KR102597252B1 - 범프를 구비하는 반도체를 기판의 기판 위치상에 장착하기 위한 방법 - Google Patents
범프를 구비하는 반도체를 기판의 기판 위치상에 장착하기 위한 방법 Download PDFInfo
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- KR102597252B1 KR102597252B1 KR1020160103073A KR20160103073A KR102597252B1 KR 102597252 B1 KR102597252 B1 KR 102597252B1 KR 1020160103073 A KR1020160103073 A KR 1020160103073A KR 20160103073 A KR20160103073 A KR 20160103073A KR 102597252 B1 KR102597252 B1 KR 102597252B1
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- Prior art keywords
- substrate
- camera
- bonding head
- optical marking
- flip chip
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- 239000000758 substrate Substances 0.000 title claims abstract description 73
- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 24
- 230000004907 flux Effects 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims description 39
- 238000000547 structure data Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 description 18
- 238000009736 wetting Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
Classifications
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH12482015 | 2015-08-31 | ||
CH1248/15 | 2015-08-31 | ||
CH01404/15A CH711536B1 (de) | 2015-08-31 | 2015-09-28 | Verfahren für die Montage von mit Bumps versehenen Halbleiterchips auf Substratplätzen eines Substrats. |
CH1404/15 | 2015-09-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170026136A KR20170026136A (ko) | 2017-03-08 |
KR102597252B1 true KR102597252B1 (ko) | 2023-11-01 |
Family
ID=58264157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020160103073A KR102597252B1 (ko) | 2015-08-31 | 2016-08-12 | 범프를 구비하는 반도체를 기판의 기판 위치상에 장착하기 위한 방법 |
Country Status (7)
Country | Link |
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JP (1) | JP6868982B2 (zh) |
KR (1) | KR102597252B1 (zh) |
CN (1) | CN106486400B (zh) |
CH (1) | CH711536B1 (zh) |
MY (1) | MY176667A (zh) |
SG (1) | SG10201606167WA (zh) |
TW (1) | TWI700767B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7164314B2 (ja) * | 2017-04-28 | 2022-11-01 | ベシ スウィッツァーランド エージー | 部品を基板上に搭載する装置及び方法 |
CN109079367B (zh) * | 2018-07-23 | 2020-07-24 | 中电科技(合肥)博微信息发展有限责任公司 | 一种芯片智能焊接方法 |
JP2023077928A (ja) * | 2021-11-25 | 2023-06-06 | キヤノン株式会社 | 接合装置および接合方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015056594A (ja) | 2013-09-13 | 2015-03-23 | 株式会社日立ハイテクインスツルメンツ | フリップチップボンダ及びフリップチップボンディング方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5372294A (en) * | 1994-01-27 | 1994-12-13 | Motorola, Inc. | Method of preparing a component for automated placement |
JP2833996B2 (ja) * | 1994-05-25 | 1998-12-09 | 日本電気株式会社 | フレキシブルフィルム及びこれを有する半導体装置 |
JPH10209208A (ja) * | 1997-01-23 | 1998-08-07 | Hitachi Ltd | 半導体製造方法および装置 |
US7842599B2 (en) * | 1997-05-27 | 2010-11-30 | Wstp, Llc | Bumping electronic components using transfer substrates |
JP2001060795A (ja) * | 1999-08-20 | 2001-03-06 | Matsushita Electric Ind Co Ltd | 電子部品実装装置 |
US7033842B2 (en) * | 2002-03-25 | 2006-04-25 | Matsushita Electric Industrial Co., Ltd. | Electronic component mounting apparatus and electronic component mounting method |
JP4334892B2 (ja) * | 2003-03-20 | 2009-09-30 | パナソニック株式会社 | 部品実装方法 |
JP4516354B2 (ja) * | 2004-05-17 | 2010-08-04 | パナソニック株式会社 | 部品供給方法 |
JP2007173801A (ja) * | 2005-12-22 | 2007-07-05 | Unaxis Internatl Trading Ltd | フリップチップを基板に取り付ける方法 |
JP2008168225A (ja) * | 2007-01-12 | 2008-07-24 | Fujifilm Corp | スリット塗布方法及び装置、並びにカラーフィルタの製造方法 |
CH698718B1 (de) * | 2007-01-31 | 2009-10-15 | Oerlikon Assembly Equipment Ag | Vorrichtung für die Montage eines Flipchips auf einem Substrat. |
CH698720B1 (de) * | 2007-02-14 | 2009-10-15 | Oerlikon Assembly Equipment Ag | Verfahren und Montageautomat für die Montage von Halbleiterchips als Flipchip auf einem Substrat. |
CH698334B1 (de) * | 2007-10-09 | 2011-07-29 | Esec Ag | Verfahren für die Entnahme und Montage von auf einem Wafertisch bereitgestellten Halbleiterchips auf einem Substrat. |
JP5030843B2 (ja) * | 2008-04-14 | 2012-09-19 | 芝浦メカトロニクス株式会社 | 電子部品の実装装置及び実装方法 |
JP4983737B2 (ja) * | 2008-06-30 | 2012-07-25 | 株式会社日立プラントテクノロジー | ハンダボール検査リペア装置およびハンダボール検査リペア方法 |
JP4766144B2 (ja) * | 2009-04-08 | 2011-09-07 | パナソニック株式会社 | 電子部品実装装置 |
KR101120129B1 (ko) * | 2009-08-31 | 2012-03-23 | (주) 에스에스피 | 기준값을 응용한 작업위치 자동 조정방법 및 이를 위한 자동화 장비 |
JP2011181675A (ja) * | 2010-03-01 | 2011-09-15 | Nec Corp | 回路部品の実装装置 |
CH705802B1 (de) * | 2011-11-25 | 2016-04-15 | Esec Ag | Einrichtung für die Montage von Halbleiterchips. |
JP6000626B2 (ja) * | 2012-05-01 | 2016-10-05 | 新光電気工業株式会社 | 電子装置の製造方法及び電子部品搭載装置 |
JP6200737B2 (ja) * | 2013-09-17 | 2017-09-20 | ファスフォードテクノロジ株式会社 | ダイボンダ用ディッピング機構及びフリップチップボンダ |
JP2015076411A (ja) * | 2013-10-04 | 2015-04-20 | 株式会社日立ハイテクインスツルメンツ | ダイボンダ |
JP6324772B2 (ja) * | 2014-03-14 | 2018-05-16 | ファスフォードテクノロジ株式会社 | ダイボンダ用ディッピング機構及びフリップチップボンダ |
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SG10201606167WA (en) | 2017-03-30 |
JP6868982B2 (ja) | 2021-05-12 |
CH711536A1 (de) | 2017-03-15 |
KR20170026136A (ko) | 2017-03-08 |
CN106486400A (zh) | 2017-03-08 |
CN106486400B (zh) | 2021-10-29 |
MY176667A (en) | 2020-08-19 |
TW201735227A (zh) | 2017-10-01 |
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CH711536B1 (de) | 2019-02-15 |
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