200902313 九、發明說明： 【發明所屬之技術領域】 本發明係有關使長狀薄片以連續的狀態下熱壓接於各 基板之長狀薄片貼附方法。 【先前技術】 例如，在液晶面板用基板、印刷電路用基板、PDP面 板用基板，係把具有感光性樹脂層（感光材料層）的感光 性薄片體（感光性薄片）貼附於基板表面而構成。感光性 薄片體，例如，係於可撓性塑膠支撐體上將感光性樹脂層 與保護薄膜依序疊層。 使用於貼附此種感光性薄片體的製造裝置，通常採 用，把玻璃基板及樹脂基板等的基板以既定的間隔隔開而 運送到積層輥子間，同時把對應貼附於該基板之感光性樹 脂層的範圍之保護薄膜既剝離之感光性薄片體運送到該積 層輥子間的方式。 例如’在日本專利特開平1 1 - 34280號公報所揭示的 薄膜貼附方法及裝置，如第7圖所示，從薄膜捲筒1所陸 續放出之積層體薄膜（感光性薄片體）la，係被導引輥子 2a、2b捲繞而沿著水平的薄膜運送面延伸存在。在此導引 輥子2b安裝有旋轉編碼器3用以輸出對應於積層體薄膜j a 之運送量數的脈衝信號。 沿著水平的薄膜運送面延伸存在之積層體薄膜la，係 被吸入輥子4捲掛，同時在該導引輥子2b與該吸入輥子4 之間’被設置有半切刀具5與保護膜剝離裝置6。 200902313 半切刀具5，係具備有一對圓盤刀具5a、5b。圓盤刀 具5a、5b，係藉由沿著積層體薄膜la的薄膜寬度方向移動， 使該積層體薄膜1 a之保護膜（未圖示）與其內側的感光性 樹脂層（未圖示）一體切斷。 保護膜剝離裝置6，係將從黏著帶捲筒7所陸續放出 之黏著帶7 a在按壓滾筒8 a、8b間，強力壓接於保護膜之 後，透過捲取滾筒9予以捲取。藉此，保護膜從感光性樹 脂層剝離而與黏著帶7 a —起被捲取滾筒9捲取。 在吸入輥子4的下游，透過基板運送裝置10，依序， 在間歇地被運送之複數個基板11的上面，配裝有將積層體 薄膜la重疊而壓接的積層滾筒12a、12b。在此積層滾筒 1 2a、1 2b的下游側，配置有支撐膜捲取滾筒1 3。被貼附在 基板11之透光性支撐膜（未圖示），係被支撐膜捲取滾筒 1 3所捲取。 可是，在上述之先前技術中，在被加熱至既定溫度之 積層滾筒12a的外圓周面，積層體薄膜la以一定的捲繞角 度進行滑接。因此，尤其在積層滾筒12a的旋轉被停止時’ 積層體薄膜la抵接於該積層滾筒12a的外圓周面之狀態 下，所以容易滯留。 然而，積層體薄膜1 a，係具有個別的熱聚合性能，如 上述於積層滾筒1 2 a的外圓周面抵接超過一定時間時’透 過從該積層滾筒1 2 a的熱傳，在下游過程的顯影處理由於 殘渣容易惹起面狀不勻等。藉此，由於基板11表面的佈 局，影響畫面內的面狀，而發生品質不良的問題。 200902313 【發明內容】 本發明係爲解決此種問題而完成者，其目的在於提供 一種能以簡單的製程，阻止因面狀不勻等之品質不良’且 可良好而有效率地實行高品質的積層處理之長狀薄片的貼 附方法。 本發明，係有關使長狀薄片以連續的狀態熱壓接於各 基板之長狀薄片貼附方法。 此貼附方法，係具有使長狀感光性薄片以第I捲繞角 度滑接於配置在貼附位置之橡膠輥子的外圓周面之狀態 下，使該橡膠輥子旋轉，藉以使該長狀感光性薄片的一部 分熱壓接於玻璃基板。接著，使橡膠輥子之旋轉停止，同 時使長狀感光性薄片以較第1捲繞角度還小的第2捲繞角 度與該橡膠輥子外圓周面接觸著的製程。 在本發明，積層（熱壓接）時，因爲長狀薄片以第1 捲繞角度滑接於加熱輥子的外圓周面，故可將該長狀薄片 良好的加熱。另一方面，積層停止時，長狀薄片以較第1 捲繞角度還小的第2捲繞角度與加熱輥子的外圓周面滑 接。因此，即使長狀薄片的熱聚合性能變化（劣化），亦可 抑制熱影響部位在狹幅，可良好的阻止因基板表面的佈局 所致畫面內的面狀之不勻等的發生。 而且，因爲不受熱聚合性能的限制，而不需要高精度 地控制基板的運送間隔。因此，可圖謀控制簡化，同時被 廢棄之薄片的量可減少，而可提高成本效率。 再者，可抑制在長狀薄片發生皺痕及熱變形，而可有 200902313 效的提高貼附品質。 從附上之圖面及配合如下的適合實施之形態 明，將更可明瞭上述之目的、特徵及優點。 【實施方式】 本發明最佳實施形態 第1圖係用以實施有關本發明之第1實施形態 薄片貼附方法之感光性積層體的製造系統之槪略構 此製造系統20係在液晶或有機EL用彩色濾光片等 過程，將由既定的寬度尺寸所形成之長狀感光性薄）： 感光性樹脂層2 8 (後述）進行對玻璃基板2 4熱轉印 (疊層）。 第2圖係被使用於該製造系統20之長狀感光性 的剖面圖。此感光性薄片2 2，係由可撓性基底薄膜 體）26、感光性樹脂層（感光材料層）28及保護f 積層所構成。 如第1圖所示，製造系統20，係具備收容把感 片22捲繞成圓筒狀之感光性薄片滾筒23,而可將來 光性薄片滾筒2 3之該長狀感光性薄片22送出的薄 機構32 ;在所送出之該長狀感光性薄片22之保護: 及感光性樹脂層28的寬度方向形成可切斷之2部位 部分之半切部位34a、34b (参照第2圖）的加工機 以及’使一部分具有非黏著部3 8 a的黏著標籤3 8 ( 3圖）黏著於該保護薄膜30之標籤黏著機構40。 在標籤黏著機構40的下游，配裝有用於將長狀 例的說 的長狀 成圖。 的製作 V 22的 之作業 薄片22 (支撐 I膜30 光性薄 自該感 片送出 薄膜30 的邊界 構36 ; 參照第 感光性 22 200902313 薄片22從間歇（tact)運送變更爲連續運送之轉向機構42 以既定的長度間隔使保護薄膜3 0從該長狀感光性薄片 剝離之剝離機構44。 加 構 28 間 之 薄 有 23 50 滾 參 朝 30 感 設 用 的 在剝離機構44的下游，配裝有用於將玻璃基板24 熱至既定的溫度之狀態下供應貼附位置之基板供應機 45 ;將藉由剝離該保護薄膜30而露出之感光性樹脂層 一體地貼附於該玻璃基板24的貼附機構46 ;以及，基板 薄片切斷機構48。 在薄片送出機構32的下游附近，配裝有將大致用完 長狀感光性薄片22的後端，與新要被使用之長狀感光性 片22的前端貼附的貼附台49。在貼附台49的下游配裝 薄膜端末位置檢測器5 3，用以控制由於感光性薄片滾筒 之捲繞偏差所致之寬度方向的偏差。 加工機構3 6被配置在輥子對5 0的下游，該輥子對 用以計算被收容捲繞在薄片送出機構32之感光性薄片 筒23的滾筒徑。加工機構36，係具備有僅隔開距離Μ ( 照第2圖）的一對圓刀刃52a、52b。圓刀刃52a、52b係 向長狀感光性薄片22的寬度方向行走，在夾著保護薄膜 之殘留部分B的既定2個部位的位置形成半切部位34a 34b (參照第2圖）。 半切部位34a、34b，至少有必要切斷保護薄膜30及 光性樹脂層2 8，實際上，圓刀刃5 2 a、5 2b的切入深度 定爲可切入到可撓性基底薄膜26。圓刀刃52a、52b係採 在不會旋轉而被固定的狀態下，朝向長狀感光性薄片22 200902313 寬度方向移動而形成半切部位34a、34b的方式，或 長狀感光性薄片22上滑動而一邊旋轉一邊向該寬 移動而形成該半切部位34 a、34b的方式。 半切部位34 a、34b，係在將感光性樹脂層28 玻璃基板24時，例如，被設定成從該玻璃基板24 部分別向內側各自進入10mm的位置。此外，玻璃 間之保護薄膜30的殘留部分B具有在後述貼附機; 將感光性樹脂層28框緣狀地貼附於前述玻璃基板 爲遮罩的機能。 標籤黏著機構40,爲了對應玻璃基板24間而留 薄膜30的殘留部分B，係供應連結半切部位34b俚 部分A與半切割部位34a側的剝離部分A之黏著標 如第3圖所示，黏著標籤3 8，係構成長方形， 以與保護薄膜3 0同一樹脂材形成。黏著標籤3 8，價 部具有不塗布黏著劑之非黏著部（含微黏著）38a， 此非黏著部3 8 a的兩側，亦即，在該黏著標籤3 8之 向兩端部，具有被接合於前方之剝離部分A的第1 3 8b，與被接合於後方之剝離部分A的第2接合部 如第1圖所示，標籤黏著機構40，係具備最多 黏著標籤3 8各以既定間隔隔開而可貼附之吸附襯Ϊ 54g，同時在依據該吸附襯墊54a〜54g之該黏著 的貼附位置，配置用於自下方保持長狀感光性薄片 升降自如的承台5 6。 轉向機構42，爲了吸收上游側之長狀感光性 不在該 度方向 貼附於 的兩端 基板24 f冓46中 24時作 ^下保護 丨的剝離 丨籤38。 例如， 〖於中央 同時在 :長度方 接合部 38c。 7 7張之 塾54a〜 標籤38 22之可 薄片22 -10- 200902313 的間歇運送，與下游側之該感光性薄片2 2的連續運送之速 度差，係於箭頭方向具備可擺動自如的跳動輥子（dancer r ο 11 e r) 6 0。 配置在轉向機構42之下游的剝離機構44,係分別遮斷 感光性薄片22之送出側的張力變動，具備用於穩定積層時 之張力吸入筒62。在吸入筒62的附近，配置有剝離輥子 63，同時透過該剝離輥子63從長狀感光性薄片22以銳角 的剝離角被剝離之保護薄膜30，除了殘留部分B以外，其 餘被保護薄膜捲取部64所捲取。 在剝離機構44的下游測，配裝有可將張力賦予長狀感 光性薄片22的張力控制機構66。張力控制機構66，係在 汽缸68的驅動作用下，藉由張力跳動子70的擺動變位， 可調整長狀感光性薄片22的張力。 基板運送機構4 5，係具備依夾持玻璃基板2 4的方式而 被配裝基板加熱部（例如，加熱器）7 4，與將該玻璃基板 2 4朝箭頭Y方向運送的運送部7 6，以及檢測該玻璃基板 2 4之後端部的停止位置之停止位置檢測感測器7 8。在基板 加熱部7 4，平常監視著玻璃基板2 4的溫度，當異常時，停 止運送部7 6及發生警報’同時發出異常資訊的信息而將異 常的玻璃基板2 4在後製程作N G排出，可有效運用於品質 管理或生產管理等。在運送部76，配裝有未圖示之空氣懸 浮板’玻璃基板24被懸浮而朝箭頭γ方向運送。玻璃基板 24的運送’亦可用輥子運送機進行。 玻璃基板24的溫度測定，較佳爲在基板加熱部74內 200902313 或在即將貼附之位置前進行。作爲測定方法，除了可爲接 觸式（例如，熱電偶）之外，亦可爲非接觸式。 貼附機構46，被配裝於上下，同時具備有加熱至既定 溫度的橡膠輥子（加熱輥子）80a、80b。橡膠輥子80a，係 建構成旋轉驅動源，例如，被連接於馬達8 1而被驅動之驅 動側輥子，另一方面橡膠輥子80b，係建構成旋轉自如的從 動側輥子。在橡膠輥子80a、80b有支承輥子82a、82b滑接。 支承輥子82b，係藉由建構成輥子夾緊部84之加壓汽缸86 按壓於橡膠輥子80b側。 在橡膠輥子80a的附近，如後述被配裝有按壓輥子88 用以調整長狀感光性薄片22接觸於該橡膠輥子80a之外圓 周面的角度（捲繞角度）。該按壓輥子8 8爲致動器’例如， 被連結於從汽缸90延伸存在之桿90a ’而可對長狀感光性 薄片22進退。 玻璃基板24，係透過從貼附機構46於箭頭Y方向延 伸存在的運送路徑92而予以運送。在此運送路徑92，配裝 有薄膜運送輥子94a、94b及基板運送輥子96°橡膠輥子 8 0a、80b與基板運送輥子96之間隔，較佳爲被設定爲1片 份玻璃基板24的長度以下。 在製造系統20，雖將薄片送出機構3 2、加工機構3 6、 標籤黏著機構40、轉向機構42、剝離機構44及張力控制 機構6 6配置於貼附機構4 6的上方，但與此相反’亦可將 從該薄片送出機構32至該張力控制機構66’配置於該貼附 機構46的下方，使長狀感光性薄片22的上下成爲相反’ -12- 200902313 而將感光性樹脂層28貼附於玻璃基板24的下側’又’亦 可將長狀感光性薄片22的運送路徑建構成直線狀° 製造系統20內，係藉由間隔壁1 〇〇隔間成第1無塵室 102a與第2無塵室102b。