KR20020046978A - 게이트 밸브 - Google Patents
게이트 밸브 Download PDFInfo
- Publication number
- KR20020046978A KR20020046978A KR1020010078529A KR20010078529A KR20020046978A KR 20020046978 A KR20020046978 A KR 20020046978A KR 1020010078529 A KR1020010078529 A KR 1020010078529A KR 20010078529 A KR20010078529 A KR 20010078529A KR 20020046978 A KR20020046978 A KR 20020046978A
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- valve plate
- box
- plate
- opening
- Prior art date
Links
- 238000007789 sealing Methods 0.000 claims description 40
- 238000000926 separation method Methods 0.000 claims 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Abstract
Description
Claims (12)
- 밸브 개구들을 구비한 제 1 밸브판, 신축체를 통해 이 제 1 밸브판에 연결된 제 2 밸브판, 그리고 이 제 1 밸브판과 제 2 밸브판 사이에 설치된 액츄에이터를 포함하는 게이트 밸브에 있어서, 이 액츄에이터의 작동에 의해 제 1 밸브판 및 제 2 밸브판이 이간 또는 접근 방향으로 이동하는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 상기 제 1 밸브판에 밸브봉이 설치된 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 상기 제 2 밸브판에 밸브봉이 설치된 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 밸브봉이 신축체의 축방향 위치의 중간에 위치되어 있는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 상기 액츄에이터가 에어 실린더를 포함하는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 상기 액츄에이터가 상기 밸브판들 사이에 설치된 방진용벨로우즈로 둘러 싸이는 것을 특징으로 하는 게이트 밸브.
- 제 5 항에 있어서, 상기 에어 실린더가 상기 밸브판들에 설치된 피스톤, 피스톤봉 및 실린더를 포함하고, 상기 피스톤과 실린더 사이에 형성된 공간에 압력매체가 공급되는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 상기 제 1 밸브판에 제 1 밀봉 부재가 설치되는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 자유롭게 이동 가능한 상기 밸브판들을 수용하기 위한 밸브 상자, 제 1 밀봉 부재와 접촉하는, 밸브 상자의 제 1 개구에 형성된 제 1 밸브시트, 및 제 2 밸브판과 접촉하는, 밸브 상자의 제 2 개구에 형성된 제 1 스토퍼를 추가로 포함하는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 자유롭게 이동 가능한 상기 밸브판들을 수용하기 위한 밸브 상자, 상기 제 1 밸브판과 접촉하는, 밸브 상자의 제 1 개구에 형성된 제 1 밀봉 부재, 및 상기 제 2 밸브판과 접촉하는, 밸브 상자의 제 2 개구에 형성된 제 1 스토퍼를 추가로 포함하는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 자유롭게 이동 가능한 상기 밸브판들을 수용하기 위한 밸브 상자, 제 1 밀봉 부재와 접촉하는, 밸브 상자의 제 1 개구에 형성된 제 1 밸브시트, 및 제 2 밸브판으로부터 돌출되고, 신축체의 내측 또는 외측에 위치하며, 제 1 개구 측에서 밸브 상자와 접촉하는 제 2 스토퍼를 추가로 포함하는 것을 특징으로 하는 게이트 밸브.
- 제 1 항에 있어서, 자유롭게 이동 가능한 상기 밸브판들을 수용하기 위한 밸브 상자, 제 1 밀봉 부재와 접촉하는, 밸브 상자의 제 1 개구에 형성된 제 1 밸브시트, 및 밸브 상자의 내벽으로부터 돌출되고, 신축체의 외측에 위치하며, 제 1 밸브판과 접촉하는 제 2 스토퍼를 추가로 포함하는 것을 특징으로 하는 게이트 밸브.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000380578A JP3425938B2 (ja) | 2000-12-14 | 2000-12-14 | ゲート弁 |
JPJP-P-2000-00380578 | 2000-12-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020046978A true KR20020046978A (ko) | 2002-06-21 |
KR100492099B1 KR100492099B1 (ko) | 2005-06-02 |
Family
ID=18848733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2001-0078529A KR100492099B1 (ko) | 2000-12-14 | 2001-12-12 | 게이트 밸브 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6561484B2 (ko) |
JP (1) | JP3425938B2 (ko) |
KR (1) | KR100492099B1 (ko) |
Cited By (4)
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---|---|---|---|---|
KR20040008877A (ko) * | 2002-07-19 | 2004-01-31 | 박웅기 | 진공 게이트밸브 |
KR100489250B1 (ko) * | 2002-10-17 | 2005-05-17 | 박웅기 | 진공 게이트밸브 |
KR100489553B1 (ko) * | 2002-07-19 | 2005-05-23 | 박웅기 | 진공 게이트밸브 |
KR100808101B1 (ko) * | 2006-01-11 | 2008-02-29 | 박웅기 | 진공 게이트 밸브 |
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JP3425938B2 (ja) * | 2000-12-14 | 2003-07-14 | 入江工研株式会社 | ゲート弁 |
AU2003245081A1 (en) * | 2002-07-19 | 2004-02-09 | Woong-Ki Park | Vacuum gate valve |
CN100408902C (zh) * | 2003-05-13 | 2008-08-06 | 应用材料股份有限公司 | 密封一处理室一开口的方法与装置 |
US7270311B1 (en) * | 2003-07-14 | 2007-09-18 | Brenes Arthur J | Pendulum gate valve |
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US20060124886A1 (en) * | 2004-07-08 | 2006-06-15 | Brenes Arthur J | Gate valve |
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JP5108292B2 (ja) * | 2005-12-20 | 2012-12-26 | ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト | 振り子式真空バルブおよびスライドゲート真空バルブ |
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US7802772B2 (en) * | 2005-12-20 | 2010-09-28 | Vat Holding Ag | Pendulum and slide gate vacuum valve |
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KR100740036B1 (ko) * | 2006-06-08 | 2007-07-19 | (주)지에스티산업 | 진공 게이트 밸브 |
