JPH01261573A - Vacuum sluice valve - Google Patents
Vacuum sluice valveInfo
- Publication number
- JPH01261573A JPH01261573A JP8646888A JP8646888A JPH01261573A JP H01261573 A JPH01261573 A JP H01261573A JP 8646888 A JP8646888 A JP 8646888A JP 8646888 A JP8646888 A JP 8646888A JP H01261573 A JPH01261573 A JP H01261573A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- container
- bellows
- passage
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は真空技術を応用した装置２例えば真空蒸着装置
、プラズマエツチング装置、プラズマＣＶＤ装置等に用
いて真空容器と大気、または真空容器間を気密に保ため
の真空仕切弁に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to devices applying vacuum technology 2, such as vacuum evaporation devices, plasma etching devices, plasma CVD devices, etc., to connect a vacuum container and the atmosphere, or between a vacuum container. Concerning vacuum gate valves for maintaining airtightness.
第２図は従来の真空仕切弁の最も簡便なものの一例を示
す断面図である。FIG. 2 is a sectional view showing an example of the simplest conventional vacuum gate valve.
この従来例は真空容器１の開口３Ｓこ、この開口３を開
閉する回動型弁体１７を駆動軸１８に取付け、この駆動
軸１８を時計方向に回動して弁体１７を同じ方向に回動
させ、開口３をＯリング１９を介して密閉することがで
き、また駆動軸１８を反時計方向に回動して弁体１７を
同じ方向に回動させ、開口３を開放することができるも
のであり、真空容器１内を密閉して真空にしたり、大気
に開放したりすることができる。In this conventional example, an opening 3S of a vacuum container 1 is attached, and a rotary valve body 17 for opening and closing this opening 3 is attached to a drive shaft 18, and this drive shaft 18 is rotated clockwise to move the valve body 17 in the same direction. By rotating the drive shaft 18, the opening 3 can be sealed via the O-ring 19, and by rotating the drive shaft 18 counterclockwise, the valve body 17 can be rotated in the same direction to open the opening 3. The inside of the vacuum container 1 can be sealed and evacuated, or it can be opened to the atmosphere.
また第２図の仮想線で示すように真空容器１の開口３に
真空容器２の開口４を対接し、回動型弁体１７を回動す
ることにより回動方向に応じて再真空容器１，２間を仕
切ったり、開放したりできるものである。Further, as shown by the imaginary line in FIG. 2, the opening 4 of the vacuum container 2 is brought into contact with the opening 3 of the vacuum container 1, and the rotary valve body 17 is rotated to re-evacuate the vacuum container 1 according to the direction of rotation. , which can partition or open two rooms.
このような従来例にあっては、弁体１７が開いた時、開
く方向に広いスペースが必要であり、また真空容器１を
大気圧に、真空容器２を真空にした場合は、気密に保つ
ために過大な駆動力を必要とする等の課題がある。In such a conventional example, when the valve body 17 opens, a wide space is required in the opening direction, and when the vacuum container 1 is brought to atmospheric pressure and the vacuum container 2 is made to be evacuated, it is necessary to keep it airtight. Therefore, there are problems such as requiring excessive driving force.
第３図は従来の真空仕切弁の他側を示す断面図で、本発
明に類似のものである。FIG. 3 is a sectional view showing the other side of a conventional vacuum gate valve, which is similar to the present invention.
この従来例は真空容器１の開口３に、この開口３を開閉
する弁体５とこれに対向する弁体６を有する弁容器７を
配設し、これらの弁体５，６の両端部をリンク２０ 、
２１で連結せしめ、これらのリンク２０ 、２１の間に
バネ２２を連結すると共に、一方の弁体５に弁容器７よ
り突出する駆動軸１８を連結せしめ、この駆動軸１８を
第３図の矢印方向に動かすと、弁体５，６がリンク２０
、２１によりバネ２２に抗して真空容器１の開口３に
通じる弁容器７の開ロアａ及びこれに対向する開ロアｂ
に押（」けられて真空容器１内を密閉することができ、
また駆動軸１８を第３図の矢印方向とは逆の方向に動か
すと、弁体５．６がバネ２２によりリンク２０ 、２１
を介して真空容器１の開口３に通じる弁容器７の開ロア
ａとこれに対向する開ロアｂを大気に開放することがで
きるものであり、真空容器１内を密閉して真空にしたり
、また大気に開放したりすることができる。In this conventional example, a valve container 7 having a valve body 5 for opening and closing the opening 3 and a valve body 6 facing the valve body 6 is disposed in an opening 3 of a vacuum vessel 1, and both ends of these valve bodies 5 and 6 are connected to each other. Link 20,
A spring 22 is connected between these links 20 and 21, and a drive shaft 18 protruding from the valve container 7 is connected to one of the valve bodies 5, and this drive shaft 18 is connected as shown by the arrow in FIG. When moved in the direction, the valve bodies 5 and 6 move to the link 20.
