KR102403096B1 - Si-함유 막 형성 조성물 및 이를 제조하고 사용하는 방법 - Google Patents

Si-함유 막 형성 조성물 및 이를 제조하고 사용하는 방법 Download PDF

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KR102403096B1
KR102403096B1 KR1020187028798A KR20187028798A KR102403096B1 KR 102403096 B1 KR102403096 B1 KR 102403096B1 KR 1020187028798 A KR1020187028798 A KR 1020187028798A KR 20187028798 A KR20187028798 A KR 20187028798A KR 102403096 B1 KR102403096 B1 KR 102403096B1
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sih
precursor
group
formula
precursors
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KR20180136446A (ko
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매니쉬 칸델왈
신 케리간
진-마크 지랄드
안토니오 산체즈
펭 장
양 왕
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레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/62—Nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/16—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/16—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/66—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials
    • H10P14/668—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials
    • H10P14/6681—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si
    • H10P14/6687—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si the compound comprising silicon and nitrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/70—Siloxanes defined by use of the MDTQ nomenclature

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicon Polymers (AREA)
KR1020187028798A 2016-03-23 2017-03-23 Si-함유 막 형성 조성물 및 이를 제조하고 사용하는 방법 Active KR102403096B1 (ko)

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KR1020227016620A KR102492744B1 (ko) 2016-03-23 2017-03-23 Si-함유 막 형성 조성물 및 이를 제조하고 사용하는 방법

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US201662312352P 2016-03-23 2016-03-23
US62/312,352 2016-03-23
PCT/US2017/023779 WO2017165626A1 (en) 2016-03-23 2017-03-23 Si-containing film forming compositions and methods of making and using the same

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KR102403096B1 true KR102403096B1 (ko) 2022-05-26

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KR1020227016620A Active KR102492744B1 (ko) 2016-03-23 2017-03-23 Si-함유 막 형성 조성물 및 이를 제조하고 사용하는 방법

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US (1) US11407922B2 (https=)
EP (1) EP3433302B1 (https=)
JP (1) JP6868640B2 (https=)
KR (2) KR102403096B1 (https=)
CN (1) CN109476848B (https=)
TW (2) TWI724141B (https=)
WO (1) WO2017165626A1 (https=)

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TWI716333B (zh) * 2015-03-30 2021-01-11 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 碳矽烷與氨、胺類及脒類之觸媒去氫耦合
JP6756689B2 (ja) * 2017-10-13 2020-09-16 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 半導体装置の製造方法、基板処理装置、およびプログラム
US10510852B2 (en) 2017-11-28 2019-12-17 Taiwan Semiconductor Manufacturing Company, Ltd. Low-k feature formation processes and structures formed thereby
US11499014B2 (en) * 2019-12-31 2022-11-15 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Cureable formulations for forming low-k dielectric silicon-containing films using polycarbosilazane
KR102844501B1 (ko) * 2020-01-31 2025-08-11 주식회사 유피케미칼 실리콘 전구체 화합물, 이를 포함하는 실리콘-함유 막 형성용 조성물 및 실리콘-함유 막 형성 방법
EP4146725B1 (en) * 2020-05-07 2024-05-22 Merck Patent GmbH Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same
JP7590078B2 (ja) * 2021-01-20 2024-11-26 東京エレクトロン株式会社 シリコン含有膜の形成方法及び処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014013889A (ja) 2012-06-01 2014-01-23 Air Products And Chemicals Inc 有機アミノジシラン前駆体、及びそれを含む膜の堆積方法
JP2015096489A (ja) * 2013-09-20 2015-05-21 エア プロダクツ アンド ケミカルズ インコーポレイテッドＡｉｒ Ｐｒｏｄｕｃｔｓ Ａｎｄ Ｃｈｅｍｉｃａｌｓ Ｉｎｃｏｒｐｏｒａｔｅｄ 有機アミノシラン前駆体およびこれを含む膜の堆積方法

