KR20090032952A - 감광성 적층체의 제조 장치 및 제조 방법 - Google Patents

감광성 적층체의 제조 장치 및 제조 방법 Download PDF

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Publication number
KR20090032952A
KR20090032952A KR1020080074141A KR20080074141A KR20090032952A KR 20090032952 A KR20090032952 A KR 20090032952A KR 1020080074141 A KR1020080074141 A KR 1020080074141A KR 20080074141 A KR20080074141 A KR 20080074141A KR 20090032952 A KR20090032952 A KR 20090032952A
Authority
KR
South Korea
Prior art keywords
substrate
heating
photosensitive
heating temperature
laminated body
Prior art date
Application number
KR1020080074141A
Other languages
English (en)
Korean (ko)
Inventor
케이스케 엔도
나오코 나카자와
Original Assignee
후지필름 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 후지필름 가부시키가이샤 filed Critical 후지필름 가부시키가이샤
Publication of KR20090032952A publication Critical patent/KR20090032952A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B32B37/0053—Constructional details of laminating machines comprising rollers; Constructional features of the rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Materials For Photolithography (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Laminated Bodies (AREA)
KR1020080074141A 2007-09-28 2008-07-29 감광성 적층체의 제조 장치 및 제조 방법 KR20090032952A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00252930 2007-09-28
JP2007252930A JP4987656B2 (ja) 2007-09-28 2007-09-28 感光性積層体の製造装置及び製造方法

Publications (1)

Publication Number Publication Date
KR20090032952A true KR20090032952A (ko) 2009-04-01

Family

ID=40515854

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080074141A KR20090032952A (ko) 2007-09-28 2008-07-29 감광성 적층체의 제조 장치 및 제조 방법

Country Status (4)

Country Link
JP (1) JP4987656B2 (ja)
KR (1) KR20090032952A (ja)
CN (1) CN101396898B (ja)
TW (1) TW200922786A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6916641B2 (ja) * 2017-03-15 2021-08-11 株式会社Ｓｃｒｅｅｎホールディングス 基材処理装置および基材処理方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622199B2 (ja) * 1988-03-25 1994-03-23 ソマール株式会社 薄膜圧着方法及び薄膜圧着装置
JP3195123B2 (ja) * 1993-06-11 2001-08-06 富士写真フイルム株式会社 感光層積層方法及び装置
JP3042970B2 (ja) * 1994-12-28 2000-05-22 シャープ株式会社 ドライレジストフィルムのラミネート方法
JP2000181080A (ja) * 1998-12-21 2000-06-30 Fuji Photo Film Co Ltd 感光性樹脂層積層方法
JP2002127250A (ja) * 2000-10-20 2002-05-08 Nec Corp ドライフィルムラミネータ
JP3756402B2 (ja) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 基板搬送装置及び方法
JP4744713B2 (ja) * 2001-04-05 2011-08-10 東芝モバイルディスプレイ株式会社 ラミネート装置およびラミネート方法
JP4774243B2 (ja) * 2004-07-06 2011-09-14 富士フイルム株式会社 感光性積層体の製造装置及び製造方法
JP2006088511A (ja) * 2004-09-24 2006-04-06 Eco & Engineering Co Ltd ラミネート装置
JP4741307B2 (ja) * 2005-05-20 2011-08-03 富士フイルム株式会社 加熱装置及び加熱方法

Also Published As

Publication number Publication date
JP4987656B2 (ja) 2012-07-25
CN101396898B (zh) 2012-10-10
JP2009083170A (ja) 2009-04-23
TW200922786A (en) 2009-06-01
CN101396898A (zh) 2009-04-01

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