第1無塵室l〇2a與第2無塵室 102b，係透過貫通部1〇4予以連通。製造系統20 ’係藉由 控制部1 0 6予以控制。 針對建構成如以上之製造系統20的動作’茲以與本實 施形態之貼附方法之相關性作說明。 首先，從被安裝在薄片送出機構3 2之感光性薄片滾筒 23送出長狀感光性薄片22。長狀感光性薄片22，係被運送 到加工機構3 6。 在加工機構36，圓刀刃52a、52b於長狀感光性薄片 22的寬度方向移動，將該長狀感光性薄片22從保護薄膜 30切入到感光材料層28至可撓性基底薄膜26爲止。藉此， 而形成僅隔開保護薄膜30的殘留部分B的寬度Μ之半切 部位34a、34b，在長狀感光性薄片22，係夾著該殘留部分 B而設置有前方的剝離部分A與後方的剝離部分A (參照 第2圖）。 接著，長狀感光性薄片22，係被運送到標籤黏著機構 40’保護薄膜30之既定的貼附部位被配置在承台56上。 在標籤黏著機構40,既定張數的黏著標籤38藉由吸附襯墊 54b〜54g而被吸附保持。而且，各黏著標籤38跨越保護薄 膜3 0的殘留部分B，將前方的剝離部分a與後方的剝離部 分A接合成一體（參照第3圖）。 -1 3 - 200902313 例如，經接合7張的黏著標籤3 8之長狀感光性薄片 22，如第1圖所示，透過轉向機構42防止送出側的張力變 動後，連續被運送到剝離機構44。在剝離機構44 ’長狀感 光性薄片22之可撓性基底薄膜26被吸入筒62吸附保持， 同時保護薄膜30留下殘留部分B而從長狀感光性薄片22 被剝離。該保護薄膜30，係藉由剝離輥子63予以剝離而被 捲取於保護薄膜捲取部64 (參照第1圖）。 在剝離機構44的作用下，保護薄膜30留下殘留部分B 而從可撓性基底薄膜26剝離之後，長狀感光性薄片22，係 透過張力控制機構66進行張力調整。 接著，由於長狀感光性薄片22，被運送到貼附機構46， 對玻璃基板24可進行感光性樹脂層28的熱轉印處理（積 層）。在貼附機構46，橡膠輥子80a、80b預先被設定成隔 開的狀態。而在橡膠輥子80a、80b間的既定位置，長狀感 光性薄片2 2之半切割部位3 4 a在被定位的狀態下，該長狀 感光性薄片22的運送暫時被停止。 再者，透過建構成基板供應機構45之基板加熱部74 加熱到既定溫度之玻璃基板24的前端部，透過運送部76 搬入橡膠輥子80a、80b間時，在加壓汽缸86的作用下支 承輥子82b及橡膠輥子80b會上升。因此，玻璃基板24及 長狀感光性薄片22以既定的加壓壓力被夾進橡膠輥子 80a、80b間。此外，橡膠輥子80a、80b，係被加熱至既定 的積層溫度。 其次，在橡膠輥子80a、80b的旋轉作用下，將玻璃基 200902313 板24及長狀感光性薄片22朝箭頭Y方向運送。藉此，感 光性樹脂層28被加熱熔融而熱轉印（積層）於玻璃基板24。 此外，作爲積層條件，速度爲1.0m/ min〜l〇.〇m/ min， 橡膠輥子80a、80b的溫度爲80 °C〜150 t：，該橡膠輥子80a、 80b的硬度爲40度〜90度’該橡膠輥子80a、80b的加壓 壓力（線壓）爲50N / cm〜400N/cm。 在結束將1片份感光性薄片22積層於玻璃基板24時， 橡膠輥子80a、80b的旋轉即被停止，另一方面，長狀感光 性薄片22被積層之玻璃基板24的感光性積層體120之前 知部’藉由基板運送輕子96而予以夾住。此時，在橡膠輕 子80a、80b間之既定位置，會被配置半切部位34b。 而且，橡膠輥子80b退避於離開橡膠輥子80a的方向 而解除被夾，同時以低速再開始旋轉基板運送輥子96，感 光性積層體1 20，係朝箭頭Y方向僅運送對應於保護薄膜 3 0的殘留部分B的寬度Μ之距離，下一個半切割部位3 4 被移動到橡膠輥子8 0a之下方附近的既定位置後，橡膠輥 子80a、80b的旋轉即被停止。 另一方面，在前述的狀態下，透過基板運送機構45使 下一個玻璃基板24朝向貼附位置運送。藉由反覆以上的動 作，而連續地製造感光性積層體1 20。 以貼附機構46積層之感光性積層體1 20，透過基板間 薄片切斷機構48使玻璃基板24間之長狀感光性薄片22被 切斷而分離。在被分離後之感光性積層體120，裝設有可撓 性基底薄膜26，此可撓性基底薄膜26與玻璃基板24間之 -15- 200902313 保護薄膜30 —起被剝離後，被供應到下一個處理製程。 此種情況，在藉由貼附機構46處理積層時，如第4圖 所示，按壓輥子88從長狀感光性薄片22離開。因此，長 狀感光性薄片22對橡膠輥子80a的外圓周面，以第1捲繞 角度0 1滑接，在此狀態下，該橡膠輥子8 0 a被旋轉驅動。 因此，長狀感光性薄片22被加熱到即將積層前所期望的溫 度後，因爲被玻璃基板24壓接，所以積層處理可良好且有 效率地施行。 另一方面，如第5圖所示，前段之玻璃基板24的積層 處理結束，而橡膠輥子80b下降的同時，到新的玻璃基板 24運送到貼附位置之間，馬達8 1的驅動被停止而停止旋轉 橡膠輥子80a。 在那時，透過汽缸90被驅動而桿90a向前方突出，被 安裝於該桿90a之按壓輥子88,將長狀感光性薄片22大致 朝下方向按壓。藉此，長狀感光性薄片2 2以較第1捲繞角 度01還小的第2捲繞角度02接觸於停止旋轉中之橡膠輥 子80a的外圓周面。 在此，橡膠輥子8 0 a在停止的狀態下，長狀感光性薄 片22若在此橡膠輥子80a的外圓周面接觸超過一定的時 間時，透過此長狀感光性薄片2 2之熱聚合性能，容易發 生不適合使用之熱影響部位（面狀不勻等）。因此，當橡 膠輥子80a的旋轉停止時，藉由按壓輥子8 8，長狀感光性 薄片22接觸於該橡膠輥子8 0a之外圓周部的角度，亦即， 將第2捲繞角度0 2設定較第1捲繞角度θ 1還小的角度。 -16- 200902313 藉此，熱影響部位被設定在玻璃基板24之表面佈局相 連的畫面以外。 因此，在第1實施形態，不會有由於玻璃基板24 表面佈局而在畫面內存在面狀不勻等的不良部分，可確 阻止品質降低而可獲得有效率地製造高品質之感光性 層體1 2 0的效果。 具體而言，例如，在橡膠輥子80a的直徑爲liOmm K 積層時之第1捲繞角度01，被設定在60°〜80°的範 內，另一方面，在停止積層時之第2捲繞角度Θ2，被設 在20°〜30°的範圍內。此外，宜因應長狀感光性薄片 的種類而變更第2捲繞角度Θ 2較佳。 又，在第1實施形態，並不受熱聚合性能所限，不 要高精度地控制玻璃基板24的運送間隔。藉此，包含基 供應機構45的控制，可有效地簡化控制部1 06的控制， 時可減少被廢棄之長狀感光性薄片量，可圖謀提升成本 率之優點。 再者，按壓輥子88係配置在橡膠輥子80a的附近， 由按壓長狀感光性薄片22，賦予張力於該長狀感光性薄 22。因此，成爲可在橡膠輥子80a前，抑制在長狀感光 薄片22產生皺紋或熱變形之，而可有效地提升該長狀感 性薄片22朝向玻璃基板24的貼附品質。 第6圖係用於實施有關本發明之第2實施形態的長 薄片貼附方法之感光性積層體的製造系統1 8 0之槪略構 圖。此外，對與第1實施形態之製造系統20相同的構成 關 之 實 積 圍 定 22 需 板 同 效 藉 片 性 光 狀 成 元 200902313 件賦予相同的參考符號並省略其詳細說明。 製造系統180係具備：冷卻機構182 ’於貼附機構46 之下游；基底自動剝離機構1 84 ’配置在此冷卻機構1 82 的下游。冷卻機構182,係供應冷風予被積層之感光性積層 體120而施以冷卻處理。 基底自動剝離機構1 84，係將各玻璃基板24以既定間 隔隔開而貼附之長狀的可撓性基底薄膜26連續剝離者，具 備有預先剝離部186、較小徑的剝離輥子188、捲取軸190、 及自動貼附機192。捲取軸190，係於驅動時控制轉矩將張 力賦予可撓性基底薄膜26，另一方面，藉由安裝張力檢測 器（未圖示）於剝離輥子1 8 8，執行張力的回授控制較佳。 預先剝離部186係具備可在玻璃基板24間升降的剝離桿 194° 在如此構成之第2實施形態，被以貼附機構46積層之 感光性積層體1 20在通過冷卻機構1 82被冷卻後，移送到 預先剝離部1 86。在此預先剝離部1 86，藉由剝離桿1 94的 上升’可從鄰接保護薄膜30之玻璃基板24的後端及前端 剝離。 接著，在基底自動剝離機構1 84，於捲取軸I 90的旋轉 作用下’可從感光性積層體丨2〇將可撓性基底薄膜26連續 地捲取。再者，由於故障停止之切離、及不良品分離時的 切斷之後’重新開始積層處理的感光性積層體丨20之可撓 性基底薄膜26的前端，與被捲取軸190捲取之可撓性基底 薄膜26的後端’係藉由自動貼附機丨92自動地貼附。 -18- 200902313 【圖式簡單說明】 第1圖係用以實施有關本發明之第1實施形態的長狀 薄片貼附方法之感光性積層體的製造系統之槪略構成圖。 第2圖係被使用於該製造系統之長狀感光性薄片的剖 面圖。 第3圖係將黏著標籤黏著於長狀感光性薄片之狀態的 說明圖。 ί 第4圖係薄膜運送裝置的槪略構成說明圖。 第5圖係該薄膜運送裝置的動作說明圖。 第6圖係用以實施有關本發明之第2實施形態的長狀 薄片貼附方法之感光性積層體的製造系統之槪略構成圖。 第7圖係習知技術之薄膜貼附裝置的槪略構成圖。 【主要元件符號說明】 20 ' 180 製造系統 22 24 26 28 30 34 45 46 76 長狀感光性薄片 玻璃基板 可撓性基底薄膜 感光性樹脂層 保護薄膜 34b 半切部位 基板供應機構 貼附機構 運送部 80a 、 80b 橡膠輥子 200902313 8 1 馬達 82a 、 82b 支承輕子 88 按壓輥子 90 汽缸 92 運送路徑 96 基板運送輥子 r -20BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an elongated sheet attaching method in which a long sheet is thermocompression bonded to each substrate in a continuous state. [Prior Art] For example, a substrate for a liquid crystal panel, a substrate for a printed circuit, and a substrate for a PDP panel are attached to a surface of a substrate by a photosensitive sheet (photosensitive sheet) having a photosensitive resin layer (photosensitive material layer). Composition. The photosensitive sheet is, for example, laminated on a flexible plastic support in order to laminate the photosensitive resin layer and the protective film in this order. In a manufacturing apparatus for attaching such a photosensitive sheet, a substrate such as a glass substrate or a resin substrate is transported between the laminating rolls at a predetermined