Family Cites Families (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0764642B2 (ja) 1986-06-13 1995-07-12 東燃株式会社 窒化物系セラミツクスの製法
JP3230029B2 (ja) 1994-05-30 2001-11-19 富士通株式会社 Ｉｉｉ−ｖ族化合物半導体結晶成長方法
US5874368A (en) 1997-10-02 1999-02-23 Air Products And Chemicals, Inc. Silicon nitride from bis(tertiarybutylamino)silane
US6841256B2 (en) 1999-06-07 2005-01-11 Honeywell International Inc. Low dielectric constant polyorganosilicon materials generated from polycarbosilanes
US6489030B1 (en) 2000-04-14 2002-12-03 Honeywell International, Inc. Low dielectric constant films used as copper diffusion barrier
JP4868639B2 (ja) 2000-06-12 2012-02-01 株式会社Ａｄｅｋａ 化学気相成長用原料及びこれを用いた薄膜の製造方法
JP4196246B2 (ja) 2000-11-17 2008-12-17 株式会社トリケミカル研究所 膜形成材料、膜形成方法、及び素子
JP2002167438A (ja) 2000-11-29 2002-06-11 Jsr Corp ケイ素ポリマー、膜形成用組成物および絶縁膜形成用材料
US7419698B2 (en) 2001-10-26 2008-09-02 Sigma-Aldrich Co. Precursors for chemical vapor deposition
JP2003151972A (ja) 2001-11-15 2003-05-23 Tri Chemical Laboratory Inc 酸化膜、酸化膜形成方法、半導体素子
JP4116283B2 (ja) 2001-11-30 2008-07-09 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ヘキサキス（モノヒドロカルビルアミノ）ジシランおよびその製造方法
JP4021653B2 (ja) 2001-11-30 2007-12-12 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード Ｃｖｄ法によるシリコン窒化物膜またはシリコンオキシ窒化物膜の製造方法
WO2004017383A2 (en) 2002-08-18 2004-02-26 Aviza Technology, Inc. Low termperature deposition of silicon oxides and oxynitrides
JP4358492B2 (ja) 2002-09-25 2009-11-04 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 熱化学気相成長法によるシリコン窒化物膜またはシリコンオキシ窒化物膜の製造方法
US7531679B2 (en) 2002-11-14 2009-05-12 Advanced Technology Materials, Inc. Composition and method for low temperature deposition of silicon-containing films such as films including silicon nitride, silicon dioxide and/or silicon-oxynitride
US7446217B2 (en) 2002-11-14 2008-11-04 Advanced Technology Materials, Inc. Composition and method for low temperature deposition of silicon-containing films
JP2006511087A (ja) 2002-12-20 2006-03-30 アプライド　マテリアルズ　インコーポレイテッド 高品位低温窒化シリコン層を形成する方法および装置
US7172792B2 (en) 2002-12-20 2007-02-06 Applied Materials, Inc. Method for forming a high quality low temperature silicon nitride film
US7972663B2 (en) 2002-12-20 2011-07-05 Applied Materials, Inc. Method and apparatus for forming a high quality low temperature silicon nitride layer
US6940173B2 (en) 2003-01-29 2005-09-06 International Business Machines Corporation Interconnect structures incorporating low-k dielectric barrier films
JP4265409B2 (ja) 2003-02-13 2009-05-20 三菱マテリアル株式会社 Ｓｉ−Ｓｉ結合を有する有機Ｓｉ含有化合物を用いたＳｉ含有薄膜の形成方法
US7579496B2 (en) * 2003-10-10 2009-08-25 Advanced Technology Materials, Inc. Monosilane or disilane derivatives and method for low temperature deposition of silicon-containing films using the same
US20050227017A1 (en) 2003-10-31 2005-10-13 Yoshihide Senzaki Low temperature deposition of silicon nitride
JP2005213633A (ja) 2004-02-02 2005-08-11 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 化学気相成長法によるシリコン窒化物膜またはシリコンオキシ窒化物膜の製造方法
US7098150B2 (en) 2004-03-05 2006-08-29 Air Liquide America L.P. Method for novel deposition of high-k MSiON dielectric films
