AU2003245081A1 - Vacuum gate valve - Google Patents

Vacuum gate valve

Info

Publication number
AU2003245081A1
AU2003245081A1 AU2003245081A AU2003245081A AU2003245081A1 AU 2003245081 A1 AU2003245081 A1 AU 2003245081A1 AU 2003245081 A AU2003245081 A AU 2003245081A AU 2003245081 A AU2003245081 A AU 2003245081A AU 2003245081 A1 AU2003245081 A1 AU 2003245081A1
Authority
AU
Australia
Prior art keywords
gate valve
vacuum gate
vacuum
valve
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003245081A
Inventor
Woong-Ki Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR10-2002-0042607A external-priority patent/KR100489553B1/en
Priority claimed from KR1020020042605A external-priority patent/KR20040008877A/en
Priority claimed from KR10-2002-0063367A external-priority patent/KR100489250B1/en
Application filed by Individual filed Critical Individual
Publication of AU2003245081A1 publication Critical patent/AU2003245081A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
AU2003245081A 2002-07-19 2003-06-30 Vacuum gate valve Abandoned AU2003245081A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
KR10-2002-0042607A KR100489553B1 (en) 2002-07-19 2002-07-19 Vaccum Gate Valve
KR1020020042605A KR20040008877A (en) 2002-07-19 2002-07-19 Vaccum Gate Valve
KR10-2002-0042607 2002-07-19
KR10-2002-0042605 2002-07-19
KR10-2002-0063367A KR100489250B1 (en) 2002-10-17 2002-10-17 Vaccum Gate Valve
KR10-2002-0063367 2002-10-17
PCT/KR2003/001286 WO2004010035A1 (en) 2002-07-19 2003-06-30 Vacuum gate valve

Publications (1)

Publication Number Publication Date
AU2003245081A1 true AU2003245081A1 (en) 2004-02-09

Family

ID=30773359

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003245081A Abandoned AU2003245081A1 (en) 2002-07-19 2003-06-30 Vacuum gate valve

Country Status (2)

Country Link
AU (1) AU2003245081A1 (en)
WO (1) WO2004010035A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2592314B1 (en) 2011-11-10 2016-08-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, vacuum valve therefore and operation thereof
CN104421437B (en) * 2013-08-20 2017-10-17 中微半导体设备(上海)有限公司 Movable valve, portable shielding door and vacuum flush system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4157169A (en) * 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
JPH01261573A (en) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd Vacuum sluice valve
DE19746241C2 (en) * 1997-10-20 2000-05-31 Vat Holding Ag Haag Device for closing an opening
DE19857201A1 (en) * 1998-12-11 2000-06-15 Leybold Systems Gmbh Sluice valve for simultaneously closing or opening aligned vacuum chamber passage slits, e.g. of a glass sputtering coating unit, comprises a freely moving slide with a reciprocating body for moving opposite valve plates
JP3425938B2 (en) * 2000-12-14 2003-07-14 入江工研株式会社 Gate valve

Also Published As

Publication number Publication date
WO2004010035A1 (en) 2004-01-29

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase