KR102654427B1 - 연삭 장치 - Google Patents

연삭 장치 Download PDF

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Publication number
KR102654427B1
KR102654427B1 KR1020190007363A KR20190007363A KR102654427B1 KR 102654427 B1 KR102654427 B1 KR 102654427B1 KR 1020190007363 A KR1020190007363 A KR 1020190007363A KR 20190007363 A KR20190007363 A KR 20190007363A KR 102654427 B1 KR102654427 B1 KR 102654427B1
Authority
KR
South Korea
Prior art keywords
wafer
grinding
outer periphery
holding table
cleaning
Prior art date
Application number
KR1020190007363A
Other languages
English (en)
Korean (ko)
Other versions
KR20190100023A (ko
Inventor
마코토 마에지마
다이치 이토
Original Assignee
가부시기가이샤 디스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 디스코 filed Critical 가부시기가이샤 디스코
Publication of KR20190100023A publication Critical patent/KR20190100023A/ko
Application granted granted Critical
Publication of KR102654427B1 publication Critical patent/KR102654427B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/226—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain in which the tool is supported by the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Polarising Elements (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Disintegrating Or Milling (AREA)
KR1020190007363A 2018-02-20 2019-01-21 연삭 장치 KR102654427B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018027834A JP7396785B2 (ja) 2018-02-20 2018-02-20 研削装置
JPJP-P-2018-027834 2018-02-20

Publications (2)

Publication Number Publication Date
KR20190100023A KR20190100023A (ko) 2019-08-28
KR102654427B1 true KR102654427B1 (ko) 2024-04-03

Family

ID=67689025

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190007363A KR102654427B1 (ko) 2018-02-20 2019-01-21 연삭 장치

Country Status (4)

Country Link
JP (1) JP7396785B2 (zh)
KR (1) KR102654427B1 (zh)
CN (1) CN110170892B (zh)
TW (1) TWI785206B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110517951B (zh) * 2019-08-29 2022-11-29 上海华力集成电路制造有限公司 一种改善sti研磨前晶圆微刮伤的清洗方法
CN111660157A (zh) * 2020-06-08 2020-09-15 苏州辰轩光电科技有限公司 减薄机
CN115889293B (zh) * 2022-11-08 2024-04-16 西安奕斯伟材料科技股份有限公司 清洗硅片的周缘的装置、方法及清洗硅片的设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02185359A (ja) * 1989-01-11 1990-07-19 Toshiba Corp 研削方法及びその装置
JP3377161B2 (ja) * 1995-12-25 2003-02-17 株式会社日平トヤマ ウエハの処理システム
JP4487353B2 (ja) * 1999-11-26 2010-06-23 ソニー株式会社 研磨装置および研磨方法
JP2003007668A (ja) * 2001-06-27 2003-01-10 Sumitomo Mitsubishi Silicon Corp 半導体ウェーハの洗浄装置及び洗浄方法
JP2003211353A (ja) * 2002-01-18 2003-07-29 Nippei Toyama Corp ウェーハの加工装置
JP2004066376A (ja) * 2002-08-05 2004-03-04 Nippei Toyama Corp 半導体ウエーハ研削盤のクーラント噴射装置およびその方法
JP4102205B2 (ja) * 2003-01-22 2008-06-18 株式会社日平トヤマ ウェーハ研削装置
KR20060133208A (ko) * 2005-06-20 2006-12-26 삼성전자주식회사 초음파 세정을 이용하는 웨이퍼 후면 연마 장치
JP2008098574A (ja) * 2006-10-16 2008-04-24 Disco Abrasive Syst Ltd ウエーハの研磨装置
JP2013141738A (ja) * 2012-01-12 2013-07-22 Disco Corp 加工装置
JP6157229B2 (ja) 2013-06-10 2017-07-05 株式会社ディスコ 研削装置及び研削方法
JP5651744B1 (ja) * 2013-07-04 2015-01-14 株式会社カイジョー 超音波洗浄装置及び超音波洗浄方法
TWI488983B (zh) * 2013-10-08 2015-06-21 光洋應用材料科技股份有限公司 銅矽合金濺鍍靶材及銅矽合金記錄層
SG10201508329UA (en) * 2014-10-10 2016-05-30 Ebara Corp Buffing apparatus and substrate processing apparatus
KR102214510B1 (ko) * 2016-01-18 2021-02-09 삼성전자 주식회사 기판 씨닝 장치, 이를 이용한 기판의 씨닝 방법, 및 반도체 패키지의 제조 방법

Also Published As

Publication number Publication date
KR20190100023A (ko) 2019-08-28
TW201934254A (zh) 2019-09-01
TWI785206B (zh) 2022-12-01
CN110170892B (zh) 2023-11-03
JP7396785B2 (ja) 2023-12-12
CN110170892A (zh) 2019-08-27
JP2019141950A (ja) 2019-08-29

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E701 Decision to grant or registration of patent right
GRNT Written decision to grant