US20060012014A1 (en) 2004-07-15 2006-01-19 International Business Machines Corporation Reliability of low-k dielectric devices with energy dissipative layer
US7358317B2 (en) 2004-09-22 2008-04-15 Jsr Corporation Polycarbosilane and method of producing the same
JP2006096675A (ja) 2004-09-28 2006-04-13 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 新規なアミノジシランおよび炭窒化珪素膜の形成方法
JP4756128B2 (ja) 2004-10-20 2011-08-24 日揮触媒化成株式会社 半導体加工用保護膜形成用塗布液、その調製方法およびこれより得られる半導体加工用保護膜
JP2006152063A (ja) 2004-11-26 2006-06-15 Jsr Corp 新規ポリカルボシランおよびその製造方法、膜形成用組成物、ならびに膜およびその形成方法
US20060121192A1 (en) 2004-12-02 2006-06-08 Jurcik Benjamin J Liquid precursor refill system
US7892648B2 (en) 2005-01-21 2011-02-22 International Business Machines Corporation SiCOH dielectric material with improved toughness and improved Si-C bonding
US20060286819A1 (en) 2005-06-21 2006-12-21 Applied Materials, Inc. Method for silicon based dielectric deposition and clean with photoexcitation
ES2265291B1 (es) 2005-07-22 2008-03-01 Universidad De Alcala Nuevos dendrimeros carbosilanos, su preparacion y sus usos.
WO2007112780A1 (en) 2006-04-03 2007-10-11 L'air Liquide Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Method for depositing silicon nitride films and/or silicon oxynitride films by chemical vapor deposition
WO2007112779A1 (en) 2006-04-03 2007-10-11 L'air Liquide Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereof
US7875312B2 (en) * 2006-05-23 2011-01-25 Air Products And Chemicals, Inc. Process for producing silicon oxide films for organoaminosilane precursors
US7442822B2 (en) 2006-09-01 2008-10-28 Air Products And Chemicals, Inc. Stabilization of nitrogen-containing and oxygen-containing organosilanes using weakly basic ion-exchange resins
US20080124815A1 (en) 2006-11-03 2008-05-29 International Business Machines Corporation Method for post cap ild/imd repair with uv irradiation
US7500397B2 (en) 2007-02-15 2009-03-10 Air Products And Chemicals, Inc. Activated chemical process for enhancing material properties of dielectric films
CN100559167C (zh) * 2007-04-23 2009-11-11 陕西师范大学 对硝基芳烃敏感的单分子层聚硅烷荧光传感薄膜的制备方法
WO2009008041A1 (ja) 2007-07-06 2009-01-15 Fujitsu Limited 絶縁膜材料、多層配線基板及びその製造方法、並びに、半導体装置及びその製造方法
US20090096106A1 (en) 2007-10-12 2009-04-16 Air Products And Chemicals, Inc. Antireflective coatings
US8071160B2 (en) 2007-10-29 2011-12-06 Integrated Surface Technologies Surface coating process
US8765899B2 (en) 2007-11-06 2014-07-01 Braggone Oy Carbosilane polymer compositions for anti-reflective coatings
US9034105B2 (en) 2008-01-10 2015-05-19 American Air Liquide, Inc. Solid precursor sublimator
JP5317089B2 (ja) 2008-01-23 2013-10-16 独立行政法人物質・材料研究機構 成膜方法および絶縁膜
JP2013520030A (ja) 2010-02-17 2013-05-30 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ＳｉＣＯＨＬＯＷ−Ｋ膜の蒸着方法
EP2553141A4 (en) 2010-04-01 2013-08-21 Air Liquide Deposition of a metal-nitride-containing film having a combination of aminometallic and halogenated metal precursors
US8196945B2 (en) 2010-06-22 2012-06-12 Pedal Lock Partnership Bicycle pedal with integrated cable lock