, 21 resisting a spring 22 to open a lower opening a of the valve container 7 which communicates with the opening 3 of the vacuum container 1, and an opening lower b opposite thereto.
The inside of the vacuum container 1 can be sealed by being pushed by
Furthermore, when the drive shaft 18 is moved in the direction opposite to the direction of the arrow in FIG.
The opening lower a of the valve container 7 communicating with the opening 3 of the vacuum container 1 and the opening lower b opposite thereto can be opened to the atmosphere through the opening 3 of the vacuum container 1. It can also be opened to the atmosphere.
また、第３図の仮想線で示すように真空容器２を追加し
、２つの真空容器１，２の開口３，４の間に、これらの
開口３．４をそれぞれ開閉する弁体５，６を有する弁容
器７を配設し、この場合には駆動軸１８を移動すること
により移動方向に応じて再真空容器１，２間を仕切った
り、開放したりすることができるものである。Further, as shown by the imaginary line in FIG. 3, a vacuum container 2 is added, and valve bodies 5, 6 are installed between the openings 3, 4 of the two vacuum containers 1, 2 to open and close these openings 3.4, respectively. In this case, by moving the drive shaft 18, the re-vacuum containers 1 and 2 can be partitioned or opened depending on the direction of movement.
このような従来例にあっては、第２図示の従来真空仕切
弁よりコンパクトにできるという利点はあるが、メカニ
ズムが複雑で動作時に塵埃を発生し易いという課題があ
る。Although such a conventional example has the advantage of being more compact than the conventional vacuum gate valve shown in FIG. 2, there is a problem that the mechanism is complicated and dust is likely to be generated during operation.
本発明の目的はコンパクトでメカニズムの単純化と動作
の信頼性の向上を図り、動作時の塵埃の発生を軽減しよ
うとするものである。An object of the present invention is to provide a compact device, simplify the mechanism, improve operational reliability, and reduce dust generation during operation.
本発明の第１真空仕切弁は、上記の課題を解決し上記の
目的を達成するため、第１図示のように真空容器ｌの開
口３に、この開口３を開閉する弁体５とこれに対向する
弁体６を有する弁容器７を配設し、これらの弁体５，６
を弁側ベローズ８で連結せしめ、一方の弁体６に、弁側
ベローズ８内に連通ずる流路９を設け、この流路９に連
通ずるｉｍ路１０を有する作動ロッド１１を弁容器７よ
り突設し、この突設した作動コンド１１部分と弁容器７
との間に作動側ベローズＩ２を連結すると共に、作動ロ
ッド１１の通路１０に排気側１３と気体供給側１４を切
替えるバルブ１５をパイプ１６で連結せしめてなる構成
としたものである。In order to solve the above problems and achieve the above objects, the first vacuum gate valve of the present invention has a valve body 5 for opening and closing the opening 3 of the vacuum container l, and a valve body 5 for opening and closing the opening 3, as shown in the first figure. A valve container 7 having opposing valve bodies 6 is arranged, and these valve bodies 5, 6
are connected by a valve-side bellows 8, one valve body 6 is provided with a passage 9 that communicates with the valve-side bellows 8, and an actuating rod 11 having an im passage 10 that communicates with this passage 9 is inserted from the valve container 7. The operating condo 11 and the valve container 7 are provided in a protruding manner.
An actuating side bellows I2 is connected between the actuating rod 11 and a valve 15 for switching between the exhaust side 13 and the gas supply side 14 is connected to the passage 10 of the actuating rod 11 by a pipe 16.