interval, and the photosensitive property is attached to the substrate. The protective film in the range of the resin layer is a method in which the peeled photosensitive sheet is transported between the laminated rolls. For example, as shown in Fig. 7, the film-attaching film (photosensitive sheet) la discharged from the film roll 1 as shown in Fig. 7 is a film attachment method and apparatus disclosed in Japanese Laid-Open Patent Publication No. Hei No. Hei. It is wound by the guide rollers 2a, 2b and extends along the horizontal film transport surface. Here, the guide roller 2b is mounted with a rotary encoder 3 for outputting a pulse signal corresponding to the number of conveyance of the laminated body film j a . The laminated body film 1a extending along the horizontal film conveying surface is wound by the suction roller 4, and is provided with a half-cutting tool 5 and a protective film peeling device 6 between the guiding roller 2b and the suction roller 4. . 200902313 The half-cutting tool 5 is provided with a pair of disc cutters 5a and 5b. The disk cutters 5a and 5b are moved in the film width direction of the laminated body film 1a, and the protective film (not shown) of the laminated body film 1a is integrated with the photosensitive resin layer (not shown) inside. Cut off. The protective film peeling device 6 is an adhesive tape 7a which is successively discharged from the adhesive tape roll 7 and is strongly pressed against the protective film between the pressing rolls 8a and 8b, and then taken up by the take-up roll 9. Thereby, the protective film is peeled off from the photosensitive resin layer and taken up by the take-up reel 9 together with the adhesive tape 7a. Downstream of the suction roller 4, the substrate transfer device 10 is passed through, in order, on the upper surface of the plurality of substrates 11 that are intermittently transported, laminated rolls 12a and 12b which are laminated and pressure-bonded to laminate film la. On the downstream side of the buildup rolls 1 2a and 1 2b, a support film take-up roll 13 is disposed. The light-transmitting support film (not shown) attached to the substrate 11 is taken up by the support film winding roller 13. However, in the above-described prior art, the laminated body film la is slid at a certain winding angle at the outer circumferential surface of the laminated drum 12a heated to a predetermined temperature. Therefore, in particular, when the laminated film 12a is stopped, the laminated body film la is in contact with the outer circumferential surface of the buildup roller 12a, so that it tends to stay. However, the laminated film 1 a has individual thermal polymerization properties, such as the above-mentioned heat transfer from the buildup roller 1 2 a when the outer circumferential surface of the buildup roller 1 2 a abuts for a certain period of time, in the downstream process The development treatment tends to cause unevenness of the surface due to the residue. As a result, the layout of the surface of the substrate 11 affects the planar shape in the screen, which causes a problem of poor quality. SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object thereof is to provide a method capable of preventing quality defects such as unevenness of a surface by a simple process and capable of performing high quality efficiently and efficiently. A method of attaching a long sheet of laminated treatment. The present invention relates to a long sheet attaching method in which a long sheet is thermocompression bonded to each substrate in a continuous state. This attaching method is such that the long photosensitive sheet is slid at a first winding angle to the outer circumferential surface of the rubber roller disposed at the attaching position, and the rubber roller is rotated to thereby make the long photosensitive A portion of the sheet is thermocompression bonded to the glass substrate. Then, the rotation of the rubber roller is stopped, and the long photosensitive sheet is brought into contact with the outer circumferential surface of the rubber roller at a second winding angle which is smaller than the first winding angle. In the present invention, in the case of lamination (thermocompression bonding), since the elongated sheet is slidably attached to the outer circumferential surface of the heating roller at the first winding angle, the elongated sheet can be favorably heated. On the other hand, when the lamination is stopped, the long sheet is slidably attached to the outer circumferential surface of the heating roller at a second winding angle which is smaller than the first winding angle. Therefore, even if the thermal polymerization property of the long sheet is changed (deteriorated), the heat-affected portion can be suppressed from being narrow, and unevenness in the surface of the screen due to the layout of the substrate surface can be satisfactorily