US8853856B2 (en) 2010-06-22 2014-10-07 International Business Machines Corporation Methodology for evaluation of electrical characteristics of carbon nanotubes
US8993072B2 (en) 2011-09-27 2015-03-31 Air Products And Chemicals, Inc. Halogenated organoaminosilane precursors and methods for depositing films comprising same
JP5969253B2 (ja) 2012-02-10 2016-08-17 東京応化工業株式会社 表面処理剤及び表面処理方法
US20130224964A1 (en) 2012-02-28 2013-08-29 Asm Ip Holding B.V. Method for Forming Dielectric Film Containing Si-C bonds by Atomic Layer Deposition Using Precursor Containing Si-C-Si bond
US8871656B2 (en) 2012-03-05 2014-10-28 Applied Materials, Inc. Flowable films using alternative silicon precursors
US9978585B2 (en) 2012-06-01 2018-05-22 Versum Materials Us, Llc Organoaminodisilane precursors and methods for depositing films comprising same
US9243324B2 (en) 2012-07-30 2016-01-26 Air Products And Chemicals, Inc. Methods of forming non-oxygen containing silicon-based films
US10279959B2 (en) 2012-12-11 2019-05-07 Versum Materials Us, Llc Alkoxysilylamine compounds and applications thereof
KR101583232B1 (ko) 2012-12-31 2016-01-07 제일모직 주식회사 중합체 제조 방법 및 실리카계 절연막 형성용 조성물
US9395593B2 (en) 2013-03-15 2016-07-19 Kinestral Technologies, Inc. Electrochromic lithium nickel group 6 mixed metal oxides
JP6155063B2 (ja) 2013-03-19 2017-06-28 株式会社日立国際電気 半導体装置の製造方法、基板処理装置及びプログラム
US9796739B2 (en) 2013-06-26 2017-10-24 Versum Materials Us, Llc AZA-polysilane precursors and methods for depositing films comprising same
KR102326396B1 (ko) * 2013-09-27 2021-11-12 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 아민 치환된 트리실릴아민 및 트리디실릴아민 화합물
US10023958B2 (en) 2013-11-22 2018-07-17 Applied Materials, Inc. Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors
US9233990B2 (en) 2014-02-28 2016-01-12 Air Products And Chemicals, Inc. Organoaminosilanes and methods for making same
CN103881101A (zh) 2014-03-18 2014-06-25 天津大学 一种碳氮化硅陶瓷用聚碳硅氮烷前驱体及其制备方法
JP6254274B2 (ja) * 2014-06-25 2017-12-27 旭化成株式会社 空隙を有するポリイミドフィルム及びその製造方法
WO2016007708A1 (en) 2014-07-10 2016-01-14 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Alkylamino-substituted carbosilane precursors
US9969756B2 (en) * 2014-09-23 2018-05-15 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés George Claude Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof
US9879340B2 (en) * 2014-11-03 2018-01-30 Versum Materials Us, Llc Silicon-based films and methods of forming the same
TWI716333B (zh) 2015-03-30 2021-01-11 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 碳矽烷與氨、胺類及脒類之觸媒去氫耦合

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014013889A (ja) 2012-06-01 2014-01-23 Air Products And Chemicals Inc 有機アミノジシラン前駆体、及びそれを含む膜の堆積方法
US20150024608A1 (en) 2012-06-01 2015-01-22 Air Products And Chemicals, Inc. Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same
JP2015181191A (ja) 2012-06-01 2015-10-15 エア プロダクツ アンド ケミカルズ インコーポレイテッドＡｉｒ Ｐｒｏｄｕｃｔｓ Ａｎｄ Ｃｈｅｍｉｃａｌｓ Ｉｎｃｏｒｐｏｒａｔｅｄ 有機アミノジシラン前駆体、及びそれを含む膜の堆積方法
JP2015096489A (ja) * 2013-09-20 2015-05-21 エア プロダクツ アンド ケミカルズ インコーポレイテッドＡｉｒ Ｐｒｏｄｕｃｔｓ Ａｎｄ Ｃｈｅｍｉｃａｌｓ Ｉｎｃｏｒｐｏｒａｔｅｄ 有機アミノシラン前駆体およびこれを含む膜の堆積方法

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