本発明の第２真空仕切弁は、同じ課題を解決し同じ目的
を達成するため、第１図示のように複数の真空容器１，
２の開口３，４の間に、これらの開口３，４をそれぞれ
開閉する弁体５，６を有する弁容器７を配設し、これら
の弁体５，６を弁側ベローズ８で連結せしめ、一方の弁
体６に、弁側ベローズ８内に連通ずる流路９を設け、こ
の流路９に連通する通路１０を有する作動ロッド１１を
弁容器７より突設し、この突設した作動コンド１１部分
と弁容器７との間に作動側ベローズ１２を連結すると共
に、作動ロッド１１の通路１０に排気側１３と気体供給
側１４を切替えるバルブ１５をパイプ１６で連結せしめ
てなる構成としたものである。In order to solve the same problem and achieve the same purpose, the second vacuum gate valve of the present invention has a plurality of vacuum vessels 1,
A valve container 7 having valve bodies 5 and 6 for opening and closing these openings 3 and 4, respectively, is disposed between the openings 3 and 4 of 2, and these valve bodies 5 and 6 are connected by a valve side bellows 8. , one valve body 6 is provided with a flow passage 9 communicating with the valve-side bellows 8, and an actuation rod 11 having a passage 10 communicating with the flow passage 9 is provided protruding from the valve container 7. The actuating side bellows 12 is connected between the condo 11 part and the valve container 7, and a valve 15 for switching between the exhaust side 13 and the gas supply side 14 is connected to the passage 10 of the actuating rod 11 by a pipe 16. It is something.
第１真空仕切弁において作動ロッド１１を移動させ第１
図示の位置まで弁体５，６を移動させた後、バルブ１５
を気体供給側１４に切替えて気体をパイプ１６、通路１
０及び流路９を経て弁側ベローズ８内に導入すると、弁
体５，６が移動し弁容器７の内面に押付けられて真空容
器１の開口３が密閉され、真空容器１内を気密に保つこ
とができる。The actuating rod 11 is moved in the first vacuum gate valve and the first
After moving the valve bodies 5 and 6 to the illustrated positions, the valve 15
switch to the gas supply side 14 and supply the gas to the pipe 16 and passage 1.
0 and into the valve-side bellows 8 through the flow path 9, the valve bodies 5 and 6 move and are pressed against the inner surface of the valve container 7, sealing the opening 3 of the vacuum container 1 and making the inside of the vacuum container 1 airtight. can be kept.
また、真空容器１内を大気に開放するときは、バルブ１
５を排気側１３に切替え、弁側ベローズ８内の気体を、
流路９９通路１０及びパイプ１６を経て排気し気密を解
いた後、作動ロッド１１を上記とは逆方向に移動させ、
弁体５，６を同じ方向に移動させることにより真空容器
１内を大気に開放することができる。In addition, when opening the inside of the vacuum container 1 to the atmosphere, the valve 1
5 to the exhaust side 13, and the gas inside the valve side bellows 8 is
After exhausting air through the flow path 99 passage 10 and pipe 16 and breaking the airtight, move the operating rod 11 in the opposite direction to the above,
By moving the valve bodies 5 and 6 in the same direction, the inside of the vacuum container 1 can be opened to the atmosphere.
第２真空仕切弁においては作動ロッド１１を移動させ、
第１図示の位置まで弁体５，６を移動させた後、バルブ
１５を気体供給側１４に切替えて気体をパイプ１６１通
路１０及び流路９を経て弁側ベローズ８内に導入すると
、弁体５，６が移動し弁容器７の内面に押付けられて真
空容器１，２の開口３゜４が密閉され、真空容器１，２
内を気密に保つことができる。In the second vacuum gate valve, the actuating rod 11 is moved,
After moving the valve bodies 5 and 6 to the positions shown in the first diagram, the valve 15 is switched to the gas supply side 14 and gas is introduced into the valve side bellows 8 through the pipe 161 passage 10 and flow path 9. 5 and 6 move and are pressed against the inner surface of the valve container 7, and the openings 3° 4 of the vacuum containers 1 and 2 are sealed.
You can keep the inside airtight.
また、真空容器１，２内を開放するときは、バルブ１５
を排気側１３に切替え、弁側ベローズ８内の気体を流路
９９通路１０及びパイプ１６を経て排気し、気密を解い
た後、作動ロッド１１を上記とは逆方向に移動させ、弁
体５，６を同じ方向に移動させることにより真空容器１
，２内を連通ずることができる。In addition, when opening the inside of the vacuum containers 1 and 2, the valve 15
is switched to the exhaust side 13, the gas in the valve side bellows 8 is exhausted through the flow path 99 passage 10 and the pipe 16, and the airtight is released.Then, the actuating rod 11 is moved in the opposite direction to the above, and the valve body 5 is switched to the exhaust side 13. , 6 in the same direction.
