KR102383356B1 - 액체 토출 헤드 및 액체 토출 장치 - Google Patents

액체 토출 헤드 및 액체 토출 장치 Download PDF

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Publication number
KR102383356B1
KR102383356B1 KR1020180071273A KR20180071273A KR102383356B1 KR 102383356 B1 KR102383356 B1 KR 102383356B1 KR 1020180071273 A KR1020180071273 A KR 1020180071273A KR 20180071273 A KR20180071273 A KR 20180071273A KR 102383356 B1 KR102383356 B1 KR 102383356B1
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South Korea
Prior art keywords
ink
circulation channel
liquid
channel
substrate
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KR1020180071273A
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English (en)
Korean (ko)
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KR20190002321A (ko
Inventor
다쿠로 야마자키
도루 나카쿠보
가즈히로 야마다
요시유키 나카가와
요시히로 하마다
고이치 이시다
신고 오쿠시마
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20190002321A publication Critical patent/KR20190002321A/ko
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Publication of KR102383356B1 publication Critical patent/KR102383356B1/ko
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    • H01L21/67051—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14056—Plural heating elements per ink chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/18—Ink recirculation systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • H01L21/6715—
    • H01L21/67259—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14467—Multiple feed channels per ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/21—Line printing

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Ink Jet (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020180071273A 2017-06-29 2018-06-21 액체 토출 헤드 및 액체 토출 장치 Active KR102383356B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017127563A JP7019318B2 (ja) 2017-06-29 2017-06-29 液体吐出ヘッドおよび液体吐出装置
JPJP-P-2017-127563 2017-06-29

Publications (2)

Publication Number Publication Date
KR20190002321A KR20190002321A (ko) 2019-01-08
KR102383356B1 true KR102383356B1 (ko) 2022-04-07

Family

ID=62567426

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KR1020180071273A Active KR102383356B1 (ko) 2017-06-29 2018-06-21 액체 토출 헤드 및 액체 토출 장치

Country Status (5)

Country Link
US (1) US10421287B2 (enExample)
EP (1) EP3421240B1 (enExample)
JP (1) JP7019318B2 (enExample)
KR (1) KR102383356B1 (enExample)
CN (1) CN109203698B (enExample)

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JP6708457B2 (ja) 2016-03-29 2020-06-10 キヤノン株式会社 液体吐出ヘッド及び液体の循環方法
JP6736324B2 (ja) 2016-03-29 2020-08-05 キヤノン株式会社 液体吐出ヘッド
JP7057071B2 (ja) 2017-06-29 2022-04-19 キヤノン株式会社 液体吐出モジュール
JP6961404B2 (ja) 2017-06-29 2021-11-05 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7039231B2 (ja) 2017-09-28 2022-03-22 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7118716B2 (ja) 2018-04-17 2022-08-16 キヤノン株式会社 液体吐出ヘッド
EP3603979B1 (en) 2018-07-31 2021-06-16 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection apparatus
EP3603977B1 (en) 2018-07-31 2024-03-27 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection module
CN110774759B (zh) 2018-07-31 2021-10-22 佳能株式会社 液体喷射头、液体喷射模块和液体喷射设备
JP7309359B2 (ja) 2018-12-19 2023-07-18 キヤノン株式会社 液体吐出装置
JP7341703B2 (ja) * 2019-04-02 2023-09-11 キヤノン株式会社 液体吐出ヘッド
JP7400216B2 (ja) * 2019-05-24 2023-12-19 ブラザー工業株式会社 液体吐出装置
JP7374681B2 (ja) * 2019-09-12 2023-11-07 東芝テック株式会社 液体吐出ヘッド及び液体吐出装置
WO2021118541A1 (en) * 2019-12-10 2021-06-17 Hewlett-Packard Development Company, L.P. Printhead with offset circulation channel
JP7486958B2 (ja) * 2020-01-27 2024-05-20 キヤノン株式会社 液体吐出ヘッドおよび液体吐出モジュール
KR102778749B1 (ko) * 2020-09-25 2025-03-13 삼성디스플레이 주식회사 프린트 헤드 유닛 및 이를 포함하는 잉크젯 프린터
EP4452653A4 (en) * 2021-12-20 2025-10-22 Hewlett Packard Development Co FLUID EJECTION PRINT HEAD WITH A SCATTERED ARRAY OF FLUID EJECTION NOZZLES
JP2023134019A (ja) * 2022-03-14 2023-09-27 キヤノン株式会社 液体吐出ヘッド
JP2023170442A (ja) * 2022-05-19 2023-12-01 キヤノン株式会社 液体吐出ヘッド、及び液体吐出装置
JP2024029581A (ja) 2022-08-22 2024-03-06 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7542035B2 (ja) * 2022-08-23 2024-08-29 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
CN120645554A (zh) * 2024-03-14 2025-09-16 佳能株式会社 液体喷射头和液体喷射方法
CN121608522A (zh) * 2024-08-27 2026-03-06 佳能株式会社 液体喷射头
CN118876424B (zh) * 2024-08-30 2025-10-31 芯体素(杭州)科技发展有限公司 一种阵列式多喷头尾液回吸装置
US20260077600A1 (en) * 2024-09-17 2026-03-19 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection apparatus

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JP2005125670A (ja) * 2003-10-24 2005-05-19 Sony Corp 液体吐出装置
JP2012061717A (ja) * 2010-09-16 2012-03-29 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
WO2016175865A1 (en) * 2015-04-30 2016-11-03 Hewlett-Packard Development Company, L.P. Fluid ejection device

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JP2016159514A (ja) * 2015-03-02 2016-09-05 富士フイルム株式会社 液体吐出装置、及び液体吐出ヘッドの異物排出方法
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US10040290B2 (en) 2016-01-08 2018-08-07 Canon Kabushiki Kaisha Liquid ejection head, liquid ejection apparatus, and method of supplying liquid
US9962937B2 (en) 2016-01-08 2018-05-08 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection device
US9931845B2 (en) 2016-01-08 2018-04-03 Canon Kabushiki Kaisha Liquid ejection module and liquid ejection head
US10214014B2 (en) 2016-02-12 2019-02-26 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection apparatus
JP6669393B2 (ja) 2016-03-25 2020-03-18 キヤノン株式会社 液体吐出ヘッド、液体吐出装置、および液体吐出ヘッドの温度制御方法
JP6808347B2 (ja) 2016-04-28 2021-01-06 キヤノン株式会社 液体吐出ヘッド及び液体吐出装置
JP6750855B2 (ja) 2016-05-27 2020-09-02 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置

Patent Citations (3)

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JP2005125670A (ja) * 2003-10-24 2005-05-19 Sony Corp 液体吐出装置
JP2012061717A (ja) * 2010-09-16 2012-03-29 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
WO2016175865A1 (en) * 2015-04-30 2016-11-03 Hewlett-Packard Development Company, L.P. Fluid ejection device

Also Published As

Publication number Publication date
US20190001698A1 (en) 2019-01-03
CN109203698A (zh) 2019-01-15
EP3421240B1 (en) 2023-08-09
JP2019010760A (ja) 2019-01-24
US10421287B2 (en) 2019-09-24
EP3421240A1 (en) 2019-01-02
JP7019318B2 (ja) 2022-02-15
CN109203698B (zh) 2020-11-24
KR20190002321A (ko) 2019-01-08

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