2010-03-15 2011-02-16 도포액 공급 장치, 도포액 공급 방법 및 버퍼 탱크

Country Status (4)

Country Link
JP (1) JP5534591B2 (ja)
KR (1) KR20110103854A (ja)
CN (1) CN102189064B (ja)
TW (1) TWI498170B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210064556A (ko) * 2019-11-26 2021-06-03 세메스 주식회사 약액 토출 장치

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118354A1 (de) * 2011-11-14 2013-05-16 Focke & Co. (Gmbh & Co. Kg) Vorrichtung zum Aufbringen von Aromastoffen auf ein Medium
CN102650774A (zh) * 2012-05-18 2012-08-29 深圳市华星光电技术有限公司 液晶吸取装置和液晶涂布设备
JP6454597B2 (ja) * 2015-05-13 2019-01-16 東京応化工業株式会社 塗布装置、塗布システム及び塗布方法
JP6257740B1 (ja) * 2016-12-09 2018-01-10 中外炉工業株式会社 塗工液供給装置
CN106938239B (zh) * 2017-04-24 2019-07-16 武汉华星光电技术有限公司 一种涂布头及涂布机
CN108897154A (zh) * 2018-08-15 2018-11-27 张家港康得新光电材料有限公司 一种涂布设备
CN109976098B (zh) * 2019-03-22 2024-04-12 福建华佳彩有限公司 一种光阻刀头
WO2020217806A1 (ja) 2019-04-24 2020-10-29 富士フイルム株式会社 消音器付送風機
JP2021178312A (ja) * 2020-05-08 2021-11-18 兵神装備株式会社 流動物吐出システム
CN112892927A (zh) * 2021-01-20 2021-06-04 程建国 一种半导体表面绝缘薄膜加工装置
CN114669447A (zh) * 2022-04-25 2022-06-28 京东方科技集团股份有限公司 涂布设备的缓冲装置和涂布设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0433440Y2 (ja) * 1984-12-04 1992-08-11
JPH02190700A (ja) * 1989-01-19 1990-07-26 Sigma Gijutsu Kogyo Kk 液体圧送装置
JP2000189880A (ja) * 1998-12-28 2000-07-11 Canon Inc 塗布方法および装置ならびにカラ―フィルタの製造方法
JP2002136912A (ja) * 2000-10-31 2002-05-14 Dainippon Printing Co Ltd 溶液の供給装置
CN1296144C (zh) * 2003-07-28 2007-01-24 中华映管股份有限公司 用以吹附阴极材料药液的多喷头涂布装置
KR100610023B1 (ko) * 2005-07-19 2006-08-08 삼성전자주식회사 포토스피너설비의 분사불량 제어장치
JP4871541B2 (ja) * 2005-07-26 2012-02-08 東レ株式会社 塗布方法および塗布装置、ディスプレイ用部材の製造方法
CN101003039A (zh) * 2006-01-20 2007-07-25 达信科技股份有限公司 省空间的涂料供应系统
TWI561312B (en) * 2006-03-31 2016-12-11 Toray Industries Coating method, coating device and manufacturing method and manufacturing device for components of a display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210064556A (ko) * 2019-11-26 2021-06-03 세메스 주식회사 약액 토출 장치

Also Published As

Publication number Publication date
TWI498170B (zh) 2015-09-01
CN102189064B (zh) 2014-12-10
JP5534591B2 (ja) 2014-07-02
JP2011189295A (ja) 2011-09-29
TW201130573A (en) 2011-09-16
CN102189064A (zh) 2011-09-21

Similar Documents

Publication Publication Date Title
KR20110103854A (ko) 도포액 공급 장치, 도포액 공급 방법 및 버퍼 탱크
KR101357961B1 (ko) 가스 제거를 수행하는 액체 분배 시스템
KR101929688B1 (ko) 기포없이 포토리소그래피 화학 용액을 공급 및 분배하기 위한 시스템 및 방법
US5751319A (en) Bulk ink delivery system and method
CN101010241A (zh) 预留空间气体移除的液体分配方法和系统
KR20130094755A (ko) 액 처리 방법 및 필터 내의 기체의 제거 장치
CN104417081A (zh) 打印设备和控制方法
CN101623956B (zh) 一种将墨水再填充至墨盒的方法及填充工具
CN104275278B (zh) 排气系统
JP2005231674A (ja) 充填装置
US10864516B2 (en) Dispensing device and liquid transfer method
JP7111592B2 (ja) 液体供給装置
KR101313484B1 (ko) 도포액 공급 장치
JP2011098302A (ja) インクジェットユニット
US11198302B2 (en) Ink jet printing apparatus and method of controlling the same
KR101083802B1 (ko) 용액 공급 방법
JP5297658B2 (ja) レジスト液供給回収システム
US20230271421A1 (en) Liquid discharge apparatus
KR100997655B1 (ko) 연속공급기능을 갖는 액제 공급장치
US11440330B2 (en) Liquid delivery in an inkjet type dispenser
JP2009190737A (ja) 二重構造ノズルによる充填時の液面揃え方法
JP4669307B2 (ja) 液体充填方法及び液体充填装置
KR101365609B1 (ko) 접착액 도포 장치 및 이를 이용한 접착액 도포 방법
JP2010214293A (ja) 機能液タンク、液滴吐出装置の機能液置換方法および液滴吐出装置
JP2010013173A (ja) 液体タンクの接続ポート、液体タンクおよび液滴吐出装置

Legal Events

Date Code Title Description
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right