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JP5171137B2 (ja) * | 2006-07-18 | 2013-03-27 | ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト | シャトルバルブ |
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WO2010025257A2 (en) * | 2008-08-28 | 2010-03-04 | Applied Materials, Inc. | Slotted tssl door to couple o-ring with moving mating part |
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US20100098518A1 (en) * | 2008-10-20 | 2010-04-22 | Applied Materials, Inc. | In/out door for a vacuum chamber |
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JP5606968B2 (ja) * | 2011-03-10 | 2014-10-15 | 株式会社アルバック | 仕切弁 |
JP5613087B2 (ja) * | 2011-03-17 | 2014-10-22 | 株式会社アルバック | 仕切弁 |
JP5620862B2 (ja) * | 2011-03-17 | 2014-11-05 | 株式会社アルバック | 仕切弁 |
JP5806827B2 (ja) * | 2011-03-18 | 2015-11-10 | 東京エレクトロン株式会社 | ゲートバルブ装置及び基板処理装置並びにその基板処理方法 |
EP2551564A1 (de) | 2011-07-28 | 2013-01-30 | VAT Holding AG | Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs |
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KR101317696B1 (ko) * | 2011-12-13 | 2013-10-15 | (주)시스콤 | 게이트 밸브의 벨로우즈 보호 구조 |
KR101293590B1 (ko) * | 2011-12-16 | 2013-08-13 | 주식회사 뉴파워 프라즈마 | 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템 |
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US9086173B2 (en) | 2012-07-19 | 2015-07-21 | Vat Holding Ag | Vacuum valve |
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TWI666401B (zh) | 2016-10-04 | 2019-07-21 | 日商愛發科股份有限公司 | 閘閥 |
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JP6562334B1 (ja) | 2018-03-12 | 2019-08-21 | 株式会社アルバック | 仕切弁 |
US10676673B2 (en) * | 2018-11-13 | 2020-06-09 | Deltavalve, Llc | Systems and methods for valve sealing |
US11328943B2 (en) * | 2020-04-03 | 2022-05-10 | Applied Materials, Inc. | Dual gate and single actuator system |
US11933416B2 (en) * | 2021-07-16 | 2024-03-19 | Changxin Memory Technologies, Inc. | Gate valve device, cleaning method and mechanical apparatus |
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Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3241807A (en) * | 1963-01-11 | 1966-03-22 | Oscar C Holderer | Fluid pressure actuated flow control gate valve |
US3524467A (en) * | 1967-10-13 | 1970-08-18 | Exxon Research Engineering Co | Fluid expanded disk valve |
US4157169A (en) * | 1977-10-12 | 1979-06-05 | Torr Vacuum Products | Fluid operated gate valve for use with vacuum equipment |
US4381100A (en) * | 1981-01-02 | 1983-04-26 | Fairchild Industries, Inc. | Valve and valving apparatus |
JPS5990664U (ja) * | 1982-12-09 | 1984-06-19 | 川崎重工業株式会社 | 両シ−ト形切替弁 |
JPH01261573A (ja) * | 1988-04-08 | 1989-10-18 | Kokusai Electric Co Ltd | 真空仕切弁 |
JPH02186172A (ja) * | 1989-01-10 | 1990-07-20 | Irie Koken Kk | 無しゅう動ゲートバルブ用弁体 |
JPH03204483A (ja) * | 1990-01-08 | 1991-09-06 | Irie Koken Kk | 無しゅう動真空ゲートバルブ |
JP3330686B2 (ja) * | 1993-07-12 | 2002-09-30 | 株式会社アルバック | 無摺動ゲートバルブ |
JP2766190B2 (ja) * | 1994-07-28 | 1998-06-18 | 入江工研株式会社 | 無しゅう動真空ゲートバルブ |
JP3138645B2 (ja) * | 1996-10-02 | 2001-02-26 | 入江工研株式会社 | 無摺動真空ゲートバルブ及び弁板 |
CH692821A5 (de) * | 1998-02-04 | 2002-11-15 | Unaxis Trading Ag | Vakuumventilplatte und Vakuumkammeranordnung mit einer solchen. |
JP3425938B2 (ja) * | 2000-12-14 | 2003-07-14 | 入江工研株式会社 | ゲート弁 |
-
2000
- 2000-12-14 JP JP2000380578A patent/JP3425938B2/ja not_active Expired - Lifetime
-
2001
- 2001-09-28 US US09/964,339 patent/US6561484B2/en not_active Expired - Fee Related
- 2001-12-12 KR KR10-2001-0078529A patent/KR100492099B1/ko active IP Right Grant
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040008877A (ko) * | 2002-07-19 | 2004-01-31 | 박웅기 | 진공 게이트밸브 |
KR100489553B1 (ko) * | 2002-07-19 | 2005-05-23 | 박웅기 | 진공 게이트밸브 |
KR100489250B1 (ko) * | 2002-10-17 | 2005-05-17 | 박웅기 | 진공 게이트밸브 |
KR100808101B1 (ko) * | 2006-01-11 | 2008-02-29 | 박웅기 | 진공 게이트 밸브 |
Also Published As
Publication number | Publication date |
---|---|
JP3425938B2 (ja) | 2003-07-14 |
US6561484B2 (en) | 2003-05-13 |
KR100492099B1 (ko) | 2005-06-02 |
US20020074534A1 (en) | 2002-06-20 |
JP2002181205A (ja) | 2002-06-26 |
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