KR102483359B1 - 반도체소자 테스트용 핸들러 및 그의 정보처리 방법 - Google Patents

반도체소자 테스트용 핸들러 및 그의 정보처리 방법 Download PDF

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Publication number
KR102483359B1
KR102483359B1 KR1020150175068A KR20150175068A KR102483359B1 KR 102483359 B1 KR102483359 B1 KR 102483359B1 KR 1020150175068 A KR1020150175068 A KR 1020150175068A KR 20150175068 A KR20150175068 A KR 20150175068A KR 102483359 B1 KR102483359 B1 KR 102483359B1
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KR
South Korea
Prior art keywords
loading
semiconductor device
barcode
test
handler
Prior art date
Application number
KR1020150175068A
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English (en)
Korean (ko)
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KR20170068174A (ko
Inventor
송희강
이태민
Original Assignee
(주)테크윙
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Application filed by (주)테크윙 filed Critical (주)테크윙
Priority to KR1020150175068A priority Critical patent/KR102483359B1/ko
Priority to CN201910650881.4A priority patent/CN110508494B/zh
Priority to CN202010298786.5A priority patent/CN111604272B/zh
Priority to CN201610929928.7A priority patent/CN107030013B/zh
Priority to TW107101252A priority patent/TWI642950B/zh
Priority to TW105135976A priority patent/TWI620943B/zh
Publication of KR20170068174A publication Critical patent/KR20170068174A/ko
Priority to KR1020220185884A priority patent/KR102635479B1/ko
Application granted granted Critical
Publication of KR102483359B1 publication Critical patent/KR102483359B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C3/00—Sorting according to destination
    • B07C3/18—Devices or arrangements for indicating destination, e.g. by code marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C3/00—Sorting according to destination
    • B07C3/02—Apparatus characterised by the means used for distribution
    • B07C3/08—Apparatus characterised by the means used for distribution using arrangements of conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C3/00—Sorting according to destination
    • B07C3/20—Arrangements for facilitating the visual reading of addresses, e.g. display arrangements coding stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2644—Adaptations of individual semiconductor devices to facilitate the testing thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2894—Aspects of quality control [QC]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/06009—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking
    • G06K19/06018—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking one-dimensional coding
    • G06K19/06028—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking one-dimensional coding using bar codes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020150175068A 2015-12-09 2015-12-09 반도체소자 테스트용 핸들러 및 그의 정보처리 방법 KR102483359B1 (ko)

Priority Applications (7)

Application Number Priority Date Filing Date Title
KR1020150175068A KR102483359B1 (ko) 2015-12-09 2015-12-09 반도체소자 테스트용 핸들러 및 그의 정보처리 방법
CN201910650881.4A CN110508494B (zh) 2015-12-09 2016-10-31 半导体器件测试用分选机及其信息处理方法
CN202010298786.5A CN111604272B (zh) 2015-12-09 2016-10-31 半导体器件测试用分选机及其信息处理方法
CN201610929928.7A CN107030013B (zh) 2015-12-09 2016-10-31 半导体器件测试用分选机及其信息处理方法
TW107101252A TWI642950B (zh) 2015-12-09 2016-11-04 半導體裝置測試用分選機
TW105135976A TWI620943B (zh) 2015-12-09 2016-11-04 半導體裝置測試用分選機
KR1020220185884A KR102635479B1 (ko) 2015-12-09 2022-12-27 반도체소자 테스트용 핸들러

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150175068A KR102483359B1 (ko) 2015-12-09 2015-12-09 반도체소자 테스트용 핸들러 및 그의 정보처리 방법

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020220185884A Division KR102635479B1 (ko) 2015-12-09 2022-12-27 반도체소자 테스트용 핸들러

Publications (2)

Publication Number Publication Date
KR20170068174A KR20170068174A (ko) 2017-06-19
KR102483359B1 true KR102483359B1 (ko) 2023-01-02

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020150175068A KR102483359B1 (ko) 2015-12-09 2015-12-09 반도체소자 테스트용 핸들러 및 그의 정보처리 방법
KR1020220185884A KR102635479B1 (ko) 2015-12-09 2022-12-27 반도체소자 테스트용 핸들러

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020220185884A KR102635479B1 (ko) 2015-12-09 2022-12-27 반도체소자 테스트용 핸들러

Country Status (3)

Country Link
KR (2) KR102483359B1 (zh)
CN (3) CN110508494B (zh)
TW (2) TWI642950B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102272262B1 (ko) * 2017-03-29 2021-07-05 (주)테크윙 전자부품 테스트용 핸들러
CN108636828A (zh) * 2018-04-23 2018-10-12 苏州诺登德智能科技有限公司 一种测试机的智能控制系统
CN108940902A (zh) * 2018-04-23 2018-12-07 苏州诺登德智能科技有限公司 一种测试机的智能控制方法
KR20200038040A (ko) * 2018-10-02 2020-04-10 (주)테크윙 전자부품 테스트용 핸들러
KR102663462B1 (ko) * 2018-11-07 2024-05-09 (주)테크윙 핸들러
KR102249304B1 (ko) * 2019-04-15 2021-05-07 주식회사 아테코 플라잉 스캔 기능을 갖는 전자부품 테스트 핸들러
KR20200144385A (ko) * 2019-06-18 2020-12-29 (주)제이티 소자핸들러 및 그에 사용되는 디지털코드 인식 시스템
CN111220892A (zh) * 2020-03-04 2020-06-02 长江存储科技有限责任公司 组件测试方法及其结构
KR20220113097A (ko) * 2021-02-05 2022-08-12 (주)테크윙 전자부품 테스트용 핸들러

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KR100349942B1 (ko) * 1999-12-06 2002-08-24 삼성전자 주식회사 램버스 핸들러
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KR100706330B1 (ko) * 2005-08-18 2007-04-13 (주)테크윙 테스트 핸들러
KR100899942B1 (ko) * 2007-05-31 2009-05-28 미래산업 주식회사 테스트 핸들러, 그를 이용한 반도체 소자 제조방법, 및테스트트레이 이송방법
WO2010021038A1 (ja) * 2008-08-20 2010-02-25 株式会社アドバンテスト 電子部品ハンドリング装置および電子部品試験システム
CN201522545U (zh) * 2009-06-11 2010-07-07 致茂电子(苏州)有限公司 半导体元件独立测试机台及测试分类系统
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Also Published As

Publication number Publication date
TWI620943B (zh) 2018-04-11
CN110508494B (zh) 2022-01-28
CN111604272A (zh) 2020-09-01
CN111604272B (zh) 2022-07-01
TW201732303A (zh) 2017-09-16
KR102635479B1 (ko) 2024-02-13
CN107030013A (zh) 2017-08-11
CN110508494A (zh) 2019-11-29
KR20230010179A (ko) 2023-01-18
KR20170068174A (ko) 2017-06-19
CN107030013B (zh) 2020-05-15
TWI642950B (zh) 2018-12-01
TW201812323A (zh) 2018-04-01

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