, 2 can be communicated.
一方の真空容器１または２が大気圧で他方の真空容器２
または１が真空状態でも、気体の圧力で十分に気密を保
つことができる。One vacuum vessel 1 or 2 is at atmospheric pressure and the other vacuum vessel 2
Alternatively, even if 1 is in a vacuum state, the airtightness can be maintained sufficiently by gas pressure.
以下図面に基づいて本発明の詳細な説明する。 The present invention will be described in detail below based on the drawings.
第１図は本発明真空仕切弁の一実施例の構成を示す断面
図である。第１図において１，２は２つの真空容器、３
，４はそれぞれ真空容器１，２の開口、７はこれらの真
空容器１．２の開口３，４間に、これらの開口３，４を
開閉する弁体５，６を有する弁容器、７ａ 、 ７ｂは
それぞれ真空容器１゜２の開口３，４に連通ずる弁容器
７の開口である。FIG. 1 is a sectional view showing the structure of an embodiment of the vacuum gate valve of the present invention. In Figure 1, 1 and 2 are two vacuum containers, 3
, 4 are the openings of the vacuum containers 1 and 2, respectively, and 7 is a valve container having valve bodies 5 and 6 between the openings 3 and 4 of these vacuum containers 1.2 for opening and closing these openings 3 and 4, 7a, 7b are openings of the valve container 7 which communicate with the openings 3 and 4 of the vacuum container 1.degree.2, respectively.
弁体５，６は弁側ベローズ８で連結され、一方の弁体６
には弁側ベローズ８内に連通ずる流路９が設けられてお
り、この流路９に連通ずる通路１０を有する作動ロッド
１１が弁容器７より突設している。この突設した作動ロ
ッド１１１部分と弁容器７との間には作動側ベローズ１
２が連結され、作動ロッド１１の通路１０には排気側１
３と気体供給側１４を切り替えるバルブ１５がパイプ１
６で連結されている。２３は作動ロッド１１に連結され
たエアシリンダ等の駆動源、１９は各弁体５，６の周部
外面に装着された０リングである。The valve bodies 5 and 6 are connected by a valve side bellows 8, and one valve body 6
A flow passage 9 communicating with the valve side bellows 8 is provided in the valve side bellows 8, and an actuating rod 11 having a passage 10 communicating with the flow passage 9 projects from the valve container 7. An operating side bellows 1 is provided between the protruding operating rod 111 portion and the valve container 7.
2 are connected, and the exhaust side 1 is connected to the passage 10 of the actuating rod 11.
The valve 15 that switches between the pipe 1 and the gas supply side 14 is connected to the pipe 1.
They are connected by 6. 23 is a driving source such as an air cylinder connected to the operating rod 11, and 19 is an O-ring attached to the outer peripheral surface of each valve body 5, 6.
上記の構成において作動ロッド１１をエアシリンダ等の
駆動源２３により移動９図例では上動させ、第１図示の
位置まで弁体５，６を上動させた後、バルブ１５を気体
供給側１４に切替えて気体１例えばＮ２ガスまたは圧縮
空気をパイプ１６１通路１０及び流路９を経て弁側ベロ
ーズ８内に導入すると、弁体５．６が右、左方向に移動
し弁容器７の内面に押付けられて真空容器１，２の開口
３，４及び弁容器７の開ロアａ 、 ７ｂが密閉され、
真空容器１．２内を気密に保つことができる。In the above configuration, the actuating rod 11 is moved upward by the drive source 23 such as an air cylinder, in the example shown in FIG. When the gas 1, for example, N2 gas or compressed air is introduced into the valve-side bellows 8 through the pipe 161 passage 10 and the flow path 9, the valve body 5.6 moves to the right and left and touches the inner surface of the valve container 7. The openings 3 and 4 of the vacuum containers 1 and 2 and the lower openings a and 7b of the valve container 7 are sealed by being pressed.
The inside of the vacuum container 1.2 can be kept airtight.