prevented. Moreover, since it is not limited by the thermal polymerization performance, it is not necessary to control the conveyance interval of the substrate with high precision. Therefore, the simplification can be conspicuously controlled, and the amount of sheets discarded can be reduced, and the cost efficiency can be improved. Further, wrinkles and thermal deformation in the long sheet can be suppressed, and the adhesion quality can be improved by the 200902313 effect. The above objects, features and advantages will become more apparent from the accompanying drawings and appended claims. BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention is a system for manufacturing a photosensitive laminate according to a sheet attaching method according to a first embodiment of the present invention. The manufacturing system 20 is liquid crystal or organic. In the process of the EL, a long-length photosensitive thinness formed by a predetermined width dimension is used: a photosensitive resin layer 28 (described later) is thermally transferred (stacked) to the glass substrate 24. Fig. 2 is a cross-sectional view showing the long-term sensitivity of the manufacturing system 20. The photosensitive sheet 2 2 is composed of a flexible base film body 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective f laminate. As shown in Fig. 1, the manufacturing system 20 includes a photosensitive sheet roll 23 that accommodates the photosensitive sheet 22 in a cylindrical shape, and can be fed out from the long photosensitive sheet 22 of the optical sheet roll 2 3 . The thin mechanism 32 is a protective machine for protecting the long photosensitive sheet 22 and a half-cut portion 34a and 34b (see FIG. 2) in which the cuttable portion is formed in the width direction of the photosensitive resin layer 28. And a label adhesive mechanism 40 for adhering a portion of the adhesive label 38 (Fig. 3) having the non-adhesive portion 38 a to the protective film 30. Downstream of the label attachment mechanism 40, a long pattern for the long example is provided. The work sheet 22 of the V 22 is produced (the support film 30 is optically thin from the boundary structure 36 of the film feed film 30; the reference photoreceptor 22 200902313 is changed from the tact transport to the continuous transport steering mechanism 42. The peeling mechanism 44 for peeling off the protective film 30 from the long photosensitive sheet at a predetermined length interval. The thinning of the 28 layers is 23 50, and the roller is placed downstream of the peeling mechanism 44 for fitting. A substrate supply device 45 for supplying a bonding position in a state where the glass substrate 24 is heated to a predetermined temperature; and a photosensitive resin layer exposed by peeling off the protective film 30 is integrally attached to the glass substrate 24 Attachment mechanism 46; and substrate sheet cutting mechanism 48. In the vicinity of the downstream of the sheet feeding mechanism 32, a rear end portion of the elongated photosensitive sheet 22 and a long photosensitive sheet to be newly used are disposed. A labeling station 49 attached to the front end of the film 22. A film end position detector 53 is disposed downstream of the attaching table 49 for controlling the deviation in the width direction due to the winding deviation of the photosensitive sheet roll. The structure 36 is disposed downstream of the roller pair 50 for calculating the diameter of the roller that is accommodated in the photosensitive sheet cylinder 23 wound around the sheet feeding mechanism 32. The processing mechanism 36 is provided with a distance only Μ A pair of round cutting edges 52a and 52b (see Fig. 2). The circular cutting edges 52a and 52b travel in the width direction of the long photosensitive sheet 22, and are formed at positions of the predetermined two portions of the remaining portion B of the protective film. The half-cut portions 34a to 34b (see Fig. 2). The half-cut portions 34a and 34b are at least required to cut the protective film 30 and the optical resin layer 2, and in fact, the cutting depths of the circular cutting edges 5 2 a and 5 2b are set to be The flexible base film 26 is cut into the flexible base film 26. The round cutting edges 52a and 52b are formed in such a manner that they move in the width direction of the long photosensitive sheet 22 200902313 to form the half-cut portions 34a and 34b in a state where they are fixed without being rotated, or are long. The half-cut portions 34a and 34b are formed by sliding the photosensitive sheet 22 while rotating to the width of the photosensitive sheet 22. The half-cut portions 34a and 34b are, for example, the photosensitive resin layer 28 when the glass substrate 24 is used. Set from the glass base Each of the 24 portions enters a position of 10 mm inwardly. Further, the remaining portion B of the protective film 30 between