また、真空容器１．２内を開放するときは、バルブ１５
を排気側１３に切替え、弁側ベローズ８内のＮ２ガスま
たは圧縮空気を流路９２通路１０及びパイプ１６を経て
排気し、気密を解いた後、作動ロッド１１を上記とは逆
方向に下動させ、弁体５，６を同じ方向に下動させるこ
とにより真空容器１．２内を連通ずることができる。Also, when opening the inside of the vacuum container 1.2, the valve 15
is switched to the exhaust side 13, the N2 gas or compressed air in the valve side bellows 8 is exhausted through the flow path 92 passage 10 and the pipe 16, the airtight is released, and the operating rod 11 is moved downward in the opposite direction to the above. By moving the valve bodies 5 and 6 downward in the same direction, the inside of the vacuum vessel 1.2 can be communicated.
一方の真空容器１または２が大気圧で他方の真空容器２
またはｌが真空状態でも、Ｎ２ガスまたは圧縮空気の圧
力が２ｋｇ ／ ｃｎｌ程度あれば十分に気密を保つこ
とができる。One vacuum vessel 1 or 2 is at atmospheric pressure and the other vacuum vessel 2
Even if l is in a vacuum state, airtightness can be maintained sufficiently if the pressure of N2 gas or compressed air is about 2 kg/cnl.
また、真空容器２を設けないときは、作動ロッド１１を
エアシリンダ等の駆動源２３により３図例では上動移動
させ、第１図示の位置まで弁体５，６を上動させた後、
バルブ１５を気体供給側１４に切替えてＮ２ガスまたは
圧縮空気をパイプ１６１通路１０及び流路９を経てベロ
ーズ８内に導入すると、弁体５．６が移動し弁容器７の
内面に押付けられて真空容器１の開口３と弁容器７の開
ロアａ 、 ７ｂが密閉され、真空容器１内を気密に保
つことができる。When the vacuum container 2 is not provided, the actuating rod 11 is moved upward in the example shown in FIG.
When the valve 15 is switched to the gas supply side 14 and N2 gas or compressed air is introduced into the bellows 8 through the pipe 161 passage 10 and the flow path 9, the valve body 5.6 moves and is pressed against the inner surface of the valve container 7. The opening 3 of the vacuum container 1 and the lower openings a and 7b of the valve container 7 are sealed, and the inside of the vacuum container 1 can be kept airtight.
また、真空容器１内を大気に開放するときは、バルブ１
５を排気側１３に切替え、弁側ベローズ８内のＮ２ガス
または圧縮空気を、流路９３通路１０及びパイプ１６を
経て排気し気宇を解いた後、作動ロッド１１を上記とは
逆方向に下動させ、弁体５，６を同じ方向に下動させる
ことにより真空容器１内を大気に開放することができる
。In addition, when opening the inside of the vacuum container 1 to the atmosphere, the valve 1
5 to the exhaust side 13 and exhaust the N2 gas or compressed air in the valve side bellows 8 through the flow path 93 passage 10 and pipe 16 to relieve the air, then lower the operating rod 11 in the opposite direction to the above. By moving the valve bodies 5 and 6 downward in the same direction, the inside of the vacuum container 1 can be opened to the atmosphere.
上述のように本発明第１真空仕切弁によれば、■、第２
図示のような従来弁より狭いスペースに設置可能である
。■４部品点数が非常に少なく単純な構造であるので、
動作の信頼性が高く、動作時の塵埃の発生も少ない。■
、他の方式の弁と違い気密を保つための力は弁体５，６
を移動させる駆動力に依らないので駆動源２３１例えば
エアシリンダ等も小さいもので良い。As mentioned above, according to the first vacuum gate valve of the present invention,
It can be installed in a smaller space than the conventional valve shown. ■4 It has a simple structure with very few parts, so
It has high operational reliability and generates little dust during operation. ■
, unlike other types of valves, the force required to maintain airtightness is the valve bodies 5 and 6.
The drive source 231, such as an air cylinder, may be small because it does not depend on the driving force for moving the motor.
また本発明第２真空仕切弁によれば、上記■〜■の効果
のみならず、■、真空容器１，２の一方が大気圧で、他
方が真空状態でも気体の圧力で十分気密を保つことがで
きる。Furthermore, according to the second vacuum gate valve of the present invention, in addition to the above-mentioned effects (1) to (3), (1) even if one of the vacuum containers 1 and 2 is at atmospheric pressure and the other is in a vacuum state, sufficient airtightness can be maintained by the gas pressure. I can do it.
第１図は本発明真空仕切弁の一実施例の構成を示す断面
図、第２図は従来の真空仕切弁の最も節便なものの一例
を示す断面図、第３図は従来の真空仕切弁の他側を示す
断面図である。
１．２・・・・・・真空容器、３，４・・・・・・開口
、５，６・・・・・・弁体、７・・・・・・弁容器、７
ａ 、 ７ｂ・・・・・・開口、８・・・・・・弁側ベ
ローズ、９・・・・・・流路、１０・・・・・・通路、
１１・・・・・・作動ロッド、１２・・・・・・作動側
ベローズ、１３・・・・・・排気側、１４・・・・・・
気体供給側、１５・・・・・・バルブ、Ｉ６・・・・・
・パイプ。
算１遡
４！νυ啄
箋２図
答３ソFig. 1 is a cross-sectional view showing the configuration of an embodiment of the vacuum gate valve of the present invention, Fig. 2 is a cross-sectional view showing an example of the most convenient conventional vacuum gate valve, and Fig. 3 is a conventional vacuum gate valve. It is a sectional view showing the other side. 1.2... Vacuum container, 3, 4... Opening, 5, 6... Valve body, 7... Valve container, 7
a, 7b...opening, 8...valve side bellows, 9...channel, 10...passage,
11... Actuation rod, 12... Actuation side bellows, 13... Exhaust side, 14...
Gas supply side, 15... Valve, I6...
·pipe. Arithmetic 1 back 4! νυ Takuji 2 Illustrations and Answers 3
Claims (2)
体５とこれに対向する弁体６を有する弁容器７を配設し
、これらの弁体５、６を弁側ベローズ８で連結せしめ、
一方の弁体６に、弁側ベローズ８内に連通する流路９を
設け、この流路９に連通する通路１０を有する作動ロッ
ド１１を弁容器７より突設し、この突設した作動ロッド
１１部分と弁容器７との間に作動側ベローズ１２を連結
すると共に、作動ロッド１１の通路１０に排気側１３と
気体供給側１４を切替えるバルブ１５をパイプ１６で連
結せしめてなる真空仕切弁。(1) A valve container 7 having a valve body 5 for opening and closing the opening 3 and a valve body 6 facing the valve body 6 is disposed in the opening 3 of the vacuum vessel 1, and these valve bodies 5 and 6 are connected to the valve side bellows 8. Connect with
One valve body 6 is provided with a passage 9 that communicates with the valve-side bellows 8, and an actuation rod 11 having a passage 10 that communicates with the passage 9 is provided protruding from the valve container 7. 11 and a valve container 7, and a valve 15 for switching between an exhaust side 13 and a gas supply side 14 is connected to a passage 10 of an actuating rod 11 by a pipe 16.
らの開口３，４をそれぞれ開閉する弁体５，６を有する
弁容器７を配設し、これらの弁体５，６を弁側ベローズ
８で連結せしめ、一方の弁体６に、弁側ベローズ８内に
連通する流路９を設け、この流路９に連通する通路１０
を有する作動ロッド１１を弁容器７より突設し、この突
設した作動ロッド１１部分と弁容器７との間に作動側ベ
ローズ１２を連結すると共に、作動ロッド１１の通路１
０に排気側１３と気体供給側１４を切替えるバルブ１５
をパイプ１６で連結せしめてなる真空仕切弁。(2) A valve container 7 having valve bodies 5 and 6 for opening and closing the openings 3 and 4, respectively, is disposed between the openings 3 and 4 of the plurality of vacuum vessels 1 and 2, and these valve bodies 5, 6 are connected by a valve-side bellows 8, one valve body 6 is provided with a passage 9 that communicates with the inside of the valve-side bellows 8, and a passage 10 that communicates with this passage 9 is provided.
An actuating rod 11 having a diameter of 10 mm is provided to protrude from the valve container 7, and an actuating side bellows 12 is connected between the protruding portion of the actuating rod 11 and the valve container 7, and the passage 1 of the actuating rod 11 is connected to the valve container 7.