the glass has an attaching machine to be described later, and the photosensitive resin layer 28 is attached to the glass substrate as a mask. In the label adhesive mechanism 40, the remaining portion B of the film 30 is left in correspondence with the glass substrate 24, and the adhesion of the peeling portion A on the side of the half-cut portion 34b and the half-cut portion 34a is shown as shown in Fig. 3. The adhesive label 38 is formed into a rectangular shape and formed of the same resin material as the protective film 30. Adhesive label 3 8, the valence portion has a non-adhesive portion (including micro-adhesive portion) 38a which is not coated with an adhesive, and both sides of the non-adhesive portion 38a, that is, at both end portions of the adhesive label 38 have The first bonding portion of the peeling portion A joined to the front side and the second bonding portion of the peeling portion A joined to the rear side are as shown in Fig. 1, and the label bonding mechanism 40 is provided with the most adhesive label 38. The absorbing linings 54g which are attached to each other at a distance from each other are disposed at a position to which the adhesive pads 54a to 54g are adhered, and a cap 56 for elevating and holding the long photosensitive sheets from below is disposed. In order to absorb the long-term sensitivity of the upstream side, the steering mechanism 42 is not detached from the both ends of the substrate 24 f冓46. For example, at the same time in the center: the length side joint portion 38c. 7 7 塾 54a 〜 38 38 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 (dancer r ο 11 er) 6 0. The peeling mechanism 44 disposed downstream of the steering mechanism 42 blocks the tension fluctuation on the delivery side of the photosensitive web 22, and includes a tension suction cylinder 62 for stabilizing the lamination. In the vicinity of the suction cylinder 62, the peeling roller 63 is disposed, and the protective film 30 which is peeled off from the long photosensitive sheet 22 at an acute peeling angle by the peeling roller 63 is wound up by the protective film except for the residual portion B. Part 64 is taken. A tension control mechanism 66 that can apply tension to the long photosensitive sheet 22 is attached to the downstream of the peeling mechanism 44. The tension control mechanism 66 adjusts the tension of the long photosensitive sheet 22 by the swing displacement of the tension jumper 70 under the driving action of the cylinder 68. The substrate transport mechanism 45 is provided with a substrate heating unit (for example, a heater) 704 so as to sandwich the glass substrate 24, and a transport unit 7 that transports the glass substrate 24 in the arrow Y direction. And a stop position detecting sensor 78 for detecting a stop position of the end portion of the glass substrate 24. In the substrate heating unit 704, the temperature of the glass substrate 24 is normally monitored. When the abnormality occurs, the transport unit 7 6 and the alarm 'at the same time as the alarm information are issued, and the abnormal glass substrate 24 is discharged in the post process. Can be effectively used in quality management or production management. The transport unit 76 is provided with an air suspension plate (not shown). The glass substrate 24 is suspended and transported in the direction of the arrow γ. The transport of the glass substrate 24 can also be carried out by a roller conveyor. The temperature measurement of the glass substrate 24 is preferably performed in the substrate heating portion 74 at 200902313 or immediately before the position to be attached. As the measuring method, in addition to the contact type (e.g., thermocouple), it may be non-contact type. The attaching mechanism 46 is attached to the upper and lower sides, and is provided with rubber rollers (heating rollers) 80a and 80b which are heated to a predetermined temperature. The rubber roller 80a is configured to constitute a rotary drive source, for example, a drive side roller that is driven to be connected to the motor 81, and a rubber roller 80b that is configured to constitute a freely rotatable driven roller. The rubber rollers 80a and 80b are slidably supported by the support rollers 82a and 82b. The support roller 82b is pressed against the rubber roller 80b side by a pressurizing cylinder 86 that constitutes the roller clamp portion 84. In the vicinity of the rubber roller 80a, a pressing roller 88 is attached as will be described later to adjust the angle (winding angle) at which the long photosensitive sheet 22 comes into contact with the circumferential surface of the rubber roller 80a. The pressing roller 88 is an actuator ', for example, connected to a rod 90a' extending from the cylinder 90 to advance and retreat the long photosensitive sheet 22. The glass substrate 24 is transported through a transport path 92 extending from the attaching mechanism 46 in the direction of the arrow Y. In this transport path 92, the distance between the film transport rollers 94a and 94b and the substrate transport rollers 96° rubber rollers 80a and 80b and the substrate transport roller 96 is preferably set to be less than the length of the one-piece glass substrate 24. . In the manufacturing system 20, the sheet feeding mechanism 3, the processing mechanism 36, the label attaching mechanism 40, the steering mechanism 42, the peeling mechanism 44, and the tension control mechanism 66 are disposed above the attaching mechanism 46, but the opposite is true. 'The sheet feeding mechanism 32 to the tension control mechanism 66' may be disposed under the attaching mechanism 46, and the upper and lower sides of the long photosensitive sheet 22 may be reversed from the same ' -12 to 200902313, and the photosensitive resin layer 28 may be used. Attached to the lower side of the glass substrate 24, the transport path of the long photosensitive sheet 22 can be formed into a linear shape. In the manufacturing system 20, the first clean room is formed by the partition wall 1 compartment. 102a and the second clean room 102b. The first clean room 102a and the second clean room 102b communicate with each other through the penetration portion 1〇4. The manufacturing system 20' is controlled by the control unit 106. The operation of constructing the manufacturing system 20 as described above will be described in relation to the attachment method of the present embodiment. First, the long photosensitive sheet 22 is fed from the photosensitive sheet roll 23 attached to the sheet feeding mechanism 32. The long photosensitive sheet 22 is transported to the processing mechanism 36. In the processing mechanism 36, the circular blades 52a and 52b are moved in the width direction of the long photosensitive sheet 22, and the long photosensitive sheet 22 is cut from the protective film 30 to the photosensitive material layer 28 to the flexible base film 26. Thereby, the half-cut portions 34a and 34b which are separated only by the width 残留 of the remaining portion B of the protective film 30 are formed, and the long-side photosensitive sheet 22 is provided with the front peeling portion A and the rear portion with the remaining portion B interposed therebetween. Stripped part A (see Figure 2). Next, the long photosensitive sheet 22 is transported to the label attachment mechanism 40. The predetermined attachment portion of the protective film 30 is placed on the cap 56. In the label attaching mechanism 40, a predetermined number of adhesive labels 38 are adsorbed and held by the suction pads 54b to 54g. Further, each of the adhesive labels 38 spans the remaining portion B of the protective film 30, and the front peeling portion a is joined to the rear peeling portion A (see Fig. 3). -1 3 - 200902313 For example, as shown in Fig. 1, the long photosensitive sheet 22 to which the adhesive label 38 is bonded is conveyed to the peeling mechanism 44 by the steering mechanism 42 to prevent the tension on the delivery side from fluctuating. . The flexible base film 26 of the peeling mechanism 44' long photosensitive sheet 22 is sucked and held by the suction tube 62, while the protective film 30 leaves the residual portion B and is peeled off from the long photosensitive sheet 22. The protective film 30 is peeled off by the peeling roller 63 and taken up by the protective film take-up portion 64 (see Fig. 1). Under the action of the peeling mechanism 44, after the protective film 30 leaves the residual portion B and is peeled off from the flexible base film 26, the long photosensitive sheet 22 is tension-adjusted by the tension control mechanism 66. Then, the long photosensitive sheet 22 is transported to the attaching mechanism 46, and the glass substrate 24 can be subjected to thermal transfer processing (layering) of the photosensitive resin layer 28. In the attaching mechanism 46, the rubber rollers 80a, 80b are set to be in a state of being separated from each other. At a predetermined position between the rubber rollers 80a and 80b, the transport of the long photosensitive sheet 22 is temporarily stopped while the half-cut portion 34a of the long photosensitive sheet 22 is positioned. Further, when the substrate heating portion 74 constituting the substrate supply mechanism 45 is heated to the front end portion of the glass substrate 24 at a predetermined temperature and is carried between the rubber rollers 80a and 80b through the transport portion 76, the roller is supported by the pressurizing cylinder 86. 82b and rubber roller 80b will rise. Therefore, the glass substrate 24 and the long photosensitive sheet 22 are sandwiched between the rubber rolls 80a and 80b at a predetermined pressing pressure. Further, the rubber rollers 80a, 80b are heated to a predetermined laminate temperature. Next, the glass base 200902313 plate 24 and the long photosensitive sheet 22 are conveyed in the arrow Y direction by the rotation of the rubber rollers 80a and 80b. Thereby, the photosensitive resin layer 28 is heated and melted and thermally transferred (laminated) to the glass substrate 24. Further, as a lamination condition, the speed is 1.0 m/min to 1 〇.