Valve 15 that switches the exhaust side 13 and gas supply side 14 to 0
A vacuum gate valve which is connected by a pipe 16.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8646888A JPH01261573A (en) | 1988-04-08 | 1988-04-08 | Vacuum sluice valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8646888A JPH01261573A (en) | 1988-04-08 | 1988-04-08 | Vacuum sluice valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01261573A true JPH01261573A (en) | 1989-10-18 |
Family
ID=13887790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8646888A Pending JPH01261573A (en) | 1988-04-08 | 1988-04-08 | Vacuum sluice valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01261573A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0448481U (en) * | 1990-08-29 | 1992-04-24 | ||
| US5271602A (en) * | 1992-04-13 | 1993-12-21 | The Japan Steel Works Ltd. | Vacuum gate valve |
| EP0589681A2 (en) * | 1992-09-22 | 1994-03-30 | Shiseido Company Limited | Red pigment and manufacturing method for it |
| WO2004010035A1 (en) * | 2002-07-19 | 2004-01-29 | Woong-Ki Park | Vacuum gate valve |
| KR20040008877A (en) * | 2002-07-19 | 2004-01-31 | 박웅기 | Vaccum Gate Valve |
| KR100472118B1 (en) * | 2000-12-04 | 2005-03-08 | 이리에 고켕 가부시키가이샤 | Gate valve |
| KR100489250B1 (en) * | 2002-10-17 | 2005-05-17 | 박웅기 | Vaccum Gate Valve |
| KR100489553B1 (en) * | 2002-07-19 | 2005-05-23 | 박웅기 | Vaccum Gate Valve |
| KR100492099B1 (en) * | 2000-12-14 | 2005-06-02 | 이리에 고켕 가부시키가이샤 | Gate valve |
| KR100808101B1 (en) * | 2006-01-11 | 2008-02-29 | 박웅기 | Vacuum Gate Valve |
| JP2010281446A (en) * | 2003-05-13 | 2010-12-16 | Applied Materials Inc | Method and device for sealing opening of processing chamber |
| JP2011505528A (en) * | 2007-12-06 | 2011-02-24 | バット ホールディング アーゲー | Vacuum valve |
| WO2011043189A1 (en) * | 2009-10-06 | 2011-04-14 | 株式会社 アルバック | Gate valve compatible with adverse pressure |
| CN104235402A (en) * | 2013-06-05 | 2014-12-24 | 入江工研株式会社 | Sluice valve and chamber |
-
1988
- 1988-04-08 JP JP8646888A patent/JPH01261573A/en active Pending
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0448481U (en) * | 1990-08-29 | 1992-04-24 | ||
| US5271602A (en) * | 1992-04-13 | 1993-12-21 | The Japan Steel Works Ltd. | Vacuum gate valve |
| EP0589681A2 (en) * | 1992-09-22 | 1994-03-30 | Shiseido Company Limited | Red pigment and manufacturing method for it |
| EP0589681A3 (en) * | 1992-09-22 | 1994-08-17 | Shiseido Co Ltd | Red pigment and manufacturing method for it |
| US5522923A (en) * | 1992-09-22 | 1996-06-04 | Shiseido Co., Ltd. | Red pigment and manufacturing method thereof |
| KR100472118B1 (en) * | 2000-12-04 | 2005-03-08 | 이리에 고켕 가부시키가이샤 | Gate valve |
| KR100492099B1 (en) * | 2000-12-14 | 2005-06-02 | 이리에 고켕 가부시키가이샤 | Gate valve |
| WO2004010035A1 (en) * | 2002-07-19 | 2004-01-29 | Woong-Ki Park | Vacuum gate valve |
| KR20040008877A (en) * | 2002-07-19 | 2004-01-31 | 박웅기 | Vaccum Gate Valve |
| KR100489553B1 (en) * | 2002-07-19 | 2005-05-23 | 박웅기 | Vaccum Gate Valve |
| KR100489250B1 (en) * | 2002-10-17 | 2005-05-17 | 박웅기 | Vaccum Gate Valve |
| JP2010281446A (en) * | 2003-05-13 | 2010-12-16 | Applied Materials Inc | Method and device for sealing opening of processing chamber |
| KR100808101B1 (en) * | 2006-01-11 | 2008-02-29 | 박웅기 | Vacuum Gate Valve |
| JP2011505528A (en) * | 2007-12-06 | 2011-02-24 | バット ホールディング アーゲー | Vacuum valve |
| WO2011043189A1 (en) * | 2009-10-06 | 2011-04-14 | 株式会社 アルバック | Gate valve compatible with adverse pressure |
| JP5490813B2 (en) * | 2009-10-06 | 2014-05-14 | 株式会社アルバック | Reverse pressure gate valve |
| CN104235402A (en) * | 2013-06-05 | 2014-12-24 | 入江工研株式会社 | Sluice valve and chamber |
| CN104235402B (en) * | 2013-06-05 | 2018-01-16 | 入江工研株式会社 | Gate valve and chamber |
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