〇m/min, and the temperature of the rubber rollers 80a, 80b is 80 ° C to 150 t: the hardness of the rubber rollers 80a, 80b is 40 to 90 The pressing pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N/cm. When the one-component photosensitive sheet 22 is laminated on the glass substrate 24, the rotation of the rubber rollers 80a and 80b is stopped, and the photosensitive laminate 120 of the glass substrate 24 in which the long photosensitive sheet 22 is laminated is formed. The former knowing section 'clamps the lepton 96 by the substrate. At this time, the half-cut portion 34b is placed at a predetermined position between the rubber lugs 80a and 80b. Further, the rubber roller 80b is retracted from the direction away from the rubber roller 80a, and is released from the clamp, and the substrate transport roller 96 is restarted at a low speed, and the photosensitive laminated body 20 is transported only in the direction of the arrow Y corresponding to the protective film 30. When the width of the remaining portion B is Μ, the rotation of the rubber rollers 80a, 80b is stopped after the next half-cut portion 34 is moved to a predetermined position near the lower side of the rubber roller 80a. On the other hand, in the above state, the next glass substrate 24 is transported toward the attaching position by the substrate transport mechanism 45. The photosensitive laminate 1 20 is continuously produced by repeating the above operations. The photosensitive laminate 1 20 laminated by the attaching mechanism 46 is passed through the inter-substrate sheet cutting mechanism 48 to cut and separate the long photosensitive sheets 22 between the glass substrates 24. After the separated photosensitive laminate 120 is provided with a flexible base film 26, the protective film 30 between the flexible base film 26 and the glass substrate 24 is peeled off and supplied to The next processing process. In this case, when the laminate is processed by the attaching mechanism 46, as shown in Fig. 4, the pressing roller 88 is separated from the long photosensitive sheet 22. Therefore, the long photosensitive sheet 22 is slid to the outer circumferential surface of the rubber roller 80a at the first winding angle 0-1, and in this state, the rubber roller 80a is rotationally driven. Therefore, the long photosensitive sheet 22 is heated to a temperature which is desired immediately before the lamination, and since it is pressed by the glass substrate 24, the lamination treatment can be carried out efficiently and efficiently. On the other hand, as shown in Fig. 5, the lamination process of the glass substrate 24 in the preceding stage is completed, and the rubber roller 80b is lowered, and the drive of the motor 81 is stopped until the new glass substrate 24 is transported to the attaching position. The rotation of the rubber roller 80a is stopped. At this time, the rod 90 is driven and the rod 90a protrudes forward, and is attached to the pressing roller 88 of the rod 90a, and the long photosensitive sheet 22 is pressed substantially downward. Thereby, the long photosensitive sheet 2 2 is brought into contact with the outer circumferential surface of the rubber roller 80a which is stopped during rotation at a second winding angle 02 which is smaller than the first winding angle 01. Here, in the state where the rubber roller 80 a is stopped, when the long photosensitive sheet 22 is in contact with the outer circumferential surface of the rubber roller 80a for more than a certain period of time, the thermal polymerization property of the long photosensitive sheet 2 2 is transmitted. It is prone to heat-affected parts that are not suitable for use (uneven surface, etc.). Therefore, when the rotation of the rubber roller 80a is stopped, by pressing the roller 8, the long photosensitive sheet 22 is in contact with the angle of the outer circumferential portion of the rubber roller 80a, that is, the second winding angle 0 2 is set. An angle smaller than the first winding angle θ 1 . -16- 200902313 Thereby, the heat-affected portion is set outside the screen in which the surface layout of the glass substrate 24 is connected. Therefore, in the first embodiment, there is no defective portion such as unevenness in the surface due to the surface layout of the glass substrate 24, and it is possible to reliably prevent the deterioration of the quality and to efficiently produce a high-quality photosensitive layer. 1 2 0 effect. Specifically, for example, the first winding angle 01 when the diameter of the rubber roller 80a is liOmm K is set within a range of 60° to 80°, and the second winding when the lamination is stopped. The angle Θ2 is set in the range of 20° to 30°. Further, it is preferable to change the second winding angle Θ 2 in accordance with the type of the long photosensitive sheet. Further, in the first embodiment, the thermal polymerization performance is not limited, and the conveyance interval of the glass substrate 24 is not controlled with high precision. Thereby, the control including the base supply mechanism 45 can effectively simplify the control of the control unit 106, and the amount of the long-length photosensitive sheet which is discarded can be reduced, and the cost can be improved. Further, the pressing roller 88 is disposed in the vicinity of the rubber roller 80a, and the long photosensitive thin film 22 is pressed to apply tension to the long photosensitive thin film 22. Therefore, it is possible to prevent wrinkles or thermal deformation of the long photosensitive sheet 22 before the rubber roller 80a, and it is possible to effectively improve the adhesion quality of the long sensitive sheet 22 toward the glass substrate 24. Fig. 6 is a schematic structural view of a manufacturing system for a photosensitive laminate according to a long sheet attaching method according to a second embodiment of the present invention. In addition, the same reference numerals are assigned to the same components as those of the manufacturing system 20 of the first embodiment, and the same reference numerals are given to the same components, and the detailed description thereof will be omitted. The manufacturing system 180 includes a cooling mechanism 182' downstream of the attaching mechanism 46, and a base automatic peeling mechanism 184' disposed downstream of the cooling mechanism 182. The cooling mechanism 182 applies cooling air to the laminated photosensitive laminate 120 to perform cooling treatment. The substrate automatic peeling mechanism 1 84 is a method in which the long flexible base film 26 which is attached to each of the glass substrates 24 at a predetermined interval is continuously peeled off, and includes a pre-separation portion 186 and a peeling roller 188 having a small diameter. The take-up shaft 190 and the automatic attaching machine 192. The take-up shaft 190 controls the torque to impart tension to the flexible base film 26 during driving, and performs tension feedback control on the peeling roller 186 by attaching a tension detector (not shown). Preferably. The pre-separation portion 186 includes a peeling bar 194 that can be moved up and down between the glass substrates 24. In the second embodiment configured as described above, the photosensitive layered body 1 20 laminated by the attaching mechanism 46 is cooled by the cooling mechanism 182. And transferred to the pre-peeling portion 186. Here, the pre-peeling portion 186 is peeled off from the rear end and the front end of the glass substrate 24 adjacent to the protective film 30 by the rise of the peeling bar 1 94. Next, the substrate automatic peeling mechanism 1 84 can continuously wind the flexible base film 26 from the photosensitive laminated body 2 under the rotation of the take-up shaft I 90. In addition, the front end of the flexible base film 26 of the photosensitive laminated body 20 that has resumed the lamination process after the cutting of the failure is stopped, and the cutting of the defective product is performed, and the winding shaft 190 is wound up. The rear end of the flexible base film 26 is automatically attached by the automatic attaching machine 92. -18-200902313 [Brief Description of the Drawings] Fig. 1 is a schematic block diagram showing a manufacturing system of a photosensitive laminate in which the long sheet attaching method according to the first embodiment of the present invention is applied. Fig. 2 is a cross-sectional view of a long photosensitive sheet used in the manufacturing system. Fig. 3 is an explanatory view showing a state in which an adhesive label is adhered to a long photosensitive sheet. ί Fig. 4 is a schematic diagram of a schematic configuration of a film transport device. Fig. 5 is an explanatory view of the operation of the film conveying device. Fig. 6 is a schematic structural view showing a manufacturing system of a photosensitive laminate in which the long sheet attaching method according to the second embodiment of the present invention is applied. Fig. 7 is a schematic structural view of a conventional film attachment device. [Description of main component symbols] 20 ' 180 Manufacturing system 22 24 26 28 30 34 45 46 76 Long photosensitive sheet glass substrate Flexible base film Photosensitive resin layer protective film 34b Half-cut portion substrate supply mechanism Attaching mechanism transport portion 80a , 80b rubber roller 200902313 8 1 motor 82a, 82b support lepton 88 press roller 90 cylinder 92 transport path 96 